• 반도체디스플레이기술학회지
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• 제7권2호
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• pp.45-48
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• 2008

An epitaxial $\beta-FeSi_2$ structure on Si (001) substrate was calculated by using density functional theory (DFT). Unit cell of orthorhombic $\beta-FeSi_2$ and $\sqrt{2}\times\sqrt{2}\times2$ supercell were calculated to find the energetically favorable structures first. The $\chi$- and y-direction axes of $\beta-FeSi_2$ were changed into y- and z-direction axes to match its structure with that of Si, to minimize the lattice mismatch between $\beta-FeSi_2$ and Si. Distance between the Si (001) surface and the $\beta-FeSi_2$ surface was varied to find an optimum distance between them, resulting in 0.825 $\AA$.

• 반도체디스플레이기술학회지
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• 제15권1호
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• pp.56-64
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• 2016

It is generally accepted that the surface quality of wafer edge is mostly damaged by the vibrations of the edge grinding machine. The surface quality of wafer edge is supposed to be the most dominant factor of the cracks, scratches, burrs and chips on the edge surfaces, which are the main defects of the wafers. In this study, the structure of a wafer edge grinder has been investigated through the frequency response experiment and the computer simulation to find ways to suppress the vibrations from the structure. The main reasons of the structural vibrations were analyzed. And further the design alterations were deduced from the results of the experiment and the simulation, and applied to the machine to check the effects of those alterations and to eventually improve the structural stability. The result shows that the machine can have much improved stability with relatively simple design changes.

• 반도체디스플레이기술학회지
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• 제15권1호
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• pp.41-46
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• 2016

In this study, gas flow and temperature distribution in the multi-wafer planetary CVD reactor for the Si epitaxial growth were analyzed. Although the structure of the reactor was simplified as the first step of the study, the three-dimensional analysis was performed taking all these considerations of the revolution of the susceptor and the rotation of satellites into account. From the analyses, a reasonable velocity field and temperature field were obtained. However, it was found that analyses including the upper structure of the reactor were required in order to obtain more realistic temperature results. DCS mole fraction above the satellite surface and the susceptor surface without satellite was compared in order to check the gas species mixing. We found that satellite rotation helped gases to mix in the reactor.

• 한국표면공학회지
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• 제48권1호
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• pp.11-22
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• 2015

Pd alloy hydrogen membranes for hydrogen purification and separation need thermal stability at high temperature for commercial applications. Intermetallic diffusion between the Pd alloy film and the porous metal support gives rise to serious problems in long-term stability of Pd alloy membranes. Ceramic barriers are widely used to prevent the intermetallic diffusion from the porous metal support. However, these layers result in poor adhesion at the interface between film and barrier because of the fundamentally poor chemical affinity and a large thermal stress. In this study, we developed Pd alloy membranes having a dense microstructure and saturated composition on modified metal supports by advanced DC magnetron sputtering and heat treatment for enhanced thermal stability. Experimental results showed that Pd-Cu and Pd-Ag alloy membranes had considerably enhanced long-term stability owing to stable, dense alloy film microstructure and saturated composition, effective diffusion barrier, and good adhesive interface layer.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.432-433
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• 2006

Electro-optical (EO) characteristics of twisted nematic (TN) - liquid crystal display (LCD) on the NDLC thin film using obliquely ion beam (IB) exposure as new ion beam (IB) type system (DuoPIGatrion ion source). A good uniform alignment of the nematic liquid crystal (NLC) alignment with the ion beam exposure on the NDLC thin film was observed. In addition, it can be achieved the good EO properties of the ion-beam-aligned TN-cell on polyimide surface ; the stable VT curve in the ion-beam-aligned TN cell on the NDLC thin film with ion beam exposure using new type IB equipment was obtained. and the fast response time in the ion-beam-aligned TN cell on the NDLC thin film with ion beam exposure using new type IB equipment was obtained.

• 반도체디스플레이기술학회지
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• 제9권3호
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• pp.41-45
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• 2010

The ZnO thin films doped with Ga(GZO) and both Ga and Ge(GZO:Ge) were deposited on glass substrate by using RF sputtering system respectively. Structural, morphological and optical properties of the films deposited in the same condition were investigated. Structural properties of the films were investigated by Field Emission Scanning Electron Microscopy, FE-SEM images and X-ray diffraction, XRD analysis. These studies showed shape of films' surface and direction of film growth respectively. It's showed that all films were deposited by vertical orientation strongly. It can be confirmed that all dopants of targets were included in deposited films by results of EDX analysis. UV-Vis spectrometer results showed that all samples had highly transparent characteristics in visible region and have similar 3.28~3.31 eV band gap. It was found that existence of all dopants by EDX analysis. Morphology and roughness of surface of each film were clearly shown by Atomic Force Microscopy, AFM images. It was found in this research that film doped with Ge more dense and stable with hardly any difference in gap energy compared to ZnO films.

• Journal of the Optical Society of Korea
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• 제19권3호
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• pp.265-271
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• 2015

We propose a reactive mesogen (RM) lens array to obtain good focusing behavior along with a short focal plane, where the focusing behavior is switchable according to the polarization state of incident light. Polarization-dependent focusing behavior is obtained using a planoconvex RM microlens array on a planoconcave isotropic lens template. Even though the sagitta of our RM lens is high, to obtain the short focal length, the RM layer can be aligned well by introducing a top-down alignment effect, using a nanogrooved template. The optical noise due to the $moir{\acute{e}}$ effect generated by the nanogrooves on the surface of the planoconvex RM layer can be removed simply by overcoating a thin RM layer, which is self-aligned by the geometric surface effect, without an additional alignment process. We demonstrate a hexagonal-packed RM lens array that has a very high fill factor and symmetric phase profile, for an ideal lens.

• 반도체디스플레이기술학회지
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• 제17권3호
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• pp.46-52
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• 2018

Slitting, which is supposed to be one of the most critical processes in Li-Ion battery manufacturing, is supposed to cut off the uncoated parts of the foil, and cut the wide foils into the size of the Li-ion batteries. Vibrations of slitting machines are the most critical factors for uneven cut surface such as surface roughness and burr, which are the main reasons of the tearing of microporous membranes to separate the cathodes and the anodes, and eventually causing explosion of the batteries. In this study, the structure of a slitting machine has been analyzed through computer simulations to figure out the main reasons of the vibrations. The result of the study shows that simple design alterations of the supporting area and roller without modifying the main structure of the machine can suppress the vibrations effectively, and further to prevent the devastating explosion.

• 반도체디스플레이기술학회지
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• 제16권4호
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• pp.5-10
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• 2017

This paper analyzed the heat transfer characteristics on the outer surface of the ambient air vaporizer which received the heat from the air through natural convection by using numerical and experimental methods. The working fluid was a liquid nitrogen. The experimental variables were the length (2,000 mm, 1,800 mm, 1,600 mm) and width of the vaporizer fin and the fluid flow ($6.7m^3/h$, $7.1m^3/h$, $7.5m^3/h$). Based on the temperature data from the experiments, the heat transfer coefficient was calculated. Numerical analyses were also conducted in order to find the heat transfer coefficient for the range of Nusselt number which was difficult to get the data from experiments. The correlation equation between Nusselt number and Rayleigh number were suggested using both the experimental and numerical data.

• 반도체디스플레이기술학회지
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• 제16권3호
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• pp.1-7
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• 2017

Multi-wafer planetary type chemical vapor deposition reactors are widely used in thin film growth and suitable for large scale production because of the high degree of growth rate uniformity and process reproducibility. In this study, a two-dimensional model for estimating the effect of the gap between satellite and wafer on the wafer surface temperature distribution is developed and analyzed using computational fluid dynamics technique. The simulation results are compared with the results obtained from an analytical method. The simulation results show that a drop in the temperature is noticed in the center of the wafer, the temperature difference between the center and wafer edges is about $5{\sim}7^{\circ}C$ for all different ranges of the gap, and the temperature of the wafer surface decreases when the size of the gap increases. The simulation results show a good agreement with the analytical ones which is based on one-dimensional heat conduction model.