• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.95-95
• /
• 2014

An OLED(Organic Light-Emitting Diode) device based on the emissive electroluminescent layer a film of organic materials. OLED is used for many electronic devices such as TV, mobile phones, handheld games consoles. ULVAC's mass production systems are indispensable to the manufacturing of OLED device. ULVAC is a manufacturer and worldwide supplier of equipment and vacuum systems for the OLED, LCD, Semiconductor, Electronics, Optical device and related high technology industries. The SMD Series are single-substrate sputtering systems for deposition of films such as metal films and TCO (Transparent Conductive Oxide) films. ULVAC has delivered a large number of these systems not only Organic Evaporating systems but also LTPS CVD systems. The most important technology of thin-film encapsulation (TFE) is preventing moisture($H_2O$) and oxygen permeation into flexible OLED devices. As a polymer substrate does not offer the same barrier performance as glass substrate, the TFE should be developed on both the bottom and top side of the device layers for sufficient lifetimes. This report provides a review of promising thin-film barrier technologies as well as the WVTR(Water Vapor Transmission Rate) properties. Multilayer thin-film deposition technology of organic and inorganic layer is very effective method for increasing barrier performance of OLED device. Gases and water in the organic evaporating system is having a strong influence as impurities to OLED device. CRYO pump is one of the very useful vacuum components to reduce above impurities. There for CRYO pump is faster than conventional TMP exhaust velocity of gases and water. So, we suggest new method to make a good vacuum condition which is CRYO Trap addition on OLED evaporator. Alignment accuracy is one of the key technologies to perform high resolution OLED device. In order to reduce vibration characteristic of CRYO pump, ULVAC has developed low vibration CRYO pumps to achieve high resolution alignment performance between Metal mask and substrate. This report also includes ULVAC's approach for these issues.

• The Korean Journal of Ceramics
• /
• v.3 no.3
• /
• pp.173-176
• /
• 1997

Direct metal ion beam deposition is considered to be a whole new thin film deposition technique. Unlike other conventional thin film deposition processes, the individual deposition particles carry its own ion beam energies which are directly coupled for the formation of this films. Due to the nature of ion beams, the energies can be controlled precisely and eventually can be tuned for optimizing the process. SKION's negative C- ion beam source is used to investigate the initial nucleation mechanism and growth. Strong C- ion beam energy dependence has been observed. Complete phase control of sp3 and sp3, control of the C/SiC/Si interface layer, control of crystalline and amorphous mode growth, and optimization of the physical properties for corresponding applications can be achieved.

• Bulletin of the Korean Chemical Society
• /
• v.35 no.9
• /
• pp.2765-2768
• /
• 2014

Flower-like Au nanoparticles, so-called Au nanoflowers (AuNFs), were synthesized by simply adding ascorbic acid to a gold acid solution in the presence of a chitosan biopolymer. The chitosan-entangled AuNFs exhibited strong plasmon absorption in the near-infrared (NIR) wavelength due to the aggregation of primary Au nanoparticles. The chitosan-entangled AuNFs were preferentially adsorbed by Raman-active 2-chlorothiophenol (CTP) molecules, and the CTP-encoded AuNFs (AuNF-CTPs) were subsequently coated with a thin silica layer by a sol-gel reaction with Si alkoxides. The silica-coated AuNFs (AuNF-CTPs@silica) exhibited the distinct Raman signals of adsorbed CTP molecules, as a potential nanoprobe with surface-enhanced Raman scattering (SERS).

• Proceedings of the Polymer Society of Korea Conference
• /
• 2006.10a
• /
• pp.310-310
• /
• 2006

We have demonstrated the formation of highly nanoporous films composed of two different BCMs through layer-by-layer (LbL) assembly on substrates. The films thus prepared showed tunable optical properties, with strong antireflective properties with light transmission above 99%. Considering the wide application areas of both LbL multilayers and block copolymer thin films, the approaches introduced in present study are likely to open up new possibilities for devices with multifunctional properties.

• Journal of the Korean institute of surface engineering
• /
• v.28 no.3
• /
• pp.174-181
• /
• 1995

Multilayered silicon cantilever beams as interconnection systems for bare chip burn-in socket applications have been designed, fabricated and characterized. Fabrication processes of the beam are employing standard semiconductor processes such as thin film processes and epitaxial layer growth and silicon wet etching techniques. We investigated silicon etch rate in 1-3-10 etchant as functions of doping concentration, surface mechanical stress and crystal defects. The experimental results indicate that silicon etch rate in 1-3-10 etchant is strong functions of doping concentration and crystal defect density rather than surface mechanical stress. We suggested the new fabrication processes of multilayered silicon cantilever beams.

• The Journal of Korea Robotics Society
• /
• v.17 no.3
• /
• pp.282-287
• /
• 2022

High shear adhesion on wet and rough surfaces and tactile feedback of gripping forces are highly important for realizing robotic gripper systems. Here, we propose a bioinspired robotic gripper with highly shear adhesion and sensitive pressure sensor for tactile feedback systems. To achieve them, we fabricated multi-walled carbon nanotube sensing layer on a thin polymeric adhesive layer of polydimethylsiloxane. With densely hexagonal-packed microstructures, the pressure sensor achieved 9 times the sensing property of a sensor without microstructures. We then assembled hexagonal microstructures inspired by the toe pads of a tree frog, giving strong shear adhesion under both dry and wet surfaces such as silicon (42 kPa for dry and ~30 kPa for underwater conditions) without chemical-residues after detachment. Our robotic gripper can prevent damage to weak or smooth surfaces that can be damaged at low pressure through pressure signal feedback suggesting a variety of robotic applications.

• Journal of the Korean Institute of Telematics and Electronics D
• /
• v.35D no.8
• /
• pp.15-23
• /
• 1998

Single crystalline I $n_{x}$G $a_{1-x}$ N thin film was grwon by MOCVD on (001) sapphire substrate for the blue light emitting devices. A good quality of I $n_{0.13}$G $a_{0.87}$N/GaN heterostructure grwon above 700.deg. C was confiremed by various characterization techniques of AFM, RHEED and DC-XRD. Through PL measurement at room temperautre for the Si-Zn co-doped I $n_{x}$G $a_{a-x}$N/GaN structure grwon at 800.deg. C to obtain blue wavelength emission, 460-470 nm and 425 nm emission peak were observed, which are believed to be from donor-to-acceptor pair transition and band edge emission of In/x/G $a_{1-x}$ N, respectively. The result of PL measurement of the undoped MQW I $n_{x}$G $a_{1-x}$ N layer at low temperature confirmed that the strong MQW peak was resulted by exciton from the GAN barrier and carrier of DA pair confined into the well layer.ll layer.yer.r.

• Korean Journal of Metals and Materials
• /
• v.48 no.3
• /
• pp.225-234
• /
• 2010

Salt bath nitriding, which has been developed recently by domestic company, is an emerging ecofriendly surface treatment. The salt bath nitriding is accompanied by the electrolysis process in the pretreatment step, and this whole processis called Pseudo-Electrolysised Salt bath Nitriding (PESN). The PESN creates only $NH_3$ and non-toxic salts without harmful $CN^{-}$ or toxic gas such as that found in previous salt bath nitriding. In general, ion nitriding and gas nitriding create high hardness and a strong brittle white layer on the surface. However, the PESN shows a thin white and gray layer. The PESN was applied to the defense material, 3%Cr-Mo-V steel, to study the surface characteristics at $480^{\circ}C$, $530^{\circ}C$, and $580^{\circ}C$ for 4 hrs, 20 hrs, 40 hrs, and 60 hrs of nitriding time condition. As a result, the best nitriding layer was found at $530^{\circ}C$ for 40 hrs. If we improve corrosion resistance and nitriding layer depth, the PESN will be able to be applied to the defense industry parts.

• Journal of the Society of Cosmetic Scientists of Korea
• /
• v.33 no.1 s.60
• /
• pp.23-28
• /
• 2007

Ascorbic acid (vitamin C, AsA) has been known as a strong reducing agent and is supposed to retard the synthesis of melanin pigment. A main problem that arose in using vitamin C in cosmetic formulation was its poor stability and low skin permeability, which result in low lightening efficacy in clinical trials. In this study, iontophoretic gel patch with flexible thin layer battery was employed in order to enhance skin permeation of vitamin c derivative (ascorbyl glucoside, AsAG) and to increase its lightening efficacy. in vitro iontophoretic skin permeation and stability of AsAG, safety and clinical lightening efficacy of iontophoretic patch containing 2% AsAG solution were examined. A optimun current of ionthophoretic patch for korean women was 0.1 mA, considering the skin permeability and skin irritation of consumers. We suggest that iontophoretic gel patch could be a safe system for enhancing the skin permeation of AsAG and lightning efficacy.

• Journal of the Microelectronics and Packaging Society
• /
• v.29 no.1
• /
• pp.43-47
• /
• 2022

In this study, we demonstrated an eco-friendly thin-metallic-film-based heater which can be operated in water. Based on the materials stability, Mo was selected as the heating element to secure long-term stability. Using a magnetron sputtering, 40 nm-thick Mo layers were deposited onto a glass substrate, followed by the deposition of 60-nm-thick ZnO layer to prevent oxidation during the heater fabrication process. Then, PVB (Polyvinyl Butyral) was applied on top of ZnO layer and an additional glass substrate was placed, which were heated at 150℃ for 2 hr. The PVB was cured with strong adhesion by the processing condition. We operated the Glass/Mo/ZnO/Glass heater in water, and it was shown that the water temperature reached 50℃ within 2 minutes, with a minimal resistance change of the heater. Finally, the heaters exhibit a semi-transparency, and this aesthetic advantage is expected to contribute to the added value of the heater.