• Title/Summary/Keyword: thermal evaporator

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A Study on the Mis-align during Fabricated Poly-Si TFT on Polymer substrate (고분자 기판위에 Poly-Si TFT 제작시 Mis-align방지를 위한 연구)

  • Kang, Su-Hee;Hwang, Jung-Yeon;Seo, Dae-Shik;Kim, Young-Hun;Moon, Dae-Kyu;Han, Jung-In
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.05a
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    • pp.173-176
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    • 2005
  • Teijin사의 HT100-B60의 폴리카보네이트(polycarbonate) $100{\mu}m$, I-Component사의 PES(polyethersulfone) $200{\mu}m$, Ferrania사의 PAR(polyacrylate) $100{\mu}m$$200{\mu}m$를 사용하였다 열팽창계수의 차이로 인해 공정상 기판의 가열과 냉각시 열응력이 발생하여 기판의 크랙발생의 원인이 된다. 이를 최소화하기 위해 모든 공정이 시작하기 전에 pre-annealing을 통해 plastic 기판의 시간별 공정을 실시하였다. plastic film의 annealing time은 0h, 12h, 24, 40h, 50h, 60h, 70h, 80h으로 사간을 달리하여 오븐 안의 진공상태를 조성하여 실험하였다. Thermal evaporator로 Al을 약 170nm 증착하였으며 (주)동진 세미캠의 DTFR-1011s DR LCD용 감광액을 Spin Coating Spread(500rpm/6sec), Spin(3000rpm/20sec)으로 coating하였다.

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AC구동 고분자유기물소자에서 임피던스의 변화

  • Won, Beom-Hui;Bae, Eun-Ji;Jeong, Dong-Geun;Yu, Se-Gi
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.168.1-168.1
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    • 2013
  • 고분자유기물로 사용되는 발광층에 탄소나노튜브를 합성하여 AC로 구동되는 고분자유기물소자를 제작하였다. 고분자유기물소자는 총 4개의 층(ITO/CRS/탄소나노튜브를 함유한 MEH-PPV/Al)으로 구성하였다. ITO가 코팅된 유리기판 위에 발광층을 보호하는 역할을 하는 절연층[cyanoethyl pullulan(CRS)], 유기발광물질인 poly[2-methoxy-5-(2-ethyl-hexyloxy)-1,4-phenylene-vinylene](MEH-PPV)에 탄소나노튜브의 함량을 조절하여 발광층으로 사용하였으며, 절연층과 발광층은 스핀코우터를 이용하여 증착하다. 마지막으로 thermal evaporator을 이용하여 Al을 증착하였다. 고분자유기물소자는 발광층에 함유된 탄소나노튜브에 함량에 따른 전압, 전류 그리고 밝기 특성을 분석하였다. 탄소나노튜브가 0.015wt% 함유된 고분자유기물소자에서 최대 밝기 특성과 낮은 소비전력을 얻을 수 있었다. 고분자유기물에 탄소나노튜브를 합성된 효과를 알아보기 위하여 임피던스분석을 통하여 고분자유기물소자의 저항, 캐패시턴스, 기생저항을 알아보았다. 고분자유기물소자의 캐패시턴스의 변화는 탄소나노튜브와 고분자 유기물(polymer-CNT matrix) 에서 생성되는 블록들이 매우 얇은 유전층을 구성할 것으로 예상되며 이는 micro-capacitance로 고분자유기물소자의 구동에 영향을 미치는 것으로 예상된다. AC구동 고분자유기물소자에 탄소나노튜브를 함유하여 높은 효율을 얻을 수 있는 장점으로 차세대 디스플레이나 조명으로 탄소나노튜브의 쓰임새를 기대해 본다.

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A Study of Application on the Pulsating Heat Pipe for Heat Transfer Enhancement of Metal Hydride Alloy (수소 저장합금층의 열전달 촉진을 위한 진동형 히트 파이프 적용에 관한 연구)

  • Lee, Min-Jae;Im, Yong-Bin;Bae, Sang-Chul;Kim, Jong-Soo
    • Proceedings of the SAREK Conference
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    • 2006.06a
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    • pp.346-351
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    • 2006
  • When metallic alloys are reacted to hydrogen, heat transfer of storage tank effects hydrogen storage rate and capacity. If pulsating heat pipe are used to improve heat transfer efficiency, production of hydrogen storage tank can be more simple and economical. Experiment of heat pipe was conducted by varying working fluids and heat flux. According to supply heat flux, test indicate that R-22 and R-l42b were found lower temperature difference between evaporator and condenser than R-134a and Ethanol. Thermal resistances of R-22 and R-142b were also lower than others. Using R-142b as a working fluid, heat pipe type hydrogen storage tank is tested in absorption and desorption processes.

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Highly Active Electrocatalyst based on Ultra-low Loading of Ruthenium Supported on Titanium Carbide for Alkaline Hydrogen Evolution Reaction

  • Junghwan, Kim;Sang-Mun, Jung;Kyu-Su, Kim;Sang-Hoon, You;Byung-Jo, Lee;Yong-Tae, Kim
    • Journal of Electrochemical Science and Technology
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    • v.13 no.4
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    • pp.417-423
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    • 2022
  • With the emerging importance of catalysts for water electrolysis, developing efficient and inexpensive electrocatalysts for water electrolysis plays a vital role in renewable hydrogen energy technology. In this study, a 1nm thickness of TiC-supported Ru catalyst for hydrogen evolution reaction (HER) has been successfully fabricated using an electron (E)-beam evaporator and thermal decomposition of gaseous CH4 in a furnace. The prepared Ru/TiC catalyst exhibited an outstanding performance for alkaline hydrogen evolution reaction with an overpotential of 55 mV at 10 mA cm-2. Furthermore, we demonstrated that the outstanding HER performance of Ru/TiC was attributed to the high surface area of the support and the metal-support interaction.

Sheet Resistance and Microstructure Evolution of Cobalt/Nickel Silicides with Annealing Temperature (코발트/니켈 복합실리사이드의 실리사이드온도에 따른 면저항과 미세구조 변화)

  • Jung Young-soon;Cheong Seong-hwee;Song Oh-sung
    • Korean Journal of Materials Research
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    • v.14 no.6
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    • pp.389-393
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    • 2004
  • The silicide layer used as a diffusion barrier in microelectronics is typically required to be below 50 nm-thick and, the same time, the silicides also need to have low contact resistance without agglomeration at high processing temperatures. We fabricated Si(100)/15 nm-Ni/15 nm-Co samples with a thermal evaporator, and annealed the samples for 40 seconds at temperatures ranging from $700^{\circ}C$ to $1100^{\circ}C$ using rapid thermal annealing. We investigated microstructural and compositional changes during annealing using transmission electron microscopy and auger electron spectroscopy. Sheet resistance of the annealed sample stack was measured with a four point probe. The sheet resistance measurements for our proposed Co/Ni composite silicide was below 8 $\Omega$/sq. even after annealing $1100^{\circ}C$, while conventional nickel-monosilicide showed abrupt phase transformation at $700^{\circ}C$. Microstructure and auger depth profiling showed that the silicides in our sample consisted of intermixed phases of $CoNiSi_{x}$ and NiSi. It was noticed that NiSi grew rapidly at the silicon interface with increasing annealing temperature without transforming into $NiSi_2$. Our results imply that Co/Ni composite silicide should have excellent high temperature stability even in post-silicidation processes.

Precise Temperature Control of Oil Coolers with Hot-gas Bypass Manner for Machine Tools Based on PI and Feedforward Control (PI와 피드포워드 제어를 이용한 공작기계용 오일쿨러의 핫가스 바이패스 방식 정밀 온도 제어)

  • Jeong, Seok-Kwon;Byun, Jong-Yeong;Kim, Sang-Ho;Yoon, Jung-In
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.23 no.2
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    • pp.111-119
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    • 2011
  • Recently, the performances of speed and accuracy are enhanced in machine tools. The high speed of the machine tools usually causes harmful thermal displacements on the objects. To reduce the thermal displacements, machine tools generally adopt oil coolers with precise temperature control function. This study aims at precise control of oil outlet temperature in the oil coolers with hot-gas bypass manner based on PI control logic. The control system was designed for obtaining steady state error within ${\pm}0.1^{\circ}C$ and maximum overshoot with 0.8% even though abrupt disturbances are added to the system. We showed that the PI gains could be easily decided by numerical simulations using practical transfer function which got experiments. Also, transient characteristics could be improved significantly by reflecting the inlet temperature of an evaporator to the output of a controller feedforwardly considering periodic abrupt disturbances. Through some experiments, excellent control performances were established by the suggested control.

Experimental Study on the Cooling Characteristics of an Environmental Control System for Avionic Reconnaissance Equipment (항공정찰장비용 환경제어시스템의 냉각특성에 관한 실험적 연구)

  • Kang, Hoon;Park, Hyung-Pil;Lee, Eung-Chan;Kim, Yong-Chan;Chi, Yong-Nam;Choi, Hee-Ju;Byeon, Young-Man;Kim, Young-Jin;Oh, Kwang-Yoon
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.21 no.9
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    • pp.519-526
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    • 2009
  • Environmental control system is adopted to control the thermal load from the avionic equipment in the reconnaissance pod which is mounted under a fighter aircraft, undergoing large and rapid environmental changes with the variations of flight altitude and velocity. In this study, an environmental control system was designed and built by adopting vapor compression cycle using R-124. The cooling performance characteristics of the system were measured varying operating parameters: thermal load in the pod, air mass flow rate through evaporator, condenser inlet air temperature, and air mass flow rate through condenser. The effects of the experimental parameters on the system performance were analyzed based on the experimental results. The problems on the designed system were also analyzed and the solutions were suggested to improve system efficiency and to obtain stable operation.

화학적 방법으로 성장된 ZnO nanorod 구조에서 Ag 나노입자의 영향

  • Go, Yeong-Hwan;Yu, Jae-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.189-189
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    • 2010
  • ZnO nanorods 구조는 광소자 및 태양광 소자의 성능을 향상시키기 위해서 무반사계수, 광추출효율, 전기적, 열적 전도도를 개선시킬 수 있어, 매우 큰 관심을 가지고 왔다. 또한 Ag 나노입자는 표면 플라즈몬 효과를 이용하여 LED나 태양전지에 응용하여 소자의 성능이 향상됨을 이론적, 실험적으로 증명되어 왔으며, 현재에도 활발한 연구가 진행되고 있다. 이러한 ZnO nanorods 특성과 Ag 나노입자의 표면 플라즈몬 효과를 이용하기 위해서, 본 연구에서는 Ag 나노 입자를 형성된 ZnO seed층에 ZnO nanorods를 성장시켰다. 시료를 제작을 위해서 비교적 성장이 간단하고 저온성장이 가능한 화학적 합성방법을 이용하였다. Ag 나노입자가 형성된 ZnO seed층 제작을 위해서 먼저 Si 기판위에 RF magnetron 스퍼터를 이용하여 고진공, $N_2$ 분위기에서 일정한 두께로 증착을 하였으며, 이후 Ag 박막을 thermal evaporator로 10 nm 두께로 증착하였다. 그 다음, 크기가 다른 Ag 나노입자를 형성을 위해서 rapid thermal annealing (RTA)을 여러 가지 온도에서 수행하였다. 그리고 이러한 시료들를 이용하여, ZnO nanorods를 성장하기 위하여, $90-95^{\circ}$의 온도에서 zinc nitrate $Zn(NO_3)_2{\cdot}6H_2O$과 hexamethylentetramines (HMT)으로 혼합된 용액에 담가두어 ZnO nanorods를 성장시켰다. Ag 나노입자의 크기에 따라 ZnO nanorods의 구조와 형태에 대하여 어떠한 영향을 주는지를 관찰하기 위해 field emission scanning electron microscopy (FE-SEM)을 이용하여 측정하였으며, Ag와 ZnO의 성분분석과 결정성을 조사하기 위해 X-ray diffraction (XRD)을 이용하여 분석하였다. 그리고 표면 플라즈몬에 의한 영향에 대하여 조사하기 위해, ZnO nanorods와 Ag 나노입자가 형성된 ZnO nanorods를 UV-Vis-NIR spectrophotometer을 이용하여 흡수계수와 반사계수를 비교하여 측정하였으며. 태양전지의 성능향상을 수 있음을 이론적으로 계산하였다. 그리고 또한 photoluminescence (PL) 분석을 수행하여 ZnO nanorods의 구조에 대하여 Ag 나노입자의 영향에 대한 광특성을 측정하였다.

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Characteristics of Energy Consumption for a Household Refrigerator under Influence of Non-condensable Gases (가정용 냉장고의 불응축 가스량에 따른 소비 전력 특성)

  • Kim, Doo-Hyun;Hwang, Yu-Jin;Park, Jae-Hong;Chung, Seong-Ir;Jeong, Young-Man;Ku, Bon-Cheol;Lee, Jae-Keun;Ahn, Young-Chull;Bang, Sun-Wook;Kim, Seok-Ro
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.20 no.6
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    • pp.381-387
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    • 2008
  • The presence of non-condensable gases as an additional thermal resistance inside a refrigerating circuit has been found for a general refrigerator, The effect of non-condensable gases was varied by controlling the injection amount of dry air into the refrigerating circuit to increase a thermal resistance. Energy consumption tests for the refrigerator were conducted under the various amounts of non-condensable gases. The tested refrigerating circuit was the household refrigerator. As the molar fraction of non-condensable gases was increased from 0% to 1.46%, the amount of energy consumption was found to increase up to 25%. The increase of the amount of non-condensable gases in refrigerating circuit was found to result in increasing the condensation temperature at the condenser and decreasing the evaporation temperature at the evaporator, which were presumably caused by the low specific heat and increased partial pressure of non-condensable gas.

Study of the Formation of Eutectic Melt of Uranium and Thermal Analysis for the Salt Distillation of Uranium Deposits (우라늄 전착물의 염증류에 대한 우라늄 공정(共晶) 형성 및 열해석 연구)

  • Park, Sung-Bin;Cho, Dong-Wook;Hwang, Sung-Chan;Kang, Young-Ho;Park, Ki-Min;Jun, Wan-Gi;Kim, Jeong-Guk;Lee, Han-Soo
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.8 no.1
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    • pp.41-48
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    • 2010
  • Uranium deposits from an electrorefining process contain about 30% salt. In order to recover pure uranium and transform it into an ingot, the salts have to be removed from the uranium deposits. Major process variables for the salt distillation process of the uranium deposits are hold temperature and vacuum pressure. Effects of the variables on the salt removal efficiency were studied in the previous study[1]. By applying the Hertz-Langmuir relation to the salt evaporation of the uranium deposits, the evaporation coefficients were obtained at the various conditions. The operational conditions for achieving above 99% salt removal were deduced. The salt distilled uranium deposits tend to form the eutectic melt with iron, nickel, chromium for structural material of salt evaporator. In this study, we investigated the hold temperature limitation in order to prevent the formation of the eutetic melt between urnaium and other metals. The reactions between the uranium metal and stainless steel were tested at various conditions. And for enhancing the evaporation rate of the salt and the efficient recovery of the distilled salt, the thermal analysis of the salt distiller was conducted by using commercial CFX software. From the thermal analysis, the effect of Ar gas flow on the evaporation of the salt was studied.