• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.100-100
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• 2000

Aluminium oxide (Al2O3) films have been investigated for many applications such as insulating materials, hard coatings, and diffusion barriers due to their attractive electrical and mechanical properties. In recent years, application of Al2O3 films for dielectric materials in integrated circuits as gates and capacitors has attracted much attention. Various deposition techniques such as sol-gel, metalorganic decomposition (MOD), sputtering, evaporation, metalorganic chemical vapor deposition (MOCVD), and pulsed laser ablation have been used to fabricate Al2O3 thin films. Among these techniques, reactive sputtering has been widely used due to its high deposition rate and easy control of film composition. It has been also reported that the sputtered Al2O3 films exhibit superior chemical stability and mechanical strength compared to the films fabricated by other processes. In this study, Al2O3 thin films were deposited on Pt/Ti/SiO/Si2 and Si substrates by DC reactive sputtering at room temperature with variation of the Ar/O2 ratio in sputtering ambient. Crystalline phase of the reactively sputtered films was characterized using X-ray diffractometry and the surface morphology of the films was observed with Scanning election microscopy. Effects of Th Ar/O2 ratio characteristics of Al2O3 films were investigated with emphasis on the thickness dependence of the dielectric properties. Correlation between the dielectric properties and the microstructure was also studied

• Journal of the Korean Wood Science and Technology
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• v.47 no.2
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• pp.163-177
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• 2019

This study aims to review the relations between the dyeing conditions (i.e., dye concentration, addition amounts of salt and alkali, and dyeing temperature) and dyeing properties and color fastness to light for identifying the optimal dyeing conditions when dyed regenerated woody fibers were obtained through the defibration of waste medium density fiberboard (MDF) using reactive Red H-E3B (Bis-monochlorotriazine (MCT)/MCT type) and reactive Red RB133% (Bis-MCT/Vinyl sulphone type). The dyeing yield (K/S) obtained using two types of reactive dyes increased as the dye concentration increased by 1-10% (on the weight of fiber (OWF)). In addition, the K/S of H-E3B was higher than that of RB133% irrespective of the dye concentration. The color difference of H-E3B after ultraviolet (UV) radiation was lower than that of RB133%, denoting good resistance to discoloration by UV. As the amount of sodium sulfate increased, the color difference and K/S also increased, and the adequate salt content was determined to be 50-70 g/L. Further, the color difference and K/S significantly increased only the addition of 2 g/L of sodium carbonate; however, almost no difference was observed when more than 2 g/L of sodium carbonate was added. The addition amount of sodium carbonate was adequate 5-10 g/L to dyeing the fiber and the pH at this addition level was 10. The dyeing yield of H-E3B increased when the dyeing temperature increased; however, it subsequently decreased after the dyeing temperature became $80^{\circ}C$. The dyeing yield of RB133% was almost the same up to $60-70^{\circ}C$ but declined subsequently. Thus, the adequate temperatures were $80^{\circ}C$ and $60^{\circ}C$ for H-E3B and RB133%, respectively. If the waste MDF woody fiber was dyed under the aforementioned optimal conditions, dyed regenerated woody fiber can be obtained having the following colors: 1.5 to 2.0R with the H-E3B dye and 9.6 to 10.0 PR with RB133%.

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1818-1820
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• 1999

This paper presents direct ${\mu}c$-Si:H thin film growth on the glass substrates using RPCVD system (remote plasma chemical vapor deposition) in low temperature. Hydrogenated micro-crystalline silicon deposited by RPCVD system in low temperature is very useful material for photovoltaic devices, sensor applications, and TFTs (thin film transistors). Varying the deposition conditions such as substrate temperature, gas flow rate, reactive gas ratio $(SiH_4/H_2)$, total chamber pressure, and rf power, we deposited ${\mu}c$-Si:H thin films on the glass substrates (Corning glass 1737). And then we measured the structural and electrical properties of the films.

• Journal of Industrial Technology
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• v.20 no.A
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• pp.279-283
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• 2000

Lime is one of the world's most useful chemicals and manufactured in various types of kilns, using various fuels. Quicklimes vary in reactivity with water due to variations in the time and temperature calcining process and type of kiln used. Careful attention and control of time and temperature in the calcining process is necessary to insure a highly reactive lime. Excess time and temperature will cause the lime to be over burned. The highest reactivity of quicklime is obtained by calcination of limestone in the particle size of 0.1cm~2cm, calcination temperature of $1000^{\circ}C$, calcination time 90min. It was found by the scanning electron microscopes that pores of quick lime is reducted if the soft burned quick lime is heated continually.

• Electrical & Electronic Materials
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• v.9 no.2
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• pp.196-203
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• 1996

The highly c-axis oriented zinc oxide thin films were deposited on Sapphire(0001) substrates by reactive RF magnetron sputtering. The characteristics of zinc oxide thin films on RF power, substrate-target distance, and substrate temperature were investigated by XRD, SEM and EDX analyses. The physical characteristics of zinc oxide thin films changed with various deposition conditions. The higher substrate temperatures were, The better crystallinity of zinc oxide thin films. The highly c-axis oriented zinc oxide thin films were obtained at sputter pressure 5mTorr, rf power 200W, substrate temperature 350.deg. C, substrate-target distance 5.5cm. In these conditions, the resistivity of zinc oxide thin films deposited on pt/sapphire was 12.196*10$^{9}$ [.ohm.cm].

• Journal of the Korean Ceramic Society
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• v.30 no.10
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• pp.803-810
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• 1993

PbxZr0.4Ti0.6O3 thin films were prepared by reactive co-sputtering and annealed by RTA(Rapid Thermal Annealing) process. Effect of Pb content in PbxZr0.4Ti0.6O3 films on the phase transformation was intensively studied. It has been found out that depending on the Pb content as well as RTA temperature, crystal structure of PbxZr0.4Ti0.6O3 films change greatly. It turned out that transformation temperature for perovskite can be lowered and the width of transition temperature region was reduced by increasing Pb content in the film. And the lattice was expanded with increasing Pb content. With increasing RTA temperature, as-deposited phase was transformed into perovskite through three different transformation paths depending on Pb content. It was confirmed that activation energies for nucleation of perovskite structure are much larger than those of its growth.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1515_1516
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• 2009

A 440MHz wireless and passive surface acoustic wave (SAW) based micro-sensor was developed for simultaneous measurement of temperature and humidity. The developed sensor is composed of a SAW reflective delay lines structured by an IDT (Inter-Digital Transducer), four reflectors and humidity sensitive film (polyimide). Polyimide was dry-ecthed by RIE (Reactive Ion Etching) to obtain high roughness, which gives the large reaction area resulting in high sensitivity. In wireless testing using a network analyzer, sharp reflection peaks with high S/N ratio, small signal attenuation, and few spurious peaks were observed in the time domain. High sensitivity towards the temperature and humidiy were also observed in the large concentration range. The obtained sensitivity was $16.8^{\circ}/^{\circ}C$ for temperature sensor and $15.8^{\circ}$/%RH for humidity sensor.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.04a
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• pp.314-317
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• 1997

The electrical and physical characteristics of aluminum oxide and Pt thin films on it, deposited by reactive sputtering and DC magnetron sputtering respectively, were analyzed with increasing annealing temperature(400~80$0^{\circ}C$) by four point probe, SEM and XRD. Under $600^{\circ}C$ of annealing temperature, aluminum oxide had the properties of improving Pt adhesion to SiO$_2$and insulation without chemical reaction to Pt thin films and the resistivity of Pt thin films was improved. But these properties of aluminum oxide and Pt thin films on it were degraded over $700^{\circ}C$ of annealing temperature because aluminum oxide was changed into metal aluminum and then reacted to Pt thin films deposited on it. In the analysis of the thermal charateristics of Pt micro-heater fabricated on Si07/si substrate, the temperature of Pt micro-heater is up to 41$0^{\circ}C$ with the power dissipation 1.8 watts.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.97-100
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• 2001

This paper presents the characteristics of Ta-N thin-film strain gauges as high-temperature strain gauges, which were deposited on Si substrate by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(4∼16 %)N$_2$). These films were annealed for 1 hour in 2x10$\^$-6/ Torr vaccum furnace range 500∼1000$^{\circ}C$. The optimized conditions of Ta-N thin-film strain gauges were annealing condition(900$^{\circ}C$, 1 hr.) in 8% N$_2$ gas flow ratio deposition atmosphere. Under optimum conditions, the Ta-N thin-films for strain gauges is obtained a high resistivity, $\rho$=768.93 ${\mu}$Ω cm, a low temperature coefficient of resistance, TCR=-84 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF=4.12.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.22 no.6
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• pp.75-82
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• 2021

Low-temperature combustion (LTC) strategies, such as HCCI (Homogeneous Charge Compression Ignition), PCCI (Premixed Charge Compression Ignition), and RCCI (Reactivity Controlled Compression Ignition), have been developed to effectively reduce NOx and PM while increasing the thermal efficiency of diesel engines. Through numerical analysis, this study examined the effects of the injection timing and two-stage injection ratio of diesel fuel, a highly reactive fuel, on the performance and exhaust gas of RCCI engines using gasoline as the low reactive fuel and diesel as the highly reactive fuel. In the case of two-stage injection, combustion slows down if the first injection timing is too advanced. The combustion temperature decreases, resulting in lower combustion performance and an increase in HC and CO. The injection timing of approximately -60°ATDC is considered the optimal injection timing considering the combustion performance, exhaust gas, and maximum pressure rise rate. When the second injection timing was changed during the two-stage injection, considering the combustion performance, exhaust gas, and the maximum pressure increase rate, it was judged to be optimal around -30°ATDC. In the case of two-stage injection, the optimal result was obtained when the first injection amount was set to approximately 60%. Finally, a two-stage injection rather than a single injection was considered more effective on the combustion performance and exhaust gas.