• Title/Summary/Keyword: target precision

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A Study on the Vibrational Reduction Evaluation and the Relative Displacement in the External Vibration of Precision Measuring System (초정밀 측정/가공 장비의 외부진동에 대한 상대변위의 추출과 진동성능 평가에 관한 연구)

  • 전종균;엄호성;김강부;원영재
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.12 no.1
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    • pp.65-72
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    • 2002

  • Generally, there are laser operating equipments( aligner, stepper) and electronic microscope( SEM, TEM) as a high precision manufacturing and inspection equipment in semiconductor production companies, precision examination and measuring laboratories. Mostly, these equipments are characterized by projection and target part. The relative displacements between projection and target part are dominant roles in vibrational problem in these precision equipments. These relative displacements are determined by the position of incoming vibration and the difference of vibration response in projection and target part. In this study, the allowable vibrational limits are suggested and the vibrational reduction plans are proposed by measurement and analysis of vibration phenomenon in the Clean Room in PDP(plasma display panel) production building. The vibration performance is evaluated by comparison relative displacements between projection and target part before/after the vibration isolation plan.

  • https://doi.org/10.5050/KSNVN.2002.12.1.065 인용 PDF KSCI

The Characteristics of Fiber Optic Sensor on the Surface Roughness of Target (측정대상물의 표면조도에 따른 광파이버 센서 특성고찰)

  • 박한수;정택구;홍준희;이동주
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.283-286
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    • 2002

  • In fiber optic sensor, the error of the measurement is influenced by the surface roughness of the target and surroundings, especially the outside light. To reduce or modify this error, the sensitivity of the fiber optic sensor and the noise change by the surface roughness of the target should be known. The purpose of this paper is to observe the sensitivity of the fiber optic sensor and the noise according to the surface roughness of the target.

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Maneuvering Target Tracking by Perception Net in Clutter Environment (클러터 환경하에서 Perception Net을 이용한 기동 표적 추적)

  • 황태현;최재원;홍금식
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.10a
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    • pp.602-605
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    • 1995

  • In this paper, we provide the new alogorithm for maneuvering target tracking in clutter environment using perception net. The perception net, as a structural representation of the sensing capabilities of a system, may supply the constraints that target must be satisfied with. The results form perception net applying to IMMPDA are compared with those obtained from IMMPDA.

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Evaluation of Autochemical Analyzer Toshiba 120 FR (자동화학 분석기 Toshiba 120 FR의 평가)

  • Park, Jum Gi
    • Korean Journal of Clinical Laboratory Science
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    • v.36 no.2
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    • pp.98-109
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    • 2004

  • The lower limit of detection, precision, setting method of target value, reportable range determination, recovery, linearity, and comparison study with another equipment was evaluated for the Toshiba-120FR chemistry autoanalyzer which was newly introduced at the Daejeon Veteran Hospital in Dec. 2003. Nineteen kinds of test for AST, ALT, ALP, LDH, GGT, TP, ALB, GLU, T-cho, T-bil, TG, UA, CAL, IP, AMY, HDL-C, LDL-C, Cre and BUN were performed to evaluate the lower limit of detection, precision, setting method of target value, reportable range determination, recovery, linearity, and comparison study with other equipment according to the NCCLS guidelines(EP5-A, EP6-P, EP9-A). The Toshiba-120FR autochemical analyzer showed good precision for all tested items. The data concerning the lower limit of detection, precision(total CV 0.47%~3.65%), setting method of target value, reportable range determination, recovery(93%~111%), linearity($R^2=0.997{\sim}0.999$), and comparison study(r=0.977~0.999) with other equipment was acceptable for all tested items. The results of evaluation for the Toshiba-120FR autochemical analyzer showed that this equipment could be used as an alternative to other equipment.

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