• Journal of Sensor Science and Technology
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• v.22 no.5
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• pp.369-373
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• 2013

In this paper, we developed contact type temperature sensor with single crystal silicon strip thermopile. This sensor consists of 15 p-type single crystal silicon strips, 17 n-types and contact electrodes on silicon dioxide silicon membrane. The result of electromotive force measuring showed very good characteristic as $15.18mV/^{\circ}C$ when temperature difference between the two ends of the thermopile occurs by applying thermal contact on the thermopile which was fabricated with silicon strip of $200{\mu}m$ length, $20{\mu}m$ width, $1{\mu}m$ thickness.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.265-266
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• 2006

It was well known that thermopile was quiet a competent sensor using to probe the temperature of "hot point" where the temperature can be off the temperature-limitation for normal operation of the main electrical power equipment. In the present work, we aimed for developing new Ge-thermopile materials which can be using a non-contact temperature sensors at various hot-point of the power equipment and evaluation of its output property. As a results of the present works, a new thermopile which were composed Ga-poded p-type and Sb-doped n-type in Ge-semiconductor were designed and manufactured by MBE(Molecular Beam Epitaxy) process and showed superior sensitivity at room temperature.

• Journal of Sensor Science and Technology
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• v.11 no.5
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• pp.294-300
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• 2002

In this study, we fabricated thermopile infrared sensor with floating membrane structure. Floating membrane was formed by SOI(Silicon On Insulator) structure. In SOI structure, silicon dioxide layer between top silicon layer and bottom silicon substrate was etched by HF solution, then membrane was floated over substrate. After membrane was floated, thermopile pattern was formed on membrane. By insertion of SOI technology, we could obtain thermal isolation structure easily and passivation process for sensor pattern protection was not required during fabrication process. Then, the amplifier circuit for thermopile sensor was fabricated by using $1.5{\mu}m$ CMOS process. The voltage gain of fabricated amplifier was about two hundred.

• Proceedings of the Korea Society for Simulation Conference
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• 2001.10a
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• pp.387-390
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• 2001

Thermopile thermometer can measure the temperature of an object without attaching the object. It measures the temperature by receiving the radiation energy from objects. The idea of this is from the law of Stefan-Boltzmann. In the past it was not used well because the size was big and the cost was too expensive. But, In these days it can be used many field because the size become smaller and advantage of cost by using micro machine technology. However, The accuracy of measuring is not better than electric type. So we want to improve the accuracy of sensor by analyzing the heat transfer of the thermopile. To analyze temperature distribution in the thermopile sensor, we use the FEM software which is named ANSYS. The conduction and radiation heat transfer is considered to simulate the temperature distribution and time response inside of the sensor.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2014.10a
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• pp.857-860
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• 2014

This paper proposes a human movement detection system by a thermopile array sensor. In the system, the sensor is attached to the ceiling and it acquires spatial temperatures, which is called thermal distribution. The system obtains $4{\times}4$ pixels thermal distributions from the sensor. The distributions are analyzed to extract human movement. As the experimental result, the proposed system successfully detected human movements.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1210-1213
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• 2005

Micro heat flux sensor is used in various industries to measure heat flux. In this study, a micro heat flux sensor is fabricated using the MEMS (Micro Electro Mechanical Systems) techniques. The fabricated sensor is composed in thermopile for sensor and SU-8 for thermal resistance layer. The new method of fabrication SU-8 is proposed in this study. The sensitivity is $44\;\mu{V/(W/cm^2)}$ at steady state and Reynolds number is 91322.

• Journal of Industrial Technology
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• v.32 no.A
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• pp.35-38
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• 2012

We present a novel non-dispersive infrared (NDIR) $CO_2$ gas sensor with a light source emitting collimated light. Using this thermopile, we also have successfully developed a small, sensitive NDIR $CO_2$ detector module for accurate air quality monitoring systems in energy-saving building and automotive applications. The novel sample cavity comprising specular reflectors around the light bulb is configured to uniformly emit collimated light into the entrance aperture of the cavity in order to enhance the sensitivity of NDIR $CO_2$ detector.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.699-700
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• 2010

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1829-1832
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• 2008

This paper reports a novel gas sensing method by using a thermoelectric device, thermopile in this case, with an embedded tin oxide catalyst. By using a thin catalyst film, the response time and recovery time were remarkably improved. The fabricated gas sensor was characterized through detecting NOx gas with various concentrations.

• The Optical Journal
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• s.177
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• pp.41-45
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• 2020