• 한국생산제조학회지
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• 제25권1호
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• pp.75-82
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• 2016

In this study, a cross-damped low vibration controller was developed to reduce vibration in ultra-precision dual stage driven by master/slave principle. In master-slave structure, the master stage leads the driving motion and the slave stage follows it so as to maintain a constant gap between two stages. In this structure, a small perturbation of master stage makes big oscillations in slave servoing stage, so a low damped master stage composed of voice coil motor makes a long vibration in settling area after driving motion profile. In this research, an effective feedback damping algorithm for increase the damping characteristics of the dual stage was developed. The designed velocity damping algorithm improves the system stability and reduces the settling time of the whole system. Simulation and experimental results show that the developed algorithm reduces settling time and improves the regulating performance.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2003년도 제21회 추계학술대회 논문집
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• pp.145-150
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• 2003

The present study aims to optimize the performance of the Two-Stage Gas Gun by using the experimentally obtained data. RSM(Response Surface Method) was adopted in the optimization process to find the operating parameter than can maximize the projectile speed with the minimum number of tests. To decide the test points which results can consist of the response surface, 3$^{k}$ full factorial method was used, and the design variables were chosen with piston mass and 2$^{nd}$ driver fill pressure. The response surface was composed by nine test results and consequently the optimization was done with GENOCOP III, inherently GA code, in order to seek the optimal test point. The optimal test condition from the response surface was verified by the experiment. Results showed that the optimization process with response surface can successfully predict the test results fairly well. This study shows the possibility of performance optimization for the experimental facilities using numerical optimization algorithm.

• 대한산업공학회지
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• 제29권2호
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• pp.179-189
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• 2003

Gate poly-silicon critical dimension is a prime characteristic of a metal-oxide-semiconductor field effect transistor. It is important to achieve the uniformity of gate poly-silicon critical dimension in order that a semiconductor device has acceptable electrical test characteristics as well as a semiconductor wafer fabrication process has a competitive net-die-per-wafer yield. However, on gate poly-silicon critical dimension, the complexity associated with a semiconductor wafer fabrication process entails hierarchical variance components according to run-to-run, wafer-to-wafer and even die-to-die production unit changes. Specifically, estimates of the hierarchical variance components are required not only for disclosing dominant sources of the variation but also for testing the wafer-level uniformity. In this paper, two experimental designs, a two-stage nested design and a randomized complete block design are considered in order to estimate the hierarchical variance components. Since gate poly-silicon critical dimensions are collected from fixed die positions within wafers, a factor representing die positions can be regarded as fixed in linear statistical models for the designs. In this context, the two-stage nested design also checks the wafer-level uniformity taking all sampled runs into account. In more detail, using variance estimates derived from randomized complete block designs, Duncan's multiple range test examines the wafer-level uniformity for each run. Consequently, a framework presented in this study could provide guidelines to practitioners on estimating the hierarchical variance components and testing the wafer-level uniformity in parallel for any characteristics concerned in semiconductor wafer fabrication processes. Statistical analysis is illustrated for an experimental dataset from a real pilot semiconductor wafer fabrication process.

• International Journal of Precision Engineering and Manufacturing
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• 제1권1호
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• pp.91-97
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• 2000

Anisotropic work hardening of cold rolled low carbon steel sheets is studied. The experiments consist of two stage tensile prestraining and tensile tests. At the first prestraining, steel sheets are streteched along the rolling direction by 3% and 6% tensile strains. The second prestrains are at 0${\cric}$, 30${\cric}$, 60${\cric}$to the rolling directions by varying degrees. Tensile tests are performed on the specimens cut from the sheets after the two stage prestraining. A theoretical framework on anisotropic hardening is proposed which includes Hill's quadratic yield function, ziegler's kinematic hardening rule, and Kim and Yin's assumption on the rotation of orthotropy axes. The predicted variations of R-values with second stage tensile strain are compared with the experimental data.

• 전력전자학회논문지
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• 제24권4호
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• pp.268-272
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• 2019

A lithium polymer battery-based 9 kJ/s high-voltage capacitor charger, which comprises two stages, is proposed. A modified LCC resonant converter and resonant circuit are introduced at the first and second stages, respectively. In the first stage, the methods for handling low-voltage and high-current batteries are considered. Delta-wye three-phase transformers are used to generate a high output voltage through the difference between the phase and line-to-line voltages. Another method is placing the series resonant capacitor of the LCC resonant components on the transformer secondary side, which conducts considerably low current compared with the transformer primary side. On the basis of the stable operation of the first charging stage, the secondary charging stage generates final output voltage by using the resonance. This additional stage protects the rectifying diodes from the negative voltage when the output capacitor is discharged for a short time. The inductance and capacitance of the resonance components are selected by considering the resonance charging time. The design procedure for each stage with the aforementioned features is suggested, and its performance is verified by not only simulation but also experimental results.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.2606-2611
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• 2003

Comprehensive study on the control system design for a RTP process has been conducted. The purpose of the control system is to maintain maximum temperature uniformity across the silicon wafer achieving precise tracking for various reference trajectories. The study has been carried out in two stages: thermal balance modeling on the basis of a semi-empirical radiation model, and optimal iterative learning controller design on the basis of a linear state space model. First, we found through steady state radiation modeling that the fourth power of wafer temperatures, lamp powers, and the fourth power of chamber wall temperature are related by an emissivity-independent linear equation. Next, for control of the MIMO system, a state space modeland LQG-based two-stage batch control technique was derived and employed to reduce the heavy computational demand in the original two-stage batch control technique. By accommodating the first result, a linear state space model for the controller design was identified between the lamp powers and the fourth power of wafer temperatures as inputs and outputs, respectively. The control system was applied to an experimental RTP equipment. As a consequence, great uniformity improvement could be attained over the entire time horizon compared to the original multi-loop PID control. In addition, controller implementation was standardized and facilitated by completely eliminating the tedious and lengthy control tuning trial.

• Advances in Computational Design
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• 제2권4호
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• pp.333-348
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• 2017

Inspections of ancient metallic bridges have illustrated fatigue cracking in riveted connections. This paper presents a comparison between two alternative finite element (FE) models proposed to predict the fatigue strength of a single shear and single rivet connection. The first model is based on solid finite elements as well as on contact elements, to simulate contact between the components of the connection. The second model is built using shell finite elements in order to model the plates of the riveted connection. Fatigue life predictions are carried out for the shear splice, integrating both crack initiation and crack propagation lives, resulting from the two alternative FE models. Global fatigue results, taking into account several clamping stresses on rivet, are compared with available experimental results. Proposed comparisons between predictions and experimental data illustrated that the proposed two-stage model yields consistent results.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2000년도 유체기계 연구개발 발표회 논문집
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• pp.163-168
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• 2000

A method to search the design parameters for optimum stage matching has been used based on a 1-D mathematical model of a compressor, which uses the data obtained from the preliminary test to identify the design parameters. This methodology was applied with a two-stage axial compressor, which was originally designed for a helicopter gas turbine engine. After Identifying design parameters using preliminary test data, an optimization process has been employed to achieve the best matching between the stages (i.e., maximum efficiency of the compressor at its operation modes within a given range of the rotor speed under given restrictions for required stall margins and mass flow). 3-D flow calculations have been performed to confirm the usefulness of the corrections based on 1-D mathematical model. Calculational results agree well with the experimental data in view of the performance characteristics. Some promising results were produced through the methodology proposed in this paper in conjunction with flow calculations.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2000년도 유체기계 연구개발 발표회 논문집
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• pp.219-225
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• 2000

Primary function of a centrifugal compressor volute is to serve the flow from the impeller and diffuser to pipe system. But losses in volutes at off-design lead to poor stage efficiency and reduction of operating range. This is largely caused by the interaction between the impeller and volute flow fields. The magnitude of distortion is increased as the operating point is away from the design point and, as a result, the interaction between the impeller and volute is stronger. The objective of present study is to find the characteristics of tile flow in the diffuser and volute of the centrifugal compressor with rectangular cross-sectional volute. The measurements are carried out in two cases with the existence and nonexistence of the volute casing. The detailed pressure is presented by comparing the experimental results obtained at two cases with each others.

• 대한전기학회논문지:전기기기및에너지변환시스템부문B
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• 제52권7호
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• pp.343-351
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• 2003

In this paper, interleaved boost converter is applied as a first-stage converter in switch mode power supply. The first-stage converter plays a role to improve power factor. Interleaved Boost Power Factor Corrector(IBPFC) can reduce input current ripple as a single voltage control loop only without inner current loop, because input current is divided each 50% by two switching devices. Each converter cell is also operated in discontinuous current mode and inductor current of each converter is discontinuous. Total input current which is composed by each converter cell is continuous current. Thus, IBPFC is able to improve input current ripple. IBPFC operating in discontinuous current mode can be classified as six modes from switching state and be carried out state space averaging small signal modeling. A control transfer function is obtained according to the modeling. Not only steady-state characteristics but also dynamic characteristics is considered. Single voltage control loop is also constructed by the control transfer function. From experimental result, improvement of power factor and input current ripple are verified.