• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1997년도 한국자동제어학술회의논문집; 한국전력공사 서울연수원; 17-18 Oct. 1997
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• pp.383-386
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• 1997

Electrostatic suspension is a method to levitate an object by using electrostatic forces. Its main advantage is to levitate objects without any mechanical contact which fulfills the requirement of an object handling in ultra clean environment. In this paper, the electrostatic suspension system for film-like thin plate such as aluminum sheet, is designed and controlled. In contrast with the conventional electrostatic suspension system which requires the costly and bulky high-voltage amplifiers, it is suggested to use the switching voltage control method in consideration of real industrial application for the handling of such flexible bodies. Some experimental results show that the developed electrostatic suspension system shows good performances to levitate flexible film-like thin plate.

• 한국콘크리트학회:학술대회논문집
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• 한국콘크리트학회 1993년도 가을 학술발표회 논문집
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• pp.207-212
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• 1993

When constructing highly precise production plants, for example, super LSI plants or semiconductor plants, it is important to take the necessary control countermeasures into consideration to obtain the working microvibration environment, which is directly related to product precision. Working environment of a clean room means vibration-free and there are only ultra-miro vibration which human cannot sense. In order to provide an place having a vibration-free working environment with only ultra-micro vibration it is necessary to posses a great number of vibration isolation technlogies, wide-ranging and abundant survey and teat data, and a high level of knowledge enabling comprehensive judgments to be made. In this study, experimental modal analysis is used to analyze the dynamic characteristics of double floor for vibration-proofing near apparatus which generate vibration. It is concluded that the double floor system with rubber pad inserted between floor panel and pedestal is good for vibration proof.

• 한국의류학회지
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• 제25권6호
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• pp.1037-1045
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• 2001

This research is done to design and manufacture prototype clean room garments to improve the product yield of the clean room processing. To assist the research, other papers and references on the same subject were collected for analysis. Also the researcher made interviews with the workers at the clean room. The prototype garments made for this project was compared against the commercially available clean room garments used in the industry. A set of test was conducted to measure particle release from the garments. The prototype clean room garments was manufactured after having considered all the aspects stated above, and tested for the level of particle release. The test subjects performed 4 different movements(marching, arms stretch, squat and rise, and jogging) while wearing the prototype garments and commercially available clean room garments. Particle counts produced by each movement were measured. The data collected was statistically analyzed. The followings are the result of the test. 1) Overall, the prototype garments yielded less particle release.(p<0.001) 2) It showed greatest difference of particle counts for jogging(p<0.001) and squat and rise(p<0.001). In the arms stretch test. the prototype garments was also more effective in controling the particle, however, in the marching test. no significant difference was detected. 3) The prototype garments had less particle release in upper(p<0.001), middle(p< 0.001), and lower level(p<0.01) than the commercially available clean room garments. Manufacturing a new fabric for the clean room processing is important, but this research proves that the design of the clean room garments also determines the efficiency garments in the particle control. Therefore the same fabric can perform differently according to how it is designed. Improving the design will also improve the 7article control and reduce the cost of research. Eventually, the manufacturers will increase the product yield.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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• pp.117-119
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• 2002

A semiconductor cleaning technology has been based upon RCA cleaning which consumes vast amounts of chemicals and ultra pure water. This technology hence gives rise to many environmental issues, and some alternatives such as electrolyzed water are being studied. In this work, intentionally contaminated Si wafers were cleaned using the electrolyzed water. The electrolyzed waters were obtained in anode and cathode with oxidation reduction potentials and pH of -1050mV and 4.8, and -750mV and 10.0, respectively. The electrolyzed water deterioration was correlated with $CO_2$ concentration changes dissolved from air. Overflowing of electrolyzed water during cleaning particles resulted in the same cleanness as could be obtained with RCA clean. The roughness of patterned wafer surfaces after EW clean maintained that of as-received wafers. RCA clean consumed about $9\ell$ chemicals, while electrolyzed water clean did only $400m\ell$ HCl or $600m\ell$ $NH_4$Cl to clean 8" wafers in this study. It was hence concluded that electrolyzed water cleaning technology would be very effective for releasing environment, safety, and health(ESH) issues in the next generation semiconductor manufacturing.ring.

• 청정기술
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• 제6권1호
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• pp.27-38
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• 2000

초고속응집침전공정(URC)은 가중응집제(WCA)를 첨가하고 슬러지를 반송시켜 응결핵으로서의 역할을 수행시킴으로서 floc의 성장속도를 향상시키고, 입자표면의 흡착을 활성화하여 유기물, 중금속, 인 등 수중에 존재하는 오염물을 보다 효율적으로 제거하며, 기존의 응집 공정에 비하여 침전성을 향상시킬 수 있다. 현재까지 하수처리장과 하천, 호소에서 수행된 URC pilot-test와 Jar-test의 결과를 비교 검토하여 가중 응집제와 반송 슬러지에 대한 오염물 제거특성에 대한 연구가 수행되었으며, 수자원의 재이용을 위한 가능성을 평가하였다.

• 청정기술
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• 제9권2호
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• pp.63-69
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• 2003

도금산업은 제조 공정상 다량의 환경오염물질을 배출하는데 일반적으로 산 알칼리 폐수 뿐만아니라 크롬화합물, 시안화합물, 중금속류, 부식성물질, 독성물질 등이 발생하여 환경오염을 초래한다. 본 연구에서는 도금 산업에서 가장 환경오염부하가 크고 많이 적용하는 아연도금공정의 공정진단 및 분석을 통해 아연도금공정의 청정생산 실행효과가 큰 우선순위별 단위공정에 최적기술을 적용하여 현 도금공장의 열악한 근무환경과 환경오염을 개선하고자 하였다.

• 한국인터넷방송통신학회논문지
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• 제9권2호
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• pp.45-50
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• 2009

청소로봇이나 경비로봇과 같이 실내에서 이동하며 작업하는 로봇에서는 센서를 통한 환경의 인식이 필수적이다. 사무실 빌딩이나 공동주택의 경우 기본적인 환경이 동일하므로 설계도와 같은 공통된 지도를 이용하면 개별 환경마다 지도를 재작성하는 것보다 유리한 점이 있다. 이때 가구나 장애물 등 위치가 바뀔 수 있는 대상의 정보는 제거하고, 벽, 문, 창 등 불변의 대상을 인식하는 것이 중요하다. 이 논문에서는 사무실이나 가정환경에서 사용할 수 있는 실험용 이동로봇을 구현하고, 레이저스캐너의 정보와 세그먼트의 방향, 위치에 의한 히스토그램 방법을 이용하여 이와 같은 불변의 특징을 추출한다. 로봇에는 레이저스캐너, 자이로 센서, 초음파 센서, 적외선 센서 등이 탑재되며 제어프로그램은 C 프로그램으로 작성되었다.

• 한국생산제조학회지
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• 제25권6호
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• pp.421-425
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• 2016

Micro-EDM is one of the recent fine-machining technologies. Micro-EDM is widely used in precision processes because products manufactured via EDM are free from workpiece hardness. However, the debris produced during the process cause many problems such as reduced precision of the process. The first solution of this problem involves using the milling hole process. Micro-EDM hole process involves an electrode moving rapidly in the vertical direction via a servo system to disperse debris. However, this process can cause reduced work efficiency owing to contact between the electrode and workpiece. In this study, ultrasonic vibration is added to micro-EDM channel machining. Ultrasonic vibration removes the debris during machining and enables precision machining. Consequently, a clean work environment for the subsequent processes is maintained.

• 한국대기환경학회지
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• 제22권1호
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• pp.53-61
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• 2006

Recently, lots of researchers have been attracted to develop various alternative fuels and to use renewable fuels in order to solve the exhaust emission problems. DME (Dimethylether) is synthetic fuel, and can be produced from natural gas, coal and biomass. The emission is clean because it contains little sulfur and aromatic components In this study, the fuel was tested to investigate the applicability as an alternative fuel for diesel. This study was carried out by comparing the exhaust emissions and performance of diesel engine with DME, ULSD (ultra low sulfur diesel), LSD (low sulfur diesel) respectively. In order to measure regulated emissions, CO, $NO_{3}$, HC from vehicle different fuel types were used on chassis dynamometer CVS (constant volume sampler)-75 mode and EPA TO-I1A method was chosen for aldehydes analysis.

• 청정기술
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• 제7권1호
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• pp.13-25
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• 2001

정밀 기계산업과 반도체 산업의 진보와 더불어 대상물의 초순도 세정이 하이테크 산업발전에 가장 중요한 핵심기술로 부각되고 있다. 현재 초순수 세정은 크게 습식세정과 건식세정으로 분류하고 있다. 습식세정의 경우 오랜 경험과 높은 세정효율을 보이고 있지만, 다량의 탈이온수에 과산화수소, 황산, 불산 또는 수산화 암모늄 등의 독성첨가제를 반복적으로 사용하고 있어 독성 폐수발생등 심각한 환경오염을 유발하고 있다. 따라서, 최근에는 습식 세정에 따른 환경오염의 문제를 개선하기 위한 노력으로 몇 가지 건식 세정기술이 개발되고 있다. 최근 들어 건식세정 방법 중에 소위 초임계상태의 환경 용매를 사용하는 기술이 개발되고 있으며, 높은 세정효율과 더불어 환경친화성이 높은 유망한 기술로 받아들여지고 있어 국제적인 관심이 집중되고 있다. 이 논문에서는 초임계 이산화탄소 세정에 관심을 두어, 초임계 용매의 물리화학적 특성과 환경친화측면, 세정공정의 엔지니어링, 그리고 국내외 기술 현황을 종합적으로 분석 평가하였다.