• Journal of the Korean Society of Manufacturing Process Engineers
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• v.3 no.2
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• pp.53-59
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• 2004

In this paper, we propose a new multi-purpose Scanning Force Microscope (SFM) system. The system can be used for nano/micro-scratching, in-process profile measurement, and observation of potential surface defects which occur during the scratching in air or liquid. Experimental results of nano/micro-scratching show that the smallest scratching depth can be controlled to be 10nm, which corresponds to the stability of the SFM system. Profile measurements of nano/micro-scratching surfaces have also been performed by the method of on-machine measurement and in-process measurement. Two measurement results were in good agreement with each other. The maximum difference was approximately 10 nm, which was mainly caused by the sampling repeatability error that influences the measurement accuracy Also, micro-defects on the micro-scratching surface were successfully detected by the SFM system. It was confirmed that the number of micro-defects increases when the surface is subjected to a cyclic bending load. The maximum depth was less than 100nm.

• Proceedings of the KSME Conference
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• 2001.11b
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• pp.42-47
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• 2001

The heat (mass) transfer characteristics on the blade surface of a first-stage turbine rotor cascade for power generation has been investigated by employing the naphthalene sublimation technique. A four-axis profile measurement system is successfully developed for the measurements of the local heat (mass) transfer coefficient on the curved blade surface. The experiment is carried out at the free-stream Reynolds number and turbulence intensity of $2.09\times10^5$ and 1.2%. The results on the blade surfaces show that the local heat (mass) transfer on the suction surface is strongly influenced by the endwall vortices, but that on the pressure surface shows a nearly two-dimensional nature. The pressure surface has a more uniform distribution of heat load than the suction one.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.04a
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• pp.613-617
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• 2000

This paper descries the effect of the stylus tip size on the measuring error in surface topography measurement. To analyze the distortional effect of an actual surface geometry originating from the finite stylus size, the surface is modeled as a sinusoid and the stylus tip as a circle. the measuring error is defined as the ratio of the standard deviation of a tracing profile and an original profile. It is shown that this measuring error depends on the amplitude and wavelength of an original profile. In this paper, the spectrum analysis is applied to investigate the distortional effect due to the mechanical filtering of the stylus in the frequency domain. and, the cumulative power spectrum is applied to determinate the minimum wavelength limits to be measured with the various stylus tip radius from these results, a new method to select proper stylus tip radius is proposed.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.7 no.3
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• pp.81-86
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• 2008

I present a 3-D profiler specially devised for the profile measurement of specular surfaces that requires precision shape accuracy up to a few nanometer. A profile is reconstructed from the curvature of a test part of the surface at several locations along a line. The local curvature data are acquired with White-light Scanning Interferometry. Test measurement proves that the proposed profiler is well suited for the specular surface inspection like precision mirror.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.64-71
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• 2005

In order to measure surface roughness profile, stylus type equipments are commonly used, but the stylus keeps contact with surface and damages specimens by its tip pressure. Therefore, optics based measurement systems are developed, and light phase interferometer, which is based on light interference phenomenon, is the most noticeable research. However, light interference based measurements require translation mechanisms of nano-meter order in order to generate phase differences or multiple focusing, thus the systems cannot satisfy the industrial need of on-the-machine and in-process measurement to achieve factory automation and productive enhancement. In this research, we focused light reflectance phenomenon rather than the light interference, because reflectance based method do not need translation mechanisms. However, the method cannot direct]y measure surface roughness profile, because reflected light consists of several components and thus it cannot supply surface height information with its original form. In order to overcome the demerit, we newly proposed an image processing based algorithm, which can separate reflected light components and conduct parameterization and reconstruction process with respect to surface height information, and then confirmed the reliability of proposed algorithm by experiment.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.8
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• pp.1530-1535
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• 1992

An optical method of phase shifting interferometry is presented for the 3-dimensional profile measurement of mirror surfaces with nanometer resolution. A series of optical interferometric fringes are generated by comparing the surface to be measured with a reference flat. The fringes are captured by a CCD camera and then analyzed to obtain actual surface profile. Detailed principles are described along with necessary image processing algorithms. finally, several measurement examples are discussed which were performed on lapped surfaces, hard discs, and semiconductor wafers.

• Journal of the Optical Society of Korea
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• v.18 no.3
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• pp.236-243
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• 2014

Surface profiling and film thickness measurement play an important role for inspection. White light interferometry is widely used for engineering surfaces profiling, but its applications are limited primarily to opaque surfaces with relatively simple optical reflection behavior. The conventional bucket algorithm had given inaccurate surface profiles because of the phase error that occurs when a thin-film exists on the top of the surface. Recently, reflectometry and white light scanning interferometry were combined to measure the film thickness and surface profile. These techniques, however, have found that many local minima exist, so it is necessary to make proper initial guesses to reach the global minimum quickly. In this paper we propose combing reflectometry and white light scanning interferometry to measure the thin-film thickness and surface profile. The key idea is to divide the measurement into two states; reflectometry mode and interferometry mode to obtain the thickness and profile separately. Interferogram modeling, which considers transparent thin-film, was proposed to determine parameters such as height and thickness. With the proposed method, the ambiguity in determining the thickness and the surface has been eliminated. Standard thickness specimens were measured using the proposed method. Multi-layered film measurement results were compared with AFM measurement results. The comparison showed that surface profile and thin-film thickness can be measured successfully through the proposed method.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1998.10a
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• pp.300-305
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• 1998

A method of calculating wear amount which is based on digitally measured surface profile was suggested. The original profile of worn out profile was estimated from its adjacent surface profile by using least squares curve fitting with Fourier series. The approximated curve was well fitted to original surface profile. With this approach, more accurate calculation of the wear amount will be possible.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.8 no.1
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• pp.126-134
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• 1999

In this paper, a new error compensating technique for form-error compensation of rough-surface profile obtained by contact stylus profilometer is proposed. By the method, the real contact points of rough-surface and diamond stylus can be estimated and the measured profile data corrected. To verify the compensation effect, the properties(Ra, RMS, Kurtosis, Skewness) of measured profile data and compensated data were compared. And, the cumulative RMS slope was proposed to assess the compensated effect of upper area of profile. The results show that the measuring error could be compensated very well in amplitude parameters and in proposed cumulative RMS slope by the developed form-error compensating technique.

• Journal of Welding and Joining
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• v.20 no.1
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• pp.62-68
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• 2002

This study investigated the feasibility of penetration depth measurement using infrared temperature sensing on the weld surface. The detection point was optimized by FEM analysis in the laser keyhole welding. The profile of the weld surface temperature was measured using infrared detector array. Surface temperature behind the weld pool is proportional or exponentially proportional to penetration depth and bead width. From the results, the monitoring device of surface temperature using infrared detector array was applicable fur real time penetration depth control.