• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.214.2-214.2
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• 2013

Device performance for the 45 and 32 nm node CMOS technology requires the integration of ultralow-k materials. To lower the dielectric constant for PECVD and spin-on materials, partial replacement of the solid network with air (k=1.01) appears to be more intuitive and direct option. This can be achieved introducting of second "labile" phase during depositoin that is removed during a subsequent UV curing and annealing step. Besides, with shrinking line dimensions the resistivity of barrier films cannot meet the International Technology Roadmap for Semiconductors (ITRS) requirements. To solve this issue self-forming diffusion barriers have drawn attention for great potential technique in meeting all ITRS requirments. In this present work, we report a Cu-V alloy as a materials for the self-forming barrier process. And we investigated diffusion barrier properties of self-formed layer on low-k dielectrics with or without UV curing treatment. Cu alloy films were directly deposited onto low-k dielectrics by co-sputtering, followed by annealing at various temperatures. X-ray diffraction revealed Cu (111), Cu (200) and Cu (220) peaks for both of Cu alloys. The self-formed layers were investigated by transmission electron microscopy. In order to compare barrier properties between V-based interlayer on low-k dielectric with UV curing and interlayer on low-k dielectric without UV curing, thermal stability was measured with various heat treatment temperature. X-ray photoelectron spectroscopy analysis showed that chemical compositions of self-formed layer. The compositions of the V based self-formed barriers after annealing were strongly dominated by the O concentration in the dielectric layers.

• Journal of Powder Materials
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• v.22 no.4
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• pp.266-270
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• 2015

The synthesis of NiTi alloy powders by hydrogen reduction and dehydrogenation process of NiO and $TiH_2$ powder mixtures is investigated. Mixtures of NiO and $TiH_2$ powders are prepared by simple mixing for 1 h or ball milling for 24 h. Simple-mixed mixture shows that fine NiO particles are homogeneously coated on the surface of $TiH_2$ powders, whereas ball milled one exhibits the morphology with mixing of fine NiO and $TiH_2$ particles. Thermogravimetric analysis in hydrogen atmosphere reveals that the NiO and $TiH_2$ phase are changed to metallic Ni and Ti in the temperature range of 260 to $290^{\circ}C$ and 553 to $639^{\circ}C$, respectively. In the simple-mixed powders by heat-up to $700^{\circ}C$, agglomerates with solid particles and solidified liquid phase are observed, and the size of agglomerates is increased at $1000^{\circ}C$. From the XRD analysis, the presence of liquid phase is explained by the formation and melting of $NiTi_2$ inter-metallic compound due to an exothermic reaction between Ni and Ti. The simple-mixed powders, heated to $1000^{\circ}C$, lead to the formation of NiTi phase but additional Ni-, Ti-rich and Ti-oxide phases. In contrast, the microstructure of ball-milled powders is characterized by the neck-grown particles, forming $Ni_3Ti$, Ti-oxide and unreacted Ni phase.

• Korean Journal of Materials Research
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• v.21 no.6
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• pp.352-356
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• 2011

[ $Zn_{2(1-x)}Mn_xSiO_4$ ]$0.07{\leq}x{\leq}0.15$) green phosphor was prepared by solid state reaction. The first heating was at $900^{\circ}C-1250^{\circ}C$ in air for 3 hours and the second heating was at $900^{\circ}C$ in $N_2/H_2$(95%/5%) for 2 hours. The size effect of $SiO_2$ in forming $Zn_2SiO_4$ was investigated. The temperature for obtaining single phase $Zn_2SiO_4$ was lowered from $1100^{\circ}C$ to $1000^{\circ}C$ by decreasing the $SiO_2$ particle size from micro size to submicro size. The effect of the activators for the Photoluminescence (PL) intensity of $Zn_2SiO_4:Mn^{2+}$ was also investigated. The PL intensity properties of the phosphors were investigated under vacuum ultraviolet excitation (147 nm). The emission spectrum peak was between 520 nm and 530 nm, which was involved in green emission area. $MnCl_2{\cdot}4H_2O$, the activator source, was more effective in providing high emission intensity than $MnCO_3$. The optimum conditions for the best optical properties of $Zn_2SiO_4:Mn^{2+}$ were at x = 0.11 and $1100^{\circ}C$. In these conditions, the phosphor particle shape was well dispersed spherical and its size was 200 nm.

• Proceedings of the Korean Institute of Resources Recycling Conference
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• 2006.05a
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• pp.78-85
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• 2006

In textile industries, waste effluent containing zinc is generated during the manufacture of rayon yarn from the wood pulp or cotton linters. Due to the strict environmental regulations and the presence of toxic metallic and other constituents, the discharge of industrial effluents in the sewage or disposal of solid sludge as landfill is restricted. Before recycling of zinc as zinc sulphate solution to the spinning-bath of the rayon manufacturing plant the zinc sulphate solution must be free from calcium, which is deleterious to the process as gypsum precipitates with the increase in concentration and forms scale in the bath. In the present work an attempt has been made to develop a process following solvent extraction technique using thiophosphinic extractants, Cyanex 272 and 302 modified with isodecanol and diluted in kerosene to recover zinc from rayon effluent. Various process parameters viz. extraction of zinc from different concentration of solution, distribution ratio, selective extraction, O/A ratio on extraction and stripping from the loaded organic, complex formation in the organic phase etc. have been studied to see the feasibility of the process. The extractant Cyanex 302 has been found selective for the recovery of 99.99% of zinc from the effluent above equilibrium pH 3.4 maintaining the O/A ratio of 1/30 leaving all the calcium in the raffinate. It selectively extracted zinc in the form of complex $[R_{2}Zn.3RH]_{org}$ and retained all the calcium in the aqueous raffinate. The zinc from the loaded Cyanex 302 can be stripped with 10% sulphuric acid at even O/A ratio of 10 without affecting the stripping efficiency. The stripped solution thus obtained could be recycled in the spinning bath of the rayon plant. The raffinate obtained after the recovery of zinc could be disposed safely without affacting environment.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.22 no.12
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• pp.1657-1668
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• 1998

In the analysis of a mushy solidification system with natural convection using a fixed grid method, the enthalpy method has been used to account for the release of latent heat. The variable viscosity, Darcy source, and hybrid methods have been employed for the velocity suppression in a mushy region. The choice of the values of solid viscosity and permeability constant in conjunction with the Darcy source term plays an important role in forming the location and shape of the phase boundaries. In this work the effects of these major parameters related to steady-state behavior in the system of mushy solidification are investigated through a simple test problem. The effective specific heat based on the spatial gradients of the enthalpy and temperature is adopted for the treatment of the release of latent heat. The effects of the Prandtl and Rayleigh numbers on the shape of mushy region are examined using the hybrid method.

• Proceedings of the KIEE Conference
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• 1998.07f
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• pp.2067-2069
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• 1998

A prototype semiconductor switch for the command resonant charging system has been developed for a line type modulator, which charges parallel pulse forming network(PFN) up to voltage of 5 kV at repetition rates of 60 Hz. A phase controlled power supply provides charging of the 4.7 ${\mu}s$ filter capacitor bank to voltage up to 5 kV. A solid state module of series stack array of sixe matched SCRs(1.6 kV, 50 A) is used as a command charging switch to initiate the resonant charging cycle. Both resistive and RC snubber network are used across each stage of the switch assembly in order to ensure proper voltage division during both steady state and transient condition. A master trigger signal is generated to trigger circuits which are transmitted through pulse transformer to each of the 6 series switch stages. A pulse transformer is required for high voltage trigger or power isolation. This paper will discuss trigger method, protection scheme, circuit simulation, and test result.

• Polymer(Korea)
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• v.24 no.3
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• pp.418-430
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• 2000

A new hydroxylpropyl chitosan (HPCTO) capable of forming both thermotropic and lyotropic liquid crystalline phases was synthesized by reaction of alkali chitosan with propylene oxide and its solid films cross-linked with glyoxal were prepared by casting the liquid crystalline solution in methanol. The thermal and swelling properties of the cross-linked films were investigated. The films displayed fingerprint patterns characteristic of cholesteric liquid-crystalline phase, and their pitches increased with increasing temperature and cross-linker concentration. The cross-linked samples exhibited an anisotropic swelling in both water and methanol, suggesting that the two-dimensional cross-linking preferentially performs between HPCTO molecules. The degree of anisotropy highly depended on the solvent, but hardly on the cross-linker concentration investigated.

• Journal of the Korean Vacuum Society
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• v.4 no.S2
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• pp.148-155
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• 1995

(1) The metastable crystalline(MX) phases formed by ion mixing are classified into 5 types, i.e. the super-saturated solid solutions and the enlarged HCP-I phases reported earlier, and the newly observed FCC-I phases in hcp-based alloys, The FCC-ll and HCP-ll phases in bcc-based alloys. The growth kinetics of the MX phases is discussed. (2) The interfacial free energy in the multilayered films was found to play an important role in ion beam mixing(IM) induced amorphization. By adding sufficient interfaces, amorphous alloys were obtained even in the systems with rather positive heat of formation. (3) Gibbs free energy diagrams of some representative systems were constructed, by calculating the free energy curves of all the competing phases. Steady-state thermal annealing was conducted and the results confirmed the relevance of the constructed diagrams, which were inturn employed to interpret the MX phase formation as well as the glass forming ability upon IM in the binary metal systems.

• Journal of Magnetics
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• v.19 no.3
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• pp.221-226
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• 2014

Significantly enhanced low-field magnetoresistance (LFMR) and maximum dMR/dH {$(dMR/dH)_{max}$} values were successfully achieved from $La_{0.7}Sr_{0.3}MnO_3$(LSMO)-manganese oxide composite samples prepared by liquid phase sintering, compared with those of the same composites prepared by solid state reaction. For this study, pure LSMO and LSMO-manganese oxide composites with various nominal compositions of (1-x)LSMO-$xMn_2O_3$ (x = 0.1, 0.2, 0.3, 0.4, and 0.8) were sintered at $1450^{\circ}C$, above the eutectic temperature of $1430^{\circ}C$, for 1 h in air. The highest LFMR value of 1.28% with the highest $(dMR/dH)_{max}$ value of 21.1% $kOe^{-1}$ was obtained from the composite sample with x = 0.3 at 290 K in 500 Oe. This enhancement of LFMR and $(dMR/dH)_{max}$ values is ascribed to efficient suppression of magnetic disorder at the LSMO grain boundary, by forming a characteristic LSMO-manganese eutectic structure.

• Korean Journal of Materials Research
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• v.21 no.11
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• pp.628-633
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• 2011

Studies on lead-free piezoelectrics have been attractive as means of meeting environmental requirements. We synthesized lead-free piezoelectric $(Bi_{1/2}Na_{1/2})TiO_3-Ba(Cu_{1/3}Nb_{2/3})O_3$ (BNT-BCN) ceramics, and their dielectric, piezoelectric, and strain behavior were characterized. As BCN with a tetragonal phase was incorporated into the rhombohedral BNT lattice, the lattice constant increased. A small amount of BCN increased the density and dielectric constant forming the complete solid solution with BNT. However, BCN above 10 mol% was precipitated into a separate phase, and which was detected with XRD. In addition, EDX measurement revealed that Cu in BCN was not distributed homogeneously but was accumulated in a certain area. A lower density with a large amount of BCN was attributed to the nonsinterable property of BCN with large tetragonaliy. The dielectric constant vs the temperature change and the strain vs the electric field indicated that the ferroelectric property of BNT was diminished and paraelectric behavior was enhanced with the BCN addition. BNT-7.5BCN showed a 0.11% unimorph strain with a 9.0 kV/mm electric field with little hysteresis.