• Clean Technology
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• v.7 no.3
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• pp.215-223
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• 2001

A present semiconductor cleaning technology is based upon RCA cleaning technology which consumes vast amounts of chemicals and ultra pure water(UPW) and is the high temperature process. Therefore, this technology gives rise to the many environmental issues, and some alternatives such as electrolyzed water(EW) are being studied. In this work, intentionally contaminated Si wafers were cleaned using the electrolyzed water. The electrolyzed water was generated by an electrolysis system which consists of three anode, cathode, and middle chambers. Oxidative water and reductive water were obtained in anode and cathode chambers, respectively. In case of NH4Cl electrolyte, the oxidation-reduction potential and pH for anode water(AW) and cathode water(CW) were measured to be +1050mV and 4.8, and -750mV and 10.0, respectively. AW and CW were deteriorated after electrolyzed, but maintained their characteristics for more than 40 minutes sufficiently enough for cleaning. Their deterioration was correlated with CO2 concentration changes dissolved from air. Contact angles of UPW, AW, and CW on DHF treated Si wafer surfaces were measured to be $65.9^{\circ}$, $66.5^{\circ}$ and $56.8^{\circ}$, respectively, which characterizes clearly the eletrolyzed water. To analyze the amount of metallic impurities on Si wafer surface, ICP-MS was introduced. It was known that AW was effective for Cu removal, while CW was more effective for Fe removal. To analyze the number of particles on Si wafer surfaces, Tencor 6220 were introduced. The particle distributions after various particle removal processes maintained the same pattern. In this work, RCA consumed about $9{\ell}$ chemicals, while EW did only $400m{\ell}$ HCl electrolyte or $600m{\ell}$ NH4Cl electrolyte. It was hence concluded that EW cleaning technology would be very effective for promoting environment, safety, and health(ESH) issues in the next generation semiconductor manufacturing.

• Korean Journal of Ecology and Environment
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• v.38 no.2 s.112
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• pp.137-145
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• 2005

Traditional screening techniques have missed up to 99% of microbial resources existing in the nature. Strategies of direct cloning of environmental DNAs comprising tine genetic blueprints of entire microbial metagenomes provide vastly more genetic information than is contained in the culturable. Therefore, one way to screening the useful gene in a variety of environments is the construction of metagenomic DNA library. In this study, the water samples were collected from Daecheong Reservoir in the mid Korea, and analyzed by T-RFLP to examine the diversity of the microbial communities. The crude DNAs were extracted by SDS-based freezing-thawing method and then further purified using an $UltraClean^{TM}kit$ (MoBio, USA). The metagenomic libraries were constructed with the DNAs partially digested with EcoRI, BamHI, and SacII in Escherichia coli DH10B using the pBACe3.6 vector. About 14.0 Mb of metagenomic libraries were obtained with average inserts 13 ${\sim}$ 15 kb in size. The genes responsible for degradation of 1, 2-dichloroethane (1, 2-DCE) via hydrolytic dehalogenation were identified from the metagenomic libraries by colony hybridization. The 1, 2-dichloroethane dehalogenase gene (dhlA) was cloned and its nucleotide sequence was analyzed. The activity of the 1, 2-DCE dehalogenase was highly expressed to the substrate. These results indicated that the dhlA gene identified from the metagenomes derived from Deacheong Reservoir might be useful to develop a potent strain for degradation of 1, 2-DCE.

• Journal of Food Hygiene and Safety
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• v.25 no.2
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• pp.118-121
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• 2010

A HPLC-MS/MS method was developed for simultaneous determination of six sweeteners (acesulfame-K, cyclamate, saccharin, sucralose, stevioside, aspartame) in children's favorite foods. The procedure involves an extraction of the six sweeteners with 50% methanol solution, sample clean-up using the Carrez clearing reagent and filtering with cartridge filter. The HPLC separation was performed on a Hypersil Gold (150 mm ${\times}$ 2.1 mm 5 um) column using the water/acetonitrile mobile phase (95:5). Mass spectrometric analysis was carried out using the TSQ Quantum Ultra operated in negative and positive ESI/SRM. With this method, good linear relationship, sensitivity and reproducibility were obtained. The spike recoveries of six sweeteners for 2 kinds of foods spiked into 0.4 mg/ kg ranged from 87.4 to 114.7%. The detection limits were above 0.02 mg/kg. The method has been applied to determination of six sweeteners in children's favorite foods.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.751-756
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• 2009

In the perspective of saving energy in buildings, the high performance of insulation and air tightness for improving the heating and the cooling efficiency, has brought economically positive effects. However, these building energy saving technologies cause the lack of ventilation, which is the direct cause of increasing the indoor contaminants, and is also very harmful to the residents, because they spend over 90% of their time indoors. Therefore, the ventilation is important to keep the indoor environment clean and it can also save the energy consumption. In this study, a HEPA type nano ceramic filter is designed as a passive ventilation system to collect airborne particles and to supply fresh outdoor air. The double layer filter, which has $30{\mu}m$ in diameter at the conditions of 10wt% of concentration and 3kV/cm of the electric intensity, is produced by electrospinning. The filtration coating technology is confirmed in the solution with $SiO_2$ nano particles using polymer nano fibers. Also double layer filters are coated with $SiO_2$ nano particles and finally the porous construction materials are made by sintering in the electric furnace at $200{\sim}1400^{\circ}C$. The efficiency is measured 96.67% at the particle size of $0.31{\mu}m$, which is slightly lower than HEPA filter. However the efficiency is turned out to be sufficient.

• Transactions of the Korean Society of Automotive Engineers
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• v.17 no.3
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• pp.81-89
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• 2009

In this experimental study, the effects of clean alternative fuels compatible with diesel combustion on nano-sized particle emission characteristics were investigated in a 0.5L auto-ignited single-cylinder engine with a compression ratio of 15. Because the number concentration of nano-sized particles emitted by automotive engine, that are suspected of being hazardous to human health and environment, might increase with engine fuel considerably and recently attracted attention. So a ultra-low sulfur diesel(ULSD), BD100(100% bio-diesel) and Di-Methyl Ether(DME) fuels used for this study. And, as a particle measuring instrument, a fast-response particle spectrometer (DMS 500) with heated sample line was used for continuous measurement of the particle size and number distribution in the size range of 5 to 1000nm (aerodynamic diameter). As this research results, we found that this measurements involving the large proportion of particles under size order of 300nm and number concentration of $4{\times}10^9$ allowed a single or bi-modal distribution to be found at different engine load conditions. Also the influence of oxygen content in fuel and the catalyst could be a dominant factor in controlling the nano-sized particle emissions in auto-ignited engine.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.128.1-128.1
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• 2013

We investigated the correlation between electrical transport and mechanical stress in $Bi_2Te_2Se$ by using a conductive probe atomic force microscopy in an ultra-high vacuum environment. Uniform distribution of measured friction and current were observed over a single quintuple layer terrace, which is an indication of the uniform chemical composition of the surface. By measuring the charge transport of $Bi_2Te_2Se$ surface as a function of the load applied by a tip to the sample, we found that the current density varies with applied load. The variation of current density was explained in light of the combined effect of the changes in the in-plane conductance and spin-orbit coupling that were theoretically predicted. We suppose that the local density of states is modified by tip-induced strain, but topological phase still remains. We exposed a clean topological insulator surface by tip-induced indentation. The surface conductance on the indented $Bi_2Te_2Se$ surface was studied, and the role of surface oxide on the surface conductance is discussed.

• Journal of the Korean Society of Marine Environment & Safety
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• v.26 no.6
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• pp.706-714
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• 2020

Currently, 90 % of the world's population breathes air with a fine dust content exceeding the World Health Organization's annual average exposure limit (10 ㎍/㎥). Global efforts have been devoted toward reducing secondary pollutants and ultra-fine dust through regulations on nitrogen oxides released over land and sea. Domestic efforts have also aimed at creating clean marine environments by reducing sulfur emissions, which are the primary cause of dust accumulation in ships, through developing and distributing environment-friendly ships. Among the technologies for reducing harmful emissions from diesel engines, electrostatic precipitator offer several advantages such as a low pressure loss, high dust collection efficiency, and NOx removal and maintenance. This study aims to increase the durability of a ship by improving equipment quality through failure mode effects analysis for the preventive maintenance of an electrostatic precipitator that was developed for reducing fine dust particles emitted from the 2,427 kW marine diesel engines in ships with a gross tonnage of 999 tons. With regard to risk priority, failure mode 241 (poor dust capture efficiency) was the highest, with an RPN of 180. It was necessary to determine the high-risk failure mode in the collecting electrode and manage it intensively. This was caused by clearance defects, owing to vibrations and consequent pin loosening. Given that pin loosening is mainly caused by vibrations generated in the hull or equipment, it is necessary to manage the position of pin loosening.