• Journal of the Korean Crystal Growth and Crystal Technology
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• v.28 no.1
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• pp.14-20
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• 2018

Lead zinc niobate (PZN) added lead zirconate titanate (PZT) thick films with thickness of $5{\sim}10{\mu}m$ were fabricated on silicon and sapphire substrates using aerosol deposition method. The contents of PZN were varied from 0 %, 20 % and 40 %. The initial particles (PZT, 2PZN-8PZT, 4PZN-6PZT) had irregular shape and submicron sizes. The as-deposited film had fairly dense microstructure without any crack, and showed only a perovskite single phase formed with nano-sized grains. The as-deposited films on silicon were annealed at the temperatures of $700^{\circ}C$, and the films deposited on sapphire were annealed at $900^{\circ}C$ in the electrical furnace. The effects of PZN addition on the microstructural evolution were observed using by FE-SEM and HR-TEM.

• Journal of the Korean Ceramic Society
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• v.43 no.7 s.290
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• pp.421-426
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• 2006

[ $(BaSr)TiO_3$ ] thick films were prepared by tape casting method, using $BaTiO_3\;and\;SrTiO_3$ powder slurry in order to investigate dielectric properties i.e. dielectric constant, ${\varepsilon}_r$, Curie temperature, $T_c$. Grain growth within $(BaSr)TiO_3$ thick films was observed with increasing weight ratio of $BaTiO_3$. This observation can be explained by phenomena of substitution of $Sr^{2+}$ ion for $Bi^{2+}$ ion in the $BaTiO_3$ system. Also, the Curie temperature in $(BaSr)TiO_3$ thick films was shifted to lower temperature range with increasing $ SrTiO_3$. Furthermore, Curie temperature having maximum dielectric constant was in the range of $-40^{\circ}C\;to\;30^{\circ}C$, and hence sharper phase transformation occurred at Curie temperature. There occurred decrease in tunability and k-factor of $(Ba_{0.6}Sr_{0.4})TiO_3$ calculated from the dielectric constant, ${\varepsilon}_r$ above Curie temperature. In addition, above the $60^{\circ}C$, phase fixation was observed. This means that internal stress relief occurred with increasing $90^{\circ}$ domains.

• Journal of the Korean Ceramic Society
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• v.50 no.2
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• pp.157-162
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• 2013

The need for lead-free piezoceramics has caused a renewal of interest in $BaTiO_3$-based systems. Recently, it was found that ceramics in the $(Ba,Ca)(Zr,Ti)O_3$ system have properties comparable to those of $Pb(Zr,Ti)O_3$. However, these ceramics require rather high sintering temperatures of $1450-1550^{\circ}C$. In this work, the effect of $TiO_2$ and CuO addition on the sintering behavior, microstructure, dielectric and piezoelectric properties of $(Ba_{0.85}Ca_{0.15})(Zr_{0.1}Ti_{0.9})O_3$ (BCTZ) ceramics will be discussed. BCTZ ceramics were prepared by the mixed oxide route and 1 mol % of $TiO_2$ or CuO was added. Undoped and doped ceramics were sintered at $1350^{\circ}C$ for 1-5 h. CuO was found to be a very effective sintering aid, with samples sintered for 1 h at $1350^{\circ}C$ having a bulk density of 95% theoretical density; however the piezoelectric properties were greatly reduced, probably due to the small grain size.

• Journal of Satellite, Information and Communications
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• v.6 no.1
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• pp.28-31
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• 2011

In this paper, a new set of structural and sacrificial material that is diamond like carbon (DLC)/photoresist for high performance piezoelectric RF-MEMS switches which are actuated in d33 mode is suggested. To avoid curing problem of photoresist sacrificial layer, DLC structure layer is deposited at room temperature by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. And lead zirconate titanate (PZT) piezoelectric layer is deposited on structure layer directly at room temperature by rf magnetron sputtering system and crystallized by rapid thermal annealing (RTA) equipment. Particular attention is paid to the annealing of PZT film in order to crystallize into perovskite and the variation of mechanical properties of DLC layer as a function of annealing temperature. The DLC layer shows good performance for structure layer in aspect to Young's modulus and hardness. The fabrication becomes much simpler and cheaper with use of a photoresist.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.5 no.3
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• pp.261-268
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• 1995

In transforming $K_2Ti_4O_9$ whisker, synthesized by calcination and slow cooling method, into $K_2Ti_6O_{13}$ whisker with boiling water and hydrochrolic acid, the effect of their treatment time and concentration on phase transformation, surface state and scattering of whisker was examined. The result was that the surface state of whisker was improved and whisker with a small diameter and a considerable aspect ratio was obtained by inducing scattering of a bundle of whisker. The treatment by boiling water and hydrochrolic acid induced the phase transformation of $K_2Ti_4O_9$ into $K_2Ti_6O_{13}$ and the phase transformation proceeded by extration of $K^+$ ion.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.319-319
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• 2013

Even though the fabrication methods of metal oxide based thin film capacitor have been well established such as RF sputtering, Sol-gel, metal organic chemical vapor deposition (MOCVD), ion beam assisted deposition (IBAD) and pulsed laser deposition (PLD), an applicable capacitor of printed circuit board (PCB) has not realized yet by these methods. Barium Strontium Titanate (BST) and other high-k ceramic oxides are important materials used in integrated passive devices, multi-chip modules (MCM), high-density interconnect, and chip-scale packaging. Thin film multi-layer technology is strongly demanded for having high capacitance (120 nF/$mm^2$). In this study, we suggest novel multi-layer thin film capacitor design and fabrication technology utilized by plasma assisted deposition and photolithography processes. Ba0.6Sr0.4TiO3 (BST) was used for the dielectric material since it has high dielectric constant and low dielectric loss. 5-layered BST and Pt thin films with multi-layer sandwich structures were formed on Pt/Ti/$SiO_2$/Si substrate by RF-magnetron sputtering and DC-sputtering. Pt electrodes and BST layers were patterned to reveal internal electrodes by photolithography. SiO2 passivation layer was deposited by plasma-enhanced chemical vapor deposition (PE-CVD). The passivation layer plays an important role to prevent short connection between the electrodes. It was patterned to create holes for the connection between internal electrodes and external electrodes by reactive-ion etching (RIE). External contact pads were formed by Pt electrodes. The microstructure and dielectric characteristics of the capacitors were investigated by scanning electron microscopy (SEM) and impedance analyzer, respectively. In conclusion, the 0402 sized thin film multi-layer capacitors have been demonstrated, which have capacitance of 10 nF. They are expected to be used for decoupling purpose and have been fabricated with high yield.

• Smart Structures and Systems
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• v.14 no.5
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• pp.811-830
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• 2014

A numerical study has been carried out to simulate an innovative monitoring procedure to detect and localize damage in reinforced concrete beams retrofitted with carbon fiber reinforced polymer (CFRP) unidirectional laminates. The main novelty of the present simulation is its ability to conduct the electromechanical admittance monitoring technique by considerably compressing the amount of data required for damage detection and localization. A FEM simulation of electromechanical admittance-based sensing technique was employed by applying lead zirconate titanate (PZT) transducers to acquire impedance spectrum signatures. Response surface methodology (RSM) is finally adopted as a tool for solving inverse problems to estimate the location and size of damaged areas from the relationship between damage and electromechanical admittance changes computed at PZT transducer surfaces. This statistical metamodel technique allows polynomial models to be produced without requiring complicated modeling or numerous data sets after the generation of damage, leading to considerably lower cost of creating diagnostic database. Finally, a numerical example is carried out regarding a steel-reinforced concrete (RC) beam model monotonically loaded up to its failure which is also retrofitted by a CFRP laminate to verify the validity of the present metamodeling monitoring technique. The load-carrying capacity of concrete is predicted in the present paper by utilizing an Ottosen-type failure surface in order to better take into account the passive confinement behavior of retrofitted concrete material under the application of FRP laminate.

• Smart Structures and Systems
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• v.16 no.2
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• pp.281-294
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• 2015

Bolted joint connection is the most commonly used connection element in structures and devices. The loosening due to external dynamic loads cannot be observed and measured easily and may cause catastrophic loss especially in an extreme requirement and/or environment. In this paper, an innovative Real-time Cross-Correlation Method (RCCM) for monitoring of the bolted joint loosening was proposed. We apply time reversal process on stress wave propagation to obtain correlation signal. The correlation signal's peak amplitude represents the cross-correlation between the loosening state and the baseline working state; therefore, it can detect the state of loosening. Since the bolt states are uncorrelated with noise, the peak amplitude will not be affected by noise and disturbance while it increases SNR level and increases the measured signals' reliability. The correlation process is carried out online through physical wave propagation without any other post offline complicated analyses and calculations. We implemented the proposed RCCM on a single bolt/nut joint experimental device to quantitatively detect the loosening states successfully. After that we implemented the proposed method on a real large structure (reaction wall) with multiple bolted joint connections. Loosening indexes were built for both experiments to indicate the loosening states. Finally, we demonstrated the proposed method's great anti-noise and/or disturbance ability. In the instrumentation, we simply mounted Lead Zirconium Titanate (PZT) patches on the device/structure surface without any modifications of the bolted connection. The low-cost PZTs used as actuators and sensors for active sensing are easily extended to a sensing network for large scale bolted joint network monitoring.

• Journal of the Korean Ceramic Society
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• v.39 no.2
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• pp.153-158
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• 2002

$Al_2O_3$ composites powders with 1∼11 wt% $TiO_2$ were prepared by wet method and sintered at 1350$^{\circ}C$, 1450$^{\circ}C$ for 2h. Mechanical properties and microstructural evolution were investigated in this study. $Al_2O_3$-3 wt% $TiO_2$ composite were high bulk density of 2.37 g/$cm^3$ and low apparent porosity of 6.3%. The composites containing of 3 wt% $TiO_2$ showed moderately high bending strength of 68.9 MPa and the young's modulus of 35.5 MPa. The composites with increasing $TiO_2$ contents exhibit reduced thermal expansion coefficient due to the formation of $Al_2TiO_5$ phase.

• Journal of the Korean Ceramic Society
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• v.47 no.6
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• pp.498-502
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• 2010

Aluminium titanate($Al_2TiO_5$) has extremely anisotropic thermal expansion properties in single crystals, and polycrystalline material spontaneously microcracks in the cooling step after sintering process. These fine intergranular cracks limit the strength of the material, but provide an effective mechanism for absorbing strain energy during thermal shock and preventing catastrophic crack propagation. Furthermore, since machinable BN-ceramics used as an insulating substrate in current micro-electronic industry are very expensive, the development of new low-cost machinable substrate ceramics are consistently required. Therefore, cheap $Al_2TiO_5$-machinable ceramics was studied for the replacement of BN ceramics. $Al_2O_3-Al_2TiO_5$ ceramic composite was fabricated via in-situ reaction sintering. $Al_2O_3$ and $TiO_2$ powders were mixed with various mol-ratio and sintered at 1400 to $1600^{\circ}C$ for 1 h. Density, hardness and strength of sintered ceramics were systematically measured. Phase analysis and microstructures were observed by XRD and SEM, respectively. Machinability of each specimens was tested by micro-hole machining. The results of research showed that the $Al_2TiO_5$-composites could be used for low-cost machinable ceramics.