• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.4
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• pp.395-401
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• 2013

In-situ optical emission spectroscopy (OES) is employed for leak detection in plasma etching system. A misprocessing is reported for significantly reduced silicon etch rate with chlorine gas, and OES is used as a supplementary sensor to analyze the gas phase species that reside in the process chamber. Potential cause of misprocessing reaches to chamber O-ring wear out, MFC leaks, and/or leak at gas delivery line, and experiments are performed to funnel down the potential of the cause. While monitoring the plasma chemistry of the process chamber using OES, the emission trace for nitrogen species is observed at the chlorine gas supply. No trace of nitrogen species is found in other than chlorine gas supply, and we found that the amount of chlorine gas is slightly fluctuating. We successfully found the root cause of the reported misprocessing which may jeopardize the quality of thin film processing. Based on a quantitative analysis of the amount of nitrogen observed in the chamber, we conclude that the source of the leak is the fitting of the chlorine mass flow controller with the amount of around 2-5 sccm.

• Analytical Science and Technology
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• v.30 no.5
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• pp.240-251
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• 2017

1,1,1,2-Tetrafluoroethane (HFC-134a), which is used as refrigerant in air conditioners, has been recently regulated as a greenhouse gas and is recommended for reuse by refining. It is very important to quantitatively analyze trace impurities present in the refrigerant to evaluate the criteria for reuse. In this study, trace impurities including C, H, Cl, and F, which are difficult to quantify because there are no reference materials, were quantitatively analyzed by a gas chromatograph-atomic emission detector (GC/AED); for this analysis, this was preceded by a qualitative analysis with a GC-mass selective detector (GC/MSD). In addition, the AED response was investigated using a hydrocarbon mixed reference material, which was proportional to the number of atoms in the component. Fifteen refrigerant components were detected as trace impurities in HFC-134a by qualitative analysis of trace impurities including C, H, Cl, and F in the samples. Based on the results of the qualitative analysis, quantitative analysis of trace impurities using AED showed that the highest mole fractions were for the $CHClF_2$ component ($45438.38{\mu}mol/mol$) in one sample and for the $C_2H_2ClF_3$ component ($1311.47{\mu}mol/mol$) in another sample. From this study, it has been shown that it is possible for this analytical method to be applied to the qualitative and quantitative analysis of trace compounds in refrigerants, which are difficult to quantify because of the absence of reference materials.

• Journal of Microbiology
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• v.42 no.4
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• pp.267-277
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• 2004

Effects of elevated $CO_2$ on soil microorganisms are known to be mediated by various interactions with plants, for which such effects are relatively poorly documented. In this review, we summarize and syn­thesize results from studies assessing impacts of elevated $CO_2$ on soil ecosystems, focusing primarily on plants and a variety the of microbial processes. The processes considered include changes in microbial biomass of C and N, microbial number, respiration rates, organic matter decomposition, soil enzyme activities, microbial community composition, and functional groups of bacteria mediating trace gas emission such as methane and nitrous oxide. Elevated $CO_2$ in atmosphere may enhance certain micro­bial processes such as $CH_4$ emission from wetlands due to enhanced carbon supply from plants. How­ever, responses of extracellular enzyme activities and microbial community structure are still controversy, because interferences with other factors such as the types of plants, nutrient availabilitial in soil, soil types, analysis methods, and types of $CO_2$ fumigation systems are not fully understood.

• Korean Journal of Ecology and Environment
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• v.39 no.4 s.118
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• pp.435-444
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• 2006

A suite of extracellular enzyme activities involved in organic carbon decomposition were determined in three northern peatlands (a bog, a fen, and a swamp) over a 12 month period along with trace gas ($CO_2$ and $N_2O$) flux and DOC dynamics in the wetlands. The activities varied $0.008-0.066\;{\mu}mole\;g^{-1}\;min^{-1}$, $0.003-0.021\;{\mu}mole\;g^{-1}\;min^{-1}$, $0.003-0.016\;{\mu}mole\;g^{-1}\;min^{-1}$, $0.004-0.047\;{\mu}mole\;g^{-1}\;min^{-1}$, for ${\beta}-glucosidase$, cellobiohydrolase, ${\beta}-xylosidase$, and N-acetylglucosaminidase, respectively. In general, the activities were highest in the forested swamp followed by the fen and the bog. When the data from three wetlands are combined, the enzyme activities exhibited significant positive correlations with trace gas emission and available carbon. Further, the average activity of 4 enzymes explained about 20-40% of the variations of trace gas emssion and available carbon. The results indicate that enzymes related to the mineralization of organic carbon may play an important role in trace gas flux and DOC dynamics in northern peatlands.

• Bulletin of the Korean Chemical Society
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• v.35 no.12
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• pp.3427-3432
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• 2014

This study introduces a new method of combining Imaging Differential Optical Absorption Spectroscopy (Imaging-DOAS) data and plume dispersion formulas for power plant emissions to determine the three-dimensional structure of a dispersing pollution plume and the spatial distributions of trace gas volume mixing ratios (VMRs) under conditions of negligible water droplet and aerosol effects on radiative transfer within the plume. This novel remote-sensing method, applied to a power plant stack plume, was used to calculate the two-dimensional distributions of sulfur dioxide ($SO_2$) and nitrogen dioxide ($NO_2$) VMRs in stack emissions for the first time. High $SO_2$ VMRs were observed only near the emission source, whereas high $NO_2$ VMRs were observed at locations several hundreds of meters away from the initial emission. The results of this study demonstrate the capability of this new method as a tool for estimating plume dimensions and trace gas VMRs in power plant emissions.

• The Bulletin of The Korean Astronomical Society
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• v.40 no.2
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• pp.52.3-53
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• 2015

It has been known that there is "dark gas" invisible either in 21-cm HI or 2.6-mm CO emission which are general tracers of atomic and molecular gas, respectively. Many researchers consider that the dark gas is "Dark Molecular Gas (DMG)" composed of CO-free $H_2$ in the intermediate zone between atomic and full-fledged molecular gas and that HCO+ and OH molecules are good tracers of the DMG since they can form in much lower $H_2$ column densities where CO does not. We have carried out HCO+ J=1-0 absorption observations toward nine bright extragalactic radio continuum sources using the KVN 21-m telescopes as single dishes. We detected HCO+ absorption lines toward two sources. We derive HCO+ and $H_2$ column densities or their limits, and discuss the implications of our results.

• Korean Journal of Agricultural and Forest Meteorology
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• v.9 no.3
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• pp.170-178
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• 2007

Rapid increases in the concentrations of greenhouse gases and many other chemically important trace gases have occurred over the last several centuries. For understanding the roles of these important gases in global change, it is essential to identify their sources and sinks, to characterize biogenic gas fluxes between the biosphere and atmosphere, and to understand the processes that control them. In this paper, enclosure-based measurements are described in a practical manner for field experiments. Theoretical reviews of mass balance equation in the enclosure and sensitivity of the flow-through dynamic flux chamber technique are presented; specifically for the case of NO flux measurements from soil surface. The physical system and theory behind the flow-through dynamic flux chamber method are examined. New calculation flux formula was introduced by considering NO chemical loss on chamber wall and uncertainties of the NO flux calculation were discussed.

• Bulletin of the Korean Chemical Society
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• v.27 no.3
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• pp.373-375
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• 2006

$CF_4$ gas is one of the most common chemicals used for dry etching in semiconductor manufacturing processes. For application to the etching process and environmental control, the low-pressure inductively coupled plasma (LP-ICP) was employed to obtain the spectrum of $CF_4$ gas. In terms of the analysis of the spectra, trace CF radical by A-X and B-X transitions was detected. The other $CF_x$ radicals, such as $CF_2$ and $CF_3$, were not seen in this experiment whereas strong C and $C_2$ emissions, dissociation products of $CF_4$ gas, were observed.

• The Bulletin of The Korean Astronomical Society
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• v.37 no.1
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• pp.72.2-72.2
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• 2012

We present the results of HI 21 cm line observations to explore the nature of the high-velocity (HV) HI gas at - 173${\circ}$, which appears as faint, wing-like, Hi emission that extends to velocities beyond those allowed by Galactic rotation in the low-resolution surveys. We designate this feature as Forbidden Velocity Wing (FVW) 172.8+1.5. Our high-resolution Arecibo HI observations show that FVW 172.8+1.5 is composed of knots, filaments, and ring-like structures distributed over an area of a few degrees in extent. These HV HI emission features are well correlated with the HII complex G173+1.5, which is composed of five Sharpless HII regions distributed along a radio continuum loop of size 4.4${\times}$3.4, or -138 pc ${\times}$ 107 pc, at a distance of 1.8 kpc. G173+1.5 is one of the largest star-forming regions in the outer Galaxy. The HV HI gas and the radio continuum loop seem to trace an expanding shell. Its derived HI parameters including large expansion velocity (55 km/s) imply the SNR interpretation. Hot xray emission is detected within the HII complex, which also supports its SNR origin. The FVW172.8+1.5 is most likely the products of a supernova explosion(s) within the HII complex, possibly in a cluster that triggered the formation of these HII regions.

• Journal of The Korean Astronomical Society
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• v.37 no.4
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• pp.193-197
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• 2004

Anomalies in the far-infrared [C II] 158 ${\mu}m$ line emission observed in the central one-kiloparsec regions of spiral galaxies are reviewed. Low far-infrared intensity ratios of the [C II] line to the continuum were observed in the center of the Milky Way, because the heating ratio of the gas to the dust is reduced by the soft interstellar radiation field due to late-type stars in the Galactic bulge. In contrast, such low line-to-continuum ratios were not obtained in the center of the nearby spiral M31, in spite of its bright bulge. A comparison with numerical simulations showed that a typical column density of the neutral interstellar medium between illuminating sources at $hv {\~} 1 eV $ is $N_H {\le}10^{21}\;cm^{-2}$ in the region; the medium is translucent for photons sufficiently energetic to heat the grains but not sufficiently energetic to heat the gas. This interpretation is consistent with the combination of the extremely high [C Il]/CO J = 1-0 line intensity ratios and the low recent star-forming activity in the region; the neutral interstellar medium is not sufficiently opaque to protect the species even against the moderately intense incident UV radiation. The above results were unexpected from classical views of the [C II] emission, which was generally considered to trace intense interstellar UV radiation enhanced by active star formation.