• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1999.06a
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• pp.47-52
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• 1999

In recent years, the micro-tribological behavior of silicon has been the topic of much interest. peformance of thin film under light load is important for potential applications in MEMS. In this work under light load and various humidity, the tribological behavior of undulated surface with various width and shape was Investigated. The results show that undulated surface of linear type had good tribological properties abrasive wear occur depending on the sliding condition. Also the effect of humidity on friction and wear was not important if exist undulation. Finally, undulations on HDD were found to be effective in trapping wear particles.

• Journal of the Korean institute of surface engineering
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• v.29 no.6
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• pp.703-708
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• 1996

Humidity sensing cheracterisrics of vacuum deposited plasma poly merized $YbPc_2$ films were evaluated. In both films, humidity caused an increase of pro-ton conduction. Polymerised film shows a threshold fo humidity increase and its sensitivity diminishes more than $38^{\circ}C$ of relative humidity. Furthermore, for the polymerized film, two min. of resssponse time and 1 min. of recovery time are also obtained. The sensitivity between 10% and 85% of relative hum-idities is found to be one hundred higher than that of the vacuum deposited film.

• Journal of Sensor Science and Technology
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• v.19 no.5
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• pp.337-341
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• 2010

In this work, the nanocrystalline ZnO/polycrystalline(poly) aluminum nitride(AlN)/ Si-layered structure was fabricated for humidity sensor applications based on surface acoustic wave(SAW). The ZnO film was used as a sensitive material layer. The ZnO and AlN(0002) were deposited by a sol-gel process and a pulse reactive magnetron sputtering, respectively. The ZnO sensitive films coated on AlN have a hexagonal wurtzite structure after the thin films annealed at $400^{\circ}C$, $500^{\circ}C$ and $600^{\circ}C$. The surface of the film exhibits sponginess and a nanometer particle size(below 50 nm). The largest shift in the frequency response was at approximately 200 kHz(the relative humidity: 10 %~90 %) for the structure annealed at $400^{\circ}C$. The effect of the change in the environmental temperature on the frequency response of the SAW humidity sensor was also investigated.

• The Korean Journal of Food And Nutrition
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• v.11 no.2
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• pp.221-227
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• 1998

This study was investigate correlation of moisture content, relative humidity, pH, color difference, myoglobin(Myo), oxymyoglobin(Oxy) and metmyoglobin(Met). The moisture content, relative humidity of loin and shank were not changed uniformly during storage, the pH was raised according to storage period. The L value was raised at the closing stage of the storage period, the surface of the b value was higher than interior. Between Myo and Met were positive correlation in common with loin and shank. The surface and interior of loin were negative correlation between Oxy and Met, the surface and interior shank were positive correlation between Myo and L value and were negative correlation between Myo and Oxy. The moisture content, relative humidity, pH and color was not correlation uniformly.

• Journal of Industrial Technology
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• v.33 no.A
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• pp.67-72
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• 2013

CNT(carbon nanotube) humidity sensors with plasma treated electrodes exhibit a much faster response time and a higher sensitivity to humidity, compared to untreated CNT and porous Cr electrodes. These results may be partially due to their percolated pore structure being more accessible for water molecules and for expending the diffusion of moisture to the polyimide sensing film, and partially due to the oxygenated surface of CNT films. This paper shows a plasma process effect and selectivity characteristics of CNT film humidity sensor.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.240-245
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• 2000

In this study, thickness, density and effective thermal conductivity of frost forming on the horizontal cylinder were measured with various air temperature and humidity. Reynolds number and temperature of cooling surface are controlled 17300 and $-l5^{\circ}C$ respectively. In each case of air temperature $5^{\circ}C,\;10^{\circ}C,\;15^{\circ}C,$ varying absolute humidity, experiments were executed. In measuring frost surface temperature and thickness of frost layer, infrared thermocouples and CCD camera were used. Frost was gathered from cylinder to measure mass of frost layer. Experimental data showed that the thickness and effective thermal conductivity of the frost layer increase with respect to time. Thickness of frost layer increase with humidity increasing, and density of frost layer increase with air temperature rising. Frost growth with air temperature and density of frost layer with humidity are affected by whether dew point is below or above freezing point.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 1998.05a
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• pp.75-75
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• 1998

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.34 no.5
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• pp.314-320
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• 2021

Controlling ambient humid condition through high performance humidity sensors has become important for various fields, including industrial process, food storage, and the preservation of historic remains. Although aerosol deposited humidity sensors using ceramic BaTiO₃ (BT) material have been widely studied because of their longtime stability, there remain critical disadvantages, such as low sensitivity, low linearity, and slow response/recovery time in case of the sensors fabricated at room temperature. To achieve superior humidity sensing properties even at room temperature condition, BT-Cu composite films utilizing aerosol deposition (AD) process have been proposed based on the percolation theory. The BT-Cu composite films showed gradually improved sensing properties until the Cu concentration reached 15 wt% in the composite film. However, the excessive Cu (above 30 wt%) containing BT-Cu composite films showed a rapid decrease of the sensing properties. The results of observed surface morphology of the AD fabricated composite films, to figure out the metal filler effect, showed correlation between surface topography as well as size and the amount of open pores according to the metal filler content. Overall, it is very important not only dielectric constant of the humidity sensing films but also microstructures, because they affect either the variation range of capacitance by ambient humidity or adsorption/desorption of ambient humidity onto/from the humidity sensing films.

• Journal of Korean Society for Atmospheric Environment
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• v.24 no.E2
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• pp.83-91
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• 2008

This work investigated the methodology to simultaneously optimize the ozone and relative humidity composition for the $NO_x$ degradation using soil biofilter. Experiments were made as a function of inlet ozone concentration ($0{\sim}1,770\;ppb$) and relative humidity ($38{\sim}81%$). Factorial design ($2^2+3$) and response surface methodology by central composite designs were used to examine the role of two factors and optimal response condition on $NO_x$ degradation. It was found that a second-order response surface model can properly interpret the experimental data with an $R^2$-value of 0.9730 and F-value of 71.83, based on which the maximum $NO_x$ degradation was predicted up to 92.8% within our experimental conditions.

• Tribology and Lubricants
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• v.15 no.1
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• pp.29-38
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• 1999

In recent years, the tribological behavior of coated ceramic material has been the issue of much interest. Particularly, the understanding of the tribological performance of thin film under light load is important for its potential in applications of MEMS. The friction and wear behavior of ceramic material that occur at light load depends on several factors such as surface roughness, contact area and material properties. In this work, the tribological behavior of coated silicon under light load and low speed was investigated. Particularly, the effects of coated materials, humidity and undulated surface were also studied. The results show that the effect of humidity on fiction was influenced by the apparent area of contact between the two surfaces. Also both adhesive and abrasive wear occurred depending on the sliding condition. Finally, undulations on the silicon wafer were found to be effective in trapping wear particles and resulted in the reduction of friction.