• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.383-386
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• 1997

Electrostatic suspension is a method to levitate an object by using electrostatic forces. Its main advantage is to levitate objects without any mechanical contact which fulfills the requirement of an object handling in ultra clean environment. In this paper, the electrostatic suspension system for film-like thin plate such as aluminum sheet, is designed and controlled. In contrast with the conventional electrostatic suspension system which requires the costly and bulky high-voltage amplifiers, it is suggested to use the switching voltage control method in consideration of real industrial application for the handling of such flexible bodies. Some experimental results show that the developed electrostatic suspension system shows good performances to levitate flexible film-like thin plate.

• Proceedings of the Korea Concrete Institute Conference
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• 1993.10a
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• pp.207-212
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• 1993

When constructing highly precise production plants, for example, super LSI plants or semiconductor plants, it is important to take the necessary control countermeasures into consideration to obtain the working microvibration environment, which is directly related to product precision. Working environment of a clean room means vibration-free and there are only ultra-miro vibration which human cannot sense. In order to provide an place having a vibration-free working environment with only ultra-micro vibration it is necessary to posses a great number of vibration isolation technlogies, wide-ranging and abundant survey and teat data, and a high level of knowledge enabling comprehensive judgments to be made. In this study, experimental modal analysis is used to analyze the dynamic characteristics of double floor for vibration-proofing near apparatus which generate vibration. It is concluded that the double floor system with rubber pad inserted between floor panel and pedestal is good for vibration proof.

• Journal of the Korean Society of Clothing and Textiles
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• v.25 no.6
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• pp.1037-1045
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• 2001

This research is done to design and manufacture prototype clean room garments to improve the product yield of the clean room processing. To assist the research, other papers and references on the same subject were collected for analysis. Also the researcher made interviews with the workers at the clean room. The prototype garments made for this project was compared against the commercially available clean room garments used in the industry. A set of test was conducted to measure particle release from the garments. The prototype clean room garments was manufactured after having considered all the aspects stated above, and tested for the level of particle release. The test subjects performed 4 different movements(marching, arms stretch, squat and rise, and jogging) while wearing the prototype garments and commercially available clean room garments. Particle counts produced by each movement were measured. The data collected was statistically analyzed. The followings are the result of the test. 1) Overall, the prototype garments yielded less particle release.(p<0.001) 2) It showed greatest difference of particle counts for jogging(p<0.001) and squat and rise(p<0.001). In the arms stretch test. the prototype garments was also more effective in controling the particle, however, in the marching test. no significant difference was detected. 3) The prototype garments had less particle release in upper(p<0.001), middle(p< 0.001), and lower level(p<0.01) than the commercially available clean room garments. Manufacturing a new fabric for the clean room processing is important, but this research proves that the design of the clean room garments also determines the efficiency garments in the particle control. Therefore the same fabric can perform differently according to how it is designed. Improving the design will also improve the 7article control and reduce the cost of research. Eventually, the manufacturers will increase the product yield.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2002.11a
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• pp.117-119
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• 2002

A semiconductor cleaning technology has been based upon RCA cleaning which consumes vast amounts of chemicals and ultra pure water. This technology hence gives rise to many environmental issues, and some alternatives such as electrolyzed water are being studied. In this work, intentionally contaminated Si wafers were cleaned using the electrolyzed water. The electrolyzed waters were obtained in anode and cathode with oxidation reduction potentials and pH of -1050mV and 4.8, and -750mV and 10.0, respectively. The electrolyzed water deterioration was correlated with $CO_2$ concentration changes dissolved from air. Overflowing of electrolyzed water during cleaning particles resulted in the same cleanness as could be obtained with RCA clean. The roughness of patterned wafer surfaces after EW clean maintained that of as-received wafers. RCA clean consumed about $9\ell$ chemicals, while electrolyzed water clean did only $400m\ell$ HCl or $600m\ell$ $NH_4$Cl to clean 8" wafers in this study. It was hence concluded that electrolyzed water cleaning technology would be very effective for releasing environment, safety, and health(ESH) issues in the next generation semiconductor manufacturing.ring.

• Clean Technology
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• v.6 no.1
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• pp.27-38
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• 2000

A physicochemical process called Ultra Rapid Coagulation(URC) can dramatically remove organics, metals, and phosphates in wastewater by adding weighted coagulation additive(WCA) and recycling sludge into the coagulation basin to increase the growth rate and adsorption ability of floc. Also this process can improve floc settling rate than conventional coagulation process and reduce the pollutants loaded into the receiving water for securing water source. It was evaluated that WCA and sludge added have effects on the removal efficiency and estimated the possibilities of reusing the effluent from this process.

• Clean Technology
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• v.9 no.2
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• pp.63-69
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• 2003

The metal finishing industry generates a variety of pollutants such as acidic or alkaline wastewater, chromic compounds, cyanide, heavy metals, and toxic materials. Especially, zinc plating process is one of the processes which cause serious environmental problems. In this study, we applied the proven optimum technology to important unit processes in terms of implement effects through the process diagnosis and analysis. This study aimed to improve the working environment and the environmental pollutions in zinc plating process.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.9 no.2
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• pp.45-50
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• 2009

The environment exploration is an essential process for indoor robots such as clean robot and security robot. Apartment house and office building has common frame structure, but internal arrangement of each room may be slightly different. So, it is more convenient to use a common frame map than to build a new map at every time the arrangement is changed. In this case, it is important to recognize invariant features such as wall, door and window. In this paper, an indoor mobile robot is implemented, and by using the laser scanner data and line segment histogram with respect to segment orientation and distance, an environment exploration method is presented and tested. This robot is fitted with a laser scanner, gyro sensor, ultra sonic sensor and IR sensor, and programed with C language.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.6
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• pp.421-425
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• 2016

Micro-EDM is one of the recent fine-machining technologies. Micro-EDM is widely used in precision processes because products manufactured via EDM are free from workpiece hardness. However, the debris produced during the process cause many problems such as reduced precision of the process. The first solution of this problem involves using the milling hole process. Micro-EDM hole process involves an electrode moving rapidly in the vertical direction via a servo system to disperse debris. However, this process can cause reduced work efficiency owing to contact between the electrode and workpiece. In this study, ultrasonic vibration is added to micro-EDM channel machining. Ultrasonic vibration removes the debris during machining and enables precision machining. Consequently, a clean work environment for the subsequent processes is maintained.

• Journal of Korean Society for Atmospheric Environment
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• v.22 no.1
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• pp.53-61
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• 2006

Recently, lots of researchers have been attracted to develop various alternative fuels and to use renewable fuels in order to solve the exhaust emission problems. DME (Dimethylether) is synthetic fuel, and can be produced from natural gas, coal and biomass. The emission is clean because it contains little sulfur and aromatic components In this study, the fuel was tested to investigate the applicability as an alternative fuel for diesel. This study was carried out by comparing the exhaust emissions and performance of diesel engine with DME, ULSD (ultra low sulfur diesel), LSD (low sulfur diesel) respectively. In order to measure regulated emissions, CO, $NO_{3}$, HC from vehicle different fuel types were used on chassis dynamometer CVS (constant volume sampler)-75 mode and EPA TO-I1A method was chosen for aldehydes analysis.

• Clean Technology
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• v.7 no.1
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• pp.13-25
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• 2001

With fast advancement of fine machineries and semiconductor industries in recent decades, the ultra-cleaning of organic chemicals, submicron particles from contaminated unit equipments and products such as silicon wafers becomes one of the most important steps for further advancement of such industries. To date, two kinds of ultra cleaning techniques are used; one is the wet-cleaning and the other is the dry cleaning. In case of wet cleaning, removal of organic contaminants and submicron particles is made by DIW with additives such as $H_2O_2$, $H_2SO_4$, HCl, $NH_4OH$ and HF, etc. While the wet cleaning method is most widely adopted for various occasions, it is inevitable to discharge significant amount of toxic waste waters in environment. Dry cleaning is an alternative method to mitigate environmental pollution of the wet cleaning with maintaining comparable degree of cleaning to the wet cleaning. Although there are various concept of dry cleaning have been devised, the dry cleaning with environmentally-benign solvent such as carbon dioxide proven to show high degree of cleaning from the contaminated porous surface as well as from the bare surface. Thus, special global attention has been placing on this technique since it has important advantages of simple process schemes and no environmentally concern, etc. Thus, this article critically reviews the state-of-the-art of the supercritical fluid drying with emphasis on the thermo-physical characteristics of the supercritical solvent, environmental gains compared to other dry cleaning methods, and the generic aspects of the basic design and processing engineering.