• Journal of the Korean institute of surface engineering
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• v.28 no.6
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• pp.343-351
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• 1995

Titanium nitride films have been prepared on various substrates (silicon wafer, HSS) by cathode arc ion plating process to measure microhardness, adhesion and wear-resistant behaviors by changing the substrate bias voltages (0∼-300V), thickness and roughness. Microhardnesses were measured by micro vickers hardness tester, the adhesion strengths were evaluated by acoustic signals through the scratch test with incremental applied load. As the substrate bias voltages were increased, the ｛111｝ orientation was predominant, the microhardnesses and adhesion strengths of tool steel were observed to be stronger than those of without subatrate bias voltage. Adhesion strengths of the substrate bias were 4-7 times higher than those of without the substrate bias, confirmed by SEM with EDX. Wear resistances were used pin-on-disk tribotester and TiN costing reduced the abrasive wear. As the substrate bias was increased, the weight loss and the friction coefficient was decreased.

• International Journal of Quality Innovation
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• v.6 no.2
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• pp.105-115
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• 2005

In recent years, high-speed recording CD-R has already become the mainstream of CD-R market. Therefore, to promote the efficiency of recording CD-R is of significant importance. This study uses Taguchi's parameter design to improve the yield rate for the process of CD-R substrate. We have found 13 three-level controllable factors from the fishbone diagram, repeated 10 times the experiment with the L27(313) orthogonal array, and measured seven quality characteristics. We employ four general methods to find the optimal parameter conditions individually. Then, we perform the confirmation experiment and compare the results. Finally, we obtain the optimal parameter conditions. According to the analysis of benefits, the optimal parameter conditions can reduce the quality loss of CD-R substrate to about 21%. In the future, the results can be extended to other research of DVD-R substrate.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.667-670
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• 2004

The dielectric properties of PZT(4060)/(6040) multilayered thin films with substrate temperature were investigated. PZT(4060)/(6040) thin films were deposited by RF sputtering method on Pt/Ti/$SiO_2$/Si substrates with different substrate temperature of $200{\sim}700^{\circ}C$. Increasing the substrate temperature, perovskite structure was increased, and PZT (001), (110), (002), (200) peaks were increased. The relative dielectric constant and dielectric loss of PZT(4060)/(6040) multilayered thin films at the substrate temperature of $700^{\circ}C$ were 843 and 2.45, respectively at 1000(Hz).

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2006.10a
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• pp.255-267
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• 2006

LTCC Technology is very suitable for 60 GHz application $\blacksquare$ LTCC substrate shows low loss at 60 GHz. - low insertion and return losses $\blacksquare$ Microstrip or CBCPW line is sultable for transmission lines at 60 GHz. - low loss (0.1dB/mm) $\blacksquare$ Single ribbbon bonding is adequate for interconnection - simple - low loss (0.1dB/bonding) $\blacksquare$ Characteristics of MMIC module - Gain difference (${\Delta}S21$) : 0.4 dB

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.05a
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• pp.35-38
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• 1995

Indium Tin Oxide(ITO) thin film is transparent to visible ray and conductive in electricity. It is seen that the samples made by the sputtering process have high transmission rate to visible ray and high adhesion , but the planar type magnetron sputtering process with is very well known in industrial region have a defect of partial erosion on the surface of target and a high loss of target and also since the substrate is positioned in plasma, the damage on thin film surface is caused by the reaction with plasma. In cylindrical magnetron sputtering system. it is known that the loss of target is little , the damage of thin film is very little and the adhesion of thin film with substrate is strong. In this study, we have made ITO thin film in the cylindrical DC magnetron system with the variable of substrate temperature , magnetic field, vacuum condution and the applied voltage. The general temperature for formation on ITO is asked at 350 $^{\circ}C$~400$^{\circ}C$ but we have made ITO is low temperature(80-150$^{\circ}C$) By studing electrical and optical properties of ITO thin fims made by varing several condition, we have searched the optimal condition for formation in the best ITO in low temperature.

• ETRI Journal
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• v.36 no.1
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• pp.106-115
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• 2014

In this work, the coplanar waveguide is fabricated on a PES (poly[ether sulfone]) substrate for application to a flexible monolithic microwave integrated circuit, and its RF characteristics were thoroughly investigated. The quality factor of the coplanar waveguide on PES is 40.3 at a resonance frequency of 46.7 GHz. A fishbone-type transmission line (FTTL) structure is also fabricated on the PES substrate, and its RF characteristics are investigated. The wavelength of the FTTL on PES is 5.11 mm at 20 GHz, which is 55% of the conventional coplanar waveguide on PES. Using the FTTL, an impedance transformer is fabricated on PES. The size of the impedance transformer is $0.318mm{\times}0.318mm$, which is 69.2% of the size of the transformer fabricated by the conventional coplanar waveguide on PES. The impedance transformer showed return loss values better than -12.9 dB from 5 GHz to 50 GHz and an insertion loss better than -1.13 dB in the same frequency range.

• Journal of the Microelectronics and Packaging Society
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• v.15 no.1
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• pp.39-44
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• 2008

In this paper, fully embedded 2.4GHz WLAN band pass filter (BPF) was investigated into a multi-layered organic packaging substrate using high Q spiral stacked inductors and high Dk MIM capacitors for low cost RF System on Package (SOP) applications. The proposed 2.4GHz WLAN BPF was designed by modifying chebyshev second order filter circuit topology. It was comprised of two parallel LC resonators for obtaining two transmission zeros. It was designed by using 2D circuit and 3D EM simulators for finding out optimal geometries and verifying their applicability. It exhibited an insertion loss of max -1.7dB and return loss of min -l7dB. The two transmission zeros were observed at 1.85 and 6.7GHz, respectively. In the low frequency band of $1.8GHz{\sim}1.9GHz$, the stop band suppression of min -23dB was achieved. In the high frequency band of $4.1GHz{\sim}5.4GHz$, the stop band suppression of min -l8dB was obtained. It was the first embedded and the smallest one of the filters formed into the organic packaging substrate. It has a size of $2.2{\times}1.8{\times}0.77mm^3$.

• The Journal of the Korea institute of electronic communication sciences
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• v.13 no.5
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• pp.965-970
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• 2018

In this paper, the transition of the folded substrate integrated waveguide (FSIW) using two substrates is suggested and applied to the bandpass filter. The FSIW has similar characteristics with the SIW and can be reduced the width of the SIW. The transition between the FSIW to the microstrip is designed by using shorted quarter wavelength line. Also, the bandpass filter is designed by using the FSIW and the elliptic lowpass filter of 5 section. Fabricated bandpass filter has the center frequency of 5.75 GHz and the bandwidth of 33.2%. Also, the insertion loss and return loss at the center frequency are 0.63dB and 19.1dB, respectively.

• Journal of information and communication convergence engineering
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• v.13 no.2
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• pp.81-85
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• 2015

A 94-GHz phased array antenna using a log-periodic antenna has been developed on a GaAs substrate. The developed phased array antenna comprises four log-periodic antennas, a phase shifter, and a Wilkinson power divider. This antenna was fabricated using the standard microwave monolithic integrated circuit (MMIC) process including an air bridge for unipolar circuit implementations on the same GaAs substrate. The total chip size of the fabricated phased array antenna is 4.8 mm × 4.5 mm. Measurement results showed that the fabricated phased array antenna had a very wide band performance from 80 GHz to 110 GHz with return loss characteristics better than -10 dB. In the center frequency of 94 GHz, the fabricated phased array antenna showed a return loss of -16 dB and a gain of 4.43 dBi. The developed antenna is expected to be widely applied in many applications at W-band frequency.

• Journal of IKEEE
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• v.23 no.2
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• pp.534-537
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• 2019

The optical loss is caused by reflection on the surface of the solar cell, without being absorbed inside the solar cell. Research is actively being conducted to reduce optical loss due to such reflection of light and to improve conversion efficiency of solar cells. In this paper, the surface of the FTO glass substrate was wet etched, and the structural characteristics of the tough surface were evaluated. In addition, optical properties on the surface were analyzed, etched using spectrometer. When light was introduced to a rough surface formed by etching, it was confirmed that the multiple reflections reduced the amount of light reflection from the surface, thereby increaseing the amount of light penetrating the glass substrate.