• Title/Summary/Keyword: step charging

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Effects of DI Rinse and Oxide HF Wet Etch Processes on Silicon Substrate During Photolithography (반도체 노광 공정의 DI 세정과 Oxide의 HF 식각 과정이 실리콘 표면에 미치는 영향)

  • Baik, Jeong-Heon;Choi, Sun-Gyu;Park, Hyung-Ho
    • Korean Journal of Materials Research
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    • v.20 no.8
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    • pp.423-428
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    • 2010
  • This study shows the effects of deionized (DI) rinse and oxide HF wet etch processes on silicon substrate during a photolithography process. We found a fail at the wafer center after DI rinse step, called Si pits, during the fabrication of a complementary metal-oxide-semiconductor (CMOS) device. We tried to find out the mechanism of the Si pits by using the silicon wafer on CMOS fabrication and analyzing the effects of the friction charge induced by the DI rinsing. The key parameters of this experiment were revolution per minute (rpm) and time. An incubation time of above 10 sec was observed for the formation of Si pits and the rinsing time was more effective than rpm on the formation of the Si pits. The formation mechanism of the Si pits and optimized rinsing process parameters were investigated by measuring the charging level using a plasma density monitor. The DI rinse could affect the oxide substrate by a friction charging phenomenon on the photolithography process. Si pits were found to be formed on the micro structural defective site on the Si substrate under acceleration by developed and accumulated charges during DI rinsing. The optimum process conditions of DI rinse time and rpm could be established through a systematic study of various rinsing conditions.

Electric Characteristics of Disk-type Piezoelectric Transformer (디스크형 압전 변압기 의 전극크기 변화에 대한 전기적 특성)

  • Kim, Dong-Soo;Kim, Young-Deog;Kim, Kwang-Il;Do, Yeung-Soo;Nam, Sung-Jin;Nam, Hyo-Duk
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.226-229
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    • 2005
  • In this study, a step-down piezoelectric transformer was fabricated to utilize as an adapter for charging batteries of mobile electronic appliances. The ceramic part of the transformer is $Pb[(Mn_{1/3}Sb_{2/3})_{0.05}Zr_{0.475}Ti_{0.475}]O_3$ with mechanical quality factor of 1600, electromechanical coupling coefficient 59 %, and piezoelectric constant d33 1300, which can be utilized as a piezoelectric transformer. A simply fabricated disk-typed test pattern of diameter 28 mm and thickness 2 mm was used to characterize resonant frequency, Qm, kp according to the different input/output electrode area. efficiency and power as a function of load resistance was also investigated. The sample APT showed some spurious mode and BPT showed better frequency property. Taking all properties which are admittance, effective electromechanical coupling coefficient and mechanical quality factor most suitable for piezoelectric transformer is BPT which has 12 mm diameter electrode and the condition of 15 Vrms, 30 $\Omega$ made the maximum efficiency of 93.7 % and maximum power is 6W with 50 Vrms.

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Optimized Design of Low-power Adiabatic Dynamic CMOS Logic Digital 3-bit PWM for SSL Dimming System

  • Cho, Seung-Il;Mizunuma, Mitsuru;Yokoyama, Michio
    • IEIE Transactions on Smart Processing and Computing
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    • v.2 no.4
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    • pp.248-254
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    • 2013
  • The size and power consumption of digital circuits including the dimming circuit part will increase for high-performance solid state lighting (SSL) systems in the future. This study examined the low-power consumption of adiabatic dynamic CMOS logic (ADCL) due to the principles of adiabatic charging. Furthermore, the designed low-power ADCL digital pulse width modulation (PWM) was optimized for SSL dimming systems. For this purpose, an ADCL digital 3-bit PWM was optimized in two steps. In the first step, the architecture of the ADCL digital 3-bit PWM was miniaturized. In the second step, the clock cut-off circuit was designed and added to the ADCL PWM. As a result, compared to the original configuration, 60 transistors and 15 capacitors of ADCL digital 3-bit PWM were reduced for miniaturization. Moreover, the clock cut-off circuit, which controls wake-up and sleep mode of ADCL D-FFs, was designed. The power consumption of an optimized ADCL digital PWM for all bit patterns decreased by 54 %.

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AC-DC buck converter topology of high power factor with soft switching mode (소프트 스위칭 모드에 의한 고역률의 AC-DC 강압형 컨버터 토폴로지)

  • 문상필;서기영;전중함;김영철;김준홍;이현우
    • Proceedings of the KIPE Conference
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    • 1997.07a
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    • pp.417-422
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    • 1997
  • This paper proposed that a AC-DC Converter topology of high power factor with soft switching mode operates with four chopper connecting a number of parallel circuit. To improve these, a large number of soft switching topologies included a resonant circuit have been proposed. And, some simulative results on computer is included to confirm the validity of the analytical results. The partial resonant circuit makes use of a inductor using step up and a condenser of loss-less snubber. The result is that the switching loss is very low and the efficiency of system is high. And the snubber condenser used in partial resonant circuit makes charging engergy regenerated at input power source for resonant operation. The proposed conversion system is deemed the most suitable for high power applications where the power switching devices are used.

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Multiple Buck-Chopper using Partial Resonant Switching

  • Mun Sang-Pil;Suh Ki-Young;Lee Hyun-Woo;Chun Jung-Ham
    • Proceedings of the KIPE Conference
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    • 2001.10a
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    • pp.189-192
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    • 2001
  • This paper proposed that an AC-DC converter system using multiple buck-chopper operates with four choppers connecting to a number of parallel circuits. To improve these, a large number of soft switching topologies included a resonant circuit have been proposed. And, some simulative results on computer are included to confirm the validity of the analytical results. The partial resonant circuit makes use of an inductor using step-down and a condenser of loss-less snubber. The result is that the switching loss is very low and the efficiency of system is high. And the snubber condenser used in a partial resonant circuit makes charging energy regenerated at input power source for resonant operation. The proposed conversion system is deemed the most suitable for high power applications where the power switching devices are used.

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A Prediction of Gas Flow in a Pipe and Orifice System Using The Finite Difference Method and The Method of Characteristics (유한차분법과 특성곡선법을 이용한 파이프-오리피스계의 가스 유동 예측)

  • Na, H.S.;Koh, D.K.;Cho, K.H.;Jang, S.H.;Ahn, S.K.
    • Journal of Power System Engineering
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    • v.7 no.2
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    • pp.11-16
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    • 2003
  • Because of the advancement of digital computers and software technologies, simulation methods have been used to reduce time and costs. A lot of simulation methods have been developed for the improvement of charging efficiency on the intake and exhaust system of engines. In this study, as a basic step for the development of the gas flow simulation program for the intake and exhaust system, the gas flow in a pipe-orifice system was calculated with three algorithms(Method of Characteristics, MacCormack Method for conservation, and MacCoramck Method for nonconservation). The calculated results using three numerical algorithms were compared with measured result to verify the calculation accuracy.

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Capacity Firming for Wind Generation using One-Step Model Predictive Control and Battery Energy Storage System

  • Robles, Micro Daryl;Kim, Jung-Su;Song, Hwachang
    • Journal of Electrical Engineering and Technology
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    • v.12 no.5
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    • pp.2043-2050
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    • 2017
  • This paper presents two MPC (Model Predictive Control) based charging and discharging algorithms of BESS (Battery Energy Storage System) for capacity firming of wind generation. To deal with the intermittency of the output of wind generation, a single BESS is employed. The proposed algorithms not only make the output of combined systems of wind generation and BESS track the predefined reference, but also keep the SoC (State of Charge) of BESS within its physical limitation. Since the proposed algorithms are both presented in simple if-then statements which are the optimal solutions of related optimization problems, they are both easy to implement in a real-time system. Finally, simulations of the two strategies are done using a realistic wind farm library and a BESS model. The results on both simulations show that the proposed algorithms effectively achieve capacity firming while fulfilling all physical constraints.

The High Power AC-DC Buck Converter of High Efficienty Using Loss-Less Snubber (로스레스 스너버를 사용한 고효율의 대용량 AC-DC 강압형 컨버터)

  • 문상필;서기영;이현우
    • Proceedings of the IEEK Conference
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    • 1998.06a
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    • pp.951-954
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    • 1998
  • This paper proposed that a high power AC-DC buck converter topology of high efficiency using loss-less snubber operates with four chopper connecting a number of parallel circuit. To improve these, a large number of soft switching topologies included a resonant circuit have been proposed. And, some simulative resutls on computer is included to confirm the validity of the analytical results. The partial resonant circuit makes use of a inductor using step-down and a condenser of loss-less snubber. The result is that the switching loss is very low and the efficiency of system is high. And the snubber condenser used in partial resonant circuit makes charging energy regenerated at input power source of rresonant operation. The proposed conversion system is deemed the most suitable for high power applications where the power switching devices are used.

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Activity Report of technical committee of Electric Vechicle (전기자동차 조사전문위원회 활동보고)

  • Moon, Sung-In;Oh, Cung-Chul;Ha, Hoi-Doo;Park, Chang-Soon;Yun, Mun-Soo;Hang, Young-Moon
    • Proceedings of the KIEE Conference
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    • 1992.07a
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    • pp.27-30
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    • 1992
  • In this paper, we report the research activities of the technical committee of Electric Vehicle (EV). Recently, environmental pollution has become a world-wide problem. As a practical step to solve this problem, it is sincerely hoped that EVs will become widely used. Here in, we wish to describe an Electric Vehicle research facility with the objectives of developing motor propulsion technology, energy storage technology, control system, battery charging systems, and etc.

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Circuit Techniques for Low-Power Data Drivers of TFT-LCDs

  • Choi, Byong-Deok;Kwon, Oh-Kyong
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.1 no.3
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    • pp.167-181
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    • 2001
  • A stepwise driving method was used for reducing the AC power consumption in a TFT-LCD. The AC power takes the largest portion of the total power consumption of a TFT-LCD. Experimental results confirmed that the AC power saving efficiency reached up to 75% when a 5-stepwise driving with each step time of $2\mu$ sec was applied to a 14.1 inch-diagonal XGA TFT-LCD. The second largest component of power consumption called the DC power comes from the quiescent currents in Op-amps. A simple and efficient architecture was proposed in this work to reduce this DC power consumption: Half of the Op-amps have the 5V-supplies, and the rest half have the 10V-supplies, and two Op-amps are shared by adjacent two channels. Measurements of test circuits showed that this simple method could reduce over 40% of the DC power consumption..

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