• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.150.1-150.1
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• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.18 no.3
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• pp.307-314
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• 2009

Large area micro pattern replication has promising application potential in many areas. Rolling imprint process has been demonstrated as one of the most competitive processes for such micro pattern replication, because it has advantages in low cost, high throughput and high efficiency. In this paper, we developed a prototype of roll-to-flat(R2F) thermal imprint system for large area micro pattern replication process, which is one of the key processes in the fabrication of flexible displays. Experimental tests were conducted to evaluate the feasibility of system and the parameters' effect on the process, such as flat mold temperature, loading pressure and rolling speed. 100mm $\times$ 100mm stainless steel flat mold and commercially available polycarbonate sheets were used for the tests. The experimental results showed that the developed R2F system is suitable for fabrication of various micro devices with micro pattern over large area.

• Wind and Structures
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• v.26 no.4
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• pp.205-214
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• 2018

In this paper, the thermo-mechanical buckling characteristics of functionally graded (FG) size-dependent Timoshenko nanobeams subjected to an in-plane thermal loading are investigated by presenting a Navier type solution for the first time. Material properties of FG nanobeam are supposed to vary continuously along the thickness according to the power-law form and the material properties are assumed to be temperature-dependent. The small scale effect is taken into consideration based on nonlocal elasticity theory of Eringen. The nonlocal governing equations are derived based on Timoshenko beam theory through Hamilton's principle and they are solved applying analytical solution. According to the numerical results, it is revealed that the proposed modeling can provide accurate critical buckling temperature results of the FG nanobeams as compared to some cases in the literature. The detailed mathematical derivations are presented and numerical investigations are performed while the emphasis is placed on investigating the effect of the several parameters such as material distribution profile, small scale effects and aspect ratio on the critical buckling temperature of the FG nanobeams in detail. It is explicitly shown that the thermal buckling of a FG nanobeams is significantly influenced by these effects. Numerical results are presented to serve as benchmarks for future analyses of FG nanobeams.

• Structural Engineering and Mechanics
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• v.65 no.6
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• pp.645-656
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• 2018

Importance of procuring adequate knowledge about the mechanical behavior of double-layered graphene sheets (DLGSs) incensed the authors to investigate wave propagation responses of mentioned element while rested on a visco-Pasternak medium under hygro-thermal loading. A nonlocal strain gradient theory (NSGT) is exploited to present a more reliable size-dependent mechanical analysis by capturing both softening and hardening effects of small scale. Furthermore, in the framework of a classical plate theory the kinematic relations are developed. Incorporating kinematic relations with the definition of Hamilton's principle, the Euler-Lagrange equations of each of the layers are derived separately. Afterwards, combining Euler-Lagrange equations with those of the NSGT the nonlocal governing equations are written in terms of displacement fields. Interaction of the each of the graphene sheets with another one is regarded by the means of vdW model. Then, a widespread analytical solution is employed to solve the derived equations and obtain wave frequency values. Subsequently, influence of each participant variable containing nonlocal parameter, length scale parameter, foundation parameters, temperature gradient and moisture concentration is studied by plotting various figures.

• Steel and Composite Structures
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• v.22 no.1
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• pp.91-112
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• 2016

In this paper, post-buckling behavior of sandwich plates with functionally graded (FG) face sheets under uniform temperature rise loading is examined based on both sinusoidal shear deformation theory and stress function. It is supposed that the sandwich plate is in contact with an elastic foundation during deformation, which acts in both compression and tension. Thermo-elastic non-homogeneous properties of FG layers change smoothly by the variation of power law within the thickness, and temperature dependency of material constituents is considered in the formulation. In the present development, Von Karman nonlinearity and initial geometrical imperfection of sandwich plate are also taken into account. By employing Galerkin method, analytical solutions of thermal buckling and post-buckling equilibrium paths for simply supported plates are determined. Numerical examples presented in the present study discuss the effects of gradient index, sandwich plate geometry, geometrical imperfection, temperature dependency, and the elastic foundation parameters.

• Smart Structures and Systems
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• v.26 no.5
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• pp.641-656
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• 2020

The finite element solutions of thermal buckling load values of the graded sandwich curved shell structure are reported in this research using a higher-order kinematic model including the shear deformation effect. The numerical buckling temperature has been computed using an in-house specialized code (MATLAB environment) prepared in the framework of the current mathematical formulation. In addition, the mathematical model includes the excess structural distortion under the influence of elevated environment via Green-Lagrange nonlinear strain. The corresponding eigenvalue equation has been solved to predict the critical buckling temperature of the graded sandwich structure. The numerical stability and the accuracy of the current solution have been confirmed by comparing with the available published results. Thereafter, the model is extended to bring out the influences of structural parameters i.e. the curvature ratio, core-face thickness ratio, support conditions, power-law indices and sandwich types on the thermal buckling behavior of graded sandwich curved shell panels.

• Advances in nano research
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• v.7 no.4
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• pp.249-263
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• 2019

In the current paper, an exact solution method is carried out for analyzing the thermo-mechanical vibration of curved FG nano-beams subjected to uniform thermal environmental conditions, by considering porosity distribution via nonlocal strain gradient beam theory for the first time. Nonlocal strain gradient elasticity theory is adopted to consider the size effects in which the stress for not only the nonlocal stress field but also the strain gradients stress field is considered. It is perceived that during manufacturing of functionally graded materials (FGMs) porosities and micro-voids can be occurred inside the material. Material properties of curved porous FG nanobeam are assumed to be temperature-dependent and are supposed to vary through the thickness direction of beam which modeled via modified power-law rule. Since variation of pores along the thickness direction influences the mechanical and physical properties, porosity play a key role in the mechanical response of curved FG nano-structures. The governing equations and related boundary condition of curved porous FG nanobeam under temperature field are derived via the energy method based on Timoshenko beam theory. An analytical Navier solution procedure is utilized to achieve the natural frequencies of porous FG curved nanobeam supposed to thermal loading. The results for simpler states are confirmed with known data in the literature. The effects of various parameters such as nonlocality parameter, porosity volume fractions, thermal effect, gradient index, opening angle and aspect ratio on the natural frequency of curved FG porous nanobeam are successfully discussed. It is concluded that these parameters play key roles on the dynamic behavior of porous FG curved nanobeam. Presented numerical results can serve as benchmarks for future analyses of curve FG nanobeam with porosity phases.

• Journal of Biosystems Engineering
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• v.33 no.6
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• pp.396-403
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• 2008

Because thermal non-uniformity of transported agricultural products is mainly affected by cooling air flow pattern in the cold transport equipment, the analysis and control of flowfield is key to optimization of cold transport equipment. The objectives of this study were to estimate the effects of geometric and operating parameters of cold container on the air flow and heat transfer, and find the optimum design parameters for the low temperature level and its uniformity in given cold container with CFD simulations. Existences of ducts, gaps between pallets and geometries of exit as geometric parameters and fan blowing velocity as operating parameter were investigated. CFD simulations were carried out with the FLUENT 6.2 code. The result showed that optimum design condition was bulk loading with no duct, wall exit and 8.0 m/s of fan blowing velocity.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.11
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• pp.1100-1107
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• 2007

In this study, a method to characterize material properties of adhesive that is used in a layered plates bonding process is developed by combined evaluation of experiment, simulation and optimization technique. A small bonded specimens of rectangular plate are prepared to this end, and put into a thermal loading conditions. $Moir{\acute{e}}$ interferomety is used to measure submicron displacements occurred during the process. The elevated temperature is chosen as control factors. FE analysis with constant values for the adhesive materials is also carried out to simulate the experiment. Significant differences are observed from the two results, in which the simulation predicts the monotonic increase of the bending displacement whereas the measurement shows decrease of the displacement at above $75^{\circ}C$. In order to minimize the difference of the two, material parameters of the adhesive at a number of different temperatures are posed as unknowns to be determined, and optimization is conducted. As a result, optimum material parameters are found that excellently matches the simulation and experiment, which are decreased with respect to the temperature.

• Journal of Pharmaceutical Investigation
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• v.41 no.5
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• pp.279-288
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• 2011

The Dexamethasone (DEX) loaded chitosan microspheres were prepared by thermal denaturation and chemical cross-linking method using a dierent concentration of glutaraldehyde as chemical cross-linking agent. The prepared microspheres were evaluated for the percentage of Drug Loading (DL), Encapsulation Efficiency (EE) and surface morphology by Scanning Electron Microscopy (SEM). DL and EE were found to be maximum range of 10.0 to 10.79 % and 58.19 to 64.73 % respectively. The SEM Photographs of the resultant microspheres exhibited fairly smooth surfaces and predominantly spherical in appearance. In addition, Fourier Transform Infrared Spectroscopy (FTIR) and Differential Scanning Calorimetry (DSC) shown that there was no interaction between the drug and polymer. In vitro and in vivo release studies revealed that the release of dexamethasone was sustained and extended up to 63 days and effectively controlled by the extent of cross-linking agent. Non-clinical parameters such as paw volume, hematological parameters like Erythrocyte Sedimentation Rate (ESR), Paced Cell Volume (PCV), Total Leucocytes Count (TLC), Hemoglobin (Hb), Differential Cell Count (DCC) were investigated in Fruend's Complete Adjuvant (FCA) induced arthritic rats. Radiology and histopathological studies were also performed in order to evaluate the therapeutic efficacy of the DEX-loaded microspheres in extenuating the rat arthritic model.