• 제목/요약/키워드: sol-gel process

검색결과 860건 처리시간 0.025초

The Review for Various Mold Fabrication toward Economical Imprint Lithography (미세패턴 전사기법을 위한 다양한 몰드 제작법 소개)

  • Kim, Joo-Hee;Kim, Youn-Sang
    • Journal of the Korean Vacuum Society
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    • 제19권2호
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    • pp.96-104
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    • 2010
  • We suggest here a cost-effective replica fabrication method for transparent and hard molds for imprinting lithography such as NIL and S-FIL. The process starts with the use of a replica hard mold from a master, using a polymer copy as a carrier. The polymer copy as a carrier was treated by soluble process for forming anti-adhesion layer. Duplicated hard molds can eliminate direct contact between a hard master and a patterned polymer on a substrate and the generated contamination of a master during the imprinting process. The replica hard mold exhibits the glass-like properties introduced here, such as transparency and hardness, make it appropriate for nanoimprint lithography and step-and-flash imprint lithography.

Anisotropic TiSrYZrO Thin Films Induced by One-step Brush Coating for Liquid Crystal Molecular Orientation (액정분자 배향용 원스텝 브러시 코팅으로 유도된 이방성 TiSrYZrO 박막)

  • Byeong-Yun Oh
    • The Journal of Korea Institute of Information, Electronics, and Communication Technology
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    • 제17권3호
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    • pp.146-154
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    • 2024
  • In this paper, we present a convenient liquid crystal (LC) molecular alignment method using brush hairs as an alternative to the rubbing process in the LC display industry. Titanium strontium yttrium zirconium oxide (TiSrYZrO) solution was prepared using a sol-gel process, and the TiSrYZrO alignment film production and LC molecular alignment were integrated through a one-step brush coating process. As the curing temperature increased, the LC molecule alignment of the LC cell improved, and the formation of a physical surface anisotropic structure due to the shear stress caused by the movement of the brush hairs on the coating surface led to uniform alignment of the LC molecules. Uniform and homogeneous LC molecular alignment was confirmed through polarizing optical microscopy and pretilt angle measurement. Through thermal oxidation using X-ray photoelectron spectroscopy, the TiSrYZrO thin film well formed of metal oxide was confirmed and verified to have excellent optical transparency. From these results, it is expected that a convenient LC molecular alignment method using brush hairs as an alternative to the rubbing process will be a viable next-generation technology.

Effects of Thermal Treatment Conditions on the Powder Characteristics of Uranium Oxide in HTGR Fuel Preparation (고온가스로용 핵연료 제조에서 열처리 조건이 우라늄산화물 입자 특성에 미치는 영향)

  • Kim, Yeon-Ku;Jeong, Kyung-Chai;Oh, Seung-Chul;Suhr, Dong-Soo;Cho, Moon-Sung
    • Journal of Powder Materials
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    • 제16권2호
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    • pp.115-121
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    • 2009
  • The effects of thermal treatment conditions on ADU (ammonium diuranate) prepared by SOL-GEL method, so-called GSP (Gel supported precipitation) process, were investigated for $UO_2$ kernel preparation. In this study, ADU compound particles were calcined to $UO_3$ particles in air and Ar atmospheres, and these $UO_3$ particles were reduced and sintered in 4%-$H_2$/Ar. During the thermal calcining treatment in air, ADU compound was slightly decomposed, and then converted to $UO_3$ phases at $500^{\circ}C$. At $600^{\circ}C$, the $U_3O_8$ phase appeared together with $UO_3$. After sintering of theses particles, the uranium oxide phases were reduced to a stoichiometric $UO_2$. As a result of the calcining treatment in Ar, more reduced-form of uranium oxide was observed than that treated in air atmosphere by XRD analysis. The final phases of these particles were estimated as a mixture of $U_3O_7$ and $U_4O_9$.

Effect of Acid Treatment Process on the Physicochemical Properties of Gelatin Extracted from Pork Skin (산처리 공정에 따라 추출한 돈피 젤라틴의 이화학적 특성에 관한 연구)

  • Yeom Geun-Woong;J Andrieu;Min Sang-Gi
    • Food Science of Animal Resources
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    • 제24권3호
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    • pp.266-272
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    • 2004
  • The objective of this study was to investigate the physicochemical characteristics of gelatin extracted from pork skin under soaking in various acid solutions (lactic acid, acetic acid, and citric acid). Gelatin sol was extracted at 8$0^{\circ}C$, frozen at -2$0^{\circ}C$ and lyophilized it for 3 days to be completely dried in freeze drying unit. In the evaluation of gelatin quality, gelatin soaked in citric acid showed higher L- and a-values than those of any other gelatin (p<0.05). Gelatin treated by acetic acid showed the highest gel strength, cohesiveness, and brittleness. The content of hydroxyproline amino acid in gelatin treated by acetic acid was larger than one of gelatin treated in lactic and citric acid in order. From the experimental results, the highest quality of gelatin in all of period, which was soaked in acetic acid and lactic acid, has a more good quality than gelatin soaked in citric acid.

Synthesis and Electromagnetic Wave Absorbing Property of BaTiO3@Fe Nanofibers with Core-Shell Structure (코어-쉘 구조를 갖는 BaTiO3@Fe 나노섬유의 합성 및 전자파 흡수 특성)

  • Lee, Young-In;Jang, Dae-Hwan;Sung, Ki-Hoon;Lee, Kyuman;Choa, Yong-Ho
    • Journal of Powder Materials
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    • 제23권1호
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    • pp.38-42
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    • 2016
  • $BaTiO_3$-coated Fe nanofibers are synthesized via a three-step process. ${\alpha}-Fe_2O_3$ nanofibers with an average diameter of approximately 200 nm are first prepared using an electrospinning process followed by a calcination step. The $BaTiO_3$ coating layer on the nanofiber is formed by a sol-gel process, and a thermal reduction process is then applied to the core-shell nanofiber to selectively reduce the ${\alpha}-Fe_2O_3$ to Fe. The thickness of the $BaTiO_3$ shell is controlled by varying the reaction time. To evaluate the electromagnetic (EM) wave-absorbing abilities of the $BaTiO_3@Fe$ nanofiber, epoxy-based composites containing the nanofibers are fabricated. The composites show excellent EM wave absorption properties where the power loss increases to the high frequency region without any degradation. Our results demonstrate that the $BaTiO_3@Fe$ nanofibers obtained in this work are attractive candidates for electromagnetic wave absorption applications.

Combustion Characteristics of Benzene over $LaMnO_3$ Perovskite-type Catalysts Prepared Using Microwave-assisted Process (마이크로파 공정으로 제조된 $LaMnO_3$ 페롭스카이트형 촉매에서 벤젠의 연소반응)

  • Jung, Won Young;Hong, Seong-Soo
    • Applied Chemistry for Engineering
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    • 제24권5호
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    • pp.507-512
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    • 2013
  • Perovskite-type oxides were successfully prepared using microwave-assisted process, and by XRD, XPS, BET, and $H_2-TPR$. Their catalytic activities for the combustion of benzene were also examined. Most of catalysts studied showed the perovskite crystalline phase with the particle size of 21~35 nm. The $LaMnO_3$ catalyst showed the highest activity and the conversion reached almost 100% at $250^{\circ}C$. The catalysts prepared by microwave-assisted process showed higher activity compared to those prepared sol-gel method. In addition, the catalytic activity was increased with an increase of calcination temperature of $LaMnO_3$-type catalyst. The TPR results on the measurement of redox property showed a good correlation with the order of catalytic activity on the benzene combustion reaction.

The Preparation and Characterization of Bismuth Layered Ferroelectric Thin Films by Sol-Gel Process (II. Dielectric Properties of Ferroelectric $Sr_{0.7}/B_{2.3}(Ta_{1-x}Nb_x)_2O_9$ Thin Films Prepared by MOD Process) (솔 - 젤법을 이용한 Bismuth Layered Structure를 가진 강유진성 박막의 제조 및 특성평가에 관한 연구 (II. MOD법으로 제조한 강유전성 $Sr_{0.7}/B_{2.3}(Ta_{1-x}Nb_x)_2O_9$ 박막의 유전특성))

  • 최무용;송석표;정병직;김병호
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • 제12권1호
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    • pp.62-68
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    • 1999
  • Ferroelectric $Sr_{0.7}/B_{2.3}(Ta_{1-x}Nb_x)_2O_9$(x=0, 0.1, 0.2, 0.3) thin films were deposited on $Pt/SiO_2/Si$ substrate by MOD(Metalorganic Decomposition) process. Metal carboxylate and metal alkoxide were used as precursors, and 2-methoxyethanol, xylene as solvents. After spin coating, thin films were pre-annealed at $400^{\circ}C$, followed by RTA(Rapid Thermal Annealing) and final annealing at $800^{\circ}C$ in oxygen atmosphere. These procedures were repeated three times to obtain thin films with the thickness of $2000{\AA}$. To enhance the nucleation and growth of layered-perovskite phase, thin films were rapid-thermally annealed above $720^{\circ}C$ in oxygen atmosphere. As RTA temperature increased, fluorite phase was transformed to layered-perovskite phase. And the change of Nb contents affected dielectric / electrical properties and microstructure. The ferroelectric characteristics of $Sr_{0.7}/B_{2.3}(Ta_{1-x}Nb_x)_2O_9$ thin film were Pr=8.67 $\mu{C}/cm^2$, Ec=62.4kV/cm and $I_{L}=1.4\times10^{-7}A/cm^2$ at the applied voltage of 5V, respectively.

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Characterization of transparent Sb-doped $SnO_2$ conducting films by XPS analysis (XPS를 이용한 Sb-doped $SnO_2$ 투명전도막의 특성 분석)

  • 임태영;김창열;심광보;오근호
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • 제13권5호
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    • pp.254-259
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    • 2003
  • In the fabrication process of transparent conducting thin films of the ATO (antimony-doped tin oxide) on a soda lime glass substrate by a sol-gel dip coating method, the effects of the $SiO_2$ buffer layer formed on the substrate and $N_2$ annealing treatment were investigated by XPS (X-ray photoelectron spectroscopy) analysis. Optical transmittance and electrical resistivity of the 400 nm-thick ATO thin films which were deposited on $SiO_2$ buffer layer/soda lime glass and then annealed under nitrogen atmosphere were 84 % and $5.0\times 10^{-3}\Omega \textrm{cm}$ respectively. The XPS analysis confirmed that a $SiO_2$ buffer layer inhibited Na ion diffusion from the substrate, resulting in prohibiting the formation of a secondary phase such as $Na_2SnO_3$ and SnO and increasing Sb ion concentration and ratio of $Sb^{5+}/Sb^{3+}$ in the film. And it was also found that $N_2$ annealing treatment leads to the reduction of $Sn^{4+}$as well as $Sb^{5+}$ however the reduction of $Sn^{4+}$ is more effective and therefore consequently results in decrease in the electrical resistivity to produce an excellent electrical properties of the film.

Sintering and Microstructure of PZT Ceramics Prepared from Nanoparticles by Sol-Gel Process (나노 입자를 이용한 PZT 압전 세라믹스의 소결 및 미세구조)

  • Park Yong-Kap
    • Journal of the Korea Academia-Industrial cooperation Society
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    • 제6권6호
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    • pp.457-460
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    • 2005
  • Nano-sized titanium oxide and zirconium oxide powders were synthesized by hydrolysis of titanium isopropoxide $[Ti(OC_3H7)_4]$ and zirconium tetrachloride ($ZrC1_4$) via a sol-gel technique. Lead titanate powders were prepared by mixing $TiO_2$ precursors with PbO slurry made with dilute $NH_4OH$. Lead zirconate titanate powders were, then, synthesized by mixing $PbTiO_3$ with $ZrO_2$ powders. The goal of this research was to obtain the $PbZrTiO_3(PZT)$ powders and sintering these powders at low temperature. The $PbTiO_3$ and PZT powders after firing were analyzed by X-ray diffraction(XRD) and transmission electron microscopy(TEM) was utilized to observe the shape and size of the synthesized nano-particles. In the XRD pattern, the well-crystallized PZT phase could be obtained in consequence of firing at $900^{\circ}C$. SEM micrographs also showed that grains of PZT were relatively well grown with the size of the range of $2{\~}4{\mu}m$. The densified perovskite structure of $PbZrTiO_3$ could be obtained by sintering at temperature as low as $900^{\circ}C$. Characterization of the samples showed improved piezoelectric properties.

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Synthesis of Porous $TiO_2$ Thin Films Using PVC-g-PSSA Graft Copolymer and Their Use in Dye-sensitized Solar Cells (PVC-g-PSSA 가지형 공중합체를 이용한 다공성 $TiO_2$ 박막의 합성 및 염료감응 태양전지 응용)

  • Byun, Su-Jin;Seo, Jin-Ah;Chi, Won-Seok;Shul, Yong-Gun;Kim, Jong-Hak
    • Membrane Journal
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    • 제21권2호
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    • pp.193-200
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    • 2011
  • An amphiphilic graft copolymer comprising a poly(vinyl chloride) (PVC) backbone and poly (styrene sulfonic acid) (PSSA) side chains (PVC-g-PSSA) was synthesized via atom transfer radical polymerization (ATRP). Mesoporous titanium dioxide $(TiO_2)$ films with crystalline anatase phase were synthesized via a sol-gel process by templating PVC-g-PSSA graft copolymer. Titanium isopropoxide (TTIP), a $TiO_2$ precursor was selectively incorporated into the hydrophilic PSSA domains of the graft copolymer and grew to form mesoporous $TiO_2$ films, as confirmed by scanning electron microscopy (SEM) and X-ray diffraction (XRD) analysis. The performances of dye-sensitized solar cell (DSSC) were systematically investigated by varying spin coating times and the amounts of P25 nanoparticies. The energy conversion efficiency reached up to 2.7% at 100 mW/$cm^2$ upon using quasi-solid-state polymer electrolyte.