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http://dx.doi.org/10.5369/JSST.2013.22.5.369

Development of a Contact Type Temperature Sensor Using Single Crystal Silicon Thermopile  

Lee, Young-Tae (Department of IT & Electronics Education, Andong National University)
Lee, You-Na (IT Convergence Technology Research Team, Gumi Electronics and Information Technology Research Institute)
Lee, Wang-Hoon (IT Convergence Technology Research Team, Gumi Electronics and Information Technology Research Institute)
Publication Information
Journal of Sensor Science and Technology / v.22, no.5, 2013 , pp. 369-373 More about this Journal
Abstract
In this paper, we developed contact type temperature sensor with single crystal silicon strip thermopile. This sensor consists of 15 p-type single crystal silicon strips, 17 n-types and contact electrodes on silicon dioxide silicon membrane. The result of electromotive force measuring showed very good characteristic as $15.18mV/^{\circ}C$ when temperature difference between the two ends of the thermopile occurs by applying thermal contact on the thermopile which was fabricated with silicon strip of $200{\mu}m$ length, $20{\mu}m$ width, $1{\mu}m$ thickness.
Keywords
Temperature sensor; Single crystal silicon; Thermopile; SOI; $XeF_2$ gas;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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