• Title/Summary/Keyword: thermal vapor deposition

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Electrical Properties and Preparation of 6FDA/4-4'DDE Polyimide Thin Films by Vapor Deposition Polymerization Method (진공증착중합법을 이용한 6FDA/4-4'DDE 폴리이미드 박막의 제조와 전기적 특성)

  • Hwang, S.Y.;Lee, B.J.;Kim, H.G.;Kim, Y.B.;Park, K.S.;Lim, H.C.;Kang, D.H.;Park, K.H.;Lee, D.C.
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1487-1489
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    • 1998
  • In this paper, thin films of PI were fabricated VDPM of dry processes which are easy to control the film's thickness and hard to pollute due to volatile solvents. From FT-lR, PAA thin films fabricated by VDP were changed to PI thin films by thermal curing. From SEM, AFM and Ellipsometer experimental, as the higher curing temperatures the films thickness decreases and reflectance increases. Therefore, Pl could be fabricated stable by increasing curing temperature. The relative permitivity and dissipation loss factor were 3.7 and 0.008. Also, the resistivity was about $1.05{\times}10^{15}{\Omega}cm$ at $30^{\circ}C$.

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Effect of Hydrogen Radicals for Ion Implanted CVD Diamond Using Remote Hydrogen Plasma Treatment(RHPT)

  • Won, Jaihyung;Hatta, Akimitsu;Yagi, Hiromasa;Wang, Chunlei;Jiang, Nan;Jeon, Hyeongmin;Deguehi, Masahiro;Kitabatake, Makoto;Ito, Toshimichi;Sasaki, Takatomo;Hiraki, Akio
    • The Korean Journal of Ceramics
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    • v.4 no.1
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    • pp.15-19
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    • 1998
  • Defects formation of Chemical Vapor Deposition (CVD) diamond on $^4He^{2+}$ irradiation and after remote hydrogen plasma treatment(RHPT) were investigated by cathodoluminescence(CL). As calculated in the TRIM simulation, the light elements of $^4He^{2-}$ can be penetrated into the diamond bulk structure at 3~4 $\mu\textrm{m}$ depth. The effects of the implantation region were observed when 5 keV~20 keV electron energy (insight 0.3~4.0$\mu\textrm{m}$) of CL measurement was irradiated to diamond at temperature 80 K. After the RHPT, rehybridization of irradiation damaged diamond was studied. The intensity of 5RL center(intrinsic defect of C) was diminished. The 2.16 eV center (N-V center) occurring usually by annealing could not be seen after RHPT. The diamond was rehybridized by hydrogen radicals without etching and thermal degradation by the RHPT.

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Preparation of Carbon Nanofibers by Catalytic CVD and Their Purification

  • Lim, Jae-Seok;Lee, Seong-Young;Park, Sei-Min;Kim, Myung-Soo
    • Carbon letters
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    • v.6 no.1
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    • pp.31-40
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    • 2005
  • The carbon nanofibers (CNFs) were synthesized through the catalytic decomposition of hydrocarbons in a quartz tube reactor. The CNFs prepared from $C_3H_8$ at $550^{\circ}C$ was selected as the purification sample due to the higher content of impurity than that prepared from other conditions. In this study, we carried out the purification of CNFs by oxidation in air or carbon dioxide after acid treatment, and investigated the influence of purification parameters such as kind of acid, concentration, oxidation time, and oxidation temperature on the structure of CNFs. The metal catalysts could be easily eliminated from the prepared CNFs by liquid phase purification with various acids and it was verified by ICP analysis, in which, for example, Ni content decreased from 2.51% to 0.18% with 8% nitric acid. However, the particulate carbon and heterogeneous fibers were not removed from the prepared CNFs by thermal oxidation in air and carbon dioxide. This result can be explained by that the direction of graphene sheet in CNFs is vertical to the fiber axis and the CNFs are oxidized at about the similar rate with the impurity carbon.

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Grain Size Effect on Mechanical Properties of Polycrystalline Graphene

  • Park, Youngho;Hyun, Sangil;Chun, Myoungpyo
    • Composites Research
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    • v.29 no.6
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    • pp.375-378
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    • 2016
  • Characteristics of nanocrystalline materials are known substantially dependent on the microstructure such as grain size, crystal orientation, and grain boundary. Thus it is desired to have systematic characterization methods on the various nanomaterials with complex geometries, especially in low dimensional nature. One of the interested nanomaterials would be a pure two-dimensional material, graphene, with superior mechanical, thermal, and electrical properties. In this study, mechanical properties of "polycrystalline" graphene were numerically investigated by molecular dynamics simulations. Subdomains with various sizes would be generated in the polycrystalline graphene during the fabrication such as chemical vapor deposition process. The atomic models of polycrystalline graphene were generated using Voronoi tessellation method. Stress strain curves for tensile deformation were obtained for various grain sizes (5~40 nm) and their mechanical properties were determined. It was found that, as the grain size increases, Young's modulus increases showing the reverse Hall-Petch effect. However, the fracture strain decreases in the same region, while the ultimate tensile strength (UTS) rather shows slight increasing behavior. We found that the polycrystalline graphene shows the reverse Hall-Petch effect over the simulated domain of grain size (< 40 nm).

Photovoltaic Properties of Organic Photovoltaic cell (유기물을 이용한 Photovoltaic cell의 광기전력 특성)

  • Kim, S.K.;Lee, H.D.;Chung, D.H.;Oh, H.S.;Hong, J.I.;Park, J.W.;Kim, T.W.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.04a
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    • pp.123-126
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    • 2003
  • Recently, there is a growing concern on the photovoltaic effects using organic materials. This is a phenomena which converts the solar energy into the electrical one. We have fabricated a device structure of $ITO/PEDOT:PSS/CuPc/C_{60}/BCP/AI$. The PEDOT:PSS layer is made by spin coating, and the other organic layers are made by thermal vapor deposition. By measuring the current-voltage characteristics with an illumination of light, we have obtained value of Voc=0.38V, Jsc=$0.5mA/cm^{2}$. And a fill factor and efficiency are about 0.314 and 0.083%, respectively. A 500W xenon lamp(ORIEL) is used for a light source, and the light intensity illuminated into the device was about 10mW.

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Synthesis and photoresponse characteristics of single-crystalline Si nanowires (단일 Si 나노선 합성 및 광특성 연구)

  • Kim, Kyung-Hwan;Keem, Ki-Hyun;Kang, Jeong-Min;Yoon, Chang-Joon;Jeong, Dong-Young;Min, Byung-Don;Cho, Kyoung-Ah;Kim, Hyun-Suk;Kim, Sang-Sig
    • Proceedings of the KIEE Conference
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    • 2005.11a
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    • pp.81-83
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    • 2005
  • Photocurrent of a single-crystalline Si nanowire is investigated in this paper. Single-crystalline Si nanowires with amorphous $SiO_2$ shells were first synthesized from ball-milled SiO powders by thermal chemical vapor deposition, and then the amorphous $SiO_2$ shellswere etched out from the as-synthesized Si nanowires. For a single-crystalline Si nanowire, photocurrent-voltage curves taken in air at room temperature were non-linear, and rapid photoresponses were observed when the light was switched on and off. The photocurrent was not changed in intensity under the illumination. Photocurrent mechanism in the single-crystalline Si nanowire is discussed in this paper.

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Optoelectronic properties of p-n hetero-junction array of networked p-CNTs and aligned $n-SnO_2$ nanowires

  • Min, Gyeong-Hun;Yun, Jang-Yeol;Ha, Jeong-Suk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.274-274
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    • 2010
  • 최근 들어 나노선을 이용한 pn 접합 소자 연구 결과가 매우 활발하게 보고되고 있다. 그러나, 서로 다른 두 종류의 나노선으로 pn 접합 어레이 구조의 소자를 제작할 때, 나노선을 원하는 위치에 정렬하는 기술상의 어려움이 큰 걸림돌이 된다. 본 연구에서는 p-CNT와 n-$SnO_2$ 나노선을 이용한 pn 접합 어레이 구조를 제작할 수 있는 독창적인 공정기술을 제안한다. 먼저 $SiO_2$가 300 nm 성장된 Si 기판을 선택적으로 패터닝하여 BOE (6:1) 용액으로 $SiO_2$ 층을 80 nm 정도 선택적으로 에칭한 후, 선택적으로 에칭된 표면에 슬라이딩 장비를 이용하여 화학기상증착법(chemical vapor deposition: CVD)으로 성장된 n-$SnO_2$ 나노선을 전이시킨다. 그 다음 thermal tape를 이용하여 CVD 법으로 성장된 랜덤 네트워크 형태의 CNT를 $SnO_2$ 나노선이 전이된 기판 위에 전이 시킨다. 이때 성장된 CNT 필름 중 금속성 나노선을 통한 전하 이동을 감소시키기 위해, 촉매로 사용되는 페리틴의 농도를 낮춰서 전체적인 CNT의 농도를 줄이는 방법을 이용하였다. 따라서, 성장된 CNT 필름은 별도의 후처리 없이 p-형의 반도체성을 보였다. 제작된 pn-소자는 정류비가 ~103 인 정류특성을 보였으며, 254 nm 파장의 UV lamp를 조사하여 광전류가 발생하는 것을 확인하였다. 연구결과는 이종의 나노선 접합에 의한 다이오드 응용과 UV 센서응용 가능성을 보여준다.

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Electrical Properties of Local Bottom-Gated MoS2 Thin-Film Transistor

  • Kwon, Junyeon;Lee, Youngbok;Song, Wongeun;Kim, Sunkook
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.375-375
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    • 2014
  • Layered semiconductor materials can be a promising candidate for large-area thin film transistors (TFTs) due to their relatively high mobility, low-power switching, mechanically flexibility, optically transparency, and amenability to a low-cost, large-area growth technique like thermal chemical vapor deposition (CVD). Unlike 2D graphene, series of transition metal dichalcogenides (TMDCs), $MX_2$ (M=Ta, Mo, W, X=S, Se, Te), have a finite bandgap (1~2 eV), which makes them highly attractive for electronics switching devices. Recently, 2D $MoS_2$ materials can be expected as next generation high-mobility thin-film transistors for OLED and LCD backplane. In this paper, we investigate in detail the electrical characteristics of 2D layered $MoS_2$ local bottom-gated transistor with the same device structure of the conventional thin film transistor, and expect the feasibility of display application.

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Control the Work Function and Plasmon Effect on Graphene Surface Using Metal Nanoparticles for High Performance Optoelectronics

  • Park, Si Jin;Kang, Seong Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.166.1-166.1
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    • 2014
  • We have controlled the graphene surface in two ways to improve the device performance of optoelectronics based on graphene transparent conductive films. We controlled multilayer graphene (MLG) work function and localized surface plasmon resonance wavelength using a silver nanoparticles formed on graphene surface. Graphene substrates were prepared using a chemical vapor deposition and transfer process. Various size of silver nanoparticles were prepared using a thermal evaporator and post annealing process on graphene surface. Silver nanoparticles were confirmed by using scanning electron microscopy (SEM). Work functions of graphene surface with various sizes of Ag nanoparticles were measured using ultraviolet photoelectron spectroscopy (UPS). The result shows that the work functions of MLG could be controlled from 4.39 eV to 4.55 eV by coating different amounts of silver nanoparticles while minimal changes in the sheet resistance and transmittance. Also the Localized surface plasmon resonance (LSPR) wavelength was investigated according to various sizes of silver nanoparticles. LSPR wavelength was measured using the absorbance spectrum, and we confirmed that the resonance wavelength could be controlled from 396nm to 425nm according to the size of silver nanoparticles on graphene surface. To confirm improvement of the device performance, we fabricated the organic solar cell based on MLG electrode. The results show that the work function and plasmon resonance wavelength could be controlled to improve the performance of optoelectronics device.

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Graphene Coated Optical Fiber SPR Biosensor

  • Kim, Jang Ah;Hwang, Taehyun;Dugasani, Sreekantha Reddy;Kulkarni, Atul;Park, Sung Ha;Kim, Taesung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.401-401
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    • 2014
  • In this study, graphene, the most attractive material today, has been applied to the wavelength-modulated surface plasmon resonance (SPR) sensor. The optical fiber sensor technology is the most fascinating topic because of its several benefits. In addition to this, the SPR phenomenon enables the detection of biomaterials to be label-free, highly sensitive, and accurate. Therefore, the optical fiber SPR sensor has powerful advantages to detect biomaterials. Meanwhile, Graphene shows superior mechanical, electrical, and optical characteristics, so that it has tremendous potential to be applied to any applications. Especially, grapheme has tighter confinement plasmon and relatively long propagation distances, so that it can enhance the light-matter interactions (F. H. L. Koppens, et al., Nano Lett., 2011). Accordingly, we coated graphene on the optical fiber probe which we fabricated to compose the wavelength-modulated SPR sensor (Figure 1.). The graphene film was synthesized via thermal chemical vapor deposition (CVD) process. Synthesized graphene was transferred on the core exposed region of fiber optic by lift-off method. Detected analytes were biotinylated double cross-over DNA structure (DXB) and Streptavidin (SA) as the ligand-receptor binding model. The preliminary results showed the SPR signal shifts for the DXB and SA binding rather than the concentration change.

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