• Title/Summary/Keyword: surface aging

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CMP slurry aging effect by Particle Size analysis (입도 분석을 통한 CMP 슬러리 에이징 효과)

  • Shin, Jae-Wook;Lee, Woo-Sun;Choi, Kwon-Woo;Ko, Pil-Ju;Seo, Yong-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.05c
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    • pp.37-40
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    • 2003
  • As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. It is well known that the presence of hard and larger size particles in the CMP slurries increases the defect density and surface roughness of the polished wafers. In this paper, we have studied aging effect the of CMP slurry as a function of particle size. We prepared and compared the self-developed silica slurry by adding of abrasives before and after annealing. As our preliminary experiment results, we could be obtained the relatively stable slurry characteristics comparable to original silica slurry in the slurry aging effect.

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The Change of the Cyclic Aging Characteristics under Salt-fog/Heating on Silicone Rubber by ATH Additions (ATH 첨가에 의한 실리콘 고무의 염무/열 반복열화 특성 변화)

  • Lee, Chung;Kim, Ki-Yup;Kim, Gyu-Baek;Ryu, Boo-Hyung
    • Journal of the Korean Society of Safety
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    • v.20 no.3 s.71
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    • pp.58-63
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    • 2005
  • In this research, silicone rubber with additions of inorganic filler, alumina trihydrate$(Al(OH)_3\;:\;ATH)$, was aged acceleratedly and cyclically by the salt-fog and heating. The optimum amount of ATH addition to silicone rubber have been investigated by measurements of leakage current in the change of electrical properties and tensile strength, %elongation in mechanical properties and FT-IR, TG, SEM in the change of the chemical properties. With regard to un-aged silicone rubber, as the ATH addition amount increases, conductive path formation time was shortened in the electrical properties and tensile strength was increased, %elongation was decreased. In case of identical ATH addition amount, as cyclic aging increases, surface resistivity, tensile strength and %elongation were decreased. Considering the cyclic aging, the most effective amount of ATH addition was about 90phr.

The effect of glazing and aging on the surface properties of CAD/CAM resin blocks

  • Tekce, Neslihan;Fidan, Sinan;Tuncer, Safa;Kara, Dilan;Demirci, Mustafa
    • The Journal of Advanced Prosthodontics
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    • v.10 no.1
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    • pp.50-57
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    • 2018
  • PURPOSE. To investigate the effect of accelerated aging on surface properties of glazed CAD/CAM resin blocks using a 2D surface profilometer and a 3D non-contact optical profilometer. MATERIALS AND METHODS. Three types of CAD/CAM resin restorative materials, LAVA Ultimate (3M ESPE, St Paul, MN, USA), VITA Enamic (Vita Zahnfabrik H. Rauter, Bad $S\ddot{a}ckingen$, Germany), and Cerasmart (GC Corparation, Tokyo, Japan) were used for this study. CAD/CAM blocks were cut in 3-mm thickness slabs and divided into three groups; Group 1: control group (specimens polished with 600 grit SCI paper); Group 2: specimens sandblasted, silanized, and glazed with Optiglaze Color (GC); Group 3: glazed specimens subjected to 5000 thermocycles (n=15). The surface roughness ($R_a$ and $R_z$) was evaluated using a profilometer and a 3D scanning instrument. Data were analyzed using two-way ANOVA and Tukey's post- hoc test (P<.05). RESULTS. LAVA, VITA, and Cerasmart exhibited statistically similar $R_a$ and $R_z$ values for each group (P>.05). For VITA and Cerasmart, the specimens in Group 1 exhibited significantly higher $R_a$ values than Group 2 (P<.05). Group 1 ($0.502R_a$), Group 2 ($0.384R_a$), and Group 3 ($0.431R_a$) exhibited statistically similar $R_a$ values for LAVA (P=.062). After 5000 thermocycles, surface roughness values did not change significantly for glazed LAVA, VITA, and Cerasmart (P>.05). CONCLUSION. Glaze material Optiglaze Color makes CAD/CAM resin surfaces smooth and glazed CAD/CAM surfaces seem resistant to deterioration under 5000 thermocycles.

Development of the Advanced NDI Technique Using an Alternating Current : the Evaluation of surface crack and blind surface crack and the detection of defects in a field component (교류전류를 이용한 새로운 비파괴탐상법의 개발;표면결함과 이면결함의 평가 및 실기 부재의 결함 검출)

  • Kim. H.;Lim, J.K.
    • Journal of Welding and Joining
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    • v.13 no.2
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    • pp.42-52
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    • 1995
  • In the evaluation of aging degradation on the structural materials based on the fracture mechanics, the detection and size prediction of defect are very important. Aiming at nondestructive detection and size prediction ol defect with high accuracy and resolution, therefore, an lnduced Current Focusing Potential Drop(ICFPD) technique has been developed. The principle of this technique is to induce a focusing current at an exploratory region by an induction wire flowing an alternating current(AC) that is a constant ampere and frequency. Defects are assessed with the potential drops that are measured the induced current on the surface of metallic material by the potential pick-up pins. In this study, the lCFPD technique was applied for evaluating the location and size of the surface crack and blind crack made in plate specimens, and also for detecting the defects existing in valve, a field component, that were developed by SCC etc. during the service. The results of this present study show that surface crack and blind crack are able to defect with potential drop. these cracks are distinguished with the distribution of potential drop, and the crack depths can be estimated with each normalized potential drop that are parameters estimating the depth of each type crack. In the field component, the defects estimated by experiment result correspond with those in the cutting face of the measuring point within a higher sensitivity.

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Effect of Aging on Adhesive Strength of Rubber-steel Cord Composite and Tire-endurance (고무-스틸 코드 접착력과 타이어 내구력에 미치는 노화의 영향)

  • Lim, Won-Woo
    • Journal of Adhesion and Interface
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    • v.3 no.2
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    • pp.40-44
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    • 2002
  • We invested effect of the keeping-time of uncured composite and thermal aging, of cured composite on adhesive strength for rubber-brass coated steel cord composite in this study. We also evaluated how the adhesive strength affects to tire endurance. Using PAD adhesion specimen, peel adhesive strength was measured. The uncured composite was kept for several days up to 35 days in factory. Cured composite was also kept for 5 and 10 days at $85^{\circ}C$ in dry oven. Peel adhesive strength was decreased with increasing keeping-time and showed lower value with increasing thermal aging time. The lower peel adhesive strength, the lower tire-endurance. This fact was caused by the humidity and thermal aging which affected in the decrease of adhesive strength of the rubber-steel cord composite and resulted in interface fracture between rubber and steel cord. This phenomenon was confirmed from SEM investigation and tire-endurance. It was just known that corrosion of steel cord's surface and aging of adhesive layer strongly affected to decrease of adhesive strength. This resulted in directly decreasing tire-endurance.

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Effect of aging on the optoelectronic properties of a single ZnO nanowire (단일 ZnO 나노선의 광전 특성에 대한 에이징 효과)

  • Keem, Ki-Hyun;Kang, Jeong-Min;Jeong, Dong-Young;Kim, Sang-Sig
    • Journal of IKEEE
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    • v.10 no.2 s.19
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    • pp.161-167
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    • 2006
  • The effect of aging on the optoelectronic properties of a single ZnO nanowire is investigated in this study. The photoluminescence (PL), photocurrent spectrum, current-voltage characteristics, and photoresponse were measured for the as-grown ZnO nanowire and for the same nanowire exposed to air for three months. For the aged nanowire, the broad PL band is weaker, the intensity of the photocurrent is strengthened, and the photoresponse is slower, compared with the as-grown nanowire. It Is suggested in this paper that the observed aging effect on the PL is due to the reduction in the number of oxygen vacancies within the nanowire and that the aging effect on the photocurrent and photoresponse originates from the formation of oxygen vacancies near the surface.

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Preparation and Characterization of Organic-inorganic Hybrid Composite Film with Plate-shaped Alumina by Electrophoretic Deposition as a Function of Aging Time of Sol-Gel Binder

  • Kim, Doo Hwan;Park, Hee Jeong;Choi, Jinsub;Lim, Hyung Mi
    • Journal of the Korean Ceramic Society
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    • v.52 no.5
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    • pp.366-373
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    • 2015
  • Sol-gel binder was prepared by hydrolysis and condensation reaction using boehmite sol and methyltrimethoxysilane as a function of aging-time. The coating slurry was composed of a plate-shape alumina in the sol-gel binder for the EPD process, in which particles dispersed in the slurry were deposited on the electrode under an electric field due to the surface charge. We studied the effects of three parameters: the content of boehmite, the aging time, and the applied voltage, on the physical, thermal, and electrical properties of the hybrid composite films by EPD. The amount of boehmite was 10 ~ 20 wt% and the aging time was 0.5 ~ 72, with a fixed amount of plate-shape alumina of 10 wt%. The condition of applied voltage was 5 ~ 30 V with a distance of 2 cm between the electrode during the EPD process. We confirmed that a structure of hybrid composite films of well-ordered plate alumina was deposited on the substrate when the film was prepared using a sol-gel binder composed of 15 wt% boehmite with 1 hr aging time and EPD at 10 V. The process shows a weight loss of 7% at $500^{\circ}C$ in TGA and a breakdown voltage of 8 kV at $87{\mu}m$.

A Study on Fracture Surface of Aged Turbine by Fractal Dimension

  • Kim, Amkee;Nahm, Seung-Hoon
    • Journal of Mechanical Science and Technology
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    • v.15 no.10
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    • pp.1417-1422
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    • 2001
  • Since fracture surface presents clear evidence to describe the circumstances of material failure event, analysis of fracture surface should provide plenty of useful information for failure prevention. Thus if we extract proper information from the fracture surface, the safety evaluation, for plant component could be more accurate. In general, the chaotic morphology of fracture surface is determined by the degree of material degradation as well as by other factors such as type of load, geometry of specimen, notch condition, microstructure of material and environment. In this research, we developed a fractal analysis technology for the fracture surface of aged turbine rotor steel based on the slit-island technique using an image analyzer. Moreover the correlation between the fractal dimension and the aging time was studied.

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Effects on Bond Strength between Zirconia and Porcelain according to Etching Treatment and Low Temperature Degradation (지르코니아 표면에칭처리와 저온열화현상이 지르코니아와 전장도재의 결합강도에 미치는 영향)

  • Park, Jin-Young;Kim, Jae-Hong;Kim, Woong-Chul;Kim, Ji-Hwan;Kim, Hae-Young
    • Journal of dental hygiene science
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    • v.14 no.2
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    • pp.140-149
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    • 2014
  • The purpose of this study was to investigate the influence of etching surface treatment and aging treatment of zirconia on the shear bond strength between zirconia core and veneered ceramic. Four groups of zirconia-ceramic specimens were prepared; 1) NEZ group (no etching zirconia), 2) EZ group (etching zirconia), 3) ANEZ group (aging and no etching zirconia), 4) AEZ group (aging and etching zirconia). The shear bond strength between zirconia and porcelain was measured using Instron Universal Testing Machine. Surface texture with crystalline structure of zirconia surface was examined by the field emission scanning electron microscopy (FE-SEM) with ingredient analysis. The fractured surfaces of specimens were examined to determine the failure pattern by a digital microscope. The mean${\pm}$standard deviation of shear bond strengths were $23.47{\pm}3.47$ Mpa in NEZ, $28.30{\pm}4.34$ Mpa in EZ, $21.85{\pm}4.65$ Mpa in ANEZ, $24.65{\pm}3.65$ Mpa in AEZ group, respectively, and were significantly different (p<0.05). The average shear bond strength was largest in EZ group, followed by AEZ, NEZ, and ANEZ groups. Most specimens in NEZ group showed adhesive failure and most specimens in EZ, AEZ, and ANEZ group showed mixed failure. Surface of etching treatment group (EZ and AEZ) showed complex micro-structure and irregular surface texture which may facilitate mechanical interlocking, while untreated zirconia surface presented simpler micro-structure. In conclusion, an etching treatment improved bonding strength between zirconia and porcelain by forming mechanical interlocking.

A Study on the Thermal Degradation Properties of Epoxy Resin for Cast Resin Transformer (몰드변압기용 에폭시 수지의 열 열화특성에 관한 연구)

  • Lim, Kyung-Bum;Nam, Ki-Dong;Kim, Ki-Hwan;Park, Su-Hong;Hwang, Myung-Hwan
    • Fire Science and Engineering
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    • v.22 no.2
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    • pp.44-48
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    • 2008
  • In this paper, we measured a contact angle, surface resistivity and XPS to study the thermal aging characteristics of the epoxy resin for cast resin transformer. As a result of this experiment, we found that the contact angle increases up to $200^{\circ}C$ as it causes a re-crosslinking on the surface, but starts decreasing at $250^{\circ}C$ as it causes heat condensation. As a result of examining the oxygen/carbon peaks through the XPS analysis, we obtained a higher oxygen peak vs. carbon in the first untreated sample, but it showed the opposite trend after heat treatment. That rise in the carbon peak continued up to $200^{\circ}C$, but decreased again at the temperatures above. That's because it kept forming a stable surface structure up to $200^{\circ}C$ but its carbon combination got destroyed due to a rapid oxidization at $250^{\circ}C$. And a conduction path was formed easily with the hydrophile property caused by rapid surface activation.