• Title/Summary/Keyword: total deposition

Search Result 633, Processing Time 0.028 seconds

Structural and Magnetic Properties of Fe-Diluted Si Alloy Films by Pulsed-Laser Deposition (펄스레이저 증착법에 의한 Fe 희석된 Si 합금의 구조 및 자기 물성 연구)

  • Suh, Joo-Young;Lee, Kyung-Su;Pak, Sang-Woo;Kim, Eun-Kyu
    • Journal of the Korean Vacuum Society
    • /
    • v.21 no.5
    • /
    • pp.258-263
    • /
    • 2012
  • Fe-diluted Si alloys grown on p-type Si (100) substrates by pulsed-laser deposition method were studied for structural, electrical, and magnetic properties. The X-ray diffraction patterns for these alloy samples showed a few of peaks with cubic structures such as FeSi, $Fe_3Si$, and $Fe_4Si$. The Fe-composition in alloys are confirmed as Fe atomic percent about 1.25~6.49 % from energy dispersive spectroscopy measurement. The resistivity as a function of the reciprocal temperature was indicated an exponential increase with two activation energies of 5.21 and 7.79 meV. The maximum value of the magnetization at 10 K was about 100 emu/cc, and the ferromagnetism was also observed until 350 K from total magnetization as a function of temperature with applied magnetic field of 3,000 Oe.

Atmospheric Acidic Deposition: State of Acid Rain in Korea and the World (대기산성강하물: 한국과 세계의 산성비 실태)

  • Kim, Joon-Ho
    • The Korean Journal of Ecology
    • /
    • v.28 no.3
    • /
    • pp.169-180
    • /
    • 2005
  • Nitrogen dioxide concentration was being grown ca. 8% per year although sulphur dioxide concentration was being reduced ca. 10% per year in Seoul from 1996 to 2003. The rainwater was heavily acidic with pH 4.19 to 4.68 in Seoul during 1980 to 1991. Acidity score on the basis of the total anion concentration of rainwater follows the higher in sequence with Seoul(Kwanaksan)(341.5 ${\mu}equiv{\cdot}L^{-1}$), Gwangneung(199.2 ${\mu}equiv{\cdot}L^{-1}$) and whole Korea mean(10.3 ${\mu}equiv{\cdot}L^{-1}$). Rainwaters from 38 sampling sites of 16 countries in the world, on the basis of the acidity score, are classified and designated as five acid rain grades(ARG): the least score is founded in Tana Rata(16.2 ${\mu}equiv{\cdot}L^{-1}$), Malaysia where has the best rain but the greatest founded in Chongquing(541.1 ${\mu}equiv{\cdot}L^{-1}$), China where has the worst rain in the world. Even though acidic deposition decrease with time in the world generally, it is expected to increase in Asia, Africa and Mid-South America.

Comparison of retention characteristics of ferroelectric capacitors with $Pb(Zr, Ti)O_3$ films deposited by various methods for high-density non-volatile memory.

  • Sangmin Shin;Mirko Hofmann;Lee, Yong-Kyun;Koo, June-Mo;Cho, Choong-Rae;Lee, June-Key;Park, Youngsoo;Lee, Kyu-Mann;Song, Yoon-Jong
    • JSTS:Journal of Semiconductor Technology and Science
    • /
    • v.3 no.3
    • /
    • pp.132-138
    • /
    • 2003
  • We investigated the polarization retention characteristics of ferroelectric capacitors with $Pb(Zr,Ti)O_3$ (PZT) thin films which were fabricated by different deposition methods. In thermally-accelerated retention tests, PZT films which were prepared by a chemical solution deposition (CSD) method showed rapid decay of retained polarization charges as the thickness of the films decreased down to 100 nm, while the films which were grown by metal organic chemical vapor deposition (MOCVD) retained relatively large non-volatile charges at the corresponding thickness. We concluded that in the CSD-grown films, the thicker interfacial passive layer compared with the MOCVD-grown films had an unfavorable effect on retention behavior. We observed the existence of such interfacial layers by extrapolation of the total capacitance with thickness of the films and the capacitance of these layers was larger in MOCVD-grown films than in CSD-grown films. Due to incomplete compensation of surface polarization charges by the free charges in the metal electrodes, the interfacial field activated the space charges inside the interfacial layers and deposited them at the boundary between the ferroelectric layer and the interfacial layer. Such space charges built up an internal field inside the films, which interfered with domain wall motion, so that retention property at last became degraded. We observed less imprint which was a result of less internal field in MOCVD-grown films while large imprint was observed in CSD-grown films.

Growth and dielectric Properties or $BaTiO_3/SrTiO_3$ oxide artificial superlattice deposited by pulsed laser deposition (PLD) (Pulsed laser depostion (PLD)법으로 증착된 $BaTiO_3/SrTiO_3$ 산화물 초격자의 성장 및 유전특성)

  • 김주호;김이준;정동근;김용성;이재찬
    • Journal of the Korean Vacuum Society
    • /
    • v.11 no.3
    • /
    • pp.166-170
    • /
    • 2002
  • Artificial $BaTiO_3$(BTO)/$SrTiO_3$(STO) oxide superlattice have been deposited on MgO (100) single crystal substrate by pulsed laser deposition(PLD) method. The stacking periodicity of BTO/STO superlattice structure was varied from $BTO_{1\;unit\; cell}/STO_{1\;unit\; cell}$ to $BTO_{125\;unit\; cell}/STO_{125 \;unit \;cell}$ thickness with the total thickness of 100 nm. The result of X-ray diffraction showed the characteristics of superlattice in the BTO/STO multilayer structure. we have also confirmed that there was no interdiffusion at the interface between BTO and STO layers by high resolution transmission electron microscopy(HRTEM). The dielectric constant of superlattice increased with decreasing stacking periodicity of the BTO/STO superlattice within the critical thickness. The dielectric constant of the BTO/STO superlattice reached a maximum i.e., 1230 at a stacking perioicity of $BTO_{2\;unit\; cell}/STO_{2\;unit\; cell}$ .

인공관절의 수명 향상을 위해 Plasma Immersion Ion Implantation & Deposition 공정으로 증착된 NbN 박막에 대한 UHMWPE Liner 소재의 마모량 평가

  • Park, Won-Ung;Kim, Eun-Gyeom;Jeon, Jun-Hong;Choe, Jin-Yeong;Mun, Seon-U;Im, Sang-Ho;Han, Seung-Hui
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2012.02a
    • /
    • pp.137-137
    • /
    • 2012
  • 인공관절은 노인성 질환이나 자가 면역질환, 신체적인 외상 등으로 인하여 발생하는 관절의 손상 부위를 대체하기 위하여 고안된 관절의 인공 대용물이다. 인공 관절 중 인공 고관절의 경우 라이너(Liner)와 헤드(Head) 부분이 직접적인 마모 운동을 수행하게 되므로, 이 부분의 소재 특성에 따라 인공관절의 수명이 결정 되게 된다. 현재 헤드 소재로서는 Co-Cr-Mo 합금이, 라이너 소재로서는 고분자 소재인 UHMWPE (Ultra High Molecular Weight Polyethylene)가 주로 사용되고 있다. 이러한 MOP (Metal-On-Polymer) 구조의 인공관절의 경우, 충격흡수의 장점이 있는 반면, 관절 운동시 발생하는 UHMWPE 의wear debris에 의해 골용해가 발생하게 되어 인공관절의 수명이 저하되는 문제점이 있으며, 금속 헤드의 마모로 인한 금속이온의 용출은 세포 독성의 문제를 야기하여 인공관절의 수명을 저하시키는 또 다른 원인이 되고 있다. 따라서 본 연구에서는 PIII&D (Plasma Immersion Ion Implantation & Deposition) 공정을 이용하여 금속 (Co-Cr-Mo 합금)소재 위에 세라믹 (niobium nitride) 박막을 증착하여 상대재인 UHMWPE의 마모를 줄이고자 하는 연구를 진행하였다. 금속 소재 위에 증착된 세라믹 박막은 상대재인 UHMWPE의 마모량을 줄여줄 뿐만 아니라 금속이온의 용출을 막아준다는 장점이 있으나, 장시간의 마모 운동에 의하여 발생하는 박막의 박리 현상은 인공관절의 수명을 급격히 저하시키는 또 다른 원인이 된다. 이러한 단점을 해결하기 위하여, 박막의 증착 초기에 이온주입과 증착을 동시에 수행하는 dynamic ion mixing공정을 수행하였다. Dynamic ion mixing 공정을 수행함에 따라 박막과 금속 사이의 접착력이 증가하게 되어, UHMWPE의 마모량이 2배 가까이 감소하는 것을 확인할 수 있었으며, 장시간의 마모시험에서도 우수한 결과를 얻을 수 있었다. 또한 UHMWPE의 마모량을 감소시키기 위하여 박막을 증착하기 전에 금속 소재에 질소 이온주입을 수행하는 pre-ion implantation 공정을 도입하였다. 질소 이온주입 결과 Co-Cr-Mo 합금 표면에 부분적으로 CrN, Cr2N의 세라믹 상이 형성 되는 것을 확인할 수 있었으며, 그에 따라 UHMWPE의 마모량이 2배 이상 감소 되는 것을 확인 할 수 있었다.

  • PDF

Fabrication of Size-Controlled Hole Array by Surface-Catalyzed Chemical Deposition (표면 촉매 화학 반응을 이용한 크기 조절이 가능한 홀 어레이 제작)

  • Park, Hyung Ju;Park, Jeong Won;Lee, Dae-Sik;Pyo, Hyeon-Bong
    • Journal of Sensor Science and Technology
    • /
    • v.27 no.1
    • /
    • pp.55-58
    • /
    • 2018
  • Low-cost and large-scale fabrication method of nanohole array, which comprises nanoscale voids separated by a few tens to a few hundreds of nanometers, has opened up new possibilities in biomolecular sensing as well as novel frontier optical devices. One of the key aspects of the nanohole array research is how to control the hole size following each specific needs of the hole structure. Here, we report the extensive study on the fine control of the hole size within the range of 500-2500 nm via surface-catalyzed chemical deposition. The initial hole structures were prepared via conventional photo-lithography, and the hole size was decreased to a designed value through the surface-catalyzed chemical reduction of the gold ion on the predefined hole surfaces, by simple dipping of the hole array device into the aqueous solution of gold chloride and hydroxylamine. The final hole size was controlled by adjusting reaction time, and the optimal experimental condition was obtained by doing a series of characterization experiments. The characterization of size-controlled hole array was systematically examined on the image results of optical microscopy, field emission scanning electron microscopy(FESEM), atomic-force microscopy(AFM), and total internal reflection microscopy.

Research on Acceleration Mechanism of Inflight Particle and Gas Flow Effect for the Velocity Control in Vacuum Kinetic Spray Process (진공상온분사(VKS) 공정에서의 비행입자 가속 기구 및 속도제어를 위한 가스 유량 효과에 관한 연구)

  • Park, Hyungkwon;Kwon, Juhyuk;Lee, Illjoo;Lee, Changhee
    • Korean Journal of Materials Research
    • /
    • v.24 no.2
    • /
    • pp.98-104
    • /
    • 2014
  • Vacuum kinetic spray(VKS) is a relatively advanced process for fabricating thin/thick and dense ceramic coatings via submicron-sized particle impact at room temperature. However, unfortunately, the particle velocity, which is an important value for investigating the deposition mechanism, has not been clarified yet. Thus, in this research, VKS average particle velocities were derived by numerical analysis method(CFD: computational fluid dynamics) connected with an experimental approach(SCM: slit cell method). When the process gas or powder particles are accelerated by a compressive force generated by gas pressure in kinetic spraying, a tensile force generated by the vacuum in the VKS system accelerates the process gas. As a result, the gas is able to reach supersonic speed even though only 0.6MPa gas pressure is used in VKS. In addition, small size powders can be accelerated up to supersonic velocity by means of the drag-force of the low pressure process gas flow. Furthermore, in this process, the increase of gas flow makes the drag-force stronger and gas distribution more homogenized in the pipe, by which the total particle average velocity becomes higher and the difference between max. and min. particle velocity decreases. Consequently, the control of particle size and gas flow rate are important factors in making the velocity of particles high enough for successful deposition in the VKS system.

Luminescent Characteristics of SrS:CuCl Thin-Film Electroluminescent(TFEL) Devices on CuCl Concentrations (CuCl 농도에 따른 SrS:CuCl 박막 전계발광소자의 발광특성)

  • Lee, Sun-Seok;Im, Seong-Gyu
    • Journal of the Institute of Electronics Engineers of Korea SD
    • /
    • v.39 no.8
    • /
    • pp.17-23
    • /
    • 2002
  • The SrS:CuCl TFEL devices were fabricated by electron-beam deposition and the luminescent characteristics of the fabricated SrS:CuCl TFEL devices were studied. The SrS powder was used as the host materials and 0.05 ~ 0.6 at% of CuCl powder was added as the luminescent center. The deposition conditions of substrate temperature, electron beam current, and deposition rate were 500 $^{\circ}C$ , 20 ~ 40 mA, and 5 ~ 10 /sec, respectively The total thickness of the phosphor layer deposited was 6000 . The blue emission at low CuCl concentrations was observed from the luminescent centers of monomer, dimer, trimer, and tetramer, The bright greenish blue emission at high CuCl concentrations was observed from the dimer and trimer luminescent centers. The maxium luminance was observed from the SrS:CuCl TFEL devices doped with 0.2 at% of CuCl concentration and the threshold voltage, luminance(L$_{40}$ ), efficiency(η$_{20}$) and CIE coordinate obtained were 55 V, 728 cd/$m^2$, 0.49 lm/w, and (0.21, 0.33), respectively..

Bias effect for diamond films deposited by HFCVD method (HFCVD 방법을 이용한 다이아몬드 박막 증착에서의 Bias 효과)

  • 권민철;박홍준;최병구
    • Journal of the Korean Vacuum Society
    • /
    • v.7 no.2
    • /
    • pp.94-103
    • /
    • 1998
  • We investigated a bias effect for diamond films deposited by a HFCVD(Hot Filament Chemical Vapor Deposition) method using a methane-hydrogen gas mixture. During deposition total chamber pressure, methane concentration, filament temperature and substrate temperature was 20 torr, 1.0%, $2100^{\circ}C$ and $980^{\circ}C$ respectively. Also DC bias was applied during both the nucleation stage and the growth stage systematically. We found that negative bias enhanced the nucleation density at the nucleation stage, but it made a bad influence on the morpholohy of films at the growth stage. Positive bias enhanced the growth rate and resulted in a good morpholohy of films. Therefore we concluded that it was effective to apply the negative bias during the nucleation stage and then to switch into the positive bias during the growth stage in the fabrication of diamond films.

  • PDF

Screening and functional validation of lipid metabolism-related lncRNA-46546 based on the transcriptome analysis of early embryonic muscle tissue in chicken

  • Ruonan, Chen;Kai, Liao;Herong, Liao;Li, Zhang;Haixuan, Zhao;Jie, Sun
    • Animal Bioscience
    • /
    • v.36 no.2
    • /
    • pp.175-190
    • /
    • 2023
  • Objective: The study was conducted to screen differentially expressed long noncoding RNA (lncRNA) in chickens by high-throughput sequencing and explore its mechanism of action on intramuscular fat deposition. Methods: Herein, Rose crown and Cbb broiler chicken embryo breast and leg muscle lncRNA and mRNA expression profiles were constructed by RNA sequencing. A total of 96 and 42 differentially expressed lncRNAs were obtained in Rose crown vs Cobb broiler chicken breast and leg muscle, respectively. lncRNA-ENSGALT00000046546, with high interspecific variability and a potential regulatory role in lipid metabolism, and its predicted downstream target gene 1-acylglycerol-3-phosphate-O-acyltransferase 2 (AGPAT2), were selected for further study on the preadipocytes. Results: lncRNA-46546 overexpression in chicken preadipocyte 2 cells significantly increased (p<0.01) the expression levels of AGPAT2 and its downstream genes diacylglycerol acyltransferase 1 and diacylglycerol acyltransferase 2 and those of the fat metabolism-related genes peroxisome proliferator-activated receptor γ, CCAAT/enhancer binding protein α, fatty acid synthase, sterol regulatory element-binding transcription factor 1, and fatty acid binding protein 4. The lipid droplet concentration was higher in the overexpression group than in the control cells, and the triglyceride content in cells and medium was also significantly increased (p<0.01). Conclusion: This study preliminarily concludes that lncRNA-46546 may promote intramuscular fat deposition in chickens, laying a foundation for the study of lncRNAs in chicken early embryonic development and fat deposition.