• 한국전기전자재료학회논문지
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• 제23권3호
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• pp.228-233
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• 2010

We studied the optical characteristics correlated with low dielectric constants of low-k SiOCH thin films through ellipsometry. The low-k SiOCH thin films were prepared by CCP-PECVD method using BTMSM(Bis-trimethylsilylmethane) precursors deposited on p-Si wafer. The Si-O-CHx, Si-O-Si, Si-CHx, CHx and Si-H bonding groups were specified by FTIR spectroscopic spectra, and the groups coupled with the nano-porous structural organic/inorganic hybrid-type of SiOCH thin films which has extremely low dielectric constant close to 2.0. The structural groups includes highly dense pore as well as ions in SiOCH thin films affecting to complex refraction characteristics of single layer on the p-Si wafer. The structural complexity originate the complex refractive constants of the films, and resulted the elliptical polarization of the incident linearly polarized light source of Xe-light source in the range from 190 nm to 2100 nm. Phase difference and amplitude ratio between s wave and p wave propagating through SiOCH thin film was studied. After annealing, the amplitude of p wave was reduced more than s wave, and phase difference between p and s wave was also reduced.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.122-122
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• 1999

Graphite with its advantages of high thermal conductivity, low thermal expansion coefficient, and low elasticity, has been widely used as a structural material for high temperature. However, graphite can easily react with oxygen at even low temperature as 40$0^{\circ}C$, resulting in CO2 formation. In order to apply the graphite to high temperature structural material, therefore, it is necessary to improve its oxidation resistive property. Silicon Carbide (SiC) is a semiconductor material for high-temperature, radiation-resistant, and high power/high frequency electronic devices due to its excellent properties. Conventional chemical vapor deposited SiC films has also been widely used as a coating materials for structural applications because of its outstanding properties such as high thermal conductivity, high microhardness, good chemical resistant for oxidation. Therefore, SiC with similar thermal expansion coefficient as graphite is recently considered to be a g행 candidate material for protective coating operating at high temperature, corrosive, and high-wear environments. Due to large lattice mismatch (~50%), however, it was very difficult to grow thick SiC layer on graphite surface. In theis study, we have deposited thick SiC thin films on graphite substrates at temperature range of 700-85$0^{\circ}C$ using single molecular precursors by both thermal MOCVD and PEMOCVD methods for oxidation protection wear and tribological coating . Two organosilicon compounds such as diethylmethylsilane (EDMS), (Et)2SiH(CH3), and hexamethyldisilane (HMDS),(CH3)Si-Si(CH3)3, were utilized as single source precursors, and hydrogen and Ar were used as a bubbler and carrier gas. Polycrystalline cubic SiC protective layers in [110] direction were successfully grown on graphite substrates at temperature as low as 80$0^{\circ}C$ from HMDS by PEMOCVD. In the case of thermal MOCVD, on the other hand, only amorphous SiC layers were obtained with either HMDS or DMS at 85$0^{\circ}C$. We compared the difference of crystal quality and physical properties of the PEMOCVD was highly effective process in improving the characteristics of the a SiC protective layers grown by thermal MOCVD and PEMOCVD method and confirmed that PEMOCVD was highly effective process in improving the characteristics of the SiC layer properties compared to those grown by thermal MOCVD. The as-grown samples were characterized in situ with OES and RGA and ex situ with XRD, XPS, and SEM. The mechanical and oxidation-resistant properties have been checked. The optimum SiC film was obtained at 85$0^{\circ}C$ and RF power of 200W. The maximum deposition rate and microhardness are 2$mu extrm{m}$/h and 4,336kg/mm2 Hv, respectively. The hardness was strongly influenced with the stoichiometry of SiC protective layers.

• Wind and Structures
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• 제36권4호
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• pp.277-292
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• 2023

Low-rise structures are generally immersed within the roughness layer of the atmospheric boundary layer flows and represent the largest class of the structures for which wind loads for design are being obtained from the wind standards codes of distinct nations. For low-rise buildings, wind loads are one of the decisive loads when designing a roof. For the case of cylindrical roof structures, the information related to wind pressure coefficient is limited to a single span only. In contrast, for multi-span roofs, the information is not available. In this research, the numerical simulation has been done using ANSYS CFX to determine wind pressure distribution on the roof of low-rise cylindrical structures arranged in rectangular plan with variable spacing in accordance with building width (B=0.2 m) i.e., zero, 0.5B, B, 1.5B and 2B subjected to different wind incidence angles varying from 0° to 90° having the interval of 15°. The wind pressure (P) and pressure coefficients (C_pe) are varying with respect to wind incidence angle and variable spacing. The results of present numerical investigation or wind induced pressure are presented in the form of pressure contours generated by Ansys CFD Post for isolated as well as variable spacing model of cylindrical roofs. It was noted that the effect of wind shielding was reducing on the roofs by increasing spacing between the buildings. The variation pf Coefficient of wind pressure (C_pe) for all the roofs have been presented individually in the form of graphs with respect to angle of attacks of wind (AoA) and variable spacing. The critical outcomes of the present study will be so much beneficial to structural design engineers during the analysis and designing of low-rise buildings with cylindrical roofs in an isolated as well as group formation.

• Smart Structures and Systems
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• 제33권1호
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• pp.41-53
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• 2024

Grouting sleeves are an essential connecting component of prefabricated components, and the quality of grouting has a significant influence on structural integrity and seismic performance. The embedded grouting sleeve (EGS)'s grouting defects are highly undetectable and random, and no effective monitoring method exists. This paper proposes an ultrasonic guided wave method and provides a set of guidelines for selecting the optimal frequency and suitable period for the EGS. The optimal frequency was determined by considering the group velocity, wave structure, and wave attenuation of the selected mode. Guided waves are prone to multi-modality, modal conversion, energy leakage, and dispersion in the EGS, which is a multi-layer structure. Therefore, a time-reversal (TR)-based multi-mode focusing and dispersion automatic compensation technology is introduced to eliminate the multi-mode phase difference in the EGS. First, the influence of defects on guided waves is analyzed according to the TR coefficient. Second, two major types of damage indicators, namely, the time domain and the wavelet packet energy, are constructed according to the influence method. The constructed wavelet packet energy indicator is more sensitive to the changes of defecting than the conventional time-domain similarity indicator. Both numerical and experimental results show that the proposed method is feasible and beneficial for the detection and quantitative estimation of the grouting defects of the EGS.

• Structural Engineering and Mechanics
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• 제62권3호
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• pp.325-344
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• 2017

The present paper investigates the propagation of Love-type wave in a composite structure comprised of imperfectly bonded piezoelectric layer with lower fiber-reinforced half-space with rectangular shaped irregularity at the common interface. Closed-form expression of phase velocity of Love-type wave propagating in the composite structure has been deduced analytically for electrically open and short conditions. Some special cases of the problem have also been studied. It has been found that the obtained results are in well-agreement to the Classical Love wave equation. Significant effects of various parameters viz. irregularity parameter, flexibility imperfectness parameter and viscoelastic imperfectness parameter associated with complex common interface, dielectric constant and piezoelectric coefficient on phase velocity of Love-type wave has been reported. Numerical computations and graphical illustrations have been carried out to demonstrate the deduced results for various cases. Moreover, comparative study has been performed to unravel the effects of the presence of reinforcement and piezoelectricity in the composite structure and also to analyze the existence of irregularity and imperfectness at the common interface of composite structure in context of the present problem which serves as a salient feature of the present study.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.367-367
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• 2013

Commercial applications of indium tin oxide (ITO) can be separated into two useful areas. As it is perceived to bear electrical properties and optical transparency at once, its chance to apply to promising fields, usually for an optical device, gets greater in the passing time. ITO is one of the transparent conducting oxides (TCO), and required to carry the relative resistance less than $10^{-3}{\Omega}$/cm and transmittances over 80 % in the visible wavelength of light. Because ITO has considerable refractive index, there exist applications for anti-reflection coatings. Anti-reflection properties require gradual change in refractive index from films to air. Such changes are obtained from film density or nano-clustered fractional void. Glancing angle deposition (GLAD) method is a well known process for adjusting nanostructure of the films. From its shadowing effects, GLAD helps to deposit well-controlled porous films effectively. In this study, we are comparing the reference sample to samples coated with controlled ITO multilayer accumulated by an e-beam evaporation system. At first, the single ITO layer samples are prepared to decide refractive index with ellipsometry. Afterwards, ITO multilayer samples are fabricated and fitted by multilayer ellipsometric model based on single layer data. The structural properties were measured by using atomic force microscopy (AFM), and by scanning X-ray diffraction (XRD) measurements. The ellipsometry was used to determine refractive indices and extinction coefficient. The optical transmittance of the film was investigated by using an ultraviolet-visible (UV-Vis) spectrophotometer.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 추계학술대회 논문집 전기물성,응용부문
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• pp.168-170
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• 2001

The NiCr is an important material for present thin-film resistor application owing to its low TCR and thermal stability. In this work, the NiCr thin films were deposited on corning glass substrate by reactive magnetron sputtering and the annealing at temperatures range from 300 to $500^{\circ}C$ for 20 min in vacuum. X-ray, AFM, $R_s$(surface leakage current) have been used to study the structural and electrical properties of the NiCr thin films. The high precision NiCr thin films resistor with TCR(temperature coefficient of resistance) of less then 10 ppm/$^{\circ}C$ was obtained under in in-situ annealing at $300^{\circ}C$ on Cr buffer layer substrate. It is clear that the NiCr thin-films resistor electrical properties are low TCR related with it's annealing and buffer layer condition. NiCr thin film resistor having a good thermal stability and low TCR properties are expected for the application to the dielectric material of passive component.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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• pp.81-84
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• 2004

The NiCr is an important material for present thin-film resistor application owing to its low TCR and thermal stability. In this work, the NiCr thin films were deposited on coming glass substrate by reactive magnetron sputtering and the annealing at temperatures range from 300 to $500^{\circ}C$ for 20 min in vacuum. X-ray, AFM, $R_s$(surface leakage current) have been used to study the structural and electrical properties of the NiCr thin films. The high precision NiCr thin films resistor with TCR(temperature coefficient of resistance) of less then $10\;ppm/^{\circ}C$ was obtained under in in-situ annealing at $300^{\circ}C$ on Cr buffer layer substrate. It is clear that the NiCr thin-films resistor electrical properties are low TCR related with it's annealing and buffer layer condition. NiCr thin film resistor having a good thermal stability and low TCR properties are expected for the application to the dielectric material of passive component.

• 센서학회지
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• 제21권2호
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• pp.83-89
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• 2012

A simple array of metal-insulator-metal capacitive elements was proposed for a potential application in humidity sensing platforms. We fabricated meso-scale sensors with different sizes(large-size: $2.7{\times}2.7mm^2$ ; mid-size: $1.5{\times}1.5mm^2$ ; small-size: $0.7{\times}0.7mm^2$) and characterized the performance of each design. Polyimide films were utilized as a humidity-sensitive layer. Capacitance changes of the polyimide layer were measured with respect to water absorption. The device showed sensitivity in the full range of relative humidity (RH) with excellent linearity(correlation coefficient > 0.994). This array structure exhibits unique advantages including easy fabrication process, high batch productivity, and high structural compatibility with various substrate materials. It is anticipated that this device structure will be potentially useful in unique applications including mapping spatial humidity variations over a meso-scale area and implementing flexible humidity sensing element arrays.

• 해양환경안전학회지
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• 제27권2호
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• pp.394-401
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• 2021

신재생에너지 신규설비 보급이 매년 꾸준히 증가하고 있으며, 그중 개발 확장성이 풍부하고 생산유발계수가 큰 해상풍력 시장이 급성장하고 있다. 특히 서남해 권역은 최고 수준의 해상풍력 잠재량을 보유하고 있으며, 관련 프로젝트들이 추진 중이다. 본 연구는 점토층 지반에 효과적인 해상풍력 하부구조물의 개발에 있어 EUROCODE에 의한 구조물의 설계 절차를 제시하고 구조 안전성을 고찰하여 관련 기술 분야에 이바지함을 목표로 한다. 선행연구에서는 풍력발전기 용량이 5MW급을 주요 대상으로 하였으나, 서남해 해상풍력발전기 시장의 기술 추세에 부합하는 발전 용량 8MW급을 연구 모델로 선정하였다. 이에 본 연구에서는 서남해 지질 조건에 부합하는 하부구조물을 개발하고, 구조 안전성을 유한요소법을 활용하여 검증하였다. 초기 설계안에서 일부 구간을 보강하여 구조 안전성을 확보하였다. 본 연구 결과를 기반으로 하여, 향후 다양한 형태의 하부구조물에 대한 구조 안전성 평가가 가능하며, 전문화된 구조 설계 및 평가 기준을 확립하였다.