• Title/Summary/Keyword: stacked plate

Search Result 31, Processing Time 0.026 seconds

FE-SEM Image Analysis of Junction Interface of Cu Direct Bonding for Semiconductor 3D Chip Stacking

  • Byun, Jaeduk;Hyun, June Won
    • Journal of the Korean institute of surface engineering
    • /
    • v.54 no.5
    • /
    • pp.207-212
    • /
    • 2021
  • The mechanical and electrical characteristics can be improved in 3D stacked IC technology which can accomplish the ultra-high integration by stacking more semiconductor chips within the limited package area through the Cu direct bonding method minimizing the performance degradation to the bonding surface to the inorganic compound or the oxide film etc. The surface was treated in a ultrasonic washer using a diamond abrasive to remove other component substances from the prepared cast plate substrate surface. FE-SEM was used to analyze the bonding characteristics of the bonded copper substrates, and the cross section of the bonded Cu conjugates at the sintering junction temperature of 100 ℃, 150 ℃, 200 ℃, 350 ℃ and the pressure of 2303 N/cm2 and 3087 N/cm2. At 2303 N/cm2, the good bonding of copper substrate was confirmed at 350 ℃, and at the increased pressure of 3087 N/cm2, the bonding condition of Cu was confirmed at low temperature junction temperature of 200 ℃. However, the recrystallization of Cu particles was observed due to increased pressure of 3087 N/cm2 and diffusion of Cu atoms at high temperature of 350 ℃, which can lead to degradation in semiconductor manufacturing.

Sedimentary Facies and Evolution of the Cretaceous Deep-Sea Channel System in Magallanes Basin, Southern Chile (마젤란 분지의 백악기 심해저 하도 퇴적계의 퇴적상 및 진화)

  • Choe, Moon-Young;Sohn, Young-Kwan;Jo, Hyung-Rae;Kim, Yea-Dong
    • Ocean and Polar Research
    • /
    • v.26 no.3
    • /
    • pp.385-400
    • /
    • 2004
  • The Lago Sofia Conglomerate encased in the 2km thick hemipelagic mudstones and thinbedded turbidites of the Cretaceous Cerro Toro Formation, southern Chile, is a deposit of a gigantic submarine channel developed along a foredeep trough. It is hundreds of meters thick kilometers wide, and extends for more than 120km from north to south, representing one of the largest ancient submarine channels in the world. The channel deposits consist of four major facies, including stratified conglomerates (Facies A), massive or graded conglomerates (Facies B), normally graded conglomerates with intraformational megaclasts (Facies C), and thick-bedded massive sandstones (Facies D). Conglomerates of Facies A and B show laterally inclined stratification, foreset stratification, and hollow-fill structures, reminiscent of terrestrial fluvial deposits and are suggestive of highly competent gravelly turbidity currents. Facies C conglomerates are interpreted as deposits of composite or multiphase debris flows associated with preceding hyperconcentrated flows. Facies D sandstones indicate rapidly dissipating, sand-rich turbidity currents. The Lago Sofia Conglomerate occurs as isolated channel-fill bodies in the northern part of the study area, generally less than 100m thick, composed mainly of Facies C conglomerates and intercalated between much thicker fine-grained deposits. Paleocurrent data indicate sediment transport to the east and southeast. They are interpreted to represent tributaries of a larger submarine channel system, which joined to form a trunk channel to the south. The conglomerate in the southern part is more than 300 m thick, composed of subequal proportions of Facies A, B, and C conglomerates, and overlain by hundreds of m-thick turbidite sandstones (Facies D) with scarce intervening fine-grained deposits. It is interpreted as vertically stacked and interconnected channel bodies formed by a trunk channel confined along the axis of the foredeep trough. The channel bodies in the southern part are classified into 5 architectural elements on the basis of large-scale bed geometry and sedimentary facies: (1) stacked sheets, indicative of bedload deposition by turbidity currents and typical of broad gravel bars in terrestrial gravelly braided rivers, (2) laterally-inclined strata, suggestive of lateral accretion with respect to paleocurrent direction and related to spiral flows in curved channel segments around bars, (3) foreset strata, interpreted as the deposits of targe gravel dunes that have migrated downstream under quasi-steady turbidity currents, (4) hollow fills, which are filling thalwegs, minor channels, and local scours, and (5) mass-flow deposits of Facies C. The stacked sheets, laterally inclined strata, and hollow fills are laterally transitional to one another, reflecting juxtaposed geomorphic units of deep-sea channel systems. It is noticeable that the channel bodies in the southern part are of feet stacked toward the east, indicating eastward migration of the channel thalwegs. The laterally inclined strata also dip dominantly to the east. These features suggest that the trunk channel of the Lago Sofia submarine channel system gradually migrated eastward. The eastward channel migration is Interpreted to be due to tectonic forcing imposed by the subduction of an oceanic plate beneath the Andean Cordillera just to the west of the Lago Sofia submarine channel.

A Study on Adhesion of Mechanical Properties of Rubber by MgCl2 (투명 차폐 필름 구현을 위한 전도성 복합 바인더의 입자구조에 따른 성능 평가)

  • Park, Ji-won;Back, Jong-Ho;Lee, Tae-Hyung;Kim, Hyun-Joong
    • Journal of Adhesion and Interface
    • /
    • v.18 no.2
    • /
    • pp.59-67
    • /
    • 2017
  • Recently, integration of parts is accelerating according to the growth of the smart mobile industry. The integration of these parts causes problems of interference phenomena between the parts, and the importance of electromagnetic wave shielding technology to solve this problem is highlighted. Electromagnetic wave shielding technology is implemented so as to reflect or absorb electromagnetic waves, and generally conductive materials are utilized for electromagnetic wave shielding. Transparent shielding technology is required according to recent industrial changes. In this research, we propose transparent the shielding film using imprint technology with conductive composite binder. Utilizing UV polymerized acrylic binder to produce a conductive composite binder. Spherical, plate and stacked silver particles were used for conductivity. The changes of the curing characteristics, conductivity and adhesion were observed according to the structural characteristics of the silver particles. The use of spherical particles was the most efficient in the curing process, and an additional curing system was required to complement the UV-shadowing structure. In the conductivity evaluation, the stacked structure showed excellent characteristics. The adhesion of spherical system was the best. It is evaluated as a result of irregularities on the surface. Ultimately, the patterned film using this showed excellent transparency characteristics.

Study on Mechanical Properties of CFRP Composite Orthogonal Grid Structure (CFRP 복합재료 직교 격자 구조의 기계적 특성 연구)

  • Baek, Sang Min;Lim, Sung June;Kim, Min Sung;Ko, Myung Gyun;Park, Chan Yik
    • Composites Research
    • /
    • v.31 no.2
    • /
    • pp.69-75
    • /
    • 2018
  • In this study, a grid panel structure in which the woven CFRP composites were stacked in the orthogonal array was proposed and the mechanical properties were analyzed and studied. The grid parts were fabricated by cutting prepregs and laminating them. The grid panel structure was fabricated by co-curing with lower laminate plate in auto-clave process. The behavior of the proposed grid panel structure was evaluated by tests under tensile, compressive, shear, and bending loads. The effect of increasing the stiffness of the orthogonal grid structure was verified through these tests. In addition, the finite element model was constructed and compared with the test results, confirming the validity and reliability of the test and analysis.

Development of the Ag/Cu Ingots for Mokumegane Jewelry (모꾸메가네 장신구를 위한 은/동 접합 잉곳 소재 개발)

  • Song, Oh-Sung;Kim, Jong-Ryul;Kim, Myung-Ro
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.9 no.1
    • /
    • pp.9-15
    • /
    • 2008
  • Mokumegane is one of the sophisticated metal craft techniques enabling wood grain surface effect. To embody the mokumegane, an ingot of well-bonded stacked metal plates has been required. Traditionally prepared mokumegane ingots were bonded using charcoal which enables reduction atmosphere, but sometimes end up with collapse of bonding interface due to the lack of reliable process control. We proposed a systematic vacuum direct bonding process for ingots. First, we confirmed copper//copper homogeneous plate bonding at $900^{\circ}C$ by applying uniaxial press of 2.5kg. We observed 80min required to obtain 90%-bonding ratio and the diffusion coefficient would be enhanced up to 100 times due to surface effect. Second, by considering enhanced diffusion behavior, we also obtained optimum bonding condition in copper/silver heterogeneous plates that ensures 90%-bonding ratio at $700^{\circ}C$ for 10min with apply uniaxial press. A 7-layered copper/silver ingot is prepared successfully, and eventually the prototype mokumegane cases for mobile phone were fabricated with these ingot.

Fabrication and Evaluation of Composite Panel with Hat-shaped Stiffeners (모자(Hat)형 보강재를 가진 복합재 패널의 제작과 평가)

  • Kim, Geon-Hui;Lim, Do-Wan;Choi, Jin-Ho;Kweon, Jin-Hwe;Lee, Tae-Joo;Song, Min-Hwan;Shin, Sang-Joon
    • Composites Research
    • /
    • v.23 no.2
    • /
    • pp.31-39
    • /
    • 2010
  • In this paper, composite panels with hat-shaped stiffeners were made using the co-curing, co-bonding and secondary bonding methods. Co-curing is a manufacturing method in which the hat part and the plate are cured simultaneously in a manner that is more cost effective than other methods. Co-bonding is a method in which the stacked prepregs are cured with other cured parts, and secondary bonding is a method in which cured parts are bonded together using an adhesive. A rubber mold was manufactured for co-curing of composite panel with hat-shaped stiffeners, and finite element analyses were done to evaluate the expanding pressure of the rubber mold consistent with the curing temperature. The manufactured panels were also evaluated using a 3-D measurement tester and an ultrasonic tester. Pull-off tests were performed to evaluate their mechanical properties.

P- and S-wave seismic studies in the Ulsan fault zone near Nongso-Eup (농소읍 부근 울산단층대에서의 P파 및 S파 탄성파 조사 연구)

  • Lee, Chang-Min;Kim, Ki-Young
    • 한국지구물리탐사학회:학술대회논문집
    • /
    • 2006.06a
    • /
    • pp.95-100
    • /
    • 2006
  • To reveal subsurface structures of the Ulsan fault, seismic data were recorded along a 750-m long line near Nongso-Eup in Ulsan. P and S waves were generated simultaneously by impacting a 5 kg sledgehammer on a tilted plate. The data were received by 16 10-Hz 3-component geophones at 3 m intervals. Refracted P waves were inverted using the tomography method. Dip moveout and migration were applied to reflection data processed following a general sequence. Four layers were identified based on P-wave velocities and P- and S-wave stacked image. From top to bottom, the P-wave velocity of each layer ranges in $300{\sim}1100\;m/s$, $1100{\sim}1700\;m/s$, $1700{\sim}2700\;m/s$, and greater than 2700 m/s. The corresponding thickness of the top three layers averages 3.9 m, 5.9 m, 4.4 m, respectively. The S-wave stack section is effective to define subsurface structures shallower than 10 m.

  • PDF

An Experimental Study on the Evaporative Heat Transfer Characteristics of R-134a in a Micro-Channel Heat Exchanger (마이크로채널 열교환기에서 R-134a의 증발열전달 특성에 관한 실험적 연구)

  • Lee, Hae-Seung;Jeon, Dong-Soon;Kim, Young-Lyoul;Kim, Yong-Chan;Kim, Seon-Chang
    • Transactions of the Korean Society of Mechanical Engineers B
    • /
    • v.34 no.2
    • /
    • pp.113-120
    • /
    • 2010
  • An experimental investigation was carried out to examine the evaporative heat transfer characteristics of R-134a in a micro-channel heat exchanger. The micro-channel heat exchanger used in this study was a sort of plate heat exchanger. Micro-channels were fabricated on the SUS304 plate by the photo-etching process: 13 sheets of plates were stacked and bonded by the diffusion bonding process. The effects of the evaporating temperature, mass flux of R-134a, and inlet temperature of water were examined. As the difference between the inlet temperatures of R-134a and water increased, the heat transfer rate increased. The evaporative heat transfer coefficients obtained in this study range from 0.67 to 6.23 kW/$m^2{\cdot}^{\circ}C$. The experimental correlation for the Nusselt number as a function of the Reynold number and $\Theta$ was suggested for the micro-channel heat exchanger.

Patient-Specific Quality Assurance in a Multileaf Collimator-Based CyberKnife System Using the Planar Ion Chamber Array

  • Yoon, Jeongmin;Lee, Eungman;Park, Kwangwoo;Kim, Jin Sung;Kim, Yong Bae;Lee, Ho
    • Progress in Medical Physics
    • /
    • v.29 no.2
    • /
    • pp.59-65
    • /
    • 2018
  • This paper describes the clinical use of the dose verification of multileaf collimator (MLC)-based CyberKnife plans by combining the Octavius 1000SRS detector and water-equivalent RW3 slab phantom. The slab phantom consists of 14 plates, each with a thickness of 10 mm. One plate was modified to support tracking by inserting 14 custom-made fiducials on surface holes positioned at the outer region of $10{\times}10cm^2$. The fiducial-inserted plate was placed on the 1000SRS detector and three plates were additionally stacked up to build the reference depth. Below the detector, 10 plates were placed to avoid longer delivery times caused by proximity detection program alerts. The cross-calibration factor prior to phantom delivery was obtained by performing with 200 monitor units (MU) on the field size of $95{\times}92.5mm^2$. After irradiation, the measured dose distribution of the coronal plane was compared with the dose distribution calculated by the MultiPlan treatment planning system. The results were assessed by comparing the absolute dose at the center point of 1000SRS and the 3-D Gamma (${\gamma}$) index using 220 patient-specific quality assurance (QA). The discrepancy between measured and calculated doses at the center point of 1000SRS detector ranged from -3.9% to 8.2%. In the dosimetric comparison using 3-D ${\gamma}$-function (3%/3 mm criteria), the mean passing rates with ${\gamma}$-parameter ${\leq}1$ were $97.4%{\pm}2.4%$. The combination of the 1000SRS detector and RW3 slab phantom can be utilized for dosimetry validation of patient-specific QA in the CyberKnife MLC system, which made it possible to measure absolute dose distributions regardless of tracking mode.

Stiffness evaluation of elastomeric bearings for leg mating unit (LMU용 일래스토머릭 베어링의 강성평가)

  • Han, Dong-Seop;Jang, Si-Hwan;Lee, Kwon-Hee
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.18 no.12
    • /
    • pp.106-111
    • /
    • 2017
  • In this study, the stiffness of an LMU (Leg Mating Unit), which is a device required for installing the top side part of an offshore structure, was examined through structural analysis. This unit is mounted on the supporting point of the structure and is used to absorb the shock at installation. It is a cylindrical structure with an empty center. To support the vertical load, elastomeric bearings (EBs) and iron plates are laminated in layers. The stiffness of the EBs is basically influenced by the size of the bearings, but it varies with the number of laminated sheets inside the same sized structure. The relationship between the stiffener and the compressive stiffness is investigated, and its design is suggested. The stiffness of the EBs is analyzed by calculating the reaction force, while controlling the displacement. First, the relationship between the size of the reinforcing plate and the compressive stiffness is considered. Next, the relationship between the number of stacked reinforcing plates and the compression stiffness is considered. Different loads are required for each installed point. The goal is to design the compression stiffness in such a way that the same deformation occurs at each point in the analysis. In this study, ANSYS is used to perform the FE analysis.