• 한국세라믹학회지
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• 제43권8호
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• pp.479-485
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• 2006

The residual stress changes on thermo-mechanical loading in the interface region of the Thermal Barrier Coating (TBC)/Thermally Grown Oxide (TGO)/Bond Coat (BC) were calculated on the TBC-coated superalloys using a Finite Element Method (FEM). It was found that the residual stress of the interface boundary was dependent upon mainly the oxide formation and the swelling rate of the oxide by creep relaxation. During an oxide swelling, the relaxation of residual stress which is due to creep deformation increased the TBC's life. In the case of the fine grain size of TGO scale, the TBC stresses piled up by oxide swelling could be relaxed by diffusional creep effect of TGO.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.415-419
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• 2004

Thermal barrier systems are susceptible to instability of the thermally grown oxide(TGO) at the interface between the bond coat(BC) and the thermal barrier coating(TBC). The instabilities have been linked to thermal cycling and initial geometrical imperfections, as well as to misfit strains due to oxide growth and expansion misfit. In this work, deformation of TGO near a surface groove due to thermal cycling has been observed at high temperatures, $1100^{circ}C$, $1150^{circ}C$, $1200^{circ}C$. The effect of peak temperature and the thickness of substrate are presented.

• Journal of Korean Vacuum Science & Technology
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• 제4권1호
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• pp.11-17
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• 2000

The low temperature electron mobilities were investigated in Si/$Si_{1-x}Ge_{x}$ modulation Doped (MOD) quantum well structure with thermally grown oxide. N-type Si/$Si_{1-x}Ge_{x}$ structures were fabricated by a gas source MBE. Thermal oxidation was carried out in a dry $O_2$ atmosphere at $700^{\circ}C$ for 7 hours. Electron mobilities were measured by a Hall effect and a magnetoresistant effect at low temperatures down to 0.4 K. Pronounced Shubnikov-de Haas (SdH) oscillations were observed at a low temperature showing two dimensional electron gases (2 DEG) in a tensile strained Si quantum well. The electron sheet density ($n_{s}$) of 1.5${\times}$$10^{12}$[$cm^{-2}$] and corresponding electron mobility of 14200 [$cm^2$$V^{-1}$$s^{-1}$] were obtained at low temperature of 0.4 K from Si/$Si_{1-x}Ge_{x}$ MOD quantum well structure with thermally grown oxide.

• 한국세라믹학회지
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• 제43권7호
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• pp.415-420
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• 2006

The residual stresses in the interface region of the Thermal Barrier Coating (TBC)/Thermally Grown Oxide (TGO)/Bond Coat (BC) were calculated on the TBC-coated superalloy samples using a Finite Element Method (FEM). It was found that the stress distribution of the interface boundary was dependent upon mainly the geometrical shape or its aspect ratio and the thickness of TGO layer, which was formed by growth and swelling behavior of oxide layer. Maximum compressive residual stress in the TBC/TGO interface is higher than that of the TGO/bond coat interface, and the tensile stress had nothing to do with change of an aspect ratio. The compressive residual stresses in the TBC/TGO and TGO/bond coat interface region increased gradually with the TGO growth.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.539-542
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• 2001

In SiC semiconductor device processing, it needs high temperature anneal for activation of ion implanted dopants. The macrosteps, 7~8nm in height, are formed on the surface of SiC substrates during activation anneal. We have investigated the effect of thermally-grown SiO$_2$layer on the suppression of macrostep formation during high temperature anneal. The cap oxide layer was found to be efficient for suppression of macrostep formation even though the annealing temperature is as high as the melting point of SiO$_2$. The thin cap oxide layer (10nm) was evaporated during anneal then the macrosteps were formed on SiC substrate. On the other hand the thicker cap oxide layer (50nm) remains until the anneal process ends. In that case, the surface was smoother and the macrosteps were rarely formed. The thermally-grown oxide layer is found to be a good material for the suppression of macrostep formation because of its feasibility of growing and processing. Moreover, we can choose a proper oxide thickness considering the evaporate rate of SiO$_2$at the given temperature.

• 대한기계학회논문집A
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• 제31권6호
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• pp.665-670
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• 2007

Alpha-phase alumina TGO(Thermally Grown Oxide) forms on the interface between zirconia top coat and bond coat of thermal barrier coating system for superalloys during exposure to high temperature over $1000^{\circ}C$. It is known to provide a good protection against hot corrosion and to cause surface failure such as rumpling and cracking due to difference in thermal expansion coefficient from the substrate metal and the lateral growth. Consequently, mechanical properties of the alumina TGO at the high temperature are the key parameters determining the integrity of TBC system. In this work, by using Fecralloy foils as the alumina forming substrate, creep tests and tensile tests have been performed with various TGO thicknesses$(h=0{\sim}4{\mu}m)$ and yttrium contents(0, 200ppm) at $1200^{\circ}C$. Displacement-time curves and load-displacement curves for each TGO thickness(h=1,2,..) were measured from the creep and tensile tests, respectively, and compared with the curves without TGO thickness(h=0). As the result, the intrinsic tensile and creep properties of TGO itself were determined.

• 한국진공학회지
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• 제1권1호
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• pp.190-197
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• 1992

In this study we have investigated physical and electrical properties of high temperature oxide (HTO) thin film using dichlorosilane (DCS) gas. This film had low etch rate and excellent step coverage, and its characteristics of Si-O bond were similar to those of thermal oxide. I-V curves also showed similar electrical properties to those of thermally grown oxide (SiO2) while time dependent dielectric breakdown (TDDB) results revealed 1/4 value of thermal oxide. However, defect density was measured to be much lower value than that of thermal oxide.

• 한국재료학회지
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• 제32권4호
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• pp.200-209
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• 2022

In this study, defects generated in the YSZ coating layer of the IN738LC turbine blade are investigated using an optical microscope and SEM/EDS. The blade YSZ coating layer is composed of a Y-Zr component top coat layer and a Co component bond coat layer. A large amount of Cr/Ni component that diffused from the base is also measured in the bond coat. The blade hot corrosion is concentrated on the surface of the concave part, accompanied by separation of the coating layer due to the concentration of combustion gas collisions here. In the top coating layer of the blade, cracks occur in the vertical and horizontal directions, along with pits in the top coating layer. Combustion gas components such as Na and S are contained inside the pits and cracks, so it is considered that the pits/cracks are caused by the corrosion of the combustion gases. Also, a thermally grown oxide (TGO) layer of several ㎛ thick composed of Al oxide is observed between the top coat and the bond coat, and a similar inner TGO with a thickness of several ㎛ is also observed between the bond coat and the matrix. A PFZ (precipitate free zone) deficient in γ' (Ni₃Al) forms as a band around the TGO, in which the Al component is integrated. Although TGO can resist high temperature corrosion of the top coat, it should also be considered that if its shape is irregular and contains pore defects, it may degrade the blade high temperature creep properties. Compositional and microstructural analysis results for high-temperature corrosion and TGO defects in the blade coating layer used at high temperatures are expected to be applied to sound YSZ coating and blade design technology.

• 대한기계학회논문집A
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• 제38권12호
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• pp.1431-1434
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• 2014

가스터빈에 적용되는 열차폐코팅은 가동 중 반복적인 열피로에 의하여 파손되므로, 열차폐코팅의 내구성평가가 필요하다. 고온 환경에 노출된 열차폐코팅의 내부에는 열생성산화물(TGO)이 성장하게 되는데, 이러한 열생성산화물(TGO)의 성장은 열차폐코팅의 주요 파손 원인으로 알려져 있다. 따라서 TGO의 성장을 고려한 열차폐코팅의 내구성평가는 반드시 선행되어야 하는 연구이다. 본 연구에서는 김대진등의 연구 결과로부터 열화시간에 따른 TGO 성장을 고려하여 유한요소해석을 수행하였으며, 이로부터 응력과 열화시간 사이의 관계를 도출하였다. 또한 열화시간에 따른 유한요소해석 결과와 김대진 등의 접착강도 시험 결과의 비교를 통하여 열차폐코팅의 내구성을 평가하였다.

• 한국세라믹학회지
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• 제55권4호
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• pp.344-351
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• 2018

The effects of bond coat species on the growth behavior of thermally grown oxide (TGO) layer in thermal barrier coatings (TBCs) was investigated through furnace cyclic test (FCT). Two types of feedstock powder with different particle sizes and distributions, AMDRY 962 and AMDRY 386-4, were used to prepare the bond coat, and were formed using air plasma spray (APS) process. The top coat was prepared by APS process using zirconia based powder containing 8 wt% yttria. The thicknesses of the top and bond coats were designed and controlled at 800 and $200{\mu}m$, respectively. Phase analysis was conducted for TBC specimens with and without heat treatment. FCTs were performed for TBC specimens at $1121^{\circ}C$ with a dwell time of 25 h, followed by natural air cooling for 1 h at room temperature. TBC specimens with and without heat treatment showed sound conditions for the AMDRY 962 bond coat and AMDRY 386-4 bond coat in FCTs, respectively. The growth behavior of TGO layer followed a parabolic mode as the time increased in FCTs, independent of bond coat species. The influences of bond coat species and heat treatment on the microstructural evolution, interfacial stability, and TGO growth behavior in TBCs are discussed.