• Proceedings of the Korean Vacuum Society Conference
• /
• 2000.02a
• /
• pp.163-163
• /
• 2000

In this research, we used the ion irradiation technique which has an advantae in improving intentionally the properties of surface and interface in a non-equilibrium, instead of the conventional annealing method which has been known to improve the material properties in the equilibrium stat. Cu/Co multilayered films were prepared on SiN4/SiO2/Si substrates by the electron-beam evaporation for the Co layers and the thermal evaporation for the Cu layers in a high vacuum. The ion irradiation with a 80keV Ar+ was carried out at various ion doses in a high vacuum. Hysteresis loops of the films were investigated by magneto-optical polar Kerr spectroscopy at various experimental conditions. The change of atomic structure of the films before and after the ion irradiation was studied by glancing angle x-ray diffraction, and the intermixing between Co and Cu sublayers was confirmed by Rutherford backscattering spectroscopy. The surface roughness and magneto-resistance were measured by atomic force microscopy and with a four-point probe system, respectively. During the magneto-resistance measurement, we changed temperature and the direction of magnetization. From the results of experiments, we found that the change at the interfaces of the Cu/Co multilayered film induced by ion irradiation cause the change of magnetic properties. According to the change in hysteresis loop, the surface inplane component of magnetic easy axis was isotropic before the ion irradiation, but became anisotropic upon irradiation. It was confirmed that this change influences the axial behavior of magneto-resistance. Especially, the magneto-resistance varied in accordance with an external magnetic field and the direction of current, which means that magneto-resistance also shows the uniaxial behavior.

• Resources Recycling
• /
• v.14 no.2
• /
• pp.28-32
• /
• 2005

By using thermal decomposition method, the preliminary experiments for recovery of metallic Ga from GaAs scraps produced in the manufacturing of compound semiconductors were carried out in laboratory(200 g/batch) scales. From these results, decomposition appratus with packed tower was constructed in commercial scale(30 kg/batch). The decomposition rate of GaAs increased with raising decomposition temperature, but the yield of Ga decreased over 1000$^{\circ}C. As a result, the optimum decomposition temperature was 1000~1050$^{\circ}C when the pressure of decomposition reactor was 2~2.5${\times}10^{-2} mmHg, and the yield of Ga was about 89 wt.%. The commercial decomposition apparatus was designed with packed tower because the partial pressure of As in vapor state was not reduced even if the temperature of As vapor was decreased. The recovery yield of Ga from GaAs scraps in large scale experiment showed 99%.

• Korean Chemical Engineering Research
• /
• v.60 no.2
• /
• pp.208-216
• /
• 2022

Surface morphology and adsorption characteristics of black and white charcoals prepared from Korean traditional kiln were quantitatively analyzed. TGA and elemental analysis of charcoals were different from produced kiln, and thermal degradation temperature and carbon content of white charcoals were apparently higher than those of black charcoals. Surface morphology shows the activation progressed through the longitudinal direction of woods and new micropores were developed to radial direction on the surface of macropores as the furthermore activation resulting in the pore connection. BET adsorption isotherms show that there are low-pressure hysteresis due to the no desorption of adsorbates, which resulted in unique Type of charcoals overlapping Type I and Type IV. Such a low-pressure hysteresis is occurred from expansion of adsorbates, which were embedded in the micropore entrances and did not get out during the desorption run. The characteristics of charcoals such as specific surface area and pore size distribution did not show correct values depending on not only produced company but also sampling sites of one piece of charcoal. Therefore, it is not easy to suggest the quantitative characteristics of charcoals prepared from Korean traditional kiln. On the other hand, preparation the quality standard of charcoal is necessary for their special uses such as adsorbent.

• Journal of the Microelectronics and Packaging Society
• /
• v.8 no.2
• /
• pp.31-36
• /
• 2001

Teflon-like fluorocarbon thin film was deposited by using difluoromethane$(CH_2F_2$) added with Ar, $O_2$, and $CH_4$ on Si, $SiO_2$, TEOS, and Al substrate. The deposited thin film was characterized by static contact angles for measuring hydrophobicity in various additive gas ratio. temperature, and working pressure. In case of addition with Ar, the static contact angles decreased as additive gas ratio and power increased. But the static contact angles increased as working pressure increased. Specially, super-hydrophobic surface was obtained using the powder-like fluorocarbon thin film above 2 Torr. Added with $O_2$, the static contact angles decreased as the $O_2$ ratio and working pressure increased. And the static contact angles did not change in 100W, but hydrophilic surface was obtained at 200W. In case of addition of CE$_4$, static contact angles dramatically increased in $CH_4/CH_2F_2$ ratio 5. And continuous static contact angles obtained above ratio 5. As compare with previous experiments by thermal evaporation, the fluorocarbon thin film by plasma polymerization was obtained very low hysteresis. This results shows more homogenous surface by plasma polymerization than thermal evaporation process.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2016.02a
• /
• pp.193.2-193.2
• /
• 2016

We evaluate the change in defects in the oxidized SiO2 grown on 4H-SiC (0001) by plasma assisted oxidation, by comparing with that of conventional thermal oxide. In order to investigate the changes in the electronic structure and electrical characteristics of the interfacial reaction between the thin SiO2 and SiC, x-ray photoelectron spectroscopy (XPS), X-ray absorption spectroscopy (XAS), DFT calculation and electrical measurements were carried out. We observed that the direct plasma oxide grown at the room temperature and rapid processing time (300 s) has enhanced electrical characteristics (frequency dispersion, hysteresis and interface trap density) than conventional thermal oxide and suppressed interfacial defect state. The decrease in defect state in conduction band edge and stress-induced leakage current (SILC) clearly indicate that plasma oxidation process improves SiO2 quality due to the reduced transition layer and energetically most stable interfacial state between SiO2/SiC controlled by the interstitial C.

• Fibers and Polymers
• /
• v.2 no.3
• /
• pp.141-147
• /
• 2001

The effect of compositions of isophorone diisocyanate (IPDl)/4.4'-diphenylmethane diisocyalate (MDI) and polypropylene oxide diol (PPG, $M_w$: 3000)/1,4-butane diol (BD) on the properties of UV-cured polyurethane acrylate films based on 2-hydroxyethyl acrylate (HEA) was examined. UV-curable polyurethane acrylates were formulated from the prepolymer. trimethylol propane triacrylate (TMPTA) as a reactive diluent, and 1-hydroxycyclohexyl ketone (Irgacure 184) as a photoinitiator. Dynamic mechanical thermal properties and elastic properties of UV-cured polyurethane acrylates was fecund to depend on the chemical composition of IPDl/MDl and PPG/BD. As the BD content increased, the tensile storage modulus of all series samples increased significantly. The storage modulus increased in the order of samples A (IPDI based samples)> samples B (IPDI/MDl (7/3 molar ratio) based samples) > samples C (IPDI/MDl (5/5 molar ratio) based samples at the same composition. Two distinct louts modulus peaks for all samples are observed owing to the softs segment glass transition temperature ($T_gh$) and hard segment glass transition temperature ($T_gh$). The difference between $T_gh$, and $T_gh$, (Δ$T_g$) increases in the order of A > B > C at the same composition. In cycle test, the initial onset strain (%) was found to decrease with increasing BD content in PPG/BD and with increasing MDI content in IPDI/MDl.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.56 no.6
• /
• pp.1080-1086
• /
• 2007

The aim of this paper is to establish the optimum fabrication condition of specimens, using the Vapor Deposition Polymerization Method(VDPM), which is one of modesto prepare functional organic thin films using a dry process, and to develop a thin film type humidity sensor which has good humidity sensitive characteristics. The inner part of the film became denser and roughness of the film surface eased as curing temperature increased so that thickness of the film could be made uniform. This also shows the appropriate curing temperature was $250^{\circ}C$. The basic structure of the humidity sensor is a parallel capacitor which consists of three layers of Aluminum/Polyimide/Aluminum. The result of SEM and AFM measurement shows that the thickness of PI thin films decreased and the refraction increased as curing temperature increased, which indicates that a capacitance-type humidity sensor utilizing polyimide thin film is fabricated on a glass substrate. The characteristics of fabricated samples were measured under various conditions, and the samples had linear characteristics in the range of 20-80 %RH, independent of temperature change, and low hysteresis characteristic.

• Transactions on Electrical and Electronic Materials
• /
• v.14 no.3
• /
• pp.130-132
• /
• 2013

$Bi_{3.25}La_{0.75}Ti_3O_{12}$(BLT) thin films were prepared on the Pt(150 nm)/Ti(50 nm)/$SiO_2$/Si substrate using the rf magnetron sputtering method. The BLT thin films were annealed at temperatures ranging from $600^{\circ}C$ to $750^{\circ}C$ using the rapid thermal annealing. The structure and surface morphology of the thin films were characterized by x-ray diffraction and field emission scanning electron microscopy. The hysteresis loop of the BLT thin films showed that the remanent polarization (2Pr) of the film annealed at $700^{\circ}C$ was 10.92 ${\mu}C/cm^2$. The fatigue characteristic of the BLT thin film annealed at $700^{\circ}C$ was shown change polarization up to $1.2{\times}10^9$ switching cycles. We confirmed the excellent remnant polarization (Pr) and fatigue properties compared with other fabrication methods and suggested a good method for BLT thin films fabrications.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.15 no.5
• /
• pp.14-20
• /
• 2006

In recent year, as the robot technology is developed, the researches on the artificial muscle actuator that enables robot to move dexterously like biological organ become active. Actuators are key technologies underpinning robotics. Breakthroughs in actuator technology, particular in terms of power-to-weight ratio, or energy-density, will have significant impacts upon the design and control of robotic system. In this paper, a new approach to design and control of shape memory alloy(SMA) actuator is presented to drive the robot hand. SMA wire is divided into many segments and their thermal states of the SMA are controlled individually in a binary manner. This control manner will reduce the hysteresis that the SMA material has and it becomes the fundamental technology to develop the anthropomorphic robot hand. In this paper, the mechanism In the digital step motor of the shape memory alloy that is driven by the segmented binary control, which is a new control technique, is studied. This SMA digital step actuator applies for the robot hand and the driving mechanism of the robot hand is investigated.

• The Transactions of the Korean Institute of Electrical Engineers P
• /
• v.58 no.4
• /
• pp.476-482
• /
• 2009

This paper describes the development of capacitive sensor for the diagnosis of liquid dielectrics, which is widely used as the electrical insulating oil of transformer, circuit breaker, cable and etc. To survey the dielectric properties of the virgin and aged electrical insulating oils, we utilized the highly precise measuring system, using the principle of cross capacitance. The measured properties were used to determine the design factors of the sensor. Then the factors were optimized with the help of computational analysis. To evaluate diagnosis by the sensor, we performed accelerated thermal aging test about electrical insulating oils. The condition of aged specimens were investigated by measurements of relative permittivity i.e. capacitance change by capacitive sensor. And to evaluate the hysteresis characteristics with the change of temperature, we constructed a testing system, which was composed with vacuum drying oven, oil chamber and measuring instruments, such as LCR meter, MUX and so forth. Through the results of this investigation, we confirmed the superior characteristics of the newly developed sensor.