• 한국표면공학회지
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• 제28권6호
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• pp.343-351
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• 1995

Titanium nitride films have been prepared on various substrates (silicon wafer, HSS) by cathode arc ion plating process to measure microhardness, adhesion and wear-resistant behaviors by changing the substrate bias voltages (0∼-300V), thickness and roughness. Microhardnesses were measured by micro vickers hardness tester, the adhesion strengths were evaluated by acoustic signals through the scratch test with incremental applied load. As the substrate bias voltages were increased, the ｛111｝ orientation was predominant, the microhardnesses and adhesion strengths of tool steel were observed to be stronger than those of without subatrate bias voltage. Adhesion strengths of the substrate bias were 4-7 times higher than those of without the substrate bias, confirmed by SEM with EDX. Wear resistances were used pin-on-disk tribotester and TiN costing reduced the abrasive wear. As the substrate bias was increased, the weight loss and the friction coefficient was decreased.

• International Journal of Quality Innovation
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• 제6권2호
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• pp.105-115
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• 2005

In recent years, high-speed recording CD-R has already become the mainstream of CD-R market. Therefore, to promote the efficiency of recording CD-R is of significant importance. This study uses Taguchi's parameter design to improve the yield rate for the process of CD-R substrate. We have found 13 three-level controllable factors from the fishbone diagram, repeated 10 times the experiment with the L27(313) orthogonal array, and measured seven quality characteristics. We employ four general methods to find the optimal parameter conditions individually. Then, we perform the confirmation experiment and compare the results. Finally, we obtain the optimal parameter conditions. According to the analysis of benefits, the optimal parameter conditions can reduce the quality loss of CD-R substrate to about 21%. In the future, the results can be extended to other research of DVD-R substrate.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.667-670
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• 2004

The dielectric properties of PZT(4060)/(6040) multilayered thin films with substrate temperature were investigated. PZT(4060)/(6040) thin films were deposited by RF sputtering method on Pt/Ti/$SiO_2$/Si substrates with different substrate temperature of $200{\sim}700^{\circ}C$. Increasing the substrate temperature, perovskite structure was increased, and PZT (001), (110), (002), (200) peaks were increased. The relative dielectric constant and dielectric loss of PZT(4060)/(6040) multilayered thin films at the substrate temperature of $700^{\circ}C$ were 843 and 2.45, respectively at 1000(Hz).

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2006년도 ISMP 2006
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• pp.255-267
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• 2006

LTCC Technology is very suitable for 60 GHz application $\blacksquare$ LTCC substrate shows low loss at 60 GHz. - low insertion and return losses $\blacksquare$ Microstrip or CBCPW line is sultable for transmission lines at 60 GHz. - low loss (0.1dB/mm) $\blacksquare$ Single ribbbon bonding is adequate for interconnection - simple - low loss (0.1dB/bonding) $\blacksquare$ Characteristics of MMIC module - Gain difference (${\Delta}S21$) : 0.4 dB

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1995년도 춘계학술대회 논문집
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• pp.35-38
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• 1995

Indium Tin Oxide(ITO) thin film is transparent to visible ray and conductive in electricity. It is seen that the samples made by the sputtering process have high transmission rate to visible ray and high adhesion , but the planar type magnetron sputtering process with is very well known in industrial region have a defect of partial erosion on the surface of target and a high loss of target and also since the substrate is positioned in plasma, the damage on thin film surface is caused by the reaction with plasma. In cylindrical magnetron sputtering system. it is known that the loss of target is little , the damage of thin film is very little and the adhesion of thin film with substrate is strong. In this study, we have made ITO thin film in the cylindrical DC magnetron system with the variable of substrate temperature , magnetic field, vacuum condution and the applied voltage. The general temperature for formation on ITO is asked at 350 $^{\circ}C$~400$^{\circ}C$ but we have made ITO is low temperature(80-150$^{\circ}C$) By studing electrical and optical properties of ITO thin fims made by varing several condition, we have searched the optimal condition for formation in the best ITO in low temperature.

• ETRI Journal
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• 제36권1호
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• pp.106-115
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• 2014

In this work, the coplanar waveguide is fabricated on a PES (poly[ether sulfone]) substrate for application to a flexible monolithic microwave integrated circuit, and its RF characteristics were thoroughly investigated. The quality factor of the coplanar waveguide on PES is 40.3 at a resonance frequency of 46.7 GHz. A fishbone-type transmission line (FTTL) structure is also fabricated on the PES substrate, and its RF characteristics are investigated. The wavelength of the FTTL on PES is 5.11 mm at 20 GHz, which is 55% of the conventional coplanar waveguide on PES. Using the FTTL, an impedance transformer is fabricated on PES. The size of the impedance transformer is $0.318mm{\times}0.318mm$, which is 69.2% of the size of the transformer fabricated by the conventional coplanar waveguide on PES. The impedance transformer showed return loss values better than -12.9 dB from 5 GHz to 50 GHz and an insertion loss better than -1.13 dB in the same frequency range.

• 마이크로전자및패키징학회지
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• 제15권1호
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• pp.39-44
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• 2008

In this paper, fully embedded 2.4GHz WLAN band pass filter (BPF) was investigated into a multi-layered organic packaging substrate using high Q spiral stacked inductors and high Dk MIM capacitors for low cost RF System on Package (SOP) applications. The proposed 2.4GHz WLAN BPF was designed by modifying chebyshev second order filter circuit topology. It was comprised of two parallel LC resonators for obtaining two transmission zeros. It was designed by using 2D circuit and 3D EM simulators for finding out optimal geometries and verifying their applicability. It exhibited an insertion loss of max -1.7dB and return loss of min -l7dB. The two transmission zeros were observed at 1.85 and 6.7GHz, respectively. In the low frequency band of $1.8GHz{\sim}1.9GHz$, the stop band suppression of min -23dB was achieved. In the high frequency band of $4.1GHz{\sim}5.4GHz$, the stop band suppression of min -l8dB was obtained. It was the first embedded and the smallest one of the filters formed into the organic packaging substrate. It has a size of $2.2{\times}1.8{\times}0.77mm^3$.

• 한국전자통신학회논문지
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• 제13권5호
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• pp.965-970
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• 2018

본 논문에서는 두 장의 기판을 이용하여 접힌 기판 집적형 도파관 구조의 활용을 위한 트랜지션이 제안되었고, 이러한 FSIW 구조는 간단한 대역통과 필터로 응용되었다. FSIW 구조는 SIW 구조와 유사한 특성을 가지며 도파관의 장축을 반으로 줄일 수 있다는 장점이 있다. FSIW 구조의 트랜지션은 접지에 연결된 ${\lambda}g/4$ 선로를 이용하여 설계되었고, FSIW 구조의 대역통과 필터는 5단의 타원함수 특성을 갖는 저역통과 필터를 FSIW 구조의 입출력부에 연결하여 설계하였다. 제작된 FSIW 구조의 대역통과 필터는 중심주파수 5.75 GHz, 대역폭 33.2%를 가졌고, 중심주파수에서 삽입 손실과 반사 손실은 각각 0.63dB와 19.1dB를 가졌다.

• Journal of information and communication convergence engineering
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• 제13권2호
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• pp.81-85
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• 2015

A 94-GHz phased array antenna using a log-periodic antenna has been developed on a GaAs substrate. The developed phased array antenna comprises four log-periodic antennas, a phase shifter, and a Wilkinson power divider. This antenna was fabricated using the standard microwave monolithic integrated circuit (MMIC) process including an air bridge for unipolar circuit implementations on the same GaAs substrate. The total chip size of the fabricated phased array antenna is 4.8 mm × 4.5 mm. Measurement results showed that the fabricated phased array antenna had a very wide band performance from 80 GHz to 110 GHz with return loss characteristics better than -10 dB. In the center frequency of 94 GHz, the fabricated phased array antenna showed a return loss of -16 dB and a gain of 4.43 dBi. The developed antenna is expected to be widely applied in many applications at W-band frequency.

• 전기전자학회논문지
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• 제23권2호
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• pp.534-537
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• 2019

광학적 손실은 태양전지 표면에 조사되는 빛이 태양전지 내부로 흡수되지 않고 표면에서 반사되어 발생하는 손실이다. 이러한 빛의 반사로 인한 광학적 손실을 줄이고 태양전지의 변환 효율을 높이기 위한 연구가 활발하게 진행되고 있다. 본 논문에서는 유리기판 표면을 습식 식각을 사용하여 표면을 거칠게 형성해 식각된 표면의 구조적 특성을 평가하였고, 분광기를 통해 식각된 표면의 광학적 특성을 분석하였다. 식각을 통해 형성되는 분화구 모양의 거친 표면은 입사되는 빛을 태양전지 내부로 재흡수하여 빛의 반사를 줄어들었고, 이에 따라 투과되는 빛이 증가하였음을 확인하였다.