• Structural Engineering and Mechanics
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• v.10 no.3
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• pp.245-262
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• 2000

The objective of this study is to analyze the deformational characteristics of a high-vacuum insulation panel that is evacuated to eliminate significant gas-phase conductance through its thickness. The panel is composed of a metal envelope and low thermal conductance spacers. The problem is very challenging because several nonlinearities are involved concurrently. Not only are various finite element models such as triangular, rectangular, beam and circular plate models used to simulate the panel, but also several finite element programs are used to solve the problem based on the characteristics of the finite element model. The numerical results indicate that the effect of the diameter of the spacer on the vertical deformation of the plate panel is negligibly small. The parameter that mainly influences the maximum sag is the spacing between the spacers. The maximum vertical deformation of the panel can be predicted for a practical range of the spacing between the spacers and the thickness of the plate. Compared with the numerical results obtained by the finite element models and the experimental tests, they have a good agreement. The results are represented in both tabular and graphical forms. In order to make the results useful, a curve fitting technique has been applied to predict the maximum deformation of the panel with various parameters. Moreover, the panel was suggested to be a "smart" structure based on thermal effect.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.133-133
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• 2011

최근 나노입자를 이용한 비휘발성 메모리 소자의 제작에 대한 연구가 진행되고 있다. 특히, 실리사이드 계열의 나노입자를 적용한 소자는 일함수가 크지만 실리콘 내의확산 문제를 가지고 있는 금속 나노입자와 달리 현 실리콘 기반의 반도체 공정 적용이 용이한 잇 점을 가지고 있다. 따라서 본 연구에서는 실리사이드 계열의 화합물 중에서 4.63 eV인 Vanadium Silicide ($V_3$Si) 박막을 열처리 과정을 통하여 수 nm 크기의 나노입자로 제작하였다. 소자의 제작은 p-Si기판에 5 nm 두께의 $SiO_2$ 터널층을 dry oxidation 방법으로 성장시킨 후 $V_3$Si 금속박막을 RF magnetron sputtering system을 이용하여 3~5 nm 두께로 tunnel barrier위에 증착시켰다. Rapid thermal annealing법으로 질소 분위기에서 $1000^{\circ}C$의 온도로 30초 동안 열처리하여 $V_3$Si 나노 입자를 형성 하였으며. 20 nm 두께의 $SiO_2$ 컨트롤 산화막층을 ultra-high vacuum magnetron sputtering을 이용하여 증착하였다. 마지막으로 thermal evaporation system을 통하여 Al 전극을 직경 200, 두께 200nm로 증착하였다. 제작된 구조는 metal-oxide-semiconductor구조를 가지는 나노 부유 게이트 커패시터 이며, 제작된 시편은 transmission electron microscopy을 이용하여 $V_3$Si 나노입자의 크기와 균일성을 확인했다. 소자의 전기적인 측정은 E4980A capacitor parameter analyzer와 Agilent 81104A apulse pattern generator system을 이용한 전기용량-전압 측정을 통해 전하저장 효과를 분석하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.143.2-143.2
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• 2013

Nanomechanical and electrical properties of vanadium dioxide (VO2) thin films across thermal-driven phase transition are investigated with ultra-high vacuum atomic force microscopy. VO2 thin films have been deposited on the n-type heavily doped silicon wafer by pulsed laser deposition. X-ray diffraction reveals that it is textured polycrystalline with preferential orientation of (100) and (120) planes in monoclinic phase. As the temperature increases, the friction decreased at the temperature below the transition temperature, and then the friction increased as increasing temperature above the transition temperature. We attribute this observation to the combined effect of the thermal lubricity and electronic contribution in friction. Furthermore, the dependence of nanoscale conductance on the local pressure was indicated at the various temperatures, and the result was discussed in the view of pressure-induced metal-insulator transition.

• Clean Technology
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• v.18 no.1
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• pp.14-21
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• 2012

The pros and cons of green building thermal insulation materials and systems have been reviewed from traditional thermal insulation materials such as mineral wool and polyurethane to new thermal insulation materials like VIP and aerogel and future insulating VIM and DIM. VIPs and aerogels with very low thermal conductivity can use for green buildings to significantly increase residential area by reducing energy consumption. Aerogels can be produced as not only opaque and but also translucent forms, thus enabling a wide range of possible building application. For building applications, there are many properties to consider like building site adaptability and mechanical strength, fire protection, cost and environmental impact.

• Current Optics and Photonics
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• v.6 no.1
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• pp.69-78
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• 2022

A high-resolution camera is a precise optical system. Its vibrations during transportation and launch, together with changes in temperature and gravity field in orbit, lead to different degrees of defocus of the camera. Thermal refocusing is one of the solutions to the problems related to in-orbit defocusing, but there are few relevant thermal refocusing mathematical models for systematic analysis and research. Therefore, to further research thermal refocusing systems by using the development of a high-resolution micro-nano satellite (CX6-02) super-resolution camera as an example, we established a thermal refocusing mathematical model based on the thermal elasticity theory on the basis of the secondary mirror position. The detailed design of the thermal refocusing system was carried out under the guidance of the mathematical model. Through optical-mechanical-thermal integration analysis and Zernike polynomial calculation, we found that the data error obtained was about 1%, and deformation in the secondary mirror surface conformed to the optical index, indicating the accuracy and reliability of the thermal refocusing mathematical model. In the final ground test, the thermal vacuum experimental verification data and in-orbit imaging results showed that the thermal refocusing system is consistent with the experimental data, and the performance is stable, which provides theoretical and technical support for the future development of a thermal refocusing space camera.

• JSTS:Journal of Semiconductor Technology and Science
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• v.8 no.3
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• pp.239-243
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• 2008

In this study, Bi-Sb thin film structure was prepared by thermal evaporation method. The electrical, optical transmission and structural characteristics of the prepared samples were introduced before and after thermal annealing process. At temperature of $500^{\circ}C$, the absorption of the structure was improved to reach 97% at near-infrared region. As well, the thermal annealing caused to reduce the bulk resistance of the Bi-Sb thin film structure. The morphology of Bi-Sb structure was also improved by thermal annealing as characteristic islands of the structure appear clearly in form hexagonal areas distinct from each other. This study is aiming to examine such structures if they are employed as photonic devices such as photodetectors, LED's and optical switches.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.107-107
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• 2012

Recently, large-area synthesis of high-quality but polycrystalline graphene has been advanced as a scalable route to applications including electronic devices. The presence of grain boundaries (GBs) may be detrimental on some electronic, thermal, and mechanical properties of graphene, including reduced electronic mobility, lower thermal conductivity, and reduced ultimate mechanical strength, yet on the other hand, GBs might be beneficially exploited via controlled GB engineering. The study of graphene grains and their boundary is therefore critical for a complete understanding of this interesting material and for enabling diverse applications. I present that scanning electron diffraction in STEM mode makes possible fast and direct identification of GBs. We also demonstrate that dark field TEM imaging techniques allow facile GB imaging for high-angle tilt GBs in graphene. GB mapping is systematically carried out on large-area graphene samples via these complementary techniques. The study of the detailed atomic structure at a GB in suspended graphene uses aberration-corrected atomic resolution TEM at a low kV.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.78-78
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• 2012

In this presentation I will review the expanding thermal plasma chemical vapour deposition (ETP-CVD) technology, a deposition technology capable of reaching ultrahigh deposition rates. High rate deposition of a-Si:H, ${\mu}c$-Si:H, a-SiNx:H and silicon nanocrystals will be discussed and their various applications, mainly for photovoltaic applications demonstrated. An important aspect over the years has been the fundamental investigation of the growth mechanism of these films. The various in situ (plasma) and thin film diagnostics, such as Langmuir probes, retarding field analyzer, (appearance potential) mass spectrometry and cavity ring absorption spectroscopy, spectroscopic ellipsometry to name a few, which were successfully applied to measure radical and ion density, their temperature and kinetic energy and their reactivity with the growth surface. The insights gained in the growth mechanism provided routes to novel applications of the ETP-CVD technology, such as the ultrahigh high growth rate of silicon nanorystals and surface passivation of c-Si surfaces.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.163-163
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• 2012

We observed strain evolution of P3HT crystals in P3HT:PCBM films and the effect of Al electrode on the evolution during real time annealing process. Based on simple assumptions, both relaxed lattice parameters and thermal expansion coefficient could be quantitatively determined. P3HT:PCBM films displayed tensile strain in as-prepared samples regardless of the presence of an Al layer. In the absence of Al layer, P3HT crystals showed only strain relaxation at an annealing temperature of $180^{\circ}C$. Meanwhile In the presence of an Al layer, the strain was relaxed and changed to compressive strain at around 120C annealing temperature, which indicated a tightening of the thiophene ring packing. These behaviors support the improved performance of devices fabricated by post annealing process.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.233.2-233.2
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• 2016

Graphite의 순도, 결함, 결정층, 전기저항이 개선을 위하여, 10,000K 이상의 초고온 RF 열플라즈마 처리에 관한 연구를 수행하였다. 방전가스는 Ar을 사용하고, 특성 개선을 위하여 첨가가스로 $H_2$, $CH_4$을 첨가하여 흑연의 열플라즈마 처리에 의한 특성을 고찰하였다. Energy Dispersion Spectroscopy을 이용한 탄소 함량 분석 결과, 75wt% 저급 흑연에 함유된 유무기 불순물은 고온의 플라즈마에 의해 제거되어 99wt% 이상으로 순도가 개선되었고, XRD 및 Raman 분석으로부터 고온 열처리를 통한 탄소원자의 재배열로 흑연의 $sp^2$결함이 감소되고, 결정성이 향상됨을 확인하였다. 또한 열플라즈마로 처리된 흑연입자에 대한 분체저항 측정 결과, $10^{-3}{\Omega}{\cdot}cm$에서 $10{-4}{\Omega}{\cdot}cm$로 감소되었다.