• Title/Summary/Keyword: target materials

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Electrical and Structural Properties of GAZO Films Deposited by DC Magnetron Co-sputtering System with Two Cathodes (DC 마그네트론 Co-sputtering 시스템을 이용하여 증착한 GAZO 박막의 전기적 및 구조적 특성)

  • Jie, Luo;Park, Se-Hun;Song, Pung-Keun
    • Journal of the Korean institute of surface engineering
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    • v.42 no.3
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    • pp.122-127
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    • 2009
  • Ga/Al doped ZnO (GAZO) thin films were prepared on non-alkali glass substrate by co-sputtering system using two DC cathodes equipped with AZO ($Al_2O_3$:2.0 wt%) target and GZO ($Ga_2O_3$:6.65 wt%) target. This study examined the influence of Al/Ga concentration and substrate temperature on the electrical, structural and optical properties of GAZO films. The lowest resistivity $1.95{\times}10^{-3}{\Omega}cm$ was obtained at room temperature. With increasing substrate temperature, resistivity of GAZO film decreased to a minimum value of $7.47{\times}10^{-4}{\Omega}cm$ at below $300^{\circ}C$. Furthermore, when 0.05% $H_2$ gas was introduced, resistivity of GAZO film decreased to $6.69{\times}10^{-4}{\Omega}cm$. All the films had a preferred orientation along the (002) direction, indicating that the deposited films have hexagonal wurtzite structure formed by the textured growth along the c-axis. The average transmittance of the films was more than 85% in the visible light range.

Characteristic of the Sputtered CIGS Films in Relation to Heat Treatment Condition (스퍼터링법으로 제작한 CIGS 박막의 후열처리에 따른 물성 평가)

  • Jung, Jae-Heon;Cho, Sang-Hyun;Song, Pung-Keun
    • Journal of the Korean institute of surface engineering
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    • v.46 no.1
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    • pp.16-21
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    • 2013
  • CIGS (Cu-In-Ga-Se) films were deposited on the Mo coated soda lime glass (Mo/SLG) by RF magnetron sputtering using a single sintered target with different chemical compositions. Heat treatment of the CIGS films were carried out under three different conditions, 1step ($350^{\circ}C$ for 2 hour and $550^{\circ}C$ for 2 hour) and 2step ($350^{\circ}C$ for 1 hour and $550^{\circ}C$ for 1 hour). In the case of CIGS films post-annealed on 2step method, grain size remarkably increased compared to other methods, indicating that chemical composition [Cu/(Ga+In) = 1] of CIGS films was same as CIGS target. After heat treatment by 2step method, band gap energy of the CIGS film deposited at RF 80 W showed 1.4 eV which is broadly similar to identical band gap energy (1.2 eV) of CIGS film prepared by evaporation method. Therefore, 2step heat treatment method could be expected to low temperature process.

A Study on the Microstryctural Evoulution of the Reagion Aheas of Craters Created by Copper and W-Cu Shaped Charge Jets (W-Cu와 Cu의 고속 충돌에 의한 연강의 미세조직 변화)

  • Lee, Seong;Hong, Moon-Hee;Baek, Woon-Hyung
    • Journal of Powder Materials
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    • v.6 no.1
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    • pp.69-74
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    • 1999
  • The microstructure of the reagion of carters, created by Cu and W-Cu shaped charge jets, in a 1020 mild steel target has been intestiaged. The region ahead of the crater created by the Cu shaped charge jet, reveals dramatic grain refinement implying the occurrence of a dynamic recrystallization, while that of W-Cu one dose a martensitic transformation indicative of heating up to an austenitic region followed by rapid cooling.The impacting pressure calculated when the W-Cu shaped charge jet encounters the target is higher than that of the Cu one. The micro-hardness of the region ahead of the crater created by the W-Cu shaped charge jet is also higher than that of the Cu one. The microstructure of W-Cu slug remained in the inside of the craters depicts the occurrence of the remarkable elongation of W particles during the liner collaphse. From these results, the microstructural variation of the region ahead of the crater with Cu and W-Cu shaped charge jets is discussed in trems of the pressure dependency of the transformation region of ferrite and austenite phases.

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Properties of ZnO:Al thin films prepared by a single target sputtering

  • An, Ilsin;Ahn, You-Shin;Taeg, Lim-Won
    • Journal of Korean Vacuum Science & Technology
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    • v.2 no.2
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    • pp.78-84
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    • 1998
  • ZnO:Al films were prepared by an rf magnetron sputtering and targets for the experiments were fabricated by sintering the mixture of ZnO and Al2O3. The most conductive film was obtained from the target with 2.0∼2.2 wt.% of Al2O3. Optical properties studied with spectroscopic ellipsometry showed band gap widening, i.e., the Burstein-Moss shift, with aluminum doping as well as with the elevation of deposition temperature. And it is found that the optical and electrical properties were related to the density of states as well as the variation of donor level. when hydrogen atoms were introduced into the films, the activation energy for the generation of oxygen vacancy was smaller for the films showing higher conductivity. This indicates that the optimum deposition condition for highly conductive ZnO:Al film has strong relation to the optimum doping condition.

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Spetroscopic Diagnostics of Reactive Plasma in a Facing Target Sputtering Unit (대향타겟트 스파터기에서 반응성 플라즈마의 스펙트로스코프 검진)

  • Na, Jong-Gab;Lee, Taek-Dong;Park, Soon-Ja
    • Korean Journal of Materials Research
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    • v.2 no.5
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    • pp.337-342
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    • 1992
  • Spectroscopic diagnostics on reactive plasmas was carried out in a facing target sputtering unit with BaO +12Fe composite targets and 50% $O_2+$ Ar sputter gas. Spectra of rective plasmas were composed of peaks which were assigned to be Ba, B$a^+$, Fe, FeO, F$e^+$, Ar, $Ar^+$, O, $O^+$. As detecting positions in plasmas were far away from targets, the relative peak intensities of the ions and neutral species were decreased, but the relative intensities of the former decreased faster than those of the latter.

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Trends of Recycling of Indium-Tin-Oxide (ITO) Target Materials for Transparent Conductive Electrodes (TCEs) (투명전극용 인듐 주석 산화물 타겟 소재의 재자원화 동향)

  • Hong, Sung-Jei;Lee, Jae Yong
    • Clean Technology
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    • v.21 no.4
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    • pp.209-216
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    • 2015
  • Indium-Tin-Oxide (ITO) is a material that is widely used for transparent conductive electrodes (TCEs). Indium (In), chief element of the ITO, is expected to be depleted in the near future owing to its high cost and limited reserves. To overcome the issue, ITO has to be retained by recycling redundant ITO targets after manufacturing processes. In this article, we proposed an efficient recycling way of the redundant ITO targets with investigation of the current recycling tendencies in domestic and foreign countries. As a result, it was revealed that only In is recycled from the redundant targets in domestic and Japan. As well, fabrication of TCEs is being researched with ITO nanoparticles solutions. However, since the TCEs fabricated with ITO target is superior to those with other materials, it is thought that establishment of regeneration technology of ITO itself is demanded for an efficient recycling and fabrication of ITO target.

Network pharmacoligical analysis for selection between Saposhnikoviae Radix and Glehniae Radix focusing on ischemic stroke (방풍(防風)과 해방풍(海防風) 중 뇌경색 연구에 더욱 적합한 약재 선정을 위한 네트워크 약리학적 분석)

  • Jin Yejin;Lim Sehyun;Cho Suin
    • Herbal Formula Science
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    • v.31 no.3
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    • pp.171-182
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    • 2023
  • Objectives : Saposhnikoviae Radix (SR) and Glehniae Radix (GR) have been frequently used in traditional medicine to treat diseases related to 'wind' syndrome, but there have been cases where it has been mixed in a state where the plant of origin is not clear. In this study, to select materials for conducting preclinical cerebral infarction research, the network pharmacology analysis method was used to select suitable medicinal materials for the study. Methods : In this study, a Traditional Chinese Medicine Systems Pharmacology Database and Analysis Platform (TCMSP) based network pharmacology analysis method was used, and oral bioavailability (OB), drug likeness (DL), Caco-2 and BBB permeability were utilized to select compounds with potential activity. For the values of each variable used in this study, OB ≥ 20%, DL ≥ 0.18, Caco-2 ≥ 0, and BBB ≥ -0.3 were applied, then networks of bioactive compounds, target proteins, and target diseases was constructed. STRING database was used to construct a protein-protein interaction network. Results : It was confirmed that SR rather than GR has various target proteins and target diseases based on network pharmacological analysis using TCMSP database. And it was analyzed that the bioactive compounds only in SR act more on neurovascular diseases, and both drugs are expected to be effectively used for cardiovascular diseases. Conclusions : In our future study, SR will be used in an ischemic stroke mouse model, and the mechanism of action will be explored focusing on apoptosis and cell proliferation.

Magnetic Field Dependent Characteristics of Al-doped ZnO by High Power Impulse Magnetron Sputtering (HIPIMS) (자장 구조 변화에 따른 High Power Impulse Magnetron Sputtering (HIPIMS)에서 Al-doped ZnO 박막 증착 특성)

  • Park, Dong-Hee;Yang, Jeong-Do;Choi, Ji-Won;Son, Young-Jin;Choi, Won-Kook
    • Korean Journal of Materials Research
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    • v.20 no.12
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    • pp.629-635
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    • 2010
  • Abstract In this study characteristics of Al-doped ZnO thin film by HIPIMS (High power impulse sputtering) are discussed. Deposition speed of HIPIMS with conventional balanced magnetic field is measured at about 3 nm/min, which is 30% of that of conventional RF sputtering process with the same working pressure. To generate additional magnetic flux and increase sputtering speed, electromagnetic coil is mounted at the back side of target. Under unbalanced magnetic flux from electromagnet with 1.5A coil current, deposition speed of AZO thin film is increased from 3 nm/min to 4.4 nm/min. This new value originates from the decline of particles near target surface due to the local magnetic flux going toward substrate from electromagnet. AZO film sputtered by HIPIMS process shows very smooth and dense film surface for which surface roughness is measured from 0.4 nm to 1 nm. There are no voids or defects in morphology of AZO films with varying of magnetic field. When coil current is increased from 0A to 1A, transmittance of AZO thin film decreases from 80% to 77%. Specific resistance is measured at about $2.9{\times}10-2\Omega{\cdot}cm$. AZO film shows C-axis oriented structure and its grain size is calculated at about 5.3 nm, which is lower than grain size in conventional sputtering.

Multicomponent IGZO Ceramics for Transparent Electrode Target Fabricated from Oxides and Nitrates (산화물과 질산염으로 제조한 투명전극 타깃용 다성분계 IGZO 세라믹스)

  • Lee, Hyun-Kwun;Yoon, Ji-Hye;Cho, Kyeong-Sik
    • Journal of Powder Materials
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    • v.26 no.5
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    • pp.375-382
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    • 2019
  • Homogeneous multicomponent indium gallium zinc oxide (IGZO) ceramics for transparent electrode targets are prepared from the oxides and nitrates as the source materials, and their properties are characterized. The selected compositions were $In_2O_3:Ga_2O_3:ZnO$ = 1:1:2, 1:1:6, and 1:1:12 in mole ratio based on oxide. As revealed by X-ray diffraction analysis, calcination of the selected oxide or nitrides at $1200^{\circ}C$ results in the formation of $InGaZnO_4$, $InGaZn_3O_6$, and $InGaZn_5O_8$ phases. The 1:1:2, 1:1:6, and 1:1:12 oxide samples pressed in the form of discs exhibit relative densities of 96.9, 93.2, and 84.1%, respectively, after sintering at $1450^{\circ}C$ for 12 h. The $InGaZn_3O_6$ ceramics prepared from the oxide or nitrate batches comprise large grains and exhibit homogeneous elemental distribution. Under optimized conditions, IGZO multicomponent ceramics with controlled phases, high densities, and homogeneous microstructures (grain and elemental distribution) are obtained.

Development of Domestic Pattern Frame Method for Skid Resistance Pavement (미끄럼 방지 도로 포장을 위한 국내형 패턴 프레임 공법 개발)

  • Lee, TaeMin;Choi, HaJin
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.25 no.2
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    • pp.58-65
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    • 2021
  • As increasing social needs of pavement maintenance, pattern frame method has been constructed in Korea. The pattern frame not only increases the skid resistance of pavements but also improve the scenery. However, construction of the pattern frame currently relies on imported materials. In this paper, we localize the materials used in pattern frame and conduct performance verification on them. The important performance indicators are the adhesion strength of undercoating materials and the skid resistance of finished pattern frames. The adhesion strength was targeted at 1.4MPa, and the localization alternative material met the target performance with 2.35MPa, the skid resistance performance was targeted at 40BPN, and the localization alternative material met the target performance with 75BPN. In the case of localized materials, approximately 40% cost reduction (per 1m2)compared to imported materials was confirmed.