• 제목/요약/키워드: surface zeta-potential

검색결과 258건 처리시간 0.03초

Post Ru CMP Cleaning for Alumina Particle Removal

  • Prasad, Y. Nagendra;Kwon, Tae-Young;Kim, In-Kwon;Park, Jin-Goo
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 춘계학술발표대회
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    • pp.34.2-34.2
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    • 2011
  • The demand for Ru has been increasing in the electronic, chemical and semiconductor industry. Chemical mechanical planarization (CMP) is one of the fabrication processes for electrode formation and barrier layer removal. The abrasive particles can be easily contaminated on the top surface during the CMP process. This can induce adverse effects on subsequent patterning and film deposition processes. In this study, a post Ru CMP cleaning solution was formulated by using sodium periodate as an etchant and citric acid to modify the zeta potential of alumina particles and Ru surfaces. Ru film (150 nm thickness) was deposited on tetraethylorthosilicate (TEOS) films by the atomic layer deposition method. Ru wafers were cut into $2.0{\times}2.0$ cm pieces for the surface analysis and used for estimating PRE. A laser zeta potential analyzer (LEZA-600, Otsuka Electronics Co., Japan) was used to obtain the zeta potentials of alumina particles and the Ru surface. A contact angle analyzer (Phoenix 300, SEO, Korea) was used to measure the contact angle of the Ru surface. The adhesion force between an alumina particle and Ru wafer surface was measured by an atomic force microscope (AFM, XE-100, Park Systems, Korea). In a solution with citric acid, the zeta potential of the alumina surface was changed to a negative value due to the adsorption of negative citrate ions. However, the hydrous Ru oxide, which has positive surface charge, could be formed on Ru surface in citric acid solution at pH 6 and 8. At pH 6 and 8, relatively low particle removal efficiency was observed in citric acid solution due to the attractive force between the Ru surface and particles. At pH 10, the lowest adhesion force and highest cleaning efficiency were measured due to the repulsive force between the contaminated alumina particle and the Ru surface. The highest PRE was achieved in citric acid solution with NaIO4 below 0.01 M at pH 10.

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Effect of Lecithin on Dermal Safety of Nanoemulsion Prepared from Hydrogenated Lecithin and Silicone Oil

  • Bae, Duck-Hwan;Shin, Jae-Sup;Shin, Gwi-Su;Jin, Fan-Long;Park, Soo-Jin
    • Bulletin of the Korean Chemical Society
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    • 제30권4호
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    • pp.821-824
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    • 2009
  • In this study, a hydrogenated lecithin-containing nanoemulsion was prepared from hydrogenated lecithin and silicone oil. Tween-60 and liquid paraffin, widely known emulsifiers, were used as standard substances, and high shear was produced by utilizing a high shear homogenizer and microfluidizer. The properties of the nanoemulsion prepared with hydrogenated lecithin were evaluated by measuring interfacial tension, dynamic interfacial tension, droplet size, zeta-potential, friction force, skin surface hygrometery, and dermal safety. The interfacial tension of lecinol S10/silicone oil was lower than that of lecinol S10/liquid paraffin. The nanoemulsion prepared from hydrogenated lecithin shows lower zeta-potential, skin surface hygrometery, and friction force compared with a general emulsion. The silicone nanoemulsion prepared from hydrogenated lecithin showed a zero value in the patch test and thus exhibits high dermal safety.

Dispersion stability of ultra-fine $BaTiO_3$ suspensions in aqueous medium

  • Chun, M.P.;Chung, Y.B.;Ma, Y.J.;Cho, J.H.;Kim, B.I.
    • 한국결정성장학회지
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    • 제15권6호
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    • pp.239-243
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    • 2005
  • The effect of pH and particle size on the dispersion stability of ultra-fine $BaTiO_3$ suspensions in aqueous medium have been investigated by means of zeta potential, sediment experiments, and powder properties (particle analysis, specific surface area) etc. Zeta potential as a function of pH for two particles of different size increases from -75 to +10 mV with decreasing pH from 8.5 to 1.4. The curve of zeta potential for small particle (150 nm) has slow slope than that of large particle (900nm), giving IEP (isoelectric point) value of pH=1.6 for small particle and pH=1.9 for large particle respectively, which means that it is more difficult to control zeta potential with pH fur small particle than large particle. The dispersion stability of $BaTiO_3$ particles in aqueous medium was found to be strongly related with the agglomeration of colloidal suspensions with time through the sedimentation behaviors of colloidal particles with time and pH value.

Cellular Uptake and Cytotoxicity of β-Lactoglobulin Nanoparticles: The Effects of Particle Size and Surface Charge

  • Ha, Ho-Kyung;Kim, Jin Wook;Lee, Mee-Ryung;Jun, Woojin;Lee, Won-Jae
    • Asian-Australasian Journal of Animal Sciences
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    • 제28권3호
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    • pp.420-427
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    • 2015
  • It is necessary to understand the cellular uptake and cytotoxicity of food-grade delivery systems, such as ${\beta}$-lactoglobulin (${\beta}$-lg) nanoparticles, for the application of bioactive compounds to functional foods. The objectives of this study were to investigate the relationships between the physicochemical properties of ${\beta}$-lg nanoparticles, such as particle size and zeta-potential value, and their cellular uptakes and cytotoxicity in Caco-2 cells. Physicochemical properties of ${\beta}$-lg nanoparticles were evaluated using particle size analyzer. Flow cytometry and confocal laser scanning microscopy were used to investigate cellular uptake and cytotoxicity of ${\beta}$-lg nanoparticles. The ${\beta}$-lg nanoparticles with various particle sizes (98 to 192 nm) and zeta-potential values (-14.8 to -17.6 mV) were successfully formed. A decrease in heating temperature from $70^{\circ}C$ to $60^{\circ}C$ resulted in a decrease in the particle size and an increase in the zeta-potential value of ${\beta}$-lg nanoparticles. Non-cytotoxicity was observed in Caco-2 cells treated with ${\beta}$-lg nanoparticles. There was an increase in cellular uptake of ${\beta}$-lg nanoparticles with a decrease in particle size and an increase in zeta-potential value. Cellular uptake ${\beta}$-lg nanoparticles was negatively correlated with particle size and positively correlated with zeta-potential value. Therefore, these results suggest that the particle size and zeta-potential value of ${\beta}$-lg nanoparticles play an important role in the cellular uptake. The ${\beta}$-lg nanoparticles can be used as a delivery system in foods due to its high cellular uptake and non-cytotoxicity.

Roles of Fucoidan, an Anionic Sulfated Polysaccharide on BSA-Stabilized Oil-in-Water Emulsion

  • Kim, Do-Yeong;Shin, Weon-Sun
    • Macromolecular Research
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    • 제17권2호
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    • pp.128-132
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    • 2009
  • Fucoidan, a sulfated polysaccharide derived from brown seaweed, is an important material valued for its various biological functions, including anti-coagulation, anti-aging, and immune system support. In this study, we examined the potential of fucoidan as a novel emulsifying agent in BSA (bovine serum albumin)-stabilized emulsion at a neutral pH. We measured the dispersed oil-droplet size, surface zeta-potential and creaming formation of 0.5 wt% BSA emulsion (20 wt% oil traction) in the absence and presence of fucoidan. The average particle size and zeta-potential value were 625.4 nm and -30.91 mV in only BSA-stabilized emulsion and 745.2 nm and -44.2 mV in 1.0 wt% fucoidan-added BSA emulsion, respectively. This result suggested that some positive charges of the BSA molecules interacted with the negative charges of fucoidan to inhibit the flocculation among the oil droplets. The creaming rate calculated from the backscattering data measured by Turbiscan dramatically decreased in 1.0 wt% fucoidan-added BSA emulsion during storage. Accordingly, the repulsion forces induced among the oil particles coated with 1.0 wt% fucoidan in emulsion solution resulted in significantly increased emulsion stability. The turbidity of the BSA-stabilized emulsion at 500 nm decreased during five days of storage. However, the fucoidan-added BSA emulsion exhibited a higher value of turbidity than the BSA-stabilized emulsion did. In conclusion, an anionic sulfated fucoidan lowered the surface zeta-potential of BSA-coated oil droplets via the electrostatic interaction, and subsequently inhibited the flocculation among the oil droplets, thereby clearly minimizing the creaming and phase separation of the emulsion.

Emulsification of Chloroprene Rubber (CR) by Interfacial Chemistry; Stabilization and Enhancement of Mechanical Properties

  • Lee, Eun-Kyoung
    • Elastomers and Composites
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    • 제52권4호
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    • pp.257-265
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    • 2017
  • In this work, CR (Chloroprene Rubber) was emulsified by phase-inversion emulsification with nonionic surfactants (NP-1025, LE-1017, and OP-1019) and an anionic surfactant (SDBS; sodium dodecylbenzenesulfonate), and its stabilization was investigated through a study of its adsorption characteristics, zeta potential, and flow behavior. As the amount of the mixed surfactant increased, the droplet size decreased, resulting in the increase of viscosity. In particular, a CR emulsion with a lower absorbance in the UV spectrum exhibited the highest zeta potential. The results of this experiment showed that the CR emulsion prepared using (LE-1017) and SDBS was the most stable. In this study, calcium hydroxide and aluminum hydroxide were added to enhance the mechanical properties of the CR emulsion, and the relationship between tensile strength, tear strength and surface free energy were investigated. The tensile and tear strengths of the CR emulsion incresed as the amount of calcium hydroxide and aluminum hydroxide increased. The highest tensile and tear strengths and surface free energy were observed for additions of 1.0% calcium hydroxide and 0.80% aluminum hydroxide, respectively. It was concluded that the interfacial bonding strength was improved by the even dispersion of calcium hydroxide and aluminum hydroxide in the CR emulsion.

적조생물의 구제 -1. IOSP에 의한 적조생물의 응집제거- (Removal of Red Tide Organisms -1. flocculation of Red Tide Organisms by Using IOSP-)

  • 김성재;조규대
    • 한국수산과학회지
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    • 제33권5호
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    • pp.448-454
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    • 2000
  • IOSP를 이용하여 적조생물입자에 대한 응집실험을 한 결과는 다음과 같다. 본 실험에 사용한 IOSP의 평균 지름은 $11.6{\mu}m$이고, 약$ 77{\%}$의 입자가 $5.0{\~}20.0{\mu}$의 범위에 속하며 변동계수는 $60.1{\%}$이었다. IOSP의 금속성분을 분석한 결과는 $98{\%}$가 칼슘으로서 생석회(CaO)와 같은 성분이었다. IOSP의 전자현미경 사진을 분석한 결과 표면이 매끈한 부정형의 입자로 되어 있었다. IOSP에 해수를 첨가하면 해수중의 $Mg^(+2)$ 이온과 급속하게 반응하여 입자의 표면 주위에 점질성의 $Mg(OH)_2$ 흡수층 (absorption layer)을 형성하여 응집 침전하고 해수의 pH를 10.0 정도까지 상승시켰다. IOSP는 $pH=6.2{\~}12.7$에서 $11.1{\~}50.1 mV$로서 IOSP의 입자가 완전히 용해될 때까지 positive zeta potential을 나타낸 반면 OSP는 pH=9.2, 11.9에서 각각 -42.5, -56.9mV로서 negative zeta potential을 나타내었다. $pNa=2.0{\~}4.0 (10^(-4){\~}10^(-2)M Na^+)$에서 IOSP, OSP의 zeta potential은 거의 일정한 값을 나타내었으나 $pNa=0.0 (1 M Na^+)$에서는 IOSP의 EDL이 매우 크게 압축되어 zeta potential은 거의 0.0mV를 나타내었고 OSP는 -25.4mV의 여전히 높은 negative zeta potential을 나타내었다. IOSP는 $Mg^(+2)$ 이온의 농도가 증가함에 따라 positive zeta potential이 증가하다가 $pMg=3.0 (10^(-3)M Mg^(+2))$에서 감소하는 결과를 나타내었다. 해수 중에서 IOSP는 4.8mV의 positive zeta potential을 나타내었고, OSP와 RTO는 각각 -30.7mV, -9.2mV의 negative zeta potential을 나타내었다. 해수중에서 IOSP의 $Mg(OH)_2$ 흡수층과 적조생물입자 사이에는 positive-negative EDL 반응이 일어나서 이들 둘 사이에는 항상 전기동력학적 인력이 작용하고, 동시에 $Mg(OH)_2$ 흡수층에 의한 전하중화로 인하여 입자 상호간의 응집반응은 극단적 인력이 작용하는 primary minimum에서 일어나고, DLVO 이론에 따라 응집반응은 비가역적아며 매우 신속하게 일어났다. 적조생물입자의 응집제거 효율은 IOSP의 농도 50mg/l까지 급격한 증가를 보이다가 IOSP의 농도가 계속 증가함에 따라서 점점 완만한 증가를 나타내었다. 즉 IOSP의 농도가 증가함에 따라서 지수함수적으로 증가하였다 ($Y=53.81{\times}X^(0.1); R^2=0.9868$).응집 침전은 IOSP 400mg/l 이상에서 거의 완전히 일어났다. IOSP $100mg/l$을 사용하고 G-value를 $1, 6, 29, 139 sec^(-1)$로 단계적으로 증가시키면서 응집 실험을 한 결과 적조생물입자의 응집제거 효율이 각각 $70.5, 70.5, 81.7, 85.3{\%}$로 증가하였다. 이는 응집 반응에서 입자간 충분한 충돌이 일어날 수 있도록 교반하는 것이 매우 중요함을 나타내 주는 것이다.

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Characterizations of Membrane for Water Treatment: Surface Charge Analysis by Electrophoresis and Acidity Measurements

  • Yongki Shim;Lee, Sangyoup;Moon, Seung-Hyeon;Jaeweon Cho
    • Korean Membrane Journal
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    • 제2권1호
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    • pp.56-59
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    • 2000
  • The surface charge properties of a polymeric NF and a ceramic UF membranes were characterized in terms of zeta potential and acidity. Both the negative zeta potential and acidity values increased as pH increases due to ionizable acidic functional groups. Increased ionic strength reduced the acidity of the negatively-charged membrane surface as anticipated. Through these results, it can be envisioned are used to reject solutes with ionizable functional groups. Fouling of the negatively-charged membrane with natural organic matter (NOM) having a negative charge density was also investigated with respect to the surface charge. The surface charge of the NF membrane increased negatively when greater NOM adsorption onto the membrane surface occured.

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상향류식 연속 역세 여과를 이용한 양어장 순환수 재리용 II. 여과사의 표면처리에 의한 세균 및 바이러스 처리율 검토 (Recycling Water Treatment of Aquaculture by Using DynaSand Filter II. Effect of Coating on Removal of Bacteria and Virus in Sand Columns)

  • 박종호;조규석;황규덕;김이오
    • 한국양식학회지
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    • 제16권2호
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    • pp.76-83
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    • 2003
  • 본 연구에서는 상향류식 연속 역세여과 연구를 통하여 양어장 순환수 처리 후 박테리아 및 바이러스 등을 효과적으로 처리하는 기술 개발과 여과사에 금속염을 코팅시켜 생물막의 형성을 도모하는 연구를 수행하였다. 여과사를 코팅한 경우 중성 pH에서 zeta potential 양(+)이 됨을 알 수 있었고 zeta potential이 양(+)에 근접할수록 column test에서 바이러스 제거효율이 증가함을 알 수 있었다. 따라서 여과사를 금속염으로 코팅을 하는 경우가 안한 경우 보다 음이온을 띤 부유물 제거에 탁월한 효능이 있음을 보여주었다. pH에 따른 여과재료의 흡착율에서 Al coating과 Al+Fe coating은 반응 시간 30분까지 효과적으로 흡착이 일어나는 것을 볼수 있었고 이 후의 반응시간에서 파과 곡선형태를 보여주었다. 회분식 형태로 운영한 여과재료를 이용한 탈착실험에서 Non, Al, Fe및 Al+Fe coating모두에서 pH 9.95에서 용출(leaching)되는 농도가 가장 높았으며 각각의 농도는 7.47, 4.80, 20.89 및 7.23 mg/L로 각각 나타났다. 이번 연구에서 Al coating의 경우 pH에 따른 영향은 거의 나타나지 않았으며, pH가 증가함에 따라 약간 감소하는 것을 알수 있었고 Fe coating에서는 pH의 영항이 없었으며, Al+Fe coating에서는 pH가 증가함에 따라 탁도도 역시 일정하게 증가하는 것으로 나타났다.