• Title/Summary/Keyword: sol-Gel

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Microstructures and Proton Conductivities of BaZrO3 Modified by BaCeO3 (BaCeO3가 첨가된 BaZrO3의 미세구조 및 수소이온 전도도)

  • Park, Jong-Sung;Lee, Sung-Myung;Kim, Dong-Wan;Lee, Jong-Ho;Lee, Hae-Won;Choi, Heon-Jin;Kim, Byung-Kook
    • Journal of the Korean Ceramic Society
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    • v.45 no.4
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    • pp.226-231
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    • 2008
  • The dense sintered bodies with >95% theoretical densities were successfully obtained from the $BaZrO_3,\;BaCeO_3,\;Ba(Zr_{0.7}Ce_{0.3})O_3$ solid solution, and core-shell structured $0.7BaZrO_3-0.3BaCeO_3$ composite powders prepared by sol-gel methods. The activation energy of $Ba(Zr_{0.7}Ce_{0.3})O_3$ solid solution calculated from the Arrhenius plot of the proton conductivities was similar to that of $BaZrO_3$. The activation energy of core-shell structured $0.7BaZrO_3-0.3BaCeO_3$ composite, however, was much lower than that of $BaZrO_3$ or $Ba(Zr_{0.7}Ce_{0.3})O_3$ solid solution, and was very similar to that $BaCeO_3$. These results could be assigned to the Ce-rich grain boundary which was clearly observed by EDX in core-shell structured $0.7BaZrO_3-0.3BaCeO_3$ composite.

A study on the Frequency Dependence of Dynamic Pyroelectric Properties for $Pb_{1-x}La_{x}Ti_{1-x/4}O_3$(x=0.1)(PLT(10)) Ferroelectric Thin Film ($Pb_{1-x}La_{x}Ti_{1-x/4}O_3$(x=0.1)(PLT(10)) 강유전체 박막에서 동적 초전특성의 주파수 의존성에 관한 연구)

  • 차대은;장동훈;강성준;윤영섭
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.104-107
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    • 2001
  • The fabricated La-modified lead titanate (PLT) thin flirt without poling treatment was investigated for modulation frequency dependence of pyroelectric properties by the dynamic method. $Pb_{1-x}La_{x}Ti_{1-x/4}O_3$PLT (x=0.1) thin film having 10 mol% La content was deposited on a Pt/$TiO_{x}$/$SiO_2$/Si substrate by sol-gel method. The PLT(10) thin film exhibits a relatively excellent dielectric property. The pyroelectric coefficient (p) of the PLT(10) thin film is 6.6 x $10^{-9}$C/$\textrm{cm}^2$.K without frequency dependence. The figure of merits for the voltage responsivity and specific detectivity are 1.03${\times}$$10^{-11}$/C.cm/J and 1.46 x $10^{-9}$C.cm/J, respectively. The PLT(10) thin film has voltage responsivity ($R_{V}$) of 5.15 V/W at 8 Hz. Noise equivalent power (NEP) and specific detectivity (D*) of the PLT(10) thin film are 9.93 x $10^{-8}$W/Hz$^{1/2}$ and 1.81 x $10^{6}$ cmHz$^{1/2}$/W at the same frequency of 100 Hz, respectively. The results means that PLT thin film having 10 mol % La content is suitable for the sensing materials of pyroelectric IR sensors.

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Effect of Thin-Film Thickness on Electrical Performance of Indium-Zinc-Oxide Transistors Fabricated by Solution Process (용액 공정을 이용한 IZO 트랜지스터의 전기적 성능에 대한 박막 두께의 영향)

  • Kim, Han-Sang;Kyung, Dong-Gu;Kim, Sung-Jin
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.30 no.8
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    • pp.469-473
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    • 2017
  • We investigated the effect of different thin-film thicknesses (25, 30, and 40 nm) on the electrical performance of solution-processed indium-zinc-oxide (IZO) thin-film transistors (TFTs). The structural properties of the IZO thin films were investigated by atomic force microscopy (AFM). AFM images revealed that the IZO thin films with thicknesses of 25 and 40 nm exhibit an uneven distribution of grains, which deforms the thin film and degrades the performance of the IZO TFT. Further, the IZO thin film with a thickness of 30 nm exhibits a homogeneous and smooth surface with a low RMS roughness of 1.88 nm. The IZO TFTs with the 30-nm-thick IZO film exhibit excellent results, with a field-effect mobility of $3.0({\pm}0.2)cm^2/Vs$, high Ion/Ioff ratio of $1.1{\times}10^7$, threshold voltage of $0.4({\pm}0.1)V$, and subthreshold swing of $0.7({\pm}0.01)V/dec$. The optimization of oxide semiconductor thickness through analysis of the surface morphologies can thus contribute to the development of oxide TFT manufacturing technology.

Micromachined Multiple Gas Sensor for Automotive Ventilation and Air Conditioning Systems (미세기계가공된 자동차 HVAC 시스템용 다중 가스센서)

  • Choi, W.S.;Lee, S.H.;Kim, S.D.;Park, J.S.;Park, H.D.;Min, N.K.
    • Proceedings of the KIEE Conference
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    • 2006.07c
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    • pp.1637-1638
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    • 2006
  • HVAC 시스템은 쾌적하고 깨끗한 운전환경을 만들어 줌으로써 운전자에게 향상된 안락성과 안전성을 제공한다. 이때 센서는 시시각각으로 변화하는 차실 내외의 환경변화에 대한 정보를 검출하여 HVAC 제어 유니트에 제공한다. 현재 HVAC 시스템에 사용되고 있는 후막 가스센서는 소자 크기와 소비전력이 크고, 제작공정이 까다로워 생산성이 낮은 단점이 있다. 이와 같은 문제점을 해결하기 위해서 최근에는 초소형화, 저소비전력, 대량생산에 의한 저가격화가 가능한 MEMS 가스센서의 연구개발이 활발히 진행되고 있다. 본 연구에서는 MEMS 구조체를 이용한 마이크로 가스센서를 설계 및 제작하였고, 감도특성을 고찰하였다. 가스 감지막은 금속산화물 페이스트를 스크린 프린팅 하는 종래의 방법 대신 MEMS 구조체에 적용 가능한 sol-gel 프로세스에 의해 형성하였다. 또 가스 감지전극과 micro-heater를 동일 평면상에 제작, 공정을 간소화하여 저가화를 시도하였다. MEMS 구조체 위에 제작된 Pt 박막 micro-heater의 인가전압에 따른 발열특성을 조사한 결과, 발열온도가 인가전압에 비례하는 이상적인 선형성을 나타내었으며, $300^{\circ}C$의 동작 온도에 도달하기 위해 65mW 이하의 저전력 동작이 가능하였다. 가스 센서의 감도특성 확인 실험은 CO 가스 10ppm, NO 가스 0.3ppm을 기준으로 수행되었으며, CO 및 NO에 대해 Rs(sensitivity, 가스반응저항/초기저항) 값은 각각 0.753 과 2.416로 우수한 성능을 나타내었다.

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Characteristics and Fabrication of Dissolved Oxygen and pH Measurement System based on the Optical Sensor for Analysis of Cell Metabolic Functions (세포대사 기능 분석을 위한 광학센서 기반 용존산소와 pH 측정 시스템의 제작 및 특성 분석)

  • Jang, Jiwoon;Hwang, Insook;Lee, Jongmok;Lee, Sunmin;Kang, Sora;Kim Pak, Youngmi;Kim, Nayoung
    • Journal of Sensor Science and Technology
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    • v.25 no.1
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    • pp.51-56
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    • 2016
  • This study evaluates the performance of an optical sensor and measurement system (CMA-24) which can analyze the fluctuation of dissolved oxygen and pH simultaneously. In the optical sensor system, the fluorescent materials, Rudpp and HPTS which are sensitive to dissolved oxygen and pH, respectively, are coated on the bottom of a 24-well -plate by the sol-gel technology. The detection times of the emission light of the oxygen sensor were $4,186{\pm}13.90{\mu}s$ and $4,452{\pm}36.68{\mu}s$ for the dissolved oxygen of 17% $O_2$ and 7.6% $O_2$, respectively. On the other hand, the detection times of the pH sensor were $6,699.43{\pm}14.64{\mu}s$, $6,722.24{\pm}6.21{\mu}s$, and $6,748.52{\pm}2.63{\mu}s$ using pH 6, 7, and 8, respectively. When we determined cellular respiration levels of C2C12 myocytes with CMA-24, $O_2$/pH measurement system, the ratio of the uncoupled to coupled OCR (oxygen consumption rate) was 1.41. The results mean that this CMA-24 system shows almost the same sensitiveness as the commercial system.

Effect of additives on physical properties of yellowfin sole skin gelatin prepared by ethanol fractional precipitation (알코올처리 각시가자미껍질 젤라틴의 물리적 특성에 미치는 첨가물의 영향)

  • Cho, Soon-Yeong;Ha, Jin-Hwan;Lee, Eung-Ho;Kim, Jin-Soo
    • Applied Biological Chemistry
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    • v.39 no.3
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    • pp.218-221
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    • 1996
  • With a view to increase utility of ethanol fractioned fish skin gelatin as a food source, efforts of additives on physical properties of the gelatin were investigated. The physical properties such as gel strength, melting Point, gelling point and viscosity of both ethanol-treated and untreated gelatins were improved by adding ferric ion, sugar and ethanol to the gelatin sol, but were deteriorated by the added sodium chloride and acids. Insignificant difference in effect of physical properties on additives such as sodium chloride, sugar and ethanol between ethanol-treated and untreated gelatins were not observed. However, the effect of ferric ion and acids on the physical properties of ethanol-treated gelatin has a greater than that of untreated gelatin.

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Electrical and optical properties of ZnO thin films grown by MOCVD (MOCVD 법으로 성장한 ZnO 박막의 전기적, 광학적 특성 평가)

  • Kong, Bo-Hyun;Kim, Dong-Chan;Han, Won-Suk;Kim, Young-Yi;Ahn, Cheol-Hyoun;Kang, Si-Woo;Yi, Yu-Jin;Cho, Hyung-Koun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.150-150
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    • 2007
  • ZnO는 3.37eV의 넓은 에너지 밴드갭을 가지고 있으며, 60meV의 큰 엑시톤(exciton) 결합에너지의 특성을 가지고 있어 UV 영역의 소스로서 가장 활용도가 클 것으로 예상된다. 특히 ZnO 박막은 청색과 자외선 발광소자 및 광전자 소자, 화학적 센서로 활용이 가능하다. 최근 ZnO 박막을 이용한 LED 및 LD 소자 제작에 대한 연구가 국내외적으로 매우 활발하게 이루어지고 있다. 이런 소자를 제작할 때 가장 우선시 되는 것이 ZnO 박막의 전기적은 특성(캐리어 밀도, 전도도, 이동도, 비저항)이다. ZnO 박막을 성장하는 방법으로는 sputtering, PLD, MOCVD, sol-gel 법 등 여러방법이 있지만, MOCVD 법은 소스인 DEZn 와 산소의 유량이 조절이 가능하여 박막의 특성 다양하게 변화시킬 수 있는 장정이 있다. 본 연구에서는 MOCVD 법을 이용하여 사파이어 기판위에 ZnO 박막을 성장 시켰다. 성장 시 VI족 소스인 산소가스와 II족 소스인 DEZn 양을 조절함으로써 이때 변화되는 박막의 전기적, 광학적, 구조적 특성에 대해 연구하였다.

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Microstructure properties with variation of doped amount $Pr_{2}O_{3}$ of BSCT ceramics ($Pr_{2}O_{3}$ 첨가량에 따른 BSCT 세라믹의 미세구조 특성)

  • Noh, Hyun-Ji;Lee, Sung-Gap;Park, Sang-Man;Yun, Sang-Eun;Kim, Ji-Eun;Lee, Young-Hie
    • Proceedings of the KIEE Conference
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    • 2007.07a
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    • pp.1283-1284
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    • 2007
  • The barium strontium calcium titanate((Ba,Sr,Ca)$TiO_3$) powders prepared by the sol-gel method and $MnCO_3$ as acceptor were mixed oxide method. The microstructure was investigated with variation of $Pr_{2}O_{3}$ amount. The BSCT powder and $Pr_{2}O_{3}$ were mixed with organic vehicle(Ferro. B75001). BSCT thick films were fabricated by the screen-printing method on alumina substrates. The bottom electrode was Pt and upper electrode was Ag, respectively. All BSCT thick films were sintered at $1420^{\circ}C$, for 2h. The result of the differential thermal analysis(DTA), exothermic peak at around $654^{\circ}C$ due to the formation of the polycrystalline perovskite phase. In the X-ray diffraction(XRD) patterns, all BSCT thick films showed the typical perovskite polycrystalline structure and no pyrochlore phase was dbserved. The microstructure investigated by scanning electron microscope(SEM). Pore and grain size of BSCT thick films were decreased with increasing amount of $Pr_{2}O_{3}$ dopant. And the average grain size and thickness of BSCT thick films doped with 0.1 mol% $Pr_{2}O_{3}$ was $3.09{\mu}m$, $60{\mu}m$, respectively. The relative dielectric constant decreased and dielectric loss decreased with increasing amount of $Pr_{2}O_{3}$ dopant, the values of the BSCT thick films no doped with $Pr_{2}O_{3}$ were 7443 and 4 % at 1 kHz, respectively.

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Structural and Dielectric Properties of (Ba,Sr,Ca)$TiO_3$ Thick films Doped with $Dy_{2}O_{3}$ ($Dy_{2}O_{3}$가 첨가된 (Ba,Sr,Ca)$TiO_3$ 후막의 구조 및 유전 특성)

  • Yun, Sang-Eun;Lee, Sung-Gap;Park, Sang-Man;Noh, Hyun-Ji;Lee, Young-Hie;Bae, Seon-Gi
    • Proceedings of the KIEE Conference
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    • 2007.07a
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    • pp.1275-1276
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    • 2007
  • For fabrication of $BaTiO_3$ system Ferroelectric thick films, (Ba,Sr,Ca)$TiO_3$ (BSCT) powders, prepared by using the alkoxide-based sol-gel method, were doped $MnCO_3$ as acceptor and $Dy_{2}O_{3}$ as donor. $MnCO_3$ and $Dy_{2}O_{3}$-doped (Ba,Sr,Ca)$TiO_3$ thick films were fabricated by screen printing techniques on high purity alumina substrates. The structure and dielectric properties were investigated with variation of $Dy_{2}O_{3}$ amount. As a result of the differential thermal analysis(DTA), exothermic peak was observed at around $670^{\circ}C$ due to the formation of the polycrystalline perovskite phase. All the BSCT thick films, sintered at $1420^{\circ}C$ for 2h, showed the typical XRD patterns of perovskite polycrystalline structure and no pyrochlore phase was observed. The average grain size and thickness of specimens no doped with $Dy_{2}O_{3}$ was 1.32mm, 52mm, respectively. The relative dielectric constant decreased and dielectric loss increased with increasing amount of $Dy_{2}O_{3}$ dopant, the values of the BSCT thick films no doped with $Dy_{2}O_{3}$ were 4043 and 0.4% at 1 kHz, respectively. The relative dielectric constant gradually decreased in the measured frequency range from 0.1 to 100 kHz

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Densification and Dielectric Properties of Yb2O3 doped (Ba1Sr1Ca)TiO3 Thick Films (Yb2O3가 첨가된 (Ba1Sr1Ca)TiO3후막의 치밀화와 유전특성)

  • Park, Sang-Man;Lee, Young-Hie;Nam, Sung-Pil;Lee, Sung-Gap
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.20 no.7
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    • pp.581-586
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    • 2007
  • [ $(Ba_{0.57}Sr_{0.33}Ca_{0.10})TiO_3$ ] (BSCT) powders, prepared by sol-gel method, were mixed with organic vehicle and the BSCT thick films were fabricated by the screen printing method. The structural and dielectric properties were investigated as a function of the $Yb_2O_3$ doping contents. As a result of the TG-DTA, exothermic peak was observed at around $670^{\circ}C$ due to the formation of the polycrystalline perovskite phase. All BSCT thick films showed the typical XRD patterns of a cubic polycrystalline structure. The average thickness of all BSCT thick films was about $70{\mu}m$. The grain size of the BSCT thick film doped with 0.7 mol% $Yb_2O_3$ was approximately $6.2{\mu}m$. The Curie temperature and relative dielectric constant at room temperature decreased with increasing $Yb_2O_3$ amount. Relative dielectric constant and dielectric loss of the specimen doped with 0.1 mol% $Yb_2O_3$ were 4637 and 19 % at Curie temperature, respectively.