• Title/Summary/Keyword: substrates

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Electrical properties of PZT thin films deposited on corning glass substrates (Corning glass 기판위에 증착된 PZT 박막의 전기적 특성)

  • Ju, Pil-Yeon;Jeong, Kyu-Won;Park, Young;Kim, Hong-Joo;Park, Ki-Yup;Song, Joon-Tae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.263-266
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    • 2000
  • Effects of excess Pb(50 mole %) on the crystallization properties of amorphous PZT thin films on the glass substrates by post-annealing in oxygen ambient were investigated to lower the crystallization temperature of the PZT thin films with a single perovskite phase. The PZT thin films(350nm) were prepared on Pt/Ti/corning glass(1737) substrates. The PZT thin films and bottom electrode were deposited by RF magnetron sputtering. Crystallization properties of PZT thin films were strongly dependent on RTA(Rapid Thermal Annealing) temperature. We were able to obtain a perovskite structure of PZT at 600$^{\circ}C$ for 10min. After thermal treatments were done, electrical properties such as I-V, P-E, and fatigue were measured.

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Optimization of Current Distributions of Electroplating on Patterned Substrates with the Auxiliary Electrode (보조 전극을 이용한 패턴된 전극에서의 전류 밀도 분포의 최적화)

  • 김남석;모화동;강탁
    • Journal of the Korean institute of surface engineering
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    • v.28 no.3
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    • pp.164-173
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    • 1995
  • Based on the potential-theory model for secondary current distribution, we could predict the thickness distributions of electroplating on patterned substrates with the different size of the auxiliary electrode. The substrates contain lithographic patterns at each sample geometry. Each sample geometry had different current distribution at the same condition except the size of the auxiliary electrodes. The size effect of the auxiliary electrode on thickness distribution of electrodeposition on patterned electrode was investigated in a series of experiments. Copper was galvanostatically deposited from an acid-sulfate solution in a reciprocating paddle cell. The thickness distributions of the workpiece scale measured by profilometry across the specimen were in good agreement with the current distribution predicted by boundary element method.

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Mechanochemistry on Self-Assembled Monolayer(SAM) /Electrodes after Contacting with Polymeric Stamp (고분자물질과 접촉한 자기조립단분자막 전극 물질의 기계화학 현상 분광학적 연구)

  • Yun, Changsuk
    • Journal of the Korean institute of surface engineering
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    • v.53 no.5
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    • pp.265-270
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    • 2020
  • We investigated mechanochemical radical, which is concomitant with chemical lift-off lithography(CLL), on the self-assembled monolayer(SAM)/electrodes and a polydimethylsiloxane(PDMS) using a colorimetric and a spectroscopic method. The 11-mercaptoundecanol(MUO)/Au or the 11-hydroxyundecylphosphonic acid (HUPA)/ITO were contacted with bare or activated PDMS. After contact, the each of SAM/substrates and the PDMS were immersed in a 2,2 Diphenyl-1-picrylhydrazyl(DPPH) radical scavenger. The color of the DPPH exposed to the PDMS was changed from purple to yellow and the absorbance decreased definitely at 515 nm wavelength. The SAM/substrates, however, have caused small changes in spectroscopic property, indicating no existence of radical species. We concluded that mechanochemical radicals were formed by homolytic cleavage of PDMS molecules upon external force and hardly transferred on the SAM/substrates.

Electro-Optical characteristics on the rubbing-aligned plastic Twisted Nematic cell (플라스틱 러빙처리된 TN셀의 전기광학 특성)

  • Nam, Ki-Hyung;Hwang, Jeoung-Yeon;Kim, Jong-Hwan;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.04a
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    • pp.18-22
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    • 2004
  • We have investigated the generation of pretilt angle for a nematic liquid crystal (NLC) alignment with rubbing alignment method on polyimide surfaces using thin plastic substrates. It was found that monodomain alignment of NLC is obtained with rubbing alignment method on polyimide surfaces using thin plastic substrates. The NLC pretilt angles generated are about $3^{\circ}$ by the rubbing alignment method on thin plastic substrates, However, the pretilt angle are at about $1.7^{\circ}$ lower on the glass substrate than on thin plastic substrate. Also, EO characteristics of the TN-LCD with a rubbed PI surface based on polymer are almost the same as that of the TN-LCD with a rubbed PI surface based on glass. However, the transmittances of the TN-LCD with a rubbed PI surface based on polymer is less than that with a rubbed PI surface based on glass.

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A Study on thinning of SDB SOI by electrochemical etch-stop (전기화학적 식각정지에 의한 SDB SOI의 박막화에 관한 연구)

  • 김일명;이승준;강경두;정수태;주병권;정귀상
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.362-365
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    • 1999
  • This paper describes on thinning SDB SOI substrates by SDB technology and electrochemical etch-stop. The surface of the fabricated SDB SOI substrates is more uniform than that grinding or polishing by mechanical method, and this process is possible to accurate SOI thickness control. During Electrochemical etch-stop, leakage current versus voltage curves were measured for analysis of the open current potential (OCP) point and the passivation potential (PP) poin and determinated to anodic substrates were analyzed by using AFM and SEM, respectivelv.

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Liquid Crystal Alignment Effect with in-situ Photoalignment on Plastic Substrates (플라스틱 기판을 이용한 in-situ 광배향법에 의한 액정배향 효과)

  • Hwang, Jeoung-Yeon;Nam, Ki-Hyung;Kim, Jong-Hwan;Kim, Kang-Woo;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.80-83
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    • 2003
  • We have investigated the generation of pretilt angle for a nematic liquid crystal (NLC) alignment with in-situ photoalignment method on polyimide (PI) surfaces using thin plastic substrates. The LC aligning capabilities and pretilt angle of the thin plastic substrates by in-situ photoalignment method were better than that of the glass substrate by general photoalignment. Also, the LC pretilt angle increased with increasing healing temperature and exposure time.

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Fabrication of Large-Scale Single-Crystal Organic Nanowire Arrays for High-Integrated Flexible Electronics

  • Park, Gyeong-Seon;Seong, Myeong-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.266.1-266.1
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    • 2013
  • Large-scale single-crystal organic nanowire arrays were generated using a direct printing method (liquidbridge- mediated nanotransfer molding) that enables the simultaneous synthesis, alignment and patterning of nanowires from molecular ink solutions. Using this method, single-crystal organic nanowires can easily be synthesized by self-assembly and crystallization of organic molecules within the nanoscale channels of molds, and these nanowires can then be directly transferred to specific positions on substrates to generate nanowire arrays by a direct printing process. Repeated application of the direct printing process can be used to produce organic nanowire-integrated electronics with two- or three-dimensional complex structures on large-area flexible substrates. This efficient manufacturing method is used to fabricate all-organic nanowire field-effect transistors that are integrated into device arrays and inverters on flexible plastic substrates.

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Effect of Substrate Roughness on the Adhesion of TiN Deposition by PACVD (플라즈마 화학증착법에 있어 모재의 표면조도가 TiN 박막층의 밀착력에 미치는 영향에 관하여)

  • Kang, H.Y.;Kim, M.I.
    • Journal of the Korean Society for Heat Treatment
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    • v.4 no.2
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    • pp.27-37
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    • 1991
  • The adhesion strength of TiN films to substrate(STC 3) steel has been studied using the scratch adhesion test. Before deposition, the substrates were mechanically polished and TiN films were deposited at different substrate temperature($480^{\circ}C-540^{\circ}C$). The chemical properties of TiN films were investigated by RBS, and EDS, and the physical properties were investigated by micro-hardness tester, SEM, and X-ray diffractometer. According to results of this study, the adhesion strength of TiN films increase with increasing the deposition temperature. The roughness of the polished substrates surface were measured with a profilometer. It was observed that, as a general rule, the adhesion strength of deposited TiN films increase with decreasing the substrates surface roughness.

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Characterization of conducting aluminium doped zinc oxide (ZnO:Al) thin films deposited on polymer substrates (폴리머 기판위에 증착된 ZnO:Al 전도막의 특성연구)

  • Koo, Hong-Mo;Kim, Se-Hyun;Park, Jong-Wan
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.535-538
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    • 2004
  • Zinc Oxide (ZnO) films have attracted considerable attention for transparent conducting films, because of their high conductivity, good optical transmittance from UV to near IR as well as a low-cost fabrication. To increase the conductivity of ZnO, doping of group III elements (Al, Ga, In and B) has been carried out. Transparent conducting films have been applied for optoelectric devices, the development of the transparent conducting thin films on flexible light-weight substrates are required. In this research, the transparent conducting ZnO thin films doped with Aluminum (Al) on polymer substrates were deposited by the RF magnetron suputtering method, and the structural, optical and electrical properties were investigated.

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Large Acceleration Effects of Mono-6-(alkylamino)-$\beta$-cyclodextrins on the Cleavage of p-Nitrophenyl $\alpha$-Methoxyphenylacetate

  • Kwanghee Koh;Byung-Kue Kang
    • Bulletin of the Korean Chemical Society
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    • v.15 no.9
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    • pp.795-799
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    • 1994
  • Kinetic studies of the deacylation reactions of p-and m-nitrophenyl esters of (R or S)-${\alpha}$ -methoxyphenylacetic acid were performed in ${\beta}$ -CD, mono-6-deoxy-6-[N-(2-aminoethyl)]amino-${\beta}$-CD (${\beta}$-CDen) and mono-6-deoxy-6-[N-(2-aminoethyl)-2-aminoethyl] amino-${\beta}$-CD (${\beta}$-CDdien) media. The binding constants (K) of the substrates to the hosts and the rate constants ($k_{\varphi}^{CD}$) for the complexed substrates were determined. $k_{\varphi}^{CD}$ values are highly dependent on the hosts and the substrates, whereas differences in K values among them are modest. The p-nitrophenyl esters show larger acceleration by -${\beta}$-CDen and -${\beta}$-CDdien than the corresponding m-isomers, while the m-isomers are more reactive than the p-isomers in -${\beta}$-CD media. This is taken as an indication that the amino groups attached to the primary side of -${\beta}$-CD participate in the deacylation reaction.