• 제목/요약/키워드: temperature estimation

검색결과 1,637건 처리시간 0.028초

실시간 제어를 위한 고속 열처리 공정에서 웨어퍼 온도 분포 추정 기법 (A Prediction Method of Temperature Distribution on the Wafer for Real-Time Control in a Rapid Thermal Process System)

  • 심영태;이석주;김학배
    • 제어로봇시스템학회논문지
    • /
    • 제6권9호
    • /
    • pp.831-835
    • /
    • 2000
  • The uniformity of themperature on a wafer is a wafer is one the most important parameters to conterol the RTF(Rapid Thermal Process) with proper input signals. It is impossible to achieve the uniformity of temperature without the exact estimation of temperature ar all points on the wafer. There fore, it is difficult to understand the internal dynamics as well as the structural complexities of the RTP, which is aprimary obstacle to measure the distributed temperatures on the wafer accurately. Furthermore, it is also hard to accomplish desirable estimation because only a few pyrometers are available in the general equipments. In the paper, a thermal model based on the chamber grometry of the AST SHS200 RTP system is developed to effectively control the thermal uniformity on the wafer. First of all, the estimation method of one-point measurement is developed, which is properly extended to the case of multi-point measurements. This thermal model is validated through simulation and experiments. The proposed work can be utilized to building a run-by -run or a real-time control of the RTP.

  • PDF

드릴링 공정의 열거동 해석과 관측기를 이용한 온도 추정법 (Analysis of Thermal Behavior and Temperature Estimation by using an Observer in Drilling Processes)

  • 김태훈;정성종
    • 대한기계학회논문집A
    • /
    • 제27권9호
    • /
    • pp.1499-1507
    • /
    • 2003
  • Physical importance of cutting temperatures has long been recognized. Cutting temperatures have strongly influenced both the tool life and the metallurgical state of machined surfaces. Temperatures in drilling processes are particularly important, because chips remain in contact with the tool for a relatively long time in a hole. Tool temperatures tend to be higher in drilling processes than in other in machining processes. This paper concerns with modeling of thermal behaviors in drilling processes as well as estimation of the cutting temperature distribution based on remote temperature measurements. One- and two-dimensional estimation problems are proposed to analyze drilling temperatures. The proposed thermal models are compared with solutions of finite element methods. Observer algorithms are developed to solve inverse heat conduction problems. In order to apply the estimation of cutting temperatures, approximation methods are proposed by using the solution of the finite element method. In two-dimensional analysis, a moving heat source according to feedrate of the drilling process is regarded as a fixed heat source with respect to the drilling location. Simulation results confirm the application of the proposed methods.

유도전동기의 통일적 벡터제어에 관한 연구 (A Study on Unified Vector Control of Induction Motor)

  • 김영대;이동철
    • 동력기계공학회지
    • /
    • 제5권3호
    • /
    • pp.95-103
    • /
    • 2001
  • This study is applied to common induction motor, and vector control is realized by using an indirect type of induction motor which has a simple composition. In this study extended Kalman filter is used from control theoretical viewpoint, and primary resistance and secondary resistance which change according to the temperature of motor are simultaneously estimated. This paper aims to research an indirect vector control in which the secondary resistance obtained from this estimation is consistent with secondary flux. This estimation is made by on-line estimation, but on-line estimation is difficult because extended Kalman filter takes long time in computation time. So off-line estimation was made on the assumption that the variation of temperature in motor is slow temporally.

  • PDF

Hot Leg Temperature Uncertainty due to Thermal Stratification

  • Jang, Ho-Cheol;Ju, Kyong-In;Kim, Young-Bo;Sul, Young-Sil;Cheong, Jong-Sik
    • 한국원자력학회:학술대회논문집
    • /
    • 한국원자력학회 1996년도 춘계학술발표회논문집(2)
    • /
    • pp.29-35
    • /
    • 1996
  • For the Reactor Coolant System(RCS) flow rate measurement by the secondary calorimetric heat balance method, the coolant temperature of the hot leg is needed. Several Resistance Temperature Detectors(RTD) are installed in the hot leg to measure the temperature, but the average value of RTDs does not correctly represent the energy-averaged(bulk) temperature because of the thermal stratification phenomenon. Therefore some correction is introduced to predict the bulk temperature, but the correction inevitably contains uncertainty because the stratification is not defined well quantitatively yet. Therefore a large uncertainty for the correction has been used for the conservative estimation. But unrealistically large uncertainty causes degradation of the measurement method and yields difficulty to meet the acceptance criterion in start-up flow measurement test. In this paper, an analytical estimation is made on the correction and the related uncertainty using the measured hot leg velocity profile of System 80 reactor flow model test and the measured temperatures of YGN 3&4 and PVNGS 1&2 start-up tests. The results reveal that the magnitude of the correction uncertainty is much smaller than that used in the previous design. Therefore, the confidence on the flow rate measurement method can be improved and the difficulty in start-up flow measurement test can be lessened if the smaller correction uncertainty obtained through this estimation is applied.

  • PDF

직류링크 커패시터의 용량 추정시 온도특성 보정 (Compensation of Temperature Characteristics for Capacitance Estimation of DC-link Capacitors)

  • 보성사;김경현;이동춘;이교범;김장목
    • 전력전자학회논문지
    • /
    • 제15권5호
    • /
    • pp.387-393
    • /
    • 2010
  • 본 논문에서는 3상 AC/DC/AC PWM 컨버터에서 직류커패시터 용량의 정확한 추정을 위하여 동작온도 변화에 따른 커패시턴스의 변화를 보정하는 방법을 제안한다. 제안된 방법에서는 커패시터의 동작온도를 측정하고 이에 따라 변화하는 커패시터 용량을 상온에서의 값으로 보정한다. 온도 측정을 위해 써미스터를 사용하고 써미스터에 나타나는 전압의 변화로 온도를 감지하여 동작온도에서 추정된 커패시턴스 값을 상온에서의 값으로 환산한다. 동작온도를 고려한 커패시턴스 보정 기법은 실험을 통하여 그 타탕성이 검증된다.

실시간 볼 스크류 열변형 추정에 관한 연구 (A Study on the Real-Time Estimation of Thermal Displacement for a Ball Screw)

  • 김수광;류승호;조동우
    • 한국정밀공학회:학술대회논문집
    • /
    • 한국정밀공학회 1995년도 춘계학술대회 논문집
    • /
    • pp.88-93
    • /
    • 1995
  • The ball screw preloaded for high nigidity and accuracy increases frictional resistance, therefore, its temperature and positioning error rise. In this paper, 2 diamensional temperature distributions of a ball screw with preload are analyzed according to the rotational speeds and stop times by a finite element method. The theremal behaviors of a ball screw are measured to examine the analyzed datum. The examined results show that the trends of temperature rising and axial distributions in steady state are nearly extimate but the temperature low. The differences of temperature ate seems to be caused by not exact heat transfer coefficients. More than an hour is consumed for calculation by FEM. So the modified lumped method for the real-time estimation of the thermal distribution is proposed. The estimated temperature of a ball serw by the modified lumped method is more exactly estimated than by FEM, nd that method takes less than several millisec. Moreover it can be used to estimate heat transfer coefficients.

  • PDF

Comparative Study of Estimation Methods of the Endpoint Temperature in Basic Oxygen Furnace Steelmaking Process with Selection of Input Parameters

  • Park, Tae Chang;Kim, Beom Seok;Kim, Tae Young;Jin, Il Bong;Yeo, Yeong Koo
    • 대한금속재료학회지
    • /
    • 제56권11호
    • /
    • pp.813-821
    • /
    • 2018
  • The basic oxygen furnace (BOF) steelmaking process in the steel industry is highly complicated, and subject to variations in raw material composition. During the BOF steelmaking process, it is essential to maintain the carbon content and the endpoint temperature at their set points in the liquid steel. This paper presents intelligent models used to estimate the endpoint temperature in the basic oxygen furnace (BOF) steelmaking process. An artificial neural network (ANN) model and a least-squares support vector machine (LSSVM) model are proposed and their estimation performance compared. The classical partial least-squares (PLS) method was also compared with the others. Results of the estimations using the ANN, LSSVM and PLS models were compared with the operation data, and the root-mean square error (RMSE) for each model was calculated to evaluate estimation performance. The RMSE of the LSSVM model 15.91, which turned out to be the best estimation. RMSE values for the ANN and PLS models were 17.24 and 21.31, respectively, indicating their relative estimation performance. The essential input parameters used in the models can be selected by sensitivity analysis. The RMSE for each model was calculated again after a sequential input selection process was used to remove insignificant input parameters. The RMSE of the LSSVM was then 13.21, which is better than the previous RMSE with all 16 parameters. The results show that LSSVM model using 13 input parameters can be utilized to calculate the required values for oxygen volume and coolant needed to optimally adjust the steel target temperature.

기온자료를 이용한 소형증발접시 증발량 산정 (Estimation of small pan evaporation using temperature data)

  • 임창수
    • 한국수자원학회논문집
    • /
    • 제50권1호
    • /
    • pp.37-53
    • /
    • 2017
  • 증발접시 증발량의 경우 저수지 증발량을 산정하는 간접적인 방법으로 유용하게 적용되고 있다. 따라서 본 연구에서는 이용할 수 있는 기상자료가 제한적인 경우에 기온자료만을 이용하여 증발접시 증발량을 산정하는 식을 제안하였다. 이를 위해서 전국 12개 지역에서 관측된 증발접시 증발량과 비교를 통해 제안식을 유도하였다. 또한 전국 44개 지역에 대해서 본 연구에서 제안된 증발접시 증발량 산정식을 다른 기온자료에 기초한 식들뿐만 아니라, 여러 종류의 기상자료(기온, 풍속, 습도, 일조시간)를 필요로 하는 식들과 비교하여 적용성을 파악하였다. 연구결과에 의하면 본 연구에서 제안된 증발량 산정식들은 다른 기온자료에 기초한 식들과 비교하여 전반적으로 양호한 증발접시 증발량 산정결과를 보였다. 본 연구에서 제안된 증발량 산정식의 경우 우리나라 56개 연구지역 대부분에서 전반적으로 양호한 증발접시 증발량 산정결과를 보였다. 따라서 본 연구에서 수정 제안된 기온자료만을 이용한 증발접시 증발량 산정식들은 우리나라에서 이용할 수 있는 기상자료가 제한적인 경우에 특히 적용성이 있는 것으로 판단된다. 추후에는 저수지에서 관측된 기온 및 증발접시 증발량 자료를 바탕으로 저수지 증발량 산정을 위한 제안식들의 적용성 검토연구가 필요하다.

모드해석과 관측기에 의한 볼스크류 온도분포의 실시간 예측 (Real-time estimation of Temperature Distribution of a Ball Screw System Using Modal Analysis and Observer)

  • 김태훈
    • 한국공작기계학회:학술대회논문집
    • /
    • 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
    • /
    • pp.635-640
    • /
    • 2000
  • Thermal deformation of machine tools can be evaluated from the analysis of the whole temperature field. However, it is extremely inefficient and impossible to acquire the whole temperature field by measuring temperatures of every point. So, a temperature estimator, which can estimate the whole temperature field from the temperatures of just a few points, is required. In this paper, 1-dimensional heat transfer problem is modeled with modal analysis and state space equations. and then state observer is designed to estimate the intensity of heat source and the whole temperature field in real-time. The reliability of this estimator is verified by making a comparison between solutions by the proposed method and the exact solutions of examples. The proposed method is applied to the estimation of temperature distribution in a ball screw system.

  • PDF

사후 경과시간 추정을 위한 현장 대기온도 예측에 국내 환경 조건이 미치는 영향 (Effect of Environmental Conditions on Estimation of Ambient Temperature for Minimum Postmortem Interval (PMI) in Korea)

  • 정수진;박지은;이효정;박성환;신상언;이재원
    • 과학수사학회지
    • /
    • 제11권3호
    • /
    • pp.178-185
    • /
    • 2017
  • 사후경과시간(PMI)을 추정하기 위하여 사용되고 있는 유효적산온도(ADD)를 계산하는데 있어서 가장 중요한 요인 중 하나는 바로 사건 현장의 대기 온도를 최대한 정확하게 추정하는 것이다. 지금까지 사건 현장의 대기 온도를 추정하는 방법으로는 사건이 일어난 현장 근처의 기상청 온도를 그대로 적용하거나, 보정 온도를 고려하여 사용하거나, 주변 기상청 온도와 사건 현장 대기 온도의 선형 회귀분석을 통해 과거 일정기간 동안의 현장 대기 온도를 추정하였다. 이 때, 온도 추정 방법에 따라 온도 추정값이 달라질 수 있으며, 측정 조건이나 온도에 영향을 줄 수 있는 풍량, 풍속, 습도, 강우량 등 환경 요인에 따라서도 추정값의 정확도가 달라질 수 있다. 따라서 본 연구에서는 국내의 환경 요인 및 측정 조건들을 대상으로 보다 다양한 온도 추정 방법들에 적용하여 과거 일정기간 동안의 현장 대기온도를 추정하고, 이렇게 추정된 온도와 실제 온도와의 비교를 통하여 국내 온도 추정에 미치는 영향을 연구하고자 한다.