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http://dx.doi.org/10.5757/JKVS.2010.19.2.096

The Review for Various Mold Fabrication toward Economical Imprint Lithography  

Kim, Joo-Hee (Graduate School of Convergence Science and Technology, Seoul National University)
Kim, Youn-Sang (Graduate School of Convergence Science and Technology, Seoul National University)
Publication Information
Journal of the Korean Vacuum Society / v.19, no.2, 2010 , pp. 96-104 More about this Journal
Abstract
We suggest here a cost-effective replica fabrication method for transparent and hard molds for imprinting lithography such as NIL and S-FIL. The process starts with the use of a replica hard mold from a master, using a polymer copy as a carrier. The polymer copy as a carrier was treated by soluble process for forming anti-adhesion layer. Duplicated hard molds can eliminate direct contact between a hard master and a patterned polymer on a substrate and the generated contamination of a master during the imprinting process. The replica hard mold exhibits the glass-like properties introduced here, such as transparency and hardness, make it appropriate for nanoimprint lithography and step-and-flash imprint lithography.
Keywords
Nanoimprint lithography; Nonconventional lithography; Replica hard mold; Hybrid inorganic materials; Sol-gel process;
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