• Journal of the Korean institute of surface engineering
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• v.45 no.2
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• pp.81-88
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• 2012

Probe tip, which should have not only superior electrical characteristics but also good abrasion resistance for numerous contacts with semiconductor pads to confirm their availability, is essential for MEMS probe card. To obtain good durability of probe tip, it needs thick and crack-free rhodium layer on the tip. However, when the rhodium thickness deposited by electroplating increased, unwanted cracks by high internal stress led to serious problem of MEMS probe tip. This article reported the method of thick Rh deposition with Au buffer layer on the probe tip to overcome the problem of high internal stress and studied mechanical and electrical properties of that. MEMS probe tip with double-Rh layer had good contact resistance and durability during long term touch downs.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.36 no.2
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• pp.195-201
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• 2012

According to many customers' requests, optical measurement module (OMM) applications using automatic measuring devices to measure the machined part rapidly on a machine tool have increased steeply. Touch trigger probes are being used for job setup and feature inspection as automatic measuring devices, and this makes quality checking and machining compensation possible. Therefore, in this study, the use of touch trigger probes for accurate measurement of the machined part has been studied and a macro program for a hole measuring cycle has been developed. This hole is the most common feature to be measured, but conventional methods are still not free from measuring error. In addition, the eccentricity change of the least square circle was simulated according to the roundness error in a hole measurement. To evaluate the reliability of this study, the developed hole-measuring program was executed to measure the hole plate on the machine and verify the roundness error in the eccentricity simulation result.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.641-642
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.231-232
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.10a
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• pp.673-674
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• 2009

• International Journal of Precision Engineering and Manufacturing
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• v.2 no.2
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• pp.73-80
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• 2001

The objective of this research is to develop a measurement error model for sculptured surface in On-Machine Measurement(OMM) process based on a closed-loop configuration. The geometric error model of each axis of a vertical CNC machining center is derived using a 4$\times$4 homogeneous transformation matrix. The ideal locations of a touch-type probe for the sculptured surface measurement are calculated from the parametric surface representation and X-, Y- directional geometric errors of the machine. Also the actual coordinates of the probe are calculated by considering the pre-travel variation of a probe and Z-directional geometric errors. Then, the step-by-sep measurement error analysis method is suggested based on a closed-loop configuration of the machining center including workpiece and probe errors. The simulation study shows the simplicity and effectiveness of the proposed error modeling strategy.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.323-326
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• 2004

In this study, the inspection path which is considered to free collision is generated by offset surface. When the inspection is executed, the consideration of machine dynamic error increases a precision. Dynamic error is measured on CNC machine bed changing of weight work price. Offset surface is safety space about collision. Because the danger of probe-collision is excluded in Offset surface, it is possible to rapid feed of probe and reduced inspection time. The Program which is possible to simulate using CAIP and is confirmed through actual experiment.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.2 no.3
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• pp.56-61
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• 2003

This paper described about on-machine profile measurement of aspheric surfaces using contact probing technique in ultra precision machine. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime using a circle leaf spring mechanism and a capacitive-type sensor. The contact probe which is installed on the z-axis is In touch with the aspheric objects which is fixed on the spindle of the diamond turning machine(DTM) during the measuring procedure. The x, z-axis motions of the machine are monitored by a set of two orthogonal plane mirror type laser interferometers. As a results, the developed contact probe on-machine measurement system showed 10 nanometers repeatability with a ${\pm}2{\sigma}$ and uncertainty of 200 nmPv.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.10
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• pp.172-181
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• 1999

The objective of this research is to develop a measurement error model for sculptured surfaces in On-Machine Measurement (OMM) process based on a closed-loop configuration. The geometric error model of each axis of a vertical CNC Machining center is derived using a 4${\times}$4 homogeneous transformation matrix. The ideal locations of a touch-type probe for the scupltured surface measurement are calculated from the parametric surface representation and X-, Y- directional geometric errors of the machine. Also, the actual coordinates of the probe are calculated by considering the pre-travel variation of a probe and Z-directional geometric errors. Then, the step-by-step measurement error analysis method is suggested based on a closed-loop configuration of the machining center including workpiece and probe errors. The simulation study shows the simplicity and effectiveness of the proposed error modeling strategy.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.10a
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• pp.71-76
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• 2001

In the surface measurement system using touch probe, probe radius compensation is a key factor for accuracy. In this paper we investigate methods for compensating probe radius so that the surface equation for an "unknown surface" can be efficiently derived. The developed algorithm derives the surface equation by the iterative procedure of estimation, verification, and modification . Since the procedure is applied only for the surface region exceeding the tolerance limit, an accurate surface equation can be obtained with less computation and measurement point. The validity and effectiveness of the algorithm was tested by numerical simulations. The results convinced us that the develop algorithm can be used for surface measurement and tool path planning for NC machining.