• 한국표면공학회지
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• 제45권2호
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• pp.75-80
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• 2012

A sputter-sublimation source was tested for high rate deposition of protective coating of PEMFC(polymer electrolyte membrane fuel cell) with high electrical conductivity and anti-corrosion capability by DC biasing of a metal rod immersed in inductively coupled plasma. A SUS(stainless steel) tube, rod were tested for low thermal conductivity materials and copper for high thermal conductivity ones. At 10 mTorr of Ar ICP(inductively coupled plasma) with 2.4 MHz, 300 W, the surface temperature of a SUS rod reached to $1,289^{\circ}C$ with a dc bias of 150 W (-706 V, 0.21 A) in 2 mins. For 10 min of sputter-sublimation, 0.1 gr of SUS rod was sputter-sublimated which is a good evidence of a high rate deposition source. ICP is used for sputter-sublimation of a target material, for substrate pre-treatment, film quality improvement by high energy particle bombardment and reactive deposition.

• 공업화학
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• 제34권6호
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• pp.596-602
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• 2023

크롬 기반 금속유기골격체(MIL-101(Cr))를 제조하고 이들을 활용한 유사화학작용제 diisopropyl methyl phosphonate(DIMP) 흡착 실험을 통해 방독면 정화통이나 보호의 충진물질로서 활용 가능성을 평가하였다. MIL-101(Cr)은 조절인자로 아세트산(MIL-101(Cr)-A)과 수산화나트륨(MIL-101(Cr)-N)을 활용하여 각각 제작하였는데, 아세트산을 조절인자로 사용하였을 때 보다 넓은 비표면적과 높은 DIMP 흡착량을 보였다. MIL-101(Cr)-A는 상대습도 90% 환경에서 10일 동안 노출 시 흡착제 무게 대비 약 160%의 수분을 흡수하여 활성탄 등 다른 흡착제와 비교할 때 흡수율이 높았다. MIL-101(Cr)-A를 상대습도 90% 환경에서 일정기간 노출한 시료에 대한 DIMP 흡착량 실험 결과 24시간 이후에는 노출되지 않았을 때 흡착량의 약 40% 수준으로 감소하였으나, 이 흡착량은 상용 방독면 정화통 충진 활성탄과 비교하였을 때 여전히 높은 흡착량으로 추후 방독면 정화통이나 보호의 충진물질로서 활용가능성이 높은 것으로 판단된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.255-255
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• 2011

Zinc oxide based thin films have been extensively studied in recent several years because they have very interesting properties and zinc oxide is non-poisonous, abundant and cheap material. ZnO films are employed in different applications like transparent conductive layers in solar cells, protective coatings and so on. Wide industrial application of the ZnO films requires of development of cheap, effective and scalable technology. Typically used technologies don't completely satisfy the industrial requirements. In the present work, we studied effect of the deposition parameters on the structure and properties of ZnO films deposited by DC arc plasmatron. The varied parameters were gas flow rates, precursor composition, substrate temperature and post-deposition annealing temperature. Vapor of Zinc acetylacetone was used as source materials, oxygen was used as working gas and argon was used as the cathode protective gas and a transport gas for the vapor. The plasmatron power was varied in the range of 700-1500 watts. Flow rate of the gases and substrate temperature rate were varied in the wide range to optimize the properties of the deposited coatings. After deposition films were annealed in the hydrogen atmosphere in the wide range of temperatures. Structure of coatings was investigated using XRD and SEM. Chemical composition was analyzed using x-ray photoelectron spectroscopy. Sheet conductivity was measured by 4-point probe method. Optical properties of the transparent ZnO-based coatings were studied by the spectroscopy. It was shown that deposition by a DC Arc plasmatron can be used for low-cost production of zinc oxide films with good optical and electrical properties. Increasing of the oxygen content in the gas mixture during deposition allow to obtain high-resistive protective and insulation coatings with high adhesion to the metallic surface.

• 동력기계공학회지
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• 제13권3호
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• pp.33-39
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• 2009

The aim of this study is to analyze the welds characteristics of the 205 stainless steel pipe for application of street pole material. The welds corrosion behavior of STS 205 pipe in 0.1 N sulphuric acid solution and 5% NaCl solution at room temperature was studied using both salt spray test and potentiodynamic polarization experiment. The morphology and components of corrosion products on surface of STS 205 pipe welds were investigated using SEM/EDX. The tensile strength and yield strength values of STS 205 plate were 715 MPa and 369 MPa respectively. The microvickers hardness values of STS 205 pipe welds were slightly increased than that of STS 304 pipe welds. Corrosion current density($I_{corr.}$) and critical current density($I_{crit.}$) values of STS 205 pipe welds in 3.5% NaCl solution were $1.89{\times}10^{-6}$ $A/cm^2$ and $15.8{\times}10 ^{-6}$ $A/cm^2$. The corrosion resistance of SIS 205 pipe welds was similar to its STS 304 pipe welds. The STS 205 and 304 pipe welds passive films were chromium oxide. Especially, the STS 205 pipe welds showed good corrosion resistance in 0.1 N sulphuric acid. This is attributed to the forming of protective chromium oxide on the surface of STS 205 pipe welds.

• 한국통신학회논문지
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• 제35권11A호
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• pp.1091-1096
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• 2010

Stiction in microelectromechanical systems (MEMS) has been a major failure mechanism. Especially, in RF MEMS switches, moving parts often suffered in-use and release related stiction problems. Some materials and methods have been used to prevent this problem. Diamond-like carbon (DLC) has not only been used as a protective material owing to its good mechanical properties but also has been used as a hydrophobic material. Its properties could be controlled by post annealing treatment in various conditions. We synthesized DLC films using a radio frequency plasma enhanced chemical vapor deposition (RF PECVD) method on silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gas. Then, the change of the hydrophobic property of the films was investigated undervarious annealing temperatures in nitrogen and in oxygen ambient. The films, that were annealed above $700^{\circ}C$ in nitrogen ambient, showed a high contact angle of water (> $90^{\circ}$) even though their mechanical property was sacrificed to some degree. The structural variation and the changes of the hydrophobic and mechanical properties of the DLC films were analyzed by Raman spectrum, contact angle measurement, surface profiler, and a nanoindentation test.

• 설비공학논문집
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• 제11권1호
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• pp.18-30
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• 1999

A heat transfer analysis for the two-dimensional (2-D) steady state using finite difference method (FDM) is performed to predict the thermal behavior of the primary first-wall (FW) system of fusion reactor under various geometric and thermo-hydraulic conditions, such as the beryllium (Be) armor thickness, pitch of cooling tube, and coolant velocity. The FW consists of authentic steel (type 316 stainless steel solution annealed) for cooling tubes, Cu for cooling tubes embedding material, and Be for a protective armor, based on the International Thermonuclear Experiment Reactor (ITER) report. The present 2-D analysis, the control volume discretized with hybrid grid (rectangular grid and polar grid) and Gauss-Seidel iteration method are adapted to solve the governing equations. In the present study, geometric and thermo-hydraulic parameters are optimized with consideration of several limitations. Consequently, it is suggested that the adequate pitch of cooling tube is 22-32mm, the beryllium armor thickness is 10-12mm, and that the coolant velocity is 4.5m/s-6m/s for $100^{\circ}C$ of inlet coolant temperature. The cooling tube should locate near beryllium armor. But, it would be better for locating the center of Cu wall, considering problems of material and manufacturing. Also, 2-D analysis neglecting the axial temperature distribution of cooling tube is appropriate, regarding the discretization error in axial direction.

• 한국전기전자재료학회논문지
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• 제17권7호
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• pp.713-717
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• 2004

In this study, the etched trench properties including cross-sectional profile, surface roughness, and crystalline defects were investigated depending on the various silicon etching and additive gases, For the case of HBr$He-O_2SiF_4$ trench etching gas mixtures, the excellent trench profile and minimum defects in the silicon trench were achieved. Due to the residual oxide film grown by the additive oxygen gas, which acts as a protective layer during trench etching, the undercut and defects generation in the trench were suppressed. To improve the electrical characteristics of trench gate, the hydrogen annealing process after trench etching was also adopted. Through the hydrogen annealing, the trench corners might be rounded by the silicon atomic migration at the trench corners having high potential. The rounded trench corner can afford to reduce the gate electric field and grow a uniform gate oxide. As a result, dielectric strength and TDDB characteristics of the hydrogen annealed trench gate oxide were remarkably increased compared to the non-hydrogen annealed one.

• 한국표면공학회지
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• 제54권2호
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• pp.43-52
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• 2021

The Ni-based superalloy, Inconel 740, was corroded between 800 and 1100℃ for up to 100 hr in air and Ar-0.2%SO₂ gas in order to study its corrosion behavior in air and sulfur/oxygen environment. It displayed relatively good corrosion resistance in both environment, because its corrosion was primarily dominated by not sulfidation but oxidation especially in Ar-0.2%SO₂ gas. Such was attributed to the thermodynamic stability of oxides of alloying elements when compared to corresponding sulfides. The scales consisted primarily of Cr₂O₃, together with some NiAl₂O₄, MnCr₂O₄, NiCrMnO₄, and rutile-TiO₂. Sulfur from SO₂ gas made scales prone to spallation, and thicker. It also widened the internal corrosion zone when compared to air. The corrosion resistance of IN740 was mainly indebted to the formation of protective Cr₂O₃-rich oxides, and suppression of the sulfide formation.

• 대한치과보철학회지
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• 제41권6호
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• pp.699-713
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• 2003

Statement of problem. Titanium is the most important material for biomedical and dental implants because of their high corrosion resistance and good biocompatibility. These beneficial properties are due to a protective passive oxide film that spontaneously forms on the surface. Purpose. The purpose of this study was to evaluate the responses of osteoblast-like cells on different surface treatments on Ti discs. Material and Methods. Group 1 represented the machined surface with no treatment. Group 2 surfaces were sandblasted with $50{\mu}m\;Al_2O_3$ under $5kgf/cm^2$ of pressure. Groups 3 and 4 were sandblasted under the same conditions. The samples were treated on a titanium oxide surface with reactive sputter depositioning and thermal oxidation at $600^{\circ}C$ (Group 3) and $800^{\circ}C$ (Group 4) for one hour in an oxygen environment. The chemical composition and microtopography were analyzed by XRD, XPS, SEM and optical interferometer. The stability of $TiO_2$ layer was studied by petentiodynamic curve. To evaluate cell response, osteoblast extracted from femoral bone marrow of young adult rat were cultured for cell attachment, proliferation and morphology on each titanium discs. Results and Conclusion. The results were as follows : 1. Surface roughness values were, from the lowest to the highest, machined group, $800^{\circ}C$ thermal oxidation group, $600^{\circ}C$ thermal oxidation group and blasted group. The Ra value of blasted group was significantly higher than that of $800^{\circ}C$ thermal oxidation group (P=0.003), which was not different from that of $600^{\circ}C$ thermal oxidation group (P<0.05). 2. The degree of cell attachment was highest in the $600^{\circ}C$ thermal oxidation group after four and eight hours (P<0.05), but after 24 hours, there was no difference among the groups (P>0.05). 3. The level of cell proliferation showed no difference among the groups after one day, three days, and seven days (P>0.05). 4. The morphology and arrangement of the cells varied with surface roughness of the discs.

• 멤브레인
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• 제33권6호
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• pp.398-408
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• 2023

본 연구는 지카바이러스, 메르스, coronavirus disease-19 (COVID-19) 등의 감염병 방역 및 의료현장에서 사용할 수 있는 의료용 공기정화호흡기(powered air purifying respirators, PAPR)의 항균성 보호복의 후드와 필터를 개발하였다. PAPR은 전동팬 본체 및 필터, 배터리팩, 후드로 구성되며 보호복의 후드 소재는 뛰어난 흡습성, 풍압, 외부충격을 견딜 수 있는 폴리프로필렌 슐폰레이스(spunlace) 부직포 직물(SFS)을 사용하였다. 사용자의 감염위험을 낮추기 위해 후드의 외피에는 피톤치드계 물질을 사용하여 99.9%의 안티-박테리얼(antibacterial) 효과를 얻었으며 내피에는 친수가공을 하여 흡수성을 25% 향상시켰다. 의료용 보호복 후드에 필요한 인공혈액 침투저항성, 건조미생물 침투저항성, 습식세균 침투저항성, 그리고 박테리오파아지 침투저항성을 평가한 결과 2~6 단계의 합격평가를 받았다. 한편, 항균 처리된 슐폰레이스(spunlace filter, SF) 헤파 필터(high efficiency particulate air, HEPA)의 성능을 평가한 결과 우수한 항균성, 분진제거율, 차압 효과를 확인하였다.