• School Mathematics
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• v.7 no.3
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• pp.237-252
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• 2005

This study aims to present a model of mathematics classroom for gifted students by applying the social constructivism. An important function of good materials is promoting students' conjectures and discussions actively, and the model is appropriate to these kinds of materials. This model includes four stages, i. e. forming the subjective knowledge, objectifying, forming the objective knowledge, individual re-forming. And the four stages form a cycle working continuously on more progressive materials. This study presents an example of the classroom for fifteen students of grade 6 on the properties of multiples. Students performed so active investigations, and structured the con-tents learned effectively.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.433-433
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• 2012

As the requirement in patterning geometry continuously shrinks down, the termination of etch process at the exact time became crucial for the success in nano patterning technology. By virtue of real-time optical emission spectroscopy (OES), etch end point detection (EPD) technique continuously develops; however, it also faced with difficulty in low open ratio etching, typically in self aligned contact (SAC) and one cylinder contact (OCS), because of very small amount of optical emission from by-product gas species in the bulk plasma glow discharge. In developing etching process, one may observe that coupon test is being performed. It consumes costs and time for preparing the patterned sample wafers every test in priority, so the coupon wafer test instead of the whole patterned wafer is beneficial for testing and developing etch process condition. We also can observe that etch open area is varied with the number of coupons on a dummy wafer. However, this can be a misleading in OES study. If the coupon wafer test are monitored using OES, we can conjecture the endpoint by experienced method, but considering by data, the materials for residual area by being etched open area are needed to consider. In this research, we compare and analysis the OES data for coupon wafer test results for monitoring about the conditions that the areas except the patterns on the coupon wafers for real-time process monitoring. In this research, we compared two cases, first one is etching the coupon wafers attached on the carrier wafer that is covered by the photoresist, and other case is etching the coupon wafers on the chuck. For comparing the emission intensity, we chose the four chemical species (SiF2, N2, CO, CN), and for comparing the etched profile, measured by scanning electron microscope (SEM). In addition, we adopted the Dynamic Time Warping (DTW) algorithm for analyzing the chose OES data patterns, and analysis the covariance and coefficient for statistical method. After the result, coupon wafers are over-etched for without carrier wafer groups, while with carrier wafer groups are under-etched. And the CN emission intensity has significant difference compare with OES raw data. Based on these results, it necessary to reasonable analysis of the OES data to adopt the pre-data processing and algorithms, and the result will influence the reliability for relation of coupon wafer test and whole wafer test.

• Journal of The Korean Association For Science Education
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• v.26 no.1
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• pp.88-98
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• 2006

The purpose of this study was to analyze the process of scientists' science knowledge generation by employing four creative scientists as participants. Raw protocols were collected by an intensive interview method and then analyzed by a psychological modelling procedure. The present study showed that the process of knowledge generation divided into the processes of inductive, abductive, and deductive thinking. Furthermore, the inductive process in simple and operative observation was involved in the processes of generating a question, conjecture/prediction, designing an operational method, operation, and simple observation. Also, the abductive process had two components; question generation, and hypothesis generation which consisted of analyzing questions, searching explicans, and constructing hypothesis. Finally, the deductive process involved inventing abstract test methods, inventing abstract criteria, inventing concrete test methods, inventing concrete criteria, collecting results, and evaluating hypotheses and stating conclusions.