• Proceedings of the KIEE Conference
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• 2006.04a
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• pp.99-101
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• 2006

Auto-Cross Correlated time series (ACTS) model was constructed by using the backpropagation neural network. The performance of ACTS model was evaluated with sensor information collected from a large volume, industrial plasma-enhanced chemical vapor deposition system. A total of 18 sensor information were collected. The effect of inclusion of past and future information were examined. For all but three sensor information with a large data variance demonstrated a prediction error less than 3%. By integrating ACTS model into equipment software, process quality can be more stringently monitored while improving device throughput.

• Transactions on Electrical and Electronic Materials
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• v.18 no.1
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• pp.51-54
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• 2017

TFTs (thin film transistors) were fabricated using a-SIZO (amorphous silicon-indium-zinc-oxide) channel by RF (radio frequency) magnetron sputtering at room temperature. We report the influence of various channel thickness on the electrical performances of a-SIZO TFTs and their stability, using TS (temperature stress) and NBTS (negative bias temperature stress). Channel thickness was controlled by changing the deposition time. As the channel thickness increased, the threshold voltage ($V_{TH}$) of a-SIZO changed to the negative direction, from 1.3 to -2.4 V. This is mainly due to the increase of carrier concentration. During TS and NBTS, the threshold voltage shift (${\Delta}V_{TH}$) increased steadily, with increasing channel thickness. These results can be explained by the total trap density ($N_T$) increase due to the increase of bulk trap density ($N_{Bulk}$) in a-SIZO channel layer.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.273-274
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• 2005

Photovoltaic effects in organic solar cell were studied in a cell configuration of ITO/PEDOT:PSS/CuPc(20nm)/$C_{60}$(40nm)/BCP/Al(150nm) at room temperature. Here, the BCP layer works as an exciton blocking layer. The exciton blocking layer must transport electrons from the acceptor layer to the metal cathode with minimal increase in the total cell series resistance and should absorb damage during cathode deposition. Therefore, a proper thickness of the exciton blocking layer is required for an optimized photovoltaic cell. Several thicknesses of BCP were made between $C_{60}$ and Al. And we obtained characteristic parameters such as short-circuit current, open-circuit voltage, and power conversion efficiency of the device under the illumination of AM 1.5.

• Journal of Surface Science and Engineering
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• v.41 no.6
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• pp.274-278
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• 2008

3-dimensional numerical analysis for a rectangular magnetron cathode model is done to predict cooling characteristics of high power sputtering system for ZnO deposition. It includes cooling channel design, heat transfer analysis of a target, bonding layer and backing plate. In order to model erosion profiles of a target, ion current density distribution from 3D Monte Carlo simulation is used to distribute total sputtering power to 5 discrete regions. At 3 kW of sputtering power and cooling water flow of 1 liter/min at $10^{\circ}C$, the maximum surface temperature was $45.8^{\circ}C$ for a flat new target and $156^{\circ}C$ for a target eroded by 1/3 of its thickness, respectively.

• Journal of Surface Science and Engineering
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• v.43 no.5
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• pp.243-247
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• 2010

The micro Vickers hardness and internal stress of Ni-Fe metal thin film synthesized by electrodeposition method at $25^{\circ}C$ were studied as a function of bath composition, and surface microstructure and atomic compositions of thin films were investigated by SEM and EDS. And the shape change of $200\;{\AA}$ Ni-Fe nanowires made using anodic aluminum oxide(AAO) templates by electrodeposition method were observed by SEM as a function of ultrasonic treatment time and bath composition. The Fe deposition contents on the substrate non-linearly increased with Fe ion concentration over total metal ion concentration. In case of low Fe contents film, the grain size is smaller and denser than high Fe contents deposited films, and the micro Vickers hardness increased with Fe contents of electrodeposited films. These results affected the shape change of nanowire after ultrasonic treatments.

• Korean Journal of Computational Design and Engineering
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• v.10 no.6
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• pp.421-431
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• 2005

This paper introduces a new approach for saving build time of hybrid rapid prototyping by decomposing a part into minimum number of layers. In the hybrid rapid prototyping, a part of a complicated shape is realized by adding layers of a simpler shape, each of which is obtained by machining a sheet of constant thickness from its top and bottom surfaces. Thus it is desired to decompose a given part into the minimum number of layers while guaranteeing each layer to be fabricated from the given sheets using a 3-axis milling machine. To satisfy these requirements, a concave edge-based algorithm is proposed to decompose a part into layers by considering the tool accessibility, the total number of layers, and the allowable sheet thickness.

• Journal of Surface Science and Engineering
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• v.29 no.5
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• pp.459-466
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• 1996

A great amount of effort has been devoted to the constant improvement of such basic performance as dirvability, safety and enviromental protection. As a result, the total combination of various technologies has made it possible to produce safer and more comfortable automobiles. Among these technologies, plasma and thin film techniques are mainly cocerned with sensors, optics, electronics and surface modification. This paper first describes a concept of thin film processing in materials synthesis for sensors based on particle-surface interaction during deposition to provide a long life sensor applicable to sutomobiles. Some examples of parctical application of thin films to sensors are then given. These include(1) a thin films strain gauge for gravity sensors, (2) a giant magneto resistance film for speen sensors, and (3) a Magneto-impedance sensors fordetection of low magnetic field. Further progress of sophisticated thin film technology must be considered in detail to explore advanced thin film materials science and to ensure the field reliability of future sensor devices for automobile.

• Journal of Surface Science and Engineering
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• v.29 no.5
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• pp.512-518
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• 1996

Amorphous carbon nitride (a-C:N) multilayerfilms are formed by using altermating conditions during film deposition in are ion plating process. Because hard a-C:N films prepared with suitable megative bias voltages have large compressive stress, it is difficult to increase film thickness more than 200nm. Preparing multilayer films composed of hard layers and soft layers, we can grow thick multilayer films on Si and SKH steel substrate. The total thickness of multilayer films is more than 1$\mu\textrm{m}$. The multilayer films are several times thicker than the single layer films and almost equal in hardness and internal stress to the single layer ones. X-ray photoelectron spectroscopy(XPS) and Raman spectroscopy reveal that multilayer films equal to single layer films in structure, which is similar to the structure of DLC films.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.10a
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• pp.185-185
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• 2009

Polypropylene beads (PP) coated with $TiO_2$ thin films were prepared by a rotating cylindrical plasma chemical vapor deposition (PCVD) reactor and were used to remove phenol in aqueous solution. The $TiO_2$ thin films of 416 nm thickness were coated on the PP particles uniformly. As the number of $TiO_2$-coated PP beads increases, the phenol is degraded faster, because of larger total surface area of photocatalysts for photodegradation. This study shows that a rotating cylindrical PCVD reactor can be a good method to prepare the particles coated with high-quality $TiO_2$ thin films, which can be applied to the pollutant removal by a photodegradation reaction of $TiO_2$ with high efficiency.

• Medical Lasers
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• v.9 no.1
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• pp.58-61
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• 2020

Keloids are pathologic fibroproliferative conditions characterized by excessive collagen deposition during wound healing. The pathogenesis of keloids is not fully understood, and current treatment options show variable results. In this case report, the patient developed a keloid after bilateral total thyroidectomy, and was treated with a combination approach using fractional ablative laser systems along with cryotherapy and triamcinolone injection. After seven monthly sessions of combination treatment, the patient presented marked improvement of the scar texture and symptoms. Furthermore, there was no recurrence for up to 2 years. We propose this combination as a safe and effective treatment option for keloid patients.