• 제목/요약/키워드: substrate thickness

검색결과 1,911건 처리시간 0.025초

Characterization of vanadium carbide coating deposited by borax salt bath process

  • Aghaie-Khafri, M.;Daemi, N.
    • Advances in materials Research
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    • 제1권3호
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    • pp.233-243
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    • 2012
  • Thermal reactive diffusion coating of vanadium carbide on DIN 2714 steel substrate was performed in a molten borax bath at $950-1050^{\circ}C$. The coating formed on the surface of the substrate had uniform thickness ($1-12{\mu}m$) all over the surface and the coating layer was hard (2430-2700 HV), dense, smooth and compact. The influence of the kinetics parameters, temperature and time, has been investigated. Vanadium carbide coating was characterized by scanning electron microscopy (SEM), energy dispersive X-ray spectrometry (EDX) and X-ray diffraction analysis (XRD). The corrosion resistance of the coating was evaluated by potentiodynamic polarization in 3.5% NaCl solution. The results obtained showed that decrease of coating microhardness following increasing time and temperature is owing to the coarsening of carbides and coating grain size.

졸겔법으로 제작된 BST 박막의 구조적 특성 (A Study on Surface of BST Thin Films by Sol-Gel Methods)

  • 홍경진;민용기;조재철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.377-380
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    • 2001
  • The BST thin films to composite (Ba$\sub$x/Sr$\sub$l-x/)TiO$_3$ using sol-gel method were fabricated on Pt/Ti/SiO$_2$/Si substrate. The thin film capacitor to be ferroelectric materials was investigated by structural and electrical properties. BST solution was composited by moi ratio, and then spin-coated (from 3 times to 5 times coating on Pt/SiO$_2$/Si substrate. Thickness of BST ceramics thin films are about 2600∼2800[${\AA}$] in 3 times deposition. The property of leakage current was stable when the applied voltage was 3[V]. Leakage current of 3 times coated BST thin film was 10$\^$-9/∼10$\^$-11/[A] at 0∼3[V].

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Y211 기판 위의 Bi-2212 후막의 후열처리 특성 (Annealing Characteristic of Bi-2212 thick Films on Y2l1 substrate)

  • 강형곤;임성훈;정동철;임성우;한병성
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 1999년도 High Temperature Superconductivity Vol.IX
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    • pp.296-299
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    • 1999
  • Bi$_2Sr_2CaCu_2O$(Bi-2212) thick films were fabricated on Y2l1 substrate by screen printing method. And the samples were annealed in various atmospheres, respectively. Though samples had many voids, the sample annealed in N$_2$ ; O$_2$ = 1:0 atmosphere and the sample in N$_2$ : O$_2$ = 0:1 showed some Bi 2212 low phase in comparison to other samples. The thickness of Bi-2212 on Y2ll substrates was about 20 ${\mu}$m.

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폴리머 원형 튜브 대상 미세 패턴 정수압 성형 (Micro Pattern Forming on Polymeric Circular Tubes by Hydrostatic Pressing)

  • 임성한
    • 소성∙가공
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    • 제23권8호
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    • pp.507-512
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    • 2014
  • The objective of the current investigation is to establish techniques in micro pattern forming operations of polymeric circular tubes by using hydrostatic pressing. This method was developed and successfully applied to the micro pattern forming on polymeric plates. The key idea of the new technique is to pressurize multiple vacuum-packed substrate-mold stacks above the glass transition temperature of the polymeric substrates. The new process is thought to be a promising micro-pattern fabrication technique for two reasons; first, (hydro-) isostatic pressing ensures a uniform micro-pattern replicating condition regardless of the substrate area and thickness. Second, multiple curved substrates can be patterned at the same time. With the prototype forming machine for the new process, micro prismatic array patterns, 25um in height and 90 degrees in apex angle, were successfully made on the PMMA circular tubes with diameters of 5~40mm. These results show that this process can be also used in the micro pattern forming process on curved plates such as circular tube.

화학증착법에 의한 여러 가지 강들위에 증착된 TiC의 결정학적 특성 (The Crystallographic Properties of TiC Deposited on Different Substrate Steel by Chemical VaporDeposition)

  • 윤순길;김호기
    • 한국세라믹학회지
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    • 제24권6호
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    • pp.519-526
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    • 1987
  • TiC was deposited onto several substrate steels by the Chemical Vapor Deposition technique from TiCl4-CH4-H2 gas mixtures in the horizontal resistance furnace. Deposition rates and morphologies of the coatings were investigated with the carbon contents. Deposition thickness increased linearly with the deposition time in the Presence of CH4 gas. The various interlayers of coating by EDS and X-ray Diffraction were proved as Cr7C3 and Fe3C. Chromium contents did not affect the preferred orientation of TiC deposit. The deposition was controlled by a mass transport and a surface reaction in case of 1 wt% C-5.25 wt% Cr steel irrespective of deposition temperature.

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응력 분포에 따른 압전 유니모프 작동기의 성능 평가 (Performance Evaluation for Piezoelectric Unimorph Actuator with Stress Distribution)

  • 이종원;강래형;한재흥;정상준;고한영
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2008년도 춘계학술대회논문집
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    • pp.127-131
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    • 2008
  • This paper deals with the performance evaluation of piezoelectric unimorph actuator. In the unimorph design, the thickness ratio of substrate to piezoelectric material and the elastic modulus ratio of substrate to piezoelectric material are important parameters. There exists only one structural configuration that satisfies the optimal condition among them, and actuators using that configuration exhibit better actuating displacements. Another design parameter is the piezoelectric coefficient which can be improved due to the induced tensile stress and voltages. The application of the tensile stress to the piezoelectric material makes it get higher piezoelectric coefficient and the total displacement performance of the unimorph actuator is improved. Finally, the piezoelectric actuator system with spring elements is fabricated and it shows higher actuating displacement capability.

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Co-sputtering으로 형성된 ZT/PZT/ZT 강유전체 다층막 구조의 특성에 관한 연구 (A Study on the Characteristics of ZT/PZT/ZT Ferroelectric Multi-layer Thin Films Deposited by Co-sputtering)

  • 주재현;길덕신;주승기
    • 한국세라믹학회지
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    • 제31권10호
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    • pp.1115-1122
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    • 1994
  • ZT/PZT/ZT multi-layered thin films were deposited on silicon substrate by co-sputtering method for FEMFET device application. Effects of Pb/(Zr+Ti) ratio, films thickness, annealing conditions and substrate temperature on the ferroelectric behavior of the multi-layered films were studied. The best memory device characteristics with leakage current of 2$\times$10-8 A/$\textrm{cm}^2$ and breakdown field of about 1 MV/cm could be obtained with ZT(250 $\AA$) / PZT(1000 $\AA$)/ZT(750 $\AA$) multi-layered thin film deposited at 35$0^{\circ}C$ and post-annealed at $700^{\circ}C$ for 120 sec by RTA(Rapid Thermal Annealing).

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A Design for a CPW-Fed Monopole Antenna with Two Modified Half Circular Rings for WLAN/WiMAX Operations

  • Kim, Woo-Su;Yoon, Joong-Han
    • Journal of information and communication convergence engineering
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    • 제13권3호
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    • pp.159-166
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    • 2015
  • In this paper, a novel design for a triple-band coplanar waveguide (CPW)-fed monopole antenna for WLAN/WiMAX operations is proposed. The proposed antenna is printed on an FR4 substrate with an area of 22.0 mm × 30.0 mm, a thickness of 1.0 mm, and a relative permittivity of 4.4. The effects of various parameters of the proposed for triple band operation is investigated. Two half circular rings and a microstrip feed line are fabricated on the substrate to achieve triple band operation and good impedance matching. Prototypes of the proposed antenna have been fabricated and tested. Experiment results reveal that the measured return loss exhibits an acceptable agreement with the simulated return loss and satisfies the impedance bandwidth requirement of -10 dB, while simultaneously covering the WLAN and WiMAX bands. In addition, the proposed antenna shows good radiation characteristics and gains in the three operating bands.

다이아몬드막의 광전도성에 관한 수소 플라즈마 표면 처리의 효과 (Effect of Hydrogen Plasma Treatment on the Photoconductivity of Free-standing Diamond Film)

  • Sung-Hoon, Kim
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1999년도 PROCEEDINGS OF 99 INTERNATIONAL CONFERENCE OF THE KACG AND 6TH KOREA·JAPAN EMG SYMPOSIUM (ELECTRONIC MATERIALS GROWTH SYMPOSIUM), HANYANG UNIVERSITY, SEOUL, 06월 09일 JUNE 1999
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    • pp.337-350
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    • 1999
  • Thick diamond film having ~700${\mu}{\textrm}{m}$ thickness was deposited on polycrystalline molybdenum (Mo) substrate using high power (4kW) microwave plasma enhanced chemical vapor deposition (MPECVD) system. We could achieve free-standing diamond film via detaching as-deposited diamond film from the substrate by rapid cooling them under vacuum. We investigated the variation of photoconductivity after exposing the film surface to either oxygen or hydrogen plasma. At as-grown state, the growth side (the as-grown surface of the film) showed noticeable photoconductivity. The oxygen plasma treatment of this side led to the insulator. After exposing the film surface to hydrogen plasma, on the other hand, we could observe the reappearing of photoconductivity at the growth side. Based on these results, we suggest that the hydrogen plasma treatment may enhance the photoconductivity of free-standing diamond film.

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스크린 프린팅법으로 제조된 PAN-PZT 후막의 특성 (Charicteristics of PAN-PZT Thick Films on Si-Substrate by Screen Printing)

  • 김상종;최지원;김현재;성만영;윤석진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.139-142
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    • 2002
  • Characteristics of piezoelectric thick films prepared by screen printing were investigated. The piezoelectric thick films were fabricated using Pb(Al,Nb)O$_3$-Pb(Zr,Ti)O$_3$ system on Si-substrate. The fabricated thick films were burned out at 400$^{\circ}C$ and sintered at 850∼1000$^{\circ}C$ using rapid thermal annealing(RTA) precess. The thickness of piezoelectric thick films were 10$\mu\textrm{m}$. PAN-PZT thick film on Ag-Pd/SiO$_2$/Si prepared at 900$^{\circ}C$/1300sec had remanent polarization of 19.70 ${\mu}$C/$\textrm{cm}^2$.

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