• Journal of information and communication convergence engineering
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• 제10권3호
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• pp.295-299
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• 2012

Defect generation during organic bottom anti-reflective coating (BARC) in the photo lithography process is closely related to humidity control in the BARC coating unit. Defects are related to the water component due to the humidity and act as a blocking material for the etching process, resulting in an extreme pattern bridging in the subsequent BARC etching process of the poly etch step. In this paper, the lower limit for the humidity that should be stringently controlled for to prevent defect generation during BARC coating is proposed. Various images of defects are inspected using various inspection tools utilizing optical and electron beams. The mechanism for defect generation only in the specific BARC coating step is analyzed and explained. The BARC defect-induced gate pattern bridging mechanism in the lithography process is also well explained in this paper.

• 한국연초학회지
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• 제5권2호
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• pp.63-69
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• 1983

The tensile strength (Pm) . elongation percentage ($\varepsilon$) , elastic modulus (I) , and specific volume (Sv) were calculated from the data of tensile characteristics of By 104 .and Burley 21 tobacco leaves, which were measured over a relative humidity from 60 to 80% at $20\pm2^{\circ}C$.The important results obtained were as follows.(1) Tensile strength(Pm) The "Pm"of By 104 was greater than that of Burley at. The "Pm"in both varieties were increased toward the upper stalk position and according to the decrease of relative humidity. The "Pm" of parallel piece to tile vein in a leaf were greater than that of right angle piece to the vein. (2) Elongation percentage ($\varepsilon$). The "s" of By 104 was higher than that of Burley 21. The "s" in both varieties were increased toward the upper stalk position and according to the increase of relative humidity. The "s" of parallel Piece to the vein in a Burley leaf was greater than that of right angle piece to the vein. (3) Elastic modulus (E) The "E" of Burley 21 leaf was higher than that of By 104. The "E" in both varieties were increased toward the lower stalk position and according to decrease of relative humidity. The "E"of parallel piece to the vein in both varieties leaves were greater than that of right angle piece to tile vein. (4) Specific volume (Sv) The "Sv" of Burley 21 leaf was increased than that of By 104. The "Sv" in both varieties were increased toward the lower stalk position and according to the decrease of relative humidity.ot;Sv" in both varieties were increased toward the lower stalk position and according to the decrease of relative humidity.dity.

• 오토저널
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• 제5권4호
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• pp.41-46
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• 1983

The influence of inlet air humidity on the flame velocity and combustion of the spark ignition engine were described experimentally by means of the flame velocity measuring apparatus using ion-current. The flame velocity are greatly influenced air fuel ratio and engine speed, and linealy decrease according to the increasing of inlet air humidity. The flame travell curve is very similar to the rate of mass burned and combustion progressive is estimated mostly by only the rate of mass burned curve. The decreasing of the mean flame velocity is about 0.4m/s for increasing of 0.001 specific humidity and we think the reason is mainly decreasing of thermal conductivity.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2001년도 제34회 추계학술대회 개최
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• pp.78-87
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• 2001

The friction and wear behaviors of WC/C multilayer coating were investigated by using a pin on disk type tester. The experiment was conducted by using silicon nitride (S $i_{3}$ $N_{4}$) as a pin material and WC/C multilayer coating on bearing steel (STB2) as a disk material, under various environments that are atmospheric conditions of high vacuum( 1,3$\times$10$^{-4}$ Pa), medium vacuum( 1.3$\times$10$^{-l}$Pa). ambient air( 10$^{5}$ pa)(3 types) and relative humidity(2~98%) conditions. The results showed that WC/C coating fracture was suddenly increased with increasing degree of vacuum, because of high adhesion. So, WC/C coating could not be displayed their ability as solid lubricant. WC/C coating could be displayed better abilitv as solid lubricant with increasing relative humidity. because of oxide film, size and shape of wear debris. The friction coefficient and specific wear rate became better about RH 50%.%.

• 대한임상검사과학회지
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• 제55권3호
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• pp.132-142
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• 2023

서울대학교병원 진단면역검사실에서 HLA 형별 검사를 위한 결과 산출하는 과정에서 HLA-DR 검사 시행 건수 총 611건 중 Lot No.20의 시약에서 빈번히 나타나는 위양성과 위음성으로 의심되는 특이 bead 들의 반응을 발견하게 되었다. 따라서 정확한 결과 산출과정을 모색하기 위하여 특이 bead들의 cut-off 수정을 하지 않은 검사결과 533건과 특이 bead의 cut-off 수정을 한 뒤 결과 산출을 한 78건의 사례들을 가지고 cut-off 수정을 야기시키는 요인을 여러 변수로서 규명하고자 하였다. 검체대상의 인구통계특성과 cut-off 수정 여부를 확인하기 위해 빈도분석, 검사실의 습도를 변수로 넣어 기술통계를 진행하였고, cut-off 수정 여부와 인구통계특성의 연관성을 확인하기 위하여 교차분석을 시행, cut-off 수정 여부에 따른 습도의 차이를 검증하기 위해 독립표본 t검증을 실시하였다. 마지막으로 습도수준에 따른 cut-off 수정비율의 관계를 검증하기 위해 로지스틱 회귀분석을 실시하였다. 결과적으로 검사실의 습도 수준이 증가함에 따라 cut-off 수정사례는 0.986배 감소하는 것으로 나타났다. 이는 습도가 낮아질수록 cut-off 수정률이 증가한다는 것을 의미한다. 따라서 검사실의 습도 또한 HLA typing 결과에 영향을 미치는 요인임을 시사한다.

• 대한설비공학회지:설비저널
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• 제4권2호
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• pp.119-128
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• 1975

Natural draft and flow which low temperature moist gas produces in the chimney of an Ondol heating system were numerically analysed. Among several factors involved inlet gas temperature has the strongest influence on the chimney performance and then next specific humidity of the gas. Thermal conductivity of the chimney wall, however, has little influence on the performance of such a low temperature chimney. Under given flow conditions there exists an optimum chimney height which gives a maximum flow rate for a given chimney diameter. This optimum value of chimney height inereases with increase in chimney diameter, inlet gas temperature and specific humidity.

• 한국지반공학회논문집
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• 제32권5호
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• pp.49-55
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• 2016

본 연구는 도심지의 도로 환경을 고려하여, 기능성 포장 재료 중 하나인 이산화티타늄($TiO_2$)을 포함한 시멘트 모르타르의 실질적인 일산화질소(NO) 제거 성능을 평가하고자 하였다. 실험은 크게 두 가지로, 유입되는 기체의 습도에 따른 NO 제거율 변화 실험과 시편의 포화도에 따른 NO 제거율 변화 실험으로 구성되었다. 습도 변화 실험에서는 건조 상태의 시편을 대상으로 유입 기체의 습도를 변화시키며 NO 제거율을 관찰하였다. 습도-NO 제거율 곡선은 로그 정규 분포 형상으로, 특정 습도에서 최대 NO 제거율이 나타났다. 포화도 변화 실험은 강우 및 생활 하수로 인하여 불포화 상태인 도로를 반영하고자 습윤 상태인 시편을 대상으로 하였다. 습윤 상태의 시편은 건조 상태보다 낮은 NO 제거 성능을 보였으며 증발이 진행되면서 $TiO_2$가 노출되어 NO 제거 성능이 증가하였다. 그리고 시편의 특정 깊이 아래에 존재하는 $TiO_2$는 NO 제거 성능에 크게 기여하지 않는 것으로 나타났다.

• 센서학회지
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• 제26권3호
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• pp.179-185
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• 2017

This article describes the characteristics of nondispersive infrared carbon dioxide gas sensor according to the temperatures and humidifies. In this researches, a thermopile sensor that included application-specific integrated circuit (ASIC) was used and the White-cell structure was implemented as an optical waveguide. The developed sensor modules were installed in gas chamber and then the temperature of gas chamber has been increased from 283 K to 313 K with 10K temperature step. In order to analyze the effects of humidity levels, the relative humidity levels were changed from 30 to 80%R.H. with small humidifier. Then, the characteristics of sensor modules were acquired with the increment of carbon dioxide concentrations from 0 to 2,000 ppm. When the initial voltages of sensors were compared before and after humidifying the chamber at constant temperature, the decrements of the output voltages of sensors are like these: 9mV (reference infrared sensor), 41 mV (carbon dioxide sensor), 2 mV (temperature sensor). With the increment of ambient temperature, the averaged output voltage of carbon dioxide sensor was increased 19 mV, however, when the humidity level was increased, it was decreased 14mV. Based upon the experimental results, the humidity effect could be alleviated by the increment of temperature, so the effects of humidity and temperature could be only compensated by the ambient temperature itself. The estimated carbon dioxide concentrations showed 10% large errors below 200 ppm, however, the errors of the estimations of carbon dioxide concentrations were less than ${\pm}5%$ from 400 to 2,000 ppm.

• 한국안전학회지
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• 제11권1호
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• pp.84-89
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• 1996

The adsorption characteristics of active carbon used as a cartridge filler of organic vapor respirator were examined by humidity, particle size, challenge concentration and specific surface area. As a result, the 1% breakthrough time of Carbon Tetrachloride($CCl_4$) was decreased with increase of relative humidity, challenge concentration and particle size (0.6～2.0mm) of active carbon. The adsorbed amount of $CCl_4$ was about 1. 1mg/$m^2$ at RH 40% and 0. 5mg/$m^2$ at RH 80% . However in the case of prehumidified active carbon, humidity did not affected to 1% breakthrough time up to RH 40%.

• 한국세라믹학회지
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• 제53권3호
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• pp.362-366
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• 2016

In this study, humidity control ceramics with good adsorption/desorption capabilities and high strength were fabricated from drinking-water treatment sludge (DWTS) and Onggi soil. The DWTS powder heat-treated at $800^{\circ}C$ and Onggi soil were mixed at weight ratios of 40:60, 50:50, 60:40, and 70:30 and fired at $800-1000^{\circ}C$. With increasing DWTS content, density and flexural strength increased. For the sample with a DWTS:Onggi soil weight ratio of 70:30, porosity and specific surface area decreased with increasing firing temperature, attributed to densification and grain growth at high firing temperatures. From the results obtained, a firing temperature of $800^{\circ}C$ is the optimum condition for fabricating humidity control ceramics with good adsorption/desorption capabilities and strength. The maximum adsorbed amount for the sample fired at $800^{\circ}C$ was $439g/m^2$.