• Journal of the Semiconductor & Display Technology
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• v.4 no.4 s.13
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• pp.19-26
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• 2005

The process optimization of ozone concentration and half life time was investigated in ultra pure water and alkaline solutions for the wet cleaning of silicon wafer surface at room temperature. In the ultra pure water,. the maximum concentration (35 ppm) of ozone was measured at oxygen flow rate of 3 liters/min and ozone generator power over 60%. The half life time of ozone increased at lower power of ozone generator. Additive gases such as $N_2$ and $CO_2$ were added to increase the concentration and half life time of ozone. Although the maximum ozone concentration was higher with the addition of $N_2$ gas, a longer half life time was observed with the addition of $CO_2$. When $NH_4OH$ of 0.05 or 0.10 vol% was added in DI water, the pH of the solution was around 10. The addition of ozone resulted in the half life time less than 1 min. In order to maintain high pH and ozone concentration, ozone was continuously supplied in 0.05 vol% ammonia solutions. 3 ppm of ozone was dissolved in ammonia solutions. The static contact angle of silicon wafer surface became hydrophilic. The particle removal was possible alkaline ozone solutions. The organic contamination can be removed by ozonated ultra pure water and then alkaline solution containing ozone can remove the particles on silicon surface at room temperature.

• Journal of Korean Society for Atmospheric Environment
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• v.19 no.5
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• pp.561-568
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• 2003

Surface ozone concentrations are highly sensitive to meteorological variability. Therefore, in order to reveal the long-term changes in ozone due to the changes in precursor emissions, we need to remove the effects of meteorological fluctuations on the annual distribution of surface ozone. In this paper, the meteorologically adjusted trends of daily maximum surface ozone concentrations in two major Korean cities (Seoul and Busan) are investigated based on ozone data from 11 (Seoul) and 6 (Busan) sites over the period 1992 ∼ 2000. The original time series consisting of the logarithm of daily maximum ozone concentrations are splitted into long-term, seasonal and short-term component using Kolmogorov-Zurbenko (KZ) filter. Meteorological effects are removed from filtered ozone series using multiple linear regression based on meteorologcial variables. The long-term evolution of ozone forming capability due to changes in precursor emission can be obtained applying the KZ filter to the residuals of the regression. The results indicated that meteorologically adjusted long-term daily maximum ozone concentrations had a significant upward trend (Seoul: ＋ 3.02% yr$^{-1}$ , Busan: ＋ 3.45% yr$^{-1}$ ). These changes of meteorologically adjusted ozone concentrations represent the effects of changing background ozone concentrations as well as the more localized changes in emissions.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.12
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• pp.591-596
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• 2006

we have been developed on the ultra high concentration ozone generator system which is the core technology in the realization of the semiconductor photoresist strip process using the ozone-vapor chemistry. The proposed ozone generator system has the structure of the surface discharge type which adopt the high purity ceramic dielectric tube. We investigate the performance of the proposed ozone generator system experimentally and the results show that the system has very high ozone concentration characteristics of $19.7[wt%/O_2]$ at the flow rate of $0.3[{\ell}/min]$ of each discharge cell. As a result of the silicon wafer photoresist strip test, we obtained the strip rate of about 400[nm/min] at the ozone concentration of $16[wt%/O_2]$ and flow rate of $8[{\ell}/min]$. So, we confirmed that it's possible to use the proposed high concentration ozone generator system for the ozone-vapor photoresist strip process in the semiconductor and FPD industry.

• Korean Journal of Materials Research
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• v.16 no.2
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• pp.75-79
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• 2006

The effect of ozone and/or ultrasound treatments on the efficiency of slurry removal in post sliced cleaning (PSC) of silicon ingot was studied. Efficiency of slurry removal was evaluated as functions of time, temperature and surfactant with DOE (Design of Experiment) method. Residual slurries were observed on the wafer surface in case of cleaning by ozone or ultrasound separately. However, a clean wafer surface was appeared when cleaned with ozone and ultrasound simultaneously. It has found that cleaning time was the main effect among temperature, time and surfactant. Elevated temperature, addition of surfactant and high ozone concentration helped to accelerate efficient removal of slurry. The improvement of removal efficiency seems to be related to the formation of more active OH radicals. The highly cleaned surface was achieved at 10 wt% ozone, 1 min and 10 vol% surfactant with ultrasound. Application of ozone and ultrasound might be a useful method for PSC process in wafer cleaning.

• Journal of Microbiology and Biotechnology
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• v.28 no.8
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• pp.1233-1246
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• 2018

Vibrio parahaemolyticus contamination causes serious foodborne illness and has become a global health problem. As a disinfectant, aqueous ozone can effectively kill a number of bacteria, viruses, parasites, and other microorganisms. In this study, three factors, namely, the aqueous ozone concentration, the exposure time, and the bacterial density, were analyzed by response surface methodology, and the aqueous ozone concentration was the most influential factor in the sterilization ratio. Under low aqueous ozone concentrations (less than 0.125 mg/l), the bacterial cell membranes remained intact, and the ozone was detoxified by intracellular antioxidant enzymes (e.g., superoxide dismutase and catalase). Under high aqueous ozone concentrations (more than 1 mg/l), cell membranes were damaged by the degree of peripheral electronegativity at the cell surface and the concentration of lactate dehydrogenase released into the extracellular space, and the ultrastructures of the cells were confirmed by transmission electron microscopy. Aqueous ozone penetrated the cells through leaking membranes, inactivated the enzymes, inhibited almost all the genes, and degraded the genetic materials of gDNA and total RNA, which eventually led to cell death.

• Asian Journal of Atmospheric Environment
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• v.9 no.1
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• pp.1-11
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• 2015

Increasing ozone concentrations are observed over Japan from year to year. One cause of high ozone concentration in the Kanto region, which includes areas inland from large coastal cities such as metropolitan Tokyo, is the transportation of precursors by sea breezes. However, high ozone concentrations are also observed in the morning, before sea breezes approach inland areas. In this point, there would be a possibility of residual ozone existing above the nocturnal boundary layer affects the ozone concentration in the following morning. In this study, we utilized the Weather Research and Forecasting model and the Community Multiscale Air Quality model to evaluate the effect of regional precursors and residual ozone on ozone concentrations over the inland Kanto region. The results show that precursors emitted from non-metropolitan areas affected inland ozone concentrations more than did precursors from metropolitan areas. Moreover, calculated results indicate downward transportation of residual ozone, resulting in increased concentration. The residual ozone was also affected by precursors emitted from non-metropolitan areas.

• Journal of Korean Society of Water and Wastewater
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• v.32 no.2
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• pp.145-152
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• 2018

This study is focused on manganese (Mn(II)) removal by ozonation in surface water. Instant ozone demand for the water was 0.5 mg/L in the study. When 0.5 mg/L of Mn(II) is existed in water, the optimum ozone concentration was 1.25 mg/L with reaction time 10 minutes to meet the drinking water regulation. The ozone concentration to meet the drinking water regulation was much higher than the stoichiometric concentration. The reaction of soluble manganese removal was so fast that the reaction time does not affect the removal dramatically. When Mn(II) is existed with Fe, the removal of Mn(II) was not affected by Fe ion. However As(V) is existed as co-ion the removal of Mn(II) was decreased by 10%. Adding ozone to surface water has limited effect to remove dissolved organic matter. When ozone is used as oxidant to remove Mn(II) in the water, the existing co-ion should be evaluated to determine optimum concentration.

• Proceedings of the KIEE Conference
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• 1995.07c
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• pp.1410-1412
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• 1995

A high efficiency ozone generation using both of a electrode-edge discharge and a dielectric-harrier discharge from a modified silent type ozone generator has been proposed and studied for small scale applications. It is found that the output ozone concentration of the proposed generator depended greatly upon the air gap spacing and the applied power frequency and voltage on the ozone generation. The ozone generator showed higher ozone concentration than the same size of the ceramic type surface ozone generator(Masuda type one). And, it is found that the generator had a potential to be used as an ozone generator for small scale applications.

• Journal of Korean Society for Atmospheric Environment
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• v.18 no.4
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• pp.253-264
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• 2002

Surface ozone concentrations measured at 40 monitoring sites in three major cities (Seoul, Busan, and Daegu) of Korea during 1993~2000 were analyzed to understand the characteristics of temporal and spatial distributions. Trends were analyzed for annual mean, 95th percentiles of daily 8-hour maximum and days exceeding 8-h ozone standard of 60 ppb. Three indicators exhibited increasing trends (+0.75 ppb yr$^{-1}$ , +2.20 ppb yr$_{-1}$ , and +5.35 days yr$_{-1}$ on average) throughout the study period at all cities. Diurnal and seasonal variations were the largest in Seoul followed by Daegue and Busan, due to the high photochemical production and titration of ozone (Seoul), strong wind and constant supply of background ozone from the ocean (Busan). In the urban centers and industrial areas at all cities, scavenging of ozone by NO reduces the daily 8-hour maximum ozone by 10 ppb on average. High concentrations of ozone have frequently occurred in downwind eastern (Seoul and Daegu) or northern (Busan) sides of the territory. In particular, the coastal area of Busan had relatively high ozone level due to the local sea land breeze circulation. The results indicated that the temporal and spatial variations of ozone concentration were non -uniform and were closely related to the local environments; emission levels, climates, and geographic locations.

• Journal of Korean Society for Atmospheric Environment
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• v.24 no.3
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• pp.310-320
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• 2008

Concentration of tropospheric ozone ($O_3$) was investigated for the South Korea. And then the critical ozone levels, expressed as AOT40 (Accumulated exposure over a threshold of 40 ppb) to vegetation have been used in this region within the UNECE (United Nations Economic Commission for Europe) Convention on Long-Range Trans-boundary Air Pollution (CLRTAP). Hourly ozone concentration data from 1996 to 2001 at 26 air monitoring stations was used to estimate the exceedance of the critical levels. It was calculated for daylight hours for each station, and mapped using surface interpolation over the South Korea. The critical levels of ozone have shown the highly exceeded value in the Gyeonggi region, southern coastal region and central inland of the South Korea. It was some different from the typical ozone distribution which represented highly in the western inland and coastal regions. The area exceeding the critical level for crops was founded to be more than 40% of the whole South Korean territory. While that for trees was to be about 17% of the South Korea. The critical ozone critical level was based upon data from experiments on specific species, and thus may not be fully representative for all types of vegetation. Nevertheless, the critical level and its exceedance of the ozone concentration would be one of the useful tools for international agreements on abatement strategies to prevent ecosystem damage.