• 제목/요약/키워드: thermal mapping

검색결과 96건 처리시간 0.024초

반도체 웨이퍼의 스트레스 측정을 위한 공정 및 표면 검사시스템 구현 (Implementation of process and surface inspection system for semiconductor wafer stress measurement)

  • 조태익;오도창
    • 대한전자공학회논문지SD
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    • 제45권8호
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    • pp.11-16
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    • 2008
  • 본 논문에서는 먼저 RTP(Rapid Thermal Processor) 장치를 스트레스 측정에 용이한 구조로 제작하고 PC에서 통합 공정관리 시스템을 설계하였다. 다음으로는 Large deformation 이론을 바탕으로 반도체 웨이퍼 표면의 변형검사를 위한 레이져 인터페로미터리를 구성하였다. 궁극적으로 이러한 레이져장치로부터 웨이퍼 표면의 영상을 추출하고 세선화, 블록화 그리고 스트레스 분포도의 순서로 영상처리 하여 스트레스로 인한 웨이퍼 표면의 변형을 검사하였다. 실험을 하기 위해 변형이 이루어지도록 웨이퍼의 후면을 1mm정도 갈아낸 후 약 1000도에서 $3\sim4$회 열처리를 수행하였으며, 열처리를 가한 영상과 가하지 않은 영상을 통하여 웨이퍼 열처리 후 심각한 변형이 이루어졌음을 알 수 있었다.

Mapping thermal deformations of long-span arch bridge to CRTS Type I double-block ballastless tracks in high-speed railways

  • Hongye Gou;Hairong Ren;Fei Hu;Qianhui Pu;Xuguang Wen;Yi Bao
    • Steel and Composite Structures
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    • 제52권4호
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    • pp.435-450
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    • 2024
  • The geometry change of railway tracks significantly influences the safety and ride comfort of high-speed trains. This paper presents an analytical method to map the thermal deformations of a long-span arch bridge to the geometry of CRTS Type I double-block ballastless tracks for high-speed railways. A mechanical model of the bridge-track coupled system was developed to derive analytical formulae of the deformations of the track. The analytical formulae explicitly consider the mechanical properties of the bridge-track coupled system and the temperature profile. A three-dimensional finite element model was established to evaluate the predictions obtained from the analytical formulae. The results show that the analytical formulae provide accurate predictions of the track deformations caused by the thermal deformations of bridges. This research will promote the design, evaluation, and operation of high-speed railway bridges for improved safety and ride comfort in engineering practices.

청주시 무심천 주변의 열환경 특성 분석 (Analysis of Thermal Characteristics for Areas of Musim Stream in Cheongju City)

  • 박진기;나상일;박종화
    • 농업과학연구
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    • 제37권1호
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    • pp.81-86
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    • 2010
  • The urban thermal environment can be an important index to detect heat island phenomena and manage it to improve urban life quality. Cheongju is a typical plain-city that main part has been formed and developed in lowland. The Mushim stream crosses the city from south to north. We reviewed the use of thermal remote sensing in stream around areas and the thermal environments, focusing primarily on the Urban Heat Island(UHI) effect. The purpose of this study is to determine the relationship between the stream nearby urban area and the stream cooling effect of UHI. The objectives are to determine the usefulness of KOMPSAT-2 bands MS3 and MS4 for vegetation cover mapping, and the usefulness of LANDSAT TM band 6 in identifying thermal environmental characteristics and UHI. Land Surface Temperatures (LST) are retrieved by single-channel algorithm to study the UHI from the 6th band (thermal infrared band) of LANDSAT TM images and thermal radiance thermometer based on remote sensing method and the LST distribution maps are accomplished according to the retrieval results. There is also comparison of satellite-derived and in situ measured temperature. The results indicated that the LST of urban center is higher than that of suburban area, the temperature of mountain and water are the lowest area, so it is clearly proved that there are obvious UHI effects by stream. The surface temperature distribution of Mushim stream is detected $2^{\circ}C$ lower than urban area.

얼굴영상과 예측한 열 적외선 텍스처의 융합에 의한 얼굴 인식 (Design of an observer-based decentralized fuzzy controller for discrete-time interconnected fuzzy systems)

  • 공성곤
    • 한국지능시스템학회논문지
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    • 제25권5호
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    • pp.437-443
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    • 2015
  • 이 논문에서는 가시광선 얼굴영상과 그로부터 예측한 열 적외선 텍스처의 데이터 융합에 의한 얼굴인식 방법에 관하여 연구하였다. 제안하는 얼굴인식 기법은 가시광선 얼굴영상과 열 적외선 텍스처를 PCA에 의하여 낮은 차원의 특징공간에서 특징벡터로 변환한 다음, 다층 신경회로망을 사용하여 가시광선 영상 특징으로부터 얼굴의 열적외선 특징을 예측하여 열 적외선 텍스처를 생성하였다. 학습과정에서는 주어진 개체로부터 획득한 한 쌍의 가시광선 및 열 적외선 영상에 대해서 PCA를 이용하여 낮은 차원의 특징공간으로 변환한 다음, 가시광선 영상특징으로부터 열 분포 특징으로 매핑시키는 비선형 함수에 해당하는 신경회로망의 내부 파라미터를 결정한다. 학습된 신경회로망은 입력 가시광선 얼굴 특징으로부터 열 에너지 분포 특성의 PCA계수를 예측하고, 이로부터 열 적외선 텍스처를 생성한다. 대표적인 두 가지 얼굴인식 알고리즘 Eigenfaces와 Fisherfaces을 사용하여 NIST/Equinox 데이터베이스에 대하여 얼굴인식에 관한 실험을 수행하였다. 예측한 열 적외선 텍스처와 가시광선 얼굴영상의 데이터 융합결과는 가시광선 얼굴영상만을 사용한 경우에 비해서 얼굴인식의 성능이 개선되었음을 수신자 조작특성 (ROC) 및 첫 번째 매칭성능에 의하여 검증하였다.

Achieving High Accuracy and Precision Inkjet Drop Placement Using Imperfect Components in an Imperfect Environment

  • Xu, Tianzong;Albertalli, David
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.1660-1665
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    • 2006
  • Drop placement accuracy and precision are the critical performance values of industrial ink jet deposition systems. Imperfect components and environments have severe impacts on drop placement. Litrex has identified over 120 error sources and developed engineering solutions to address the errors. In this paper, improved results using thermal compensation and stage mapping techniques are demonstrated. A recent progress in inkjet fabrication of multi-color electrophoretic display on flexible substrate with large distortion is also demonstrated.

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Study on Grain Boundaries in Single-layer Graphene Using Ultrahigh Resolution TEM

  • Lee, Zong-Hoon
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.107-107
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    • 2012
  • Recently, large-area synthesis of high-quality but polycrystalline graphene has been advanced as a scalable route to applications including electronic devices. The presence of grain boundaries (GBs) may be detrimental on some electronic, thermal, and mechanical properties of graphene, including reduced electronic mobility, lower thermal conductivity, and reduced ultimate mechanical strength, yet on the other hand, GBs might be beneficially exploited via controlled GB engineering. The study of graphene grains and their boundary is therefore critical for a complete understanding of this interesting material and for enabling diverse applications. I present that scanning electron diffraction in STEM mode makes possible fast and direct identification of GBs. We also demonstrate that dark field TEM imaging techniques allow facile GB imaging for high-angle tilt GBs in graphene. GB mapping is systematically carried out on large-area graphene samples via these complementary techniques. The study of the detailed atomic structure at a GB in suspended graphene uses aberration-corrected atomic resolution TEM at a low kV.

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BIM and Thermographic Sensing: Reflecting the As-is Building Condition in Energy Analysis

  • Ham, Youngjib;Golparvar-Fard, Mani
    • Journal of Construction Engineering and Project Management
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    • 제5권4호
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    • pp.16-22
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    • 2015
  • This paper presents an automated computer vision-based system to update BIM data by leveraging multi-modal visual data collected from existing buildings under inspection. Currently, visual inspections are conducted for building envelopes or mechanical systems, and auditors analyze energy-related contextual information to examine if their performance is maintained as expected by the design. By translating 3D surface thermal profiles into energy performance metrics such as actual R-values at point-level and by mapping such properties to the associated BIM elements using XML Document Object Model (DOM), the proposed method shortens the energy performance modeling gap between the architectural information in the as-designed BIM and the as-is building condition, which improve the reliability of building energy analysis. Several case studies were conducted to experimentally evaluate their impact on BIM-based energy analysis to calculate energy load. The experimental results on existing buildings show that (1) the point-level thermography-based thermal resistance measurement can be automatically matched with the associated BIM elements; and (2) their corresponding thermal properties are automatically updated in gbXML schema. This paper provides practitioners with insight to uncover the fundamentals of how multi-modal visual data can be used to improve the accuracy of building energy modeling for retrofit analysis. Open research challenges and lessons learned from real-world case studies are discussed in detail.

Updating BIM: Reflecting Thermographic Sensing in BIM-based Building Energy Analysis

  • Ham, Youngjib;Golparvar-Fard, Mani
    • 국제학술발표논문집
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    • The 6th International Conference on Construction Engineering and Project Management
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    • pp.532-536
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    • 2015
  • This paper presents an automated computer vision-based system to update BIM data by leveraging multi-modal visual data collected from existing buildings under inspection. Currently, visual inspections are conducted for building envelopes or mechanical systems, and auditors analyze energy-related contextual information to examine if their performance is maintained as expected by the design. By translating 3D surface thermal profiles into energy performance metrics such as actual R-values at point-level and by mapping such properties to the associated BIM elements using XML Document Object Model (DOM), the proposed method shortens the energy performance modeling gap between the architectural information in the as-designed BIM and the as-is building condition, which improve the reliability of building energy analysis. The experimental results on existing buildings show that (1) the point-level thermography-based thermal resistance measurement can be automatically matched with the associated BIM elements; and (2) their corresponding thermal properties are automatically updated in gbXML schema. This paper provides practitioners with insight to uncover the fundamentals of how multi-modal visual data can be used to improve the accuracy of building energy modeling for retrofit analysis. Open research challenges and lessons learned from real-world case studies are discussed in detail.

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A New Study on Vibration Data Acquisition and Intelligent Fault Diagnostic System for Aero-engine

  • Ding, Yongshan;Jiang, Dongxiang
    • 한국추진공학회:학술대회논문집
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    • 한국추진공학회 2008년 영문 학술대회
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    • pp.16-21
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    • 2008
  • Aero-engine, as one kind of rotating machinery with complex structure and high rotating speed, has complicated vibration faults. Therefore, condition monitoring and fault diagnosis system is very important for airplane security. In this paper, a vibration data acquisition and intelligent fault diagnosis system is introduced. First, the vibration data acquisition part is described in detail. This part consists of hardware acquisition modules and software analysis modules which can realize real-time data acquisition and analysis, off-line data analysis, trend analysis, fault simulation and graphical result display. The acquisition vibration data are prepared for the following intelligent fault diagnosis. Secondly, two advanced artificial intelligent(AI) methods, mapping-based and rule-based, are discussed. One is artificial neural network(ANN) which is an ideal tool for aero-engine fault diagnosis and has strong ability to learn complex nonlinear functions. The other is data mining, another AI method, has advantages of discovering knowledge from massive data and automatically extracting diagnostic rules. Thirdly, lots of historical data are used for training the ANN and extracting rules by data mining. Then, real-time data are input into the trained ANN for mapping-based fault diagnosis. At the same time, extracted rules are revised by expert experience and used for rule-based fault diagnosis. From the results of the experiments, the conclusion is obvious that both the two AI methods are effective on aero-engine vibration fault diagnosis, while each of them has its individual quality. The whole system can be developed in local vibration monitoring and real-time fault diagnosis for aero-engine.

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멀티 핀/핑거 FinFET 트랜지스터의 열 저항 해석과 모델링 (Analysis and modeling of thermal resistance of multi fin/finger FinFETs)

  • 장문용;김소영
    • 전자공학회논문지
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    • 제53권8호
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    • pp.39-48
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    • 2016
  • 본 논문에서는 소스와 드레인의 구조가 육각형인 FinFET에서 구조 변수 및 핀/핑거 개수 증가에 따른 열 저항 모델을 제안한다. 소자의 크기가 감소하여 발열 효과 및 열 특성의 영향이 커졌으며, 이를 분석하기 위해 소자의 열 저항은 중요한 요소이다. 열 저항 모델은 소자에서 열이 생성되는 열원과 열이 빠져나가는 contact를 설정했으며, 도메인은 열원과 4 부분의 소스, 드레인, 게이트, 서브스트레이트 contact를 통해 나누어진다. 또 각각의 contact 열 저항 모델은 TCAD의 시뮬레이션 결과의 온도 및 열 흐름을 분석하여 해석이 용이한 형태로 세분화하였다. 도메인들은 그 구조에 따라 구조 변수를 통한 적분 및 등각 매핑 방식을 기반으로 모델링하였다. 먼저 싱글 핀으로 열 저항을 분석하여 모델링하였으며, 멀티 핀/핑거의 열 저항 모델의 정확도를 높이기 위해 채널증가에 따른 파라미터의 변화를 적용하였다. 제안한 열 저항 모델은 3D Technology CAD 시뮬레이션을 해석하여 얻은 열 저항 결과와 비교하였으며, 싱글 핀 및 멀티 핀의 전체 열 저항 모델은 3 % 이하의 오차를 얻었다. 제안한 열 저항은 핀/핑거 개수의 증가에 따른 열 저항을 예측할 수 있으며, 발열효과 및 열 특성 분석을 계산하여 회로 특성을 개선할 수 있다.