• Title/Summary/Keyword: top electrodes

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The Effect of Top-electrode Perimeter on the Tunability of Tunable Varactors Based on a BZN/BST/BZN Thin Film (BZN/BST/BZN 박막에 기초한 가변 바렉터의 상부전극 가장자리 길이에 대한 가변성 영향)

  • Lee, Young Chul;Lee, Baek Ju;Ko, Kyung Hyun
    • Journal of Advanced Navigation Technology
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    • v.17 no.6
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    • pp.720-725
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    • 2013
  • This paper has presented that fringing-electric fields enhanced by a finger-type electrode can improve the tunability of the tunable capacitor. Its top electrodes with different area and line width are designed in types of the finger for a long conducting perimeter. The tunable varactors were fabricated on a quartz substrate employing a multi-layer dielectric of a para/ferro/para-electric thin film. Compared to the conventional capacitor, finger-type capacitors are analyzed in terms of effective capacitance and tunablility. Their effective capacitance and tunability of the varactors with the long perimeter increase 24~40 % and 7~12 %, respectively, due to enhanced fringing electric fields from 1 to 2.5 GHz.

Developing the Electrode Board for Bio Phase Change Template (바이오 상변화 Template 위한 전극기판 개발)

  • Li, Xue Zhe;Yoon, Junglim;Lee, Dongbok;Kim, Sookyung;Kim, Ki-Bum;Park, Young June
    • Korean Chemical Engineering Research
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    • v.47 no.6
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    • pp.715-719
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    • 2009
  • The phase change electrode board for the bio-information detection through electrical property response of phase change material was developed in this study. We manufactured the electrode board using Aluminum first that is widely used in conventional semiconductor device process. Without further treatment, these aluminum electrodes tend to contain voids in PETEOS(plasma enhanced tetraethyoxysilane) material that are easily detected by cross-sectional SEM(Scanning Electron Microscope). The voids can be easily attacked and transformed into holes in between PETEOS and electrodes after etch back and washing process. In order to resolve this issue of Al electrode board, we developed a electrode board manufacturing method using low resistivity TiN, which has advantages in terms of the step-coverage of phase change($Ge_2Sb_2Te_5$, GST) thin film as well as thermodynamic stability, without etch back and washing process. This TiN material serves as the top and bottom electrode in PRAM(Phase-change Random Access Memory). The good connection between the TiN electrode and GST thin film was confirmed by observing the cross-section of TiN electrode board using SEM. The resistances of amorphous and crystalline GST thin film on TiN electrodes were also measured, and 1000 times difference between the amorphous and crystalline resistance of GST thin film was obtained, which is well enough for the signal detection.

An Analysis on Upper Extremity and Trunk EMG of Elderly for Table Height Using Electronic Bed (고령자의 전동침대 사용 시 테이블 높이에 따른 상지와 체간의 근활성도 분석)

  • Lee, Myoung-Hee;Lee, Sang-Yeol
    • Journal of the Korean Society of Physical Medicine
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    • v.8 no.3
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    • pp.443-448
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    • 2013
  • PURPOSE: In recent years, senior friendly device is growing rapidly because of population aging The study was designed to investigate the effects of table height of electronic bed on upper extremity and trunk EMG in elderly. METHODS: Thirty right-handed elderly without history of neurological and musculoskeletal dysfunction were participated in this study. Three heights of the table (3/3 height, 2/3 height, and 1/3 height between top of the shoulder and olecranon) were provided. During the eating performance, surface electromyography (EMG) was used to measure muscle activity, and electrodes were attached to the deltoid middle fiber, serratus anterior, suprapinatus, upper trapezius, rhomboideus, cervical part of longissimus, thoracic part of longissimus, lumbar part of longissimus on right. One way ANOVA was conducted for the statistical analysis. RESULTS: There were significant differences in deltoid middle fiber, suprapinatus, upper trapezius, rhomboideus, lumbar part of longissimus in the 3 different height of table (p<.05). The deltoid middle fiber, suprapinatus, upper trapezius, and lumbar part of longissimus were significantly increased in higher table than lower table(p<.05). And the rhomboideus was significantly decreased in higher table than lower table(p<.05). CONCLUSION: This study demonstrates that different height of table affect upper extremity and trunk muscle activity. The table height of olecranon is the best for elderly.

3차원 LTCC 기판을 이용한 압전 압력 센서의 제작 및 연구 특성

  • Heo, Won-Yeong;Hwang, Hyeon-Seok;U, Hyeong-Gwan;Lee, Tae-Yong;Lee, Gyeong-Cheon;Sim, Deung;Song, Jun-Tae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.118-118
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    • 2009
  • Low temperature co-fired ceramic (LTCC) is one of promising materials for MEMS structures because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of 400 um were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of $Pb(ZrTi)O_3$ (PZT) thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The results showed that the fabrication method is very suitable for pressure sensor applications. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

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Characterization of BST films for high tunable thin film capacitor

  • No, Ji-Hyeong;Song, Sang-U;Kim, Ji-Hong;Go, Jung-Hyeok;Mun, Byeong-Mu
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.179-179
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    • 2009
  • This is for the electrical characterization by IDC pattern using BST$(Ba_{0.5}Sr_{0.5}TiO_3)$ thin film. BST materials had been chosen for high frequency applications due to it's high permitivity and tunability. The BST thin films have been deposited on $Al_2O_3$ Substrates by Nd-YAG pulsed laser deposition with a 355nm wavelength at $700\;^{\circ}C$. The post deposition annealing at $750^{\circ}C$ in flowing $O_2$ atmosphere for 1 hours. The capacitance of IDC patterns have been measured from 1 to 10 GHz as a function of electric field ($\pm40$ KV/cm) at room temperature using inter-digital Au electrodes deposited on top of BST. The IDC patterns have three type of fingers number. For the 10 pairs finger was the best capacitance onto $Al_2O_3$ substrate. The capacitance was 0.9pF. Also Dielectric constant was been 351 at 100 mTorr and annealing temperature $750^{\circ}C$ for 1 hour. The loss tangent was been 0.00531.

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Waste coffee grounds-derived nanoporous carbon nanosheets for supercapacitors

  • Park, Min Hong;Yun, Young Soo;Cho, Se Youn;Kim, Na Rae;Jin, Hyoung-Joon
    • Carbon letters
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    • v.19
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    • pp.66-71
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    • 2016
  • The development of nanostructured functional materials derived from biomass and/or waste is of growing importance for creating sustainable energy-storage systems. In this study, nanoporous carbonaceous materials containing numerous heteroatoms were fabricated from waste coffee grounds using a top-down process via simple heating with KOH. The nanoporous carbon nanosheets exhibited notable material properties such as high specific surface area (1960.1 m2 g−1), numerous redox-active heteroatoms (16.1 at% oxygen, 2.7 at% nitrogen, and 1.6 at% sulfur), and high aspect ratios (>100). These unique properties led to good electrochemical performance as supercapacitor electrodes. A specific capacitance of ~438.5 F g−1 was achieved at a scan rate of 2 mV s−1, and a capacitance of 176 F g−1 was maintained at a fast scan rate of 100 mV s−1. Furthermore, cyclic stability was achieved for over 2000 cycles.

Comparison of the Electrical and Optical Properties in between Transparent ITO and Au Electrodes using Hydrogen-storage Metals as Intermediate Layers (수소저장합금을 이용한 p-GaN ITO 투명전극과 Au 전극과의 특성비교)

  • Chae, Seung-Wan;Kim, Chul-Min;Kim, Eun-Hong;Lee, Byung-Kyu;Shin, Young-Chul;Kim, Tae-Geun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.7
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    • pp.610-614
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    • 2008
  • In this work, the electrical and optical properties of the two different p-type GaN electrode schemes, ZnNi/ITO and ZnNi/Au, were compared each other, and applied to the top-emitting GaN/InGaN light-emitting diodes (LEDs). The ZnNi/ITO electrode showed much higher transmittance (90%) and slightly lower contact resistance $(1.27{\times}10^{-4}{\Omega}cm^2)$ than those (77%, $(2.26{\times}10^{-4}{\Omega}cm^2)$) of the ZnNi/Au at a wavelength of 460 nm. In addition, GaN LEDs having ZnNi/ITO showed accordingly higher light output power and luminous intensity than those having ZnNI/Au did at the current levels up to 1 A.

FBAR Device with Thin AlN Piezoelectric Film for 2 GHz RF Bandpass Filter Applications (2 GHz 대역 RF 대역통과 필터 응용을 위한 AlN 압전 박막을 이용한 FBAR 소자)

  • Giwan Yoon;Munhyuk Yim;Dongkyu Chai;Kim, Sanghee;Kim, Jongheon
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.7 no.2
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    • pp.250-254
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    • 2003
  • A film bulk acoustic resonator (FBAR) device for 2 GHz radio frequency (RF) bandpass filter application is presented. This FBAR device consists of an aluminum nitride (AlN) film sandwiched between top(Al) and bottom(Au) electrodes and an acoustic multilayer reflector of a silicon dioxide/tungsten (SiO2/W). The A/N film deposited using a RF sputtering was observed to have small columnar grains with a strongly preferred orientation towards c axis. In addition to a high quality factor (4300), a large return loss of 37.19 dB was obtained.

Bending Properties of the Flexible BMNO (Bi2Mg2/3Nb4/3O7) Capacitor Using Graphene Electrode (그래핀 전극을 이용한 유연한 BMNO (Bi2Mg2/3Nb4/3O7) 캐패시터의 굽힘 특성)

  • Song, Hyun-A;Park, Byeong-Ju;Yoon, Soon-Gil
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.25 no.5
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    • pp.387-391
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    • 2012
  • Graphene was fabricated onto Ni/Si substrate using a rapid-thermal pulse CVD and they were transferred onto the Ti/PES flexible substrate. For top electrode applications of the BMNO dielectric films, graphene was patterned using a argon plasma. Through an AFM image and a leakage current density of the BMNO films grown onto various bottom electrodes before and after bending test, BMNO films grown onto the graphene bottom electrode showed no change of the microstructure and the leakage current density after the bend.

A Comparative Study of The Electrical Properties of Arachidic Acid L-B Film in the Al/LB/Al and Au/LB/Au Electrode Structures (Al/LB/Al, Au/LB/AU 전극구조에서 Arachidic Acid L-B막의 전기적 특성에 관한 비교 연구)

  • 오세중;김형석;이창희;김태완;김정수
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1993.11a
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    • pp.112-115
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    • 1993
  • We have studied a property of arachidic acid Langmuir-Blodgett films at room temperature with two different electrodes ; Al/LB/Al and Au/LB/Au. Since a natural oxide layer is formed on top of the Al electrode, the appropriate structure of AL/LB/Al is Al/Al$_2$O$_3$/LB/Al. To obtain a property of Pure LB film, Aua/LB/Au structure was made. In Al/Al$_2$O$_3$/LB/Al structure, a conductivity of 3.7${\times}$10$\^$-14/ S/cm was obtained by using current-voltage(I-V) characteristics. In Au/LB/AU structure, however, I-V curve was not able to be measured because of short current even in 51 layers of the LB film. A status of defects in the film was confirmed by copper decoration method. We have clearly seen a rather big difference of defect in those two above structures.

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