• Korean Journal of Materials Research
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• v.8 no.7
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• pp.634-640
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• 1998

A well- shaped trench was investigated in view of the defect distribution along trench sidewall and bottom using high resolution transmission electron microscopy. The trench was formed by HBr plasma and additive gases in magnetically enhanced reactive ion etching system. Adding $0_2$ and other additive gases into HBr plasma makes it possible to eliminate sidewall undercut and lower surface roughness by forming the passivation layer of lateral etching, resulted in the well filled trench with oxide and polysilicon by subsequent deposition. The passivation layer of lateral etching was mainly composed of $SiO_xF_y$ $SiO_xBr_y$ confirmed by chemical analysis. It also affects the generation and distribution of lattice defects. Most of etch induced defects were found in the edge region of the trench bottom within the depth of 10$\AA$. They are generally decreased with the thickness of residue layer and almost disappeared below the uni¬formly thick residue layer. While the formation of crystalline defects in silicon substrate mainly depends on the incident angle and energy of etch species, the region of surface defects on the thickness of residue layer formed during trench etching.

• Journal of the Korean Ceramic Society
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• v.46 no.1
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• pp.30-34
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• 2009

A Sand blasting technology has been used to address via and trench processing of glass wafer of optic semiconductor packaging. Manufactured sand blast that is controlled by blast nozzle and servomotor so that 8" wafer processing may be available. 10mm sq test device manufactured by Dry Film Resist (DFR) pattern process on 8" glass wafer of $500{\mu}m's$ thickness. Based on particle pressure and the wafer transfer speed, etch rate, mask erosion, and vertical trench slope have been analyzed. Perfect 500 um tooling has been performed at 0.3 MPa pressure and 100 rpm wafer speed. It is particle pressure that influence in processing depth and the transfer speed did not influence.

• Proceedings of the KIEE Conference
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• 1997.11a
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• pp.339-341
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• 1997

From this first studies, We have investigated the latch-up characteristics of various CMOS well structures possible with high energy ion implantation processes. In this study, we also investigated those of STI(Shallow Trench Isolation} structures with varing n+/p+ spacing and the depth of trench. STI structure is formed by T-SUPREM4 process simulator, and then latch-up simulations for each case were performed by MEDICI device simulator for latch-up immunity improvement. STI is very effective to preventing the degradation of latch-up characteristics as the n+/p+ spacing is reduced. These studies will allow us to evaluate each technology and suggest guidelines for the optimization of latch-up susceptibility.

• 한국태양에너지학회:학술대회논문집
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• 2011.11a
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• pp.328-332
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• 2011

The conclusion is derived from the arranged results and using a simulation by determining the shape of an optimum heat pump which is appropriate for small scale houses. It is concluded as 3 meters long for the laying depth of underground piping of the horizontal type geothermal heat pump system in regard to the 5 RT capacity standard that is suitable for a small scale house. The shape of the horizontal type geothermal heat pump system for a small scale house is theThree pipe shape whose trench length is short and pipe length laid in a trench is short. It is 9 for the number of laying pipes that is most appropriate to system.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.9 no.2
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• pp.155-161
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• 2016

This paper proposes a novel fabrication method for a capacitive type micro-accelerometer with uniform nano-gap using photo-assisted electro-chemical etching. The sensitivity of the accelerometer should be improved while the electrodes between the inertial mass and the sensing comb should be narrowed. In this paper the nano-gap trench structure is fabricated using the photo-assisted electrochemical etching method. The sensor was designed and analysed using ANSYS simulator. The characteristics of the etching were observed according to the dc bias, the light intensity, the composition of the solution, the temperature of the solution, and the pattern pitch variation. The optimum etching conditions were dc bias of 2V, Blue LED of 20mA, 49wt% HF:DMF:D.I.Water=1:20:10, the pattern pitch of $20{\mu}m$. Uniform trench structure with width of 344nm and depth of $11.627{\mu}m$ are formed using the optimum condition.

• Journal of architectural history
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• v.17 no.2
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• pp.47-66
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• 2008

This research was to analyze the border signal-fire which is the main facility of military protective duty for safety of sea side in chosun dynasty. The results of this research were described separately as follows. 1. Five types of site plan of signal-fire were observed, which is circle, half-circle, oval, round-rectangular. The majorities were circle type in eastern area. 2. Plan configuration of signal-fire stand which is separated with circle, rectangular type roughly was constructed with circle type generally. The height of signal-fire stand was about $2{\sim}3m$. The diameter of signal-fire stand was $8{\sim}10m$. Building base that protect ground moisture and infilteration of rainfall was found in 9 border singal-fire, the height of it was about $0.3m{\sim}2.5m$. 3. Trench was mainly circle type and average width was $3{\sim}4m$. However the depth was almost observed as 1m, originally, it was estimated it has more depth. 4. The height of protective wall remained until present was about 1m, the depth was about average 2.5m. 5. The storage of border signal-fire has rectangular dimension, several types of $1.8{\times}1.2m{\sim}5.7{\times}4.4m$, square(間) of $1{\times}1{\sim}2{\times}1$. The building material was stone and located below or near the signal-fire stand.

• Journal of the Korean Geotechnical Society
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• v.21 no.3
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• pp.43-54
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• 2005

The ground movements during three. full-scale trial diaphragm wall (DW) panel constructions were monitored and analysed. The DW panels were constructed in reclaimed fill where sedimentary marine deposit and residual weathered soils are being consolidated. The monitoring data showed exceptionally large lateral ground movements of up to 293 mm near a trench due to the DW panel constructions, which is about 0.8$\%$ D, where D is the maximum excavation depth. It was observed that deliberate holding period of the trench resulted in a significant increase in the lateral ground movements of about 50-225$\%$. A pre-treatment of the marine deposit by installing a single line of jet grout columns around the trench prior to the excavation was found to be a very effective way of reducing the ground movements. The measured ground settlements were compared with some relevant case histories. DW panel constructions in sedimentary marine deposit are likely to cause maximum ground surface settlement up to 0.225$\%$ D.

• 한국신재생에너지학회:학술대회논문집
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• 2008.05a
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• pp.630-633
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• 2008

Geothermal heat pump systems use the earth as a heat source in heating mode and a heat sink in cooling mode. These systems can be used for heating or cooling systems in farm facilities such as greenhouses for protected horticulture, cattle sheds, mushroom house and etc. A horizontal type means that a geothermal heat exchanger is laid in the trench buried in 1.2 to 1.8 m depth. Because a horizontal type has advantages of low installation, operation and maintenance costs compared to a vertical type, it is easy to be adopted to agriculture. In this study, to heat and cool farm facilities and obtain basic data for practical application of horizontal geothermal heat pump system in agriculture, a horizontal geothermal heat pump system of 10 RT was installed in greenhouse. Heating and cooling performance of this system was estimated. The horizontal geothermal heat pump used in this study had heating COP of 4.57 at soil temperature of $14^{\circ}C$ with depth of 1.75m and heating COP of 3.75 at soil temperature of $7^{\circ}C$ with the same depth. The cooling COP was 2.7 at ground temperature at 1.75m depth of $25.5^{\circ}C$ and 2.0 at the temperature of $33.5^{\circ}C$.

• Korean Journal of Medicinal Crop Science
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• v.7 no.3
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• pp.167-171
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• 1999

This experiment was conducted to determine effects of trenching depth on characteristics and yield of tubers in Chinese yam (Dioscorea opposita Thunb). Self-propelled trencher, ‘NF-827H’ produced by KAWABE company, was used for trenching. When trenched, tuber's length and weight were longer and heavier, tuber's shape was better, and marketable tuber yield was remarkably increased than those of conventional plowing and soil preparation by a tractor. The size and yield of tubers were greatly enhanced by trenching in long-tuber variety than that in short-tuber variety. The depth of trenching is recommended to be more than 60cm for short-tuber variety and more than 80cm for long-tuber variety considering the size, shape and yield of the tllbers.

• Journal of the Korean Solar Energy Society
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• v.33 no.1
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• pp.57-65
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• 2013

The temperatures with the ground depth, the positions of circulation water in ground heat exchanger were measured and thermal diffusion characteristics with the distances of the direction normal to the borehole was analysed. The deeper the depth of ground, the less the influences of outdoor temperature, but below 10m of ground, there was no influences of ground temperature. When the depth of trench pipe was below the depth of 2m, there was no influence. In the ground of 10m when the distances between the pipe and the other places were above 0.5m, the variations of temperature were less than $1.6^{\circ}C$ and above 2.5m they were less than $0.1^{\circ}C$. When the distances of bore hole were above 5m, there were no. influences of the nearest ground heat exchanger.