Control of pretilt angles on $SiO_x$ Thin Film by Electron Beam Evaporation Method
(전자빔 경사증착을 이용한 $SiO_x$ 박막의 프리틸트각 제어)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2005.11a
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- pp.311-312
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- 2005