A High-Resolution Heterodyne Interferometer using Beat Frequency between Two-Axial Modes of a HeNe Laser (2-종 모드 레이저를 이용한 고분해능 헤터로다인 간섭계)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 1997.10a
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- pp.214-219
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- 1997