1 |
A. G. McNamara, "Semiconductor diode and transistors as electrical thermometers", Rev. Sci. Instrum., Vol. 33, pp. 330-333, 1962.
DOI
|
2 |
S. Middelhoek and S. A. Audet, Silicon Sensors, Academic Press, p. 174, 1989.
|
3 |
T. Berlicki, S. Osadnik and E. Prociow, "Thermal thin-film sensors for r.m.s. value measurements", Sens. Actuator A-Phys., Vol. 27, pp. 629-632, 1991.
DOI
ScienceOn
|
4 |
A. W. van Herwaarden and P. M. Sarro, "Thermal sensors based on the seebeck effect", Sens. Actuator A-Phys., Vol. 10, pp. 321-346, 1986.
DOI
ScienceOn
|
5 |
D. D. L.Wijngaards, S. H. Kong, M. Bartek, and R. F. Wolffenbuttel, "Tharmal stabilization of integrated silicon platforms using polysilicon and SiGe peltier element", Proceedings Transducers '99, Sandai, Japan, pp. 310-313, 1999.
|
6 |
Y. T. Lee, H. Takao, and M. Ishida, 'Fabrication of the thermopile using SOI structure", J. Sensor Sci. & Tech., Vol. 11, No. 1, pp. 1-8, 2002.
과학기술학회마을
DOI
ScienceOn
|
7 |
Y. T. Lee, H. Takao, and M. Ishida, "Fabrication of a silicon pressure sensor of measuring low pressure using ICP-RIE", J. Sensor Sci. & Tech., Vol. 16, No. 2, pp. 126-131, 2007.
과학기술학회마을
DOI
ScienceOn
|