The Hydrogenated Micro-crystalline Silicon(${\mu} c-Si:H$ ) Films Deposited by Hot Wire CVD Method
(Hot Wire CVD법에 의한 수소화된 미세결정 실리콘(${\mu} c-Si:H$ ) 박막 증착)
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- Journal of the Institute of Electronics Engineers of Korea SD
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- v.37 no.8
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- pp.17-27
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- 2000