• 제목/요약/키워드: transparent dielectric

검색결과 140건 처리시간 0.027초

투명전자소자를 위한 HfO2계 투명 MIM 커패시터 특성연구 (Characteristics of Transparent Mim Capacitor using HfO2 System for Transparent Electronic Device)

  • 조영제;이지면;곽준섭
    • 한국진공학회지
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    • 제18권1호
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    • pp.30-36
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    • 2009
  • 투명 전자소자의 고유전 $HfO_2$ 절연막을 개발하기 위하여, ITO/$HfO_2$/ITO 금속-절연체-금속 (Metal-Insulator-Metal, MIM) 커패시터 구조를 형성한후 $HfO_2$ 박막의 두께에 따른 전기적, 광학적, 구조적 특성의 변화를 연구하였다. $HfO_2$ 박막의 두께가 50 nm에서 300 nm로 증가함에 따라 유전상수는 20에서 10이하로 감소하였으나, $HfO_2$ 두께가 증가함에 따라 누설전류는 감소하여 200 nm 이상의 두께에서는 $2.7{\times}10^{-12}\;A/cm^2$ 이하의 낮은 누설전류 특성을 나타내었다. ITO/$HfO_2$/ITO MIM 커패시터의 $HfO_2$ 박막의 두께가 50 nm에서 300 nm로 증가함에 따라 투과율은 감소하였으나 300 nm 두께에서도 가시광선 영역에서 80% 이상의 투과율을 나타내어 우수한 투과도 특성을 나타내었다.

Effect of Particle Size Distribution of Glass Frit on the Transparency of Transparent Dielectric Layer for Plasma Display Panel

  • Park, Ji-Su;Han, Sun-Mi;Hwang, Jong-Hee;Lim, Tae-Young;Kim, Kwang-Jin;Masaki, Takaki
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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    • pp.555-557
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    • 2004
  • We report the effect of the particle size (D50) and PSD (Particle Size Distribution) of glass frit on the transparency of transparent dielectric layer of PDP. The milling efficiency of wet milling with water was the best among the dry milling, wet milling with IPA and wet milling with water. The transparency increased with the reduction of particle size of glass frit as the milling time increased. Also the transparency changed by the PSD of glass frit. Glass frits of broad PSD showed high transparency compared with the glass frits of sharp PSD.

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PDP 투명 유전체용 Bi계 프릿트 필름의 제조 및 특성분석 (Fabrication and Characterization of Bi-Based Frit Film for PDP Transparent Dielectric Front Panel)

  • 이상진;김주원;황종희
    • 한국세라믹학회지
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    • 제44권10호
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    • pp.548-553
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    • 2007
  • Ceramic green sheets consisting Bi-based glass frit were fabricated for an application to PDP transparent dielectric front panel. The dispersion condition of the slurry for tape casting was pre-examined, and two kinds of hinder and plasticizer were used in the non-aqueous slurry system. In the fabrication process for the frit film, the properties such as dry and firing shrinkage, elongation, and transmittance were examined at the condition of various mixing ratio of plasticizers. In the mixing ratio of polyethylene glycol to dibutyl phthalate of 3:5wt%, a good adhesion, elongation and transmittance were observed at the firing temperature of $580^{\circ}C$. The photograph for the cross section of the interface was also showed a dense microstructure.

Improved Electrical Properties of Indium Gallium Zinc Oxide Thin-film Transistors by AZO/Ag/AZO Multilayer Transparent Electrode

  • 노영수;양정도;박동희;위창환;조세희;김태환;최원국
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.443-443
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    • 2012
  • We fabricated a-IGZO TFT with AZO/Ag/AZO transparent multilayer source/drain contacts by rf magnetron sputtering. Enhanced electrical device performance of a-IGZO TFT with AZO/Ag/AZO multilayer S/D electrodes (W/L = = 400/50 mm) was achieved with a subs-threshold swing of 3.78 V/dec, a minimum off-current of 10-12 A, a threshold voltage of 1.80 V, a field effect mobility of 10.86 cm2/Vs, and an on/off ration of 9x109. It demonstrated the potential application of the AZO/Ag/AZO film as a promising S/D contact material for the fabrication of the high performance TFTs.

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Transparent ZnO based thin film transistors fabricated at room temperature with high-k dielectric $Gd_2O_3$ gate insulators

  • Tsai, Jung-Ruey;Li, Chi-Shiau;Tsai, Shang-Yu;Chen, Jyun-Ning;Chien, Po-Hsiu;Feng, Wen-Sheng;Liu, Kou-Chen
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.374-377
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    • 2009
  • The characteristics of the deposited thin films of the zinc oxide (ZnO) at different oxygen pressures will be elucidated in this work. The resistivity of ZnO thin films were dominated by the carrier concentration under high oxygen pressure conditions while controlled by the carrier mobility at low oxygen ambiences. In addition, we will show the characteristics of the transparent ZnO based thin film transistor (TFT) fabricated at a full room temperature process with gate dielectric of gadolinium oxide ($Gd_2O_3$) thin films.

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플라즈마 디스플레이용 투명 유전체 페이스트의 개발 (Development of transparent dielectric paste for PDP)

  • 김형종;정용선;주경;오근호
    • 한국결정성장학회지
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    • 제9권1호
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    • pp.50-54
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    • 1999
  • 플라즈마 디스플레이는 후막기술을 이용하여 화면의 크기를 늘리는 것이 쉽기 때문에 고선명 TV의 가장 유력한 후보이다. 본 연구에서는 플라즈마 디스플레이용 유전체의 조건을 만족하는 lead borosilicate 유리를 이용한 투명 유전체 재료를 개발하였다. 또한 이 유리를 이용하여 페이스트를 제조하였다. 페이스트는 스크린 프린팅에 적합한 요변성을 나타내었고, 입자 크기가 작아질수록 더욱 강한 요변성을 나타내었다. 열처리 후 후막의 파단면을 전자현미경으로 관찰하였다. 후막의 기공은 서로 다른 크기의 평균입경을 갖는 powder를 사용함으로써 제거 될 수 있었다. 소성된 후막은 좋은 융착 특성을 나타내었다.

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Sr-doped AlOx gate dielectrics enabling high-performance flexible transparent thin film transistors by sol-gel process

  • Kim, Jaeyoung;Choi, Seungbeom;Kim, Yong-Hoon
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.301.2-301.2
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    • 2016
  • Metal-oxide thin-film transistors (TFTs) have gained a considerable interest in transparent electronics owing to their high optical transparency and outstanding electrical performance even in an amorphous state. Also, these metal-oxide materials can be solution-processed at a low temperature by using deep ultraviolet (DUV) induced photochemical activation allowing facile integration on flexible substrates [1]. In addition, high-dielectric constant (k) inorganic gate dielectrics are also of a great interest as a key element to lower the operating voltage and as well as the formation of coherent interface with the oxide semiconductors, which may lead to a considerable improvement in the TFT performance. In this study, we investigated the electrical properties of solution-processed high-k strontium-doped AlOx (Sr-AlOx) gate dielectrics. Using the Sr-AlOx as a gate dielectric, indium-gallium-zinc oxide (IGZO) TFTs were fabricated and their electrical properties are analyzed. We demonstrate IGZO TFTs with a 10-nm-thick Sr-AlOx gate dielectric which can be operated at a low voltage (~5 V).

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Effect of melting temperature and additives on transparency of Bi based Transparent Dielectric Layer in Plasma Display Panel

  • Park, Ji-Su;Han, Sun-Mi;Hwang, Jong-Hee;Kim, Chang-Yeul;Choi, Duck-Kyun
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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    • pp.1229-1232
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    • 2005
  • We report the method of preventing the grey color of Bi based glass frits caused by reduction of $Bi_2O_3$. To prevent reduction of $Bi_2O_3$, we controlled the melting temperature. Low melting temperature reduces the reduction of $Bi_2O_3$ and that makes clarity transparent glass cullets. After firing, glass frits that melted at lower temperature showed better transparency. To prevent the browning, we used some additives like CuO, $CeO_2$, CoO and $TiO_2$. The colors of glass cullets were varied according to additives. After firing, dielectric layer contained additives showed better transparency than the one without additives. In the point of reaction between dielectric layer and Ag electrode, CuO was the most effective additive in preventing the yellowing.

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전형적인 열처리와 마이크로웨이브 열처리에 따른 PDP용 전극과 투명 유전체의 동시 소성 (Co-firing of Dielectric and Electrode with Conventional and Microwave Heating in Plasma Display Panel)

  • 황성진;;;김형순
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.463-463
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    • 2008
  • The glass frit has been used in transparent dielectric, barrier rib and electrode of PDP (Plasma display panel). In PDP fabrication, the firing temperature of glass frit is normally 550~$580^{\circ}C$ with conventional heating. However, there are a problem that silver in electrode is diffused throughout the transparent dielectric. For inhibiting the Ag diffusion we considered use of the microwave heating. We investigated firing of glass frit compared between conventional and microwave heating. After firing by two types of heating, the diffusion of silver is determined using a optical microscope and UV-spectrometer. Based on the our results, the microwave heating should be a candidate to heating source for high efficacy in PDP.

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