• Journal of the Korean Institute of Telematics and Electronics
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• v.27 no.12
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• pp.1865-1869
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• 1990

N-Channel polysilicon MOSFETs (W/L=20/1.5, 3, 5.10\ulcorner) were fabricated using RTP (Rapid Thermal Processor) and hydrogen passivation. The N+ source, drain and gate were annealed and recrystallized using RTP at temperature of 1000\ulcorner-1100\ulcorner. But the active areas were not specially crystallized before growing the gate oxide. Without the hydrogen passivarion, excellent transistor characteristics (ON/OFF=5.10**6, S=85MV/DEC, IL=51pA/\ulcorner) were obtained for 1.5\ulcorner MOSFET. Also the transistor characteristics were improved by hydrogen passivation.

• Electronics and Telecommunications Trends
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• v.13 no.3 s.51
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• pp.71-83
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• 1998

반도체 제조용 웨이퍼의 온도를 측정하고 제어하는 기술의 진보로 열처리 장비 시장에서 점점 더 각광을 받고 있는 급속 열처리(rapid thermal process: RTP) 장치의 최근 기술 동향을 전반적으로 조사 분석하였다. RTP의 장점, 온도 제어 모델링 기술(model-based control), 최근에 개발된 여러 종류의 RTP 시스템 설계 및 이들 각각의 기술적인 문제들이 기술된다. 새롭게 개발된 단일 wafer furnace와 광자 효과를 이용한 rapid photothermal process (RPP)에 관해서도 기술하였다. 아울러 최근 열처리 장비 업체들의 현황과 열처리 장비 시장의 향후 전망에 관해서도 검토하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.496-500
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• 1996

An air flow measurement device is proposed. The thermal characteristic of a semiconductor element is adopted as a cooling parameter of thermal convection rate. The difference between forced convection and natural convection of two Zener diodes results enough difference in temperature. Experiment at various air flow conditions shows the measuring capability of the air flow in a duct. This measuring device has some merits, such as a reliability n hard field condition, simple circuit for signal processing, small volume of the element, less air flow resistance, independance of various ai temperature. The experimental result shows that it is an exact and usefull air flow measurement device.

• Transactions of Materials Processing
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• v.13 no.3
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• pp.205-210
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• 2004

The waveguide Bragg gratings have been fabricated by the phase-mask method. An excimer laser with maximum 600mJ output pulse energy and uniform phase masks have been used. Hydrogen loading is often used for enhancing the uv photosensitivity of the core, however, the resultant gratings show significant aging effect. In the present study, high temperature thermal annealing process has been investigated to obtain thermal gratings and process parameters are deduced.

• Proceedings of the Korean Society for Agricultural Machinery Conference
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• 1999.12a
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• pp.278-283
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• 1999

• The Proceedings of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.22 no.6
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• pp.10-20
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• 2008

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2004.05a
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• pp.189-190
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• 2004

• Proceedings of the Korean Vacuum Society Conference
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• 1995.02a
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• pp.21-21
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• 1995

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1876-1878
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• 1999

Developed was a 5kW-class polymer electrolyte membrane fuel cell(PEMFC) system comprised of fuel cell stack, fuel processing, thermal and water management subsystems and ancillary equipments. Several large single cells have been fabricated with different gas flow field patterns and paths, and the gas flow field pattern for the stack has been determined based on the single cell performance of thin film membrane electrode assembly (MEA). The PEMFC stack was consisted of 100 cells with an electrode area of $300cm^2$, having serpentine flow pattern. Fuel processing was developed including an autothermal methanol reformer and two preferential CO oxidation reactors. The fuel processing was combined to PEMFC operation system consisted of air compressor and thermal and water management subsystems. The PEMFC stack showed performance of 5kW under the supply of $H_2$ and air, but its performance was lowered to 3.5kW under the supply of reformed gas.

• Food Science and Biotechnology
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• v.16 no.3
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• pp.444-450
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• 2007

The antioxidant activity and isoflavone content of chokong, Rhynchosia nolubilis seeds pickled in vinegar at $4^{\circ}C$ for 2 weeks, were investigated. The polyphenol content and 2,2-diphenyl-1-pycrylhydrazyl (DPPH) radical-scavenging capacity were lower in chokong than in raw seeds. Based on isoflavone analysis, the aglycone (daidzein and genistein) content was high in chokong while the content of the corresponding glucosides (daidzin and genistin) was similar to that in raw seeds. Thermal processing, in which seeds were heated in vinegar at $121^{\circ}C$ for 20 min, reduced the polyphenol content but did not affect the DPPH radical-scavenging capacity compared to the pickling process. The heated seeds had a 2.6 to 2.7 times higher glucoside content and 51 to 55% lower aglycone content than chokong, depending on the kind of vinegar used. During pickling and thermal processing, vinegars were more effective at eluting antioxidants and isoflavones from seeds than other solutions such as acetic acid, citric acid and HCl solutions, distilled water, and phosphate buffer (pH 7.0).