• Journal of electromagnetic engineering and science
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• 제6권2호
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• pp.135-145
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• 2006

This paper presents the theory, design, fabrication and characterization of the novel low actuation voltage capacitive shunt RF-MEMS switch using a corrugated membrane with HRS MEMS packaging. Analytical analyses and experimental results have been carried out to derive algebraic expressions for the mechanical actuation mechanics of corrugated membrane for a low residual stress. It is shown that the residual stress of both types of corrugated and flat membranes can be modeled with the help of a mechanics theory. The residual stress in corrugated membranes is calculated using a geometrical model and is confirmed by finite element method(FEM) analysis and experimental results. The corrugated electrostatic actuated bridge is suspended over a concave structure of CPW, with sputtered nickel(Ni) as the structural material for the bridge and gold for CPW line, fabricated on high-resistivity silicon(HRS) substrate. The corrugated switch on concave structure requires lower actuation voltage than the flat switch on planar structure in various thickness bridges. The residual stress is very low by corrugating both ends of the bridge on concave structure. The residual stress of the bridge material and structure is critical to lower the actuation voltage. The Self-alignment HRS MEMS package of the RF-MEMS switch with a $15{\Omega}{\cdot}cm$ lightly-doped Si chip carrier also shows no parasitic leakage resonances and is verified as an effective packaging solution for the low cost and high performance coplanar MMICs.

• 한국자기학회지
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• 제15권5호
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• pp.287-291
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• 2005

새로운 저온 박막증착 공정인 원자층 증착방법으로 증착된 $HfO_2$ 박막을 게이트의 유전물질로 사용하여 MOSFET 소자를 제작하기 위하여 $HfO_2$ 박막의 특성을 개선하고 평가하였다. MOSFET 소자는 p-type (100) 실리콘 웨이퍼 위에 두께가 $5\~6\;nm$인 원자층 증착 $HfO_2$ 박막을 증착한 다음, 압력이 $1\~20\;atm$의 $H_2$ 가스로 열처리 하여 활성 영역이 $5{\times}10^{-5}\;cm^2$이 되도록 알루미늄으로 전극을 증착하였다. 제작된 MOSFET 소자는 열처리 압력이 20 atm일 경우 $5\~10\%$ 정도 드레인 전류와 transconductance가 개선되었으며, 이것은 고집적화된 소자의 신뢰성 향상에 크게 기여할 것으로 생각된다.

• 한국자기학회지
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• 제9권4호
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• pp.203-209
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• 1999

CoCrTa/Cr 자성박막의 Cr 하지층에 Mo와 Si을 첨가하여 제조한 박막의 자기적 성질에 미치는 Mo와 Si의 영향에 대하여 조사하였다. 증착시 사용된 장비는 DC magnetron sputtering system이었고, CoCrTa 자성층의 두께는 30.0$\AA$으로 Cr 하지층의 두께는 700$\AA$으로 고정하였으며 기판의 가열온도는 26$0^{\circ}C$이었다. CrMo 하지층의 박막이 순수한 Cr 하지층에 비하여 약 200 Oe의 보자력 증가를 나타내었다. 하지만 Si을 첨가하였을 경우엔 첨가량의 증가에 따라 보자력이 점차 감소하는 것으로 나타났다. CrMo 하지층에서는Mo를 첨가함에 따라 Cr 하지츠의 (200)면의 결정배향성이 증가하였고, Mo를 첨가한 Cr(200)과 CoCrTa(110)의lattice misfit가 Si을 첨가한 경우보다 작았고, 이것이 보자력 증가의 원인이었다.

• 한국재료학회지
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• 제3권6호
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• pp.598-605
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• 1993

고분자 전해질의 화학구조가 감습특성에 미치는 효과를 조사하기 위하여 $C_{1}\sim C_{12}$의 알킬,benzy1, 2,2-diethoxy dthy1기가 치환된 메타크릴계 4차 암모늄 단량체들을 합성하였다. 이들의 감습용액을 0.15mm간격의 빗살 모양의 금전극이 인쇄된 알루미나 기판에 마이크로 주사기로 도포하여 광중합 후 상대습도에 따른 임피던스 변화를 측정하였다. 도포된 막의 두께가 증가하면 임피던스는 감소하고, 치환기의 탄소 길이가 증가할수록 임피던스는 증가하였다. $C_6\sim C_8$의 알킬기를 가지는 고분자 전해질의 감습특성은 30-90% RH 범위에서 18M$\Omega$-5K$\Omega$의 직선적인 임피던스 변화를 보였다. 또한 임피던스는 온도 의존성을 보여주며 온도가 증가하면 임피던스가 감소하며 온도 의존성 계수는 -0,45% $RH/^{\circ}C$이다. 히스테리시스는 $\pm$2%RH이내이며, 33%-85% RH 사이에서의 응답 속도는 약 35sec이었다.

• 한국전자파학회논문지
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• 제23권3호
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• pp.306-313
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• 2012

본 논문에서는 UMTS Tx 대역(1.92~1.98 GHz)과 Rx 대역(2.11~2.17 GHz)에서 동작하는 이중 대역 E 슬롯 마이크로스트립 패치 안테나 사이의 격리도 향상을 위한 EBG 구조를 제안하였다. 제안된 EBG 구조는 이중 대역에서 두 안테나 사이의 격리도를 향상시키기 위하여 서로 다른 크기의 변형된 버섯 모양(mushroom-type) 구조로 단위 셀들을 배열하였다. 제안된 구조는 패치 안테나와 접지 면을 공유하지 않으며, 설계되어진 단위 셀의 크기는 각각 $15.6mm{\times}4mm$, $17.4mm{\times}4mm$이다. 제안된 안테나의 전체 크기는 $210.5mm{\times}117mm$이고, FR-4(비유전율=4.6, 기판 두께= 3.93 mm) 기판 상에 설계되어졌다. 제작된 안테나의 측정 결과, 제안된 EBG 구조의 사용으로 UMTS Tx 대역과 Rx 대역에서 각각 9 dB, 12 dB의 격리도 향상을 나타내었다.

• 한국전자파학회논문지
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• 제23권2호
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• pp.159-168
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• 2012

본 논문에서는 IR-UWB(Impulse Radio Ultra Wideband) 시스템 응용을 위한 앤티포달 비발디 안테나를 설계하고, 시간 및 주파수 영역에서 나노 초 단위의 초광대역 임펄스 신호 전송을 위한 IR-UWB 안테나 성능 평가를 수행하였다. 설계된 앤티포달 비발디 안테나는 저가 생산이 가능한 두께 1.6 mm, 유전율 ${\epsilon}_r=4.7$, $tan{\delta}=0.002$인 FR-4 기판을 이용하여 제작하였다. 제작된 안테나는 무반사실에서 주파수 영역 파라메타인 반사 손실, Far 필드방사 패턴을 측정하였다. 또한, 시간 영역에서 나노 초 단위의 임펄스 신호 전송에 따른 펄스 충실도 분석을 수행하여 UWB 대역에서 안정적으로 초광대역 신호 전송이 가능함을 증명하였다. 본 논문에서 설계/제작된 앤티포달 비발디 안테나는 낮은 왜곡과 양호한 방사 특성을 갖고, 나노 초 단위의 초광대역 임펄스를 방사 또는 수신할 수 있다.

• 한국재료학회지
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• 제22권4호
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• pp.169-173
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• 2012

Recently, various attempts to produce a heat sink made of Al 6xxx alloys have been carried out using die-casting. In order to apply die-casting, the Al alloys should be verified for die-soldering ability with die steel. It is generally well known that both Fe and Mn contents have effects on decreasing die soldering, especially with aluminum alloys containing substantial amounts of Si. However, die soldering has not been widely studied for the low Si aluminum (1.0~2.0wt%) alloys. Therefore, in this study, an investigation was performed to consider how the soldering phenomena were affected by Fe and Mn contents in low Si aluminum alloys. Each aluminum alloy was melted and held at $680^{\circ}C$. Then, STD61 substrate was dipped for 2 hr in the melt. The specimens, which were air cooled, were observed using a scanning electron microscope and were line analyzed by an electron probe micro analyzer. The SEM results of the dipping soldering test showed an Al-Fe inter-metallic layer in the microstructure. With increasing Fe content up to 0.35%, the Al-Fe inter-metallic layer became thicker. In Al-1.0%Si alloy, the additional content of Mn also increased the thickness of the inter-metallic layer compared to that in the alloy without Mn. In addition, EPMA analysis showed that Al-Fe inter-metallic compounds such as $Al_2Fe$, $Al_3Fe$, and $Al_5Fe_2$ formed in the die soldering layers.

• 한국표면공학회지
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• 제46권6호
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• pp.258-263
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• 2013

4 mol% Yttria-stabilized zirconia (4YSZ) coatings are fabricated by Air Plasma Spray (APS) and Electron Beam Physical Vapor Deposition (EB-PVD) with top coating of thermal barrier coating (TBC). NiCrAlY based bond coat is prepared as 150 ${\mu}m$ thickness by conventional APS (Air Plasma Spray) method on the NiCrCoAl alloy substrate before deposition of top coating. Each 4YSZ top coating shows different tribological behaviors based on the inherent layer structures. 4YSZ by APS which has splat-stacked structure shows lower friction coefficient but higher wear rate than 4YSZ by EB-PVD which has columnar structure. For 4YSZ by APS, such results are expected due to the sliding wear accompanied with local delamination of splats.

• 한국환경과학회지
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• 제22권11호
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• pp.1443-1449
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• 2013

This was an experimental study to evaluate temperature reduction and evapotranspiration of extensive green roof. Three test cells with a dimension of $1.2(W){\times}1.2(D){\times}1.0(H)$ meters were built using 4-inch concrete blocks. Ten-centimeter concrete slab was installed on top of each cell. The first cell was control cell with no green roof installed. The second and third cells were covered with medium-leaf type Zoysiagrass (Zoysia japonica) above a layer of soil. Soil thickness on the second cell was 10cm and that on the third cell was 20cm. Air temperature, relative humidity and solar irradiance were measured using AWS (automatic weather system). Temperature on top surface and ceiling of the control cell and temperature on top surface, below soil and ceiling of green roof cells was measured. Evapotranspiration of the green roof cells were measured using weight changes. Compared with temperature difference on the control cell, temperature difference was greater on green roof cells. Between two green roof cells, the temperature difference was greater on the third cell with a thicker soil layer. Temperature differences below soil and on ceilings of green roof cells were found greater than those of the control cell. Between the green roof cells, there was no difference in the temperature reduction effects below soil and on ceilings based on substrate depth. In summary, green roof was found effective in temperature reduction due to evapotranspiration and shading effect.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2010년도 추계학술대회 초록집
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• pp.77.1-77.1
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• 2010

Durability problems of gas diffusion layer(GDL) is one of the important issues for accomplishing commercialization of proton exchange membrane fuel cell(PEMFC). GDL is strongly related to the performance of PEMFC because one of the main function of GDL is to work as a path of fuel, air and water. When the GDL is degraded, it causes water balance problems such as the flooding phenomenon. Thus, investigating the durability characteristics of the GDL is important and understanding the GDL degradation process is needed. In this study, the GDLs are degraded by carbon corrosion stress method which is the electrochemical degradation mode. To determine the effects of carbon corrosion of the GDL, 1.45 V of potential is imposed for 96 hours. In this manner, in the previous research, the structure between the substrate and the MPL is weaken. Further investigations are needed to clarify this phenomenon. Therefore, in this study, the carbon corrosion stress method is carried out with GDLs which have various MPL penetration levels and the effects of the MPL penetration level on the characteristics change of the GDL are analyzed. The changes in characteristics are measured with various properties of GDL such as weight, thickness and static contact angle. The degraded GDL shows loss of their properties.